DE69419688D1 - Vorrichtung zur Abstützung des Taragewichtes - Google Patents
Vorrichtung zur Abstützung des TaragewichtesInfo
- Publication number
- DE69419688D1 DE69419688D1 DE69419688T DE69419688T DE69419688D1 DE 69419688 D1 DE69419688 D1 DE 69419688D1 DE 69419688 T DE69419688 T DE 69419688T DE 69419688 T DE69419688 T DE 69419688T DE 69419688 D1 DE69419688 D1 DE 69419688D1
- Authority
- DE
- Germany
- Prior art keywords
- supporting
- tare weight
- tare
- weight
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/02—Sliding-contact bearings
- F16C29/025—Hydrostatic or aerostatic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/262—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members with means to adjust the distance between the relatively slidable members
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
- B23Q1/385—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports in which the thickness of the fluid-layer is adjustable
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2322/00—Apparatus used in shaping articles
- F16C2322/39—General buildup of machine tools, e.g. spindles, slides, actuators
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/20—Control lever and linkage systems
- Y10T74/20207—Multiple controlling elements for single controlled element
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Machine Tool Units (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP27732593A JP3196798B2 (ja) | 1993-10-12 | 1993-10-12 | 自重支持装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69419688D1 true DE69419688D1 (de) | 1999-09-02 |
DE69419688T2 DE69419688T2 (de) | 1999-12-23 |
Family
ID=17581961
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69419688T Expired - Lifetime DE69419688T2 (de) | 1993-10-12 | 1994-09-30 | Vorrichtung zur Abstützung des Taragewichtes |
Country Status (5)
Country | Link |
---|---|
US (1) | US5701041A (de) |
EP (1) | EP0647788B1 (de) |
JP (1) | JP3196798B2 (de) |
KR (1) | KR0166987B1 (de) |
DE (1) | DE69419688T2 (de) |
Families Citing this family (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW318255B (de) | 1995-05-30 | 1997-10-21 | Philips Electronics Nv | |
TW316874B (de) † | 1995-05-30 | 1997-10-01 | Philips Electronics Nv | |
JP3634483B2 (ja) * | 1996-02-13 | 2005-03-30 | キヤノン株式会社 | ステージ装置、及びこれを用いた露光装置やデバイス生産方法 |
JPH10521A (ja) * | 1996-06-07 | 1998-01-06 | Nikon Corp | 支持装置 |
JP3266515B2 (ja) * | 1996-08-02 | 2002-03-18 | キヤノン株式会社 | 露光装置、デバイス製造方法およびステージ装置 |
JP3907252B2 (ja) * | 1996-12-05 | 2007-04-18 | キヤノン株式会社 | 露光装置およびデバイス製造方法ならびにステージ装置および原点出し方法 |
US6028376A (en) * | 1997-04-22 | 2000-02-22 | Canon Kabushiki Kaisha | Positioning apparatus and exposure apparatus using the same |
US6408045B1 (en) | 1997-11-11 | 2002-06-18 | Canon Kabushiki Kaisha | Stage system and exposure apparatus with the same |
TWI242113B (en) * | 1998-07-17 | 2005-10-21 | Asml Netherlands Bv | Positioning device and lithographic projection apparatus comprising such a device |
EP0973067A3 (de) * | 1998-07-17 | 2001-10-24 | ASM Lithography B.V. | Positionierungsvorrichtung und lithographisches Projektionsapparat mit einer solchen Vorrichtung |
US6113056A (en) * | 1998-08-04 | 2000-09-05 | Micrion Corporation | Workpiece vibration damper |
JP3448005B2 (ja) * | 1999-05-27 | 2003-09-16 | ミラエ・コーポレーション | リニアモーターの冷却装置 |
US6271606B1 (en) * | 1999-12-23 | 2001-08-07 | Nikon Corporation | Driving motors attached to a stage that are magnetically coupled through a chamber |
US7095482B2 (en) * | 2001-03-27 | 2006-08-22 | Nikon Corporation | Multiple system vibration isolator |
DE10120553A1 (de) * | 2001-04-26 | 2002-10-31 | Werth Messtechnik Gmbh | Lagerung für insbesondere ein Koordinatenmessgerät |
