KR880005681A - 고열전도성 질화알루미늄소결체 및 그의 제조방법 - Google Patents

고열전도성 질화알루미늄소결체 및 그의 제조방법 Download PDF

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Publication number
KR880005681A
KR880005681A KR870012080A KR870012080A KR880005681A KR 880005681 A KR880005681 A KR 880005681A KR 870012080 A KR870012080 A KR 870012080A KR 870012080 A KR870012080 A KR 870012080A KR 880005681 A KR880005681 A KR 880005681A
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South Korea
Prior art keywords
thermal conductivity
sintered body
high thermal
aluminum nitride
weight
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KR870012080A
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English (en)
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KR960001429B1 (ko
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고이찌 소가베
히도유끼 사까노우에
노부유끼 사사끼
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원본미기재
스미또모 뎅끼 고교 가부시끼가이샤
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Publication of KR880005681A publication Critical patent/KR880005681A/ko
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    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Products (AREA)

Abstract

내용 없음

Description

고열전도성 질화알류미늄소결체 및 그의 제조방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (5)

  1. 산화가돌기늄 1.0내지 15중량%를 첨가하여 소결된 산화알류미늄소결체에 있어서, 입계상이 GdA103+ Gd20, 로 주로 형성되며, 95% 이상의 상대밀도를 가지며, 실온에서의 열 전도율이 150W/m.k 이상임을 특징으로 하는 고열전도성 질화알루미늄소결체.
  2. 가돌리늄들 Gd403, 환산으로 0.01 중량% 이상 및 1.0 중량 미만 함유하며, 입계상이 GdA10₃+ Gd203로 주로 형성되며, 95%이상의 상대밀도를 가지며, 실온에서의 열 전도율이 150W/m.k 이상임을 특징으로 하는 고열전도성 질화알루미늄소결체.
  3. 산소함유량 0.1 내지 2.0 중량%의 질화알류미늄분말 85 내지 99.0 중량%, 산화가돌리늄분말 1.0 내지 15 중량%를 혼합, 성형하고, 이어서 1800 내지 2200℃ 의 온도하의 비산화성분위기중에서 소결하고, GdA103+ Gd203를 주성분으로 하는 입계면을 갖는 소결체조직을 얻음을 특징으로 하는 고열전도성 질화알루미늄소결체의 제조방법.
  4. 제3항에 있어서, 상기 비산화성분위기는 진공 또는 질소가스, 수소가스, 일산화탄소가스, 아르곤가스, 헬륨가스로 이루어진 군으로부터 선택된 1종 또는 2종 이상의 가스를 형성되는 분위기임을 특징으로 하는 고열전도성 질화알루미늄소결체의 제조방법.
  5. 제3항 또는 제4항에 있어서, 상기 성형한 혼합분말을 비산화성분위기중 50 Kg/cm2이상의 압력에서 가압 소결함을 특징으로 하는 고열전도성 질화알루미늄소결체의 제조방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019870012080A 1986-10-31 1987-10-30 고열전도성 질화알루미늄 소결체 및 이의 제조방법 KR960001429B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP26156 1986-10-31
JP260,156 1986-10-31
JP61260156A JPH0641390B2 (ja) 1986-10-31 1986-10-31 高熱伝導性窒化アルミニウム焼結体とその製造方法

Publications (2)

Publication Number Publication Date
KR880005681A true KR880005681A (ko) 1988-06-30
KR960001429B1 KR960001429B1 (ko) 1996-01-27

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019870012080A KR960001429B1 (ko) 1986-10-31 1987-10-30 고열전도성 질화알루미늄 소결체 및 이의 제조방법

Country Status (5)

Country Link
EP (1) EP0266277B1 (ko)
JP (1) JPH0641390B2 (ko)
KR (1) KR960001429B1 (ko)
CA (1) CA1277337C (ko)
DE (1) DE3786142T2 (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01203270A (ja) * 1988-02-08 1989-08-16 Sumitomo Electric Ind Ltd 高熱伝導性窒化アルミニウム焼結体及びその製造法
US6017485A (en) * 1996-03-28 2000-01-25 Carborundum Corporation Process for making a low electrical resistivity, high purity aluminum nitride electrostatic chuck
JP7082947B2 (ja) 2017-02-01 2022-06-09 出光興産株式会社 非晶質酸化物半導体膜、酸化物焼結体、薄膜トランジスタ、スパッタリングターゲット、電子機器及び非晶質酸化物半導体膜の製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60127267A (ja) * 1983-12-12 1985-07-06 株式会社東芝 高熱伝導性窒化アルミニウム焼結体の製造方法
DE3587481T2 (de) * 1984-02-27 1993-12-16 Toshiba Kawasaki Kk Schaltungssubstrat mit hoher Wärmeleitfähigkeit.

Also Published As

Publication number Publication date
JPH0641390B2 (ja) 1994-06-01
KR960001429B1 (ko) 1996-01-27
EP0266277A2 (en) 1988-05-04
JPS63218585A (ja) 1988-09-12
EP0266277B1 (en) 1993-06-09
EP0266277A3 (en) 1989-09-27
CA1277337C (en) 1990-12-04
DE3786142D1 (de) 1993-07-15
DE3786142T2 (de) 1994-01-27

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