KR880005681A - 고열전도성 질화알루미늄소결체 및 그의 제조방법 - Google Patents
고열전도성 질화알루미늄소결체 및 그의 제조방법 Download PDFInfo
- Publication number
- KR880005681A KR880005681A KR870012080A KR870012080A KR880005681A KR 880005681 A KR880005681 A KR 880005681A KR 870012080 A KR870012080 A KR 870012080A KR 870012080 A KR870012080 A KR 870012080A KR 880005681 A KR880005681 A KR 880005681A
- Authority
- KR
- South Korea
- Prior art keywords
- thermal conductivity
- sintered body
- high thermal
- aluminum nitride
- weight
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Ceramic Products (AREA)
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
Claims (5)
- 산화가돌기늄 1.0내지 15중량%를 첨가하여 소결된 산화알류미늄소결체에 있어서, 입계상이 GdA103+ Gd20, 로 주로 형성되며, 95% 이상의 상대밀도를 가지며, 실온에서의 열 전도율이 150W/m.k 이상임을 특징으로 하는 고열전도성 질화알루미늄소결체.
- 가돌리늄들 Gd403, 환산으로 0.01 중량% 이상 및 1.0 중량 미만 함유하며, 입계상이 GdA10₃+ Gd203로 주로 형성되며, 95%이상의 상대밀도를 가지며, 실온에서의 열 전도율이 150W/m.k 이상임을 특징으로 하는 고열전도성 질화알루미늄소결체.
- 산소함유량 0.1 내지 2.0 중량%의 질화알류미늄분말 85 내지 99.0 중량%, 산화가돌리늄분말 1.0 내지 15 중량%를 혼합, 성형하고, 이어서 1800 내지 2200℃ 의 온도하의 비산화성분위기중에서 소결하고, GdA103+ Gd203를 주성분으로 하는 입계면을 갖는 소결체조직을 얻음을 특징으로 하는 고열전도성 질화알루미늄소결체의 제조방법.
- 제3항에 있어서, 상기 비산화성분위기는 진공 또는 질소가스, 수소가스, 일산화탄소가스, 아르곤가스, 헬륨가스로 이루어진 군으로부터 선택된 1종 또는 2종 이상의 가스를 형성되는 분위기임을 특징으로 하는 고열전도성 질화알루미늄소결체의 제조방법.
- 제3항 또는 제4항에 있어서, 상기 성형한 혼합분말을 비산화성분위기중 50 Kg/cm2이상의 압력에서 가압 소결함을 특징으로 하는 고열전도성 질화알루미늄소결체의 제조방법.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP260,156 | 1986-10-31 | ||
JP61260156A JPH0641390B2 (ja) | 1986-10-31 | 1986-10-31 | 高熱伝導性窒化アルミニウム焼結体とその製造方法 |
JP26156 | 1986-10-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR880005681A true KR880005681A (ko) | 1988-06-30 |
KR960001429B1 KR960001429B1 (ko) | 1996-01-27 |
Family
ID=17344091
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019870012080A KR960001429B1 (ko) | 1986-10-31 | 1987-10-30 | 고열전도성 질화알루미늄 소결체 및 이의 제조방법 |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP0266277B1 (ko) |
JP (1) | JPH0641390B2 (ko) |
KR (1) | KR960001429B1 (ko) |
CA (1) | CA1277337C (ko) |
DE (1) | DE3786142T2 (ko) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01203270A (ja) * | 1988-02-08 | 1989-08-16 | Sumitomo Electric Ind Ltd | 高熱伝導性窒化アルミニウム焼結体及びその製造法 |
US6017485A (en) * | 1996-03-28 | 2000-01-25 | Carborundum Corporation | Process for making a low electrical resistivity, high purity aluminum nitride electrostatic chuck |
WO2018143280A1 (ja) | 2017-02-01 | 2018-08-09 | 出光興産株式会社 | 非晶質酸化物半導体膜、酸化物焼結体、及び薄膜トランジスタ |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60127267A (ja) * | 1983-12-12 | 1985-07-06 | 株式会社東芝 | 高熱伝導性窒化アルミニウム焼結体の製造方法 |
US4659611A (en) * | 1984-02-27 | 1987-04-21 | Kabushiki Kaisha Toshiba | Circuit substrate having high thermal conductivity |
-
1986
- 1986-10-31 JP JP61260156A patent/JPH0641390B2/ja not_active Expired - Lifetime
-
1987
- 1987-10-30 KR KR1019870012080A patent/KR960001429B1/ko not_active IP Right Cessation
- 1987-11-02 EP EP87402457A patent/EP0266277B1/en not_active Expired - Lifetime
- 1987-11-02 DE DE87402457T patent/DE3786142T2/de not_active Expired - Lifetime
- 1987-11-02 CA CA000550795A patent/CA1277337C/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS63218585A (ja) | 1988-09-12 |
EP0266277A2 (en) | 1988-05-04 |
JPH0641390B2 (ja) | 1994-06-01 |
DE3786142T2 (de) | 1994-01-27 |
EP0266277B1 (en) | 1993-06-09 |
CA1277337C (en) | 1990-12-04 |
EP0266277A3 (en) | 1989-09-27 |
DE3786142D1 (de) | 1993-07-15 |
KR960001429B1 (ko) | 1996-01-27 |
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