KR100434975B1 (ko) * | 2001-07-09 | 2004-06-07 | 백윤수 | 범용 나노 스테이지의 구동장치 및 그 방법 |
JP4136363B2 (ja) * | 2001-11-29 | 2008-08-20 | キヤノン株式会社 | 位置決め装置及びそれを用いた露光装置 |
US6953109B2 (en) | 2002-10-08 | 2005-10-11 | Nikon Corporation | Vibration isolator with low lateral stiffness |
US6987559B2 (en) * | 2002-10-15 | 2006-01-17 | Nikon Corporation | Vibration-attenuation devices having low lateral stiffness, and exposure apparatus comprising same |
US20040155534A1 (en) * | 2003-02-07 | 2004-08-12 | Engwall Mats Anders | Structure integrating gas support bearing and a planar electromagnetic drive and levitation system |
JP2005032818A (ja) * | 2003-07-08 | 2005-02-03 | Canon Inc | 静圧軸受、位置決め装置、並びに露光装置 |
JP2005044893A (ja) * | 2003-07-24 | 2005-02-17 | Canon Inc | 基板保持装置 |
JP2005155658A (ja) * | 2003-11-20 | 2005-06-16 | Canon Inc | 静圧気体軸受装置およびそれを用いたステージ装置 |
KR101119814B1 (ko) * | 2004-06-07 | 2012-03-06 | 가부시키가이샤 니콘 | 스테이지 장치, 노광 장치 및 노광 방법 |
CN100336628C (zh) * | 2004-06-09 | 2007-09-12 | 潘旭华 | 一种静压导轨的装配方法 |
WO2006012408A2 (en) * | 2004-07-21 | 2006-02-02 | Newport Corporation | Improved cooling system for linear motors |
WO2006052855A2 (en) * | 2004-11-04 | 2006-05-18 | Nikon Corporation | Fine stage z support apparatus |
WO2006077958A1 (ja) * | 2005-01-21 | 2006-07-27 | Nikon Corporation | リニアモータ、ステージ装置、及び露光装置 |
JP4664142B2 (ja) * | 2005-07-21 | 2011-04-06 | 住友重機械工業株式会社 | ステージ装置 |
JP5088270B2 (ja) * | 2008-08-19 | 2012-12-05 | 株式会社安川電機 | 精密微動位置決めユニット、それを備えたステージ装置、露光装置及び検査装置 |
KR101716267B1 (ko) | 2012-08-21 | 2017-03-14 | 에이에스엠엘 네델란즈 비.브이. | 리소그래피 장치 및 디바이스 제조 방법 |
KR20220035113A (ko) * | 2019-07-19 | 2022-03-21 | 아크리비스 시스템즈 피티이 엘티디 | 일체형 공기정역학적 베어링 가이드를 갖는 철심 선형 모터 포서 |
DE102019005966A1 (de) * | 2019-08-23 | 2021-02-25 | Kern Microtechnik Gmbh | Hochpräzisions-Werkzeugmaschine mit linearem Antriebs- und Führungslager |
KR102244820B1 (ko) * | 2020-08-10 | 2021-04-27 | (주)세스텍 | 리니어 모터를 적용한 이송 로봇 |
CN116950996B (zh) * | 2023-09-21 | 2023-12-29 | 无锡星微科技有限公司杭州分公司 | 一种承重台及具有该承载台的直线平台 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4485339A (en) * | 1983-06-10 | 1984-11-27 | The Perkin-Elmer Corporation | Electro-magnetic alignment device |
JPS60217033A (ja) * | 1984-04-12 | 1985-10-30 | Omron Tateisi Electronics Co | 微動ステ−ジ装置 |
JPH0640731B2 (ja) * | 1984-12-28 | 1994-05-25 | 松下電器産業株式会社 | リニアモ−タ |
US4798985A (en) * | 1987-02-17 | 1989-01-17 | Anwar Chitavat | Linear motor with air-lift bearing unloading |
US5040431A (en) * | 1988-01-22 | 1991-08-20 | Canon Kabushiki Kaisha | Movement guiding mechanism |
US5184055A (en) * | 1989-10-06 | 1993-02-02 | Canon Kabushiki Kaisha | Device for positioning control |
US5280677A (en) * | 1990-05-17 | 1994-01-25 | Canon Kabushiki Kaisha | Positioning mechanism |
JP2833321B2 (ja) * | 1992-02-13 | 1998-12-09 | 日本電気株式会社 | 2次元位置決めステージ |
WO1995006949A1 (en) * | 1993-09-01 | 1995-03-09 | Grumman Aerospace Corporation | Superconducting electromagnet for levitation and propulsion of a maglev vehicle |
-
1993
- 1993-10-12 JP JP27732593A patent/JP3196798B2/ja not_active Expired - Lifetime
-
1994
- 1994-09-30 DE DE69419688T patent/DE69419688T2/de not_active Expired - Lifetime
- 1994-09-30 EP EP94307197A patent/EP0647788B1/de not_active Expired - Lifetime
- 1994-10-03 US US08/316,887 patent/US5701041A/en not_active Expired - Lifetime
- 1994-10-07 KR KR1019940025636A patent/KR0166987B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JPH07111238A (ja) | 1995-04-25 |
JP3196798B2 (ja) | 2001-08-06 |
EP0647788A1 (de) | 1995-04-12 |
EP0647788B1 (de) | 1999-07-28 |
KR950012670A (ko) | 1995-05-16 |
KR0166987B1 (ko) | 1999-02-01 |
US5701041A (en) | 1997-12-23 |
DE69419688T2 (de) | 1999-12-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |