DE3786142D1 - Verfahren zur herstellung von aluminiumnitrid-sinterkoerper mit hoher waermeleitfaehigkeit. - Google Patents

Verfahren zur herstellung von aluminiumnitrid-sinterkoerper mit hoher waermeleitfaehigkeit.

Info

Publication number
DE3786142D1
DE3786142D1 DE8787402457T DE3786142T DE3786142D1 DE 3786142 D1 DE3786142 D1 DE 3786142D1 DE 8787402457 T DE8787402457 T DE 8787402457T DE 3786142 T DE3786142 T DE 3786142T DE 3786142 D1 DE3786142 D1 DE 3786142D1
Authority
DE
Germany
Prior art keywords
high heat
aluminum nitride
heat conductivity
producing aluminum
nitride sinter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8787402457T
Other languages
English (en)
Other versions
DE3786142T2 (de
Inventor
Koichi Itami Works Of S Sogabe
Hitoyuki Itami Works Sakanoue
Nobuyuki Itami Works Of Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Application granted granted Critical
Publication of DE3786142D1 publication Critical patent/DE3786142D1/de
Publication of DE3786142T2 publication Critical patent/DE3786142T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Products (AREA)
DE87402457T 1986-10-31 1987-11-02 Verfahren zur Herstellung von Aluminiumnitrid-Sinterkörper mit hoher Wärmeleitfähigkeit. Expired - Lifetime DE3786142T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61260156A JPH0641390B2 (ja) 1986-10-31 1986-10-31 高熱伝導性窒化アルミニウム焼結体とその製造方法

Publications (2)

Publication Number Publication Date
DE3786142D1 true DE3786142D1 (de) 1993-07-15
DE3786142T2 DE3786142T2 (de) 1994-01-27

Family

ID=17344091

Family Applications (1)

Application Number Title Priority Date Filing Date
DE87402457T Expired - Lifetime DE3786142T2 (de) 1986-10-31 1987-11-02 Verfahren zur Herstellung von Aluminiumnitrid-Sinterkörper mit hoher Wärmeleitfähigkeit.

Country Status (5)

Country Link
EP (1) EP0266277B1 (de)
JP (1) JPH0641390B2 (de)
KR (1) KR960001429B1 (de)
CA (1) CA1277337C (de)
DE (1) DE3786142T2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01203270A (ja) * 1988-02-08 1989-08-16 Sumitomo Electric Ind Ltd 高熱伝導性窒化アルミニウム焼結体及びその製造法
US6017485A (en) * 1996-03-28 2000-01-25 Carborundum Corporation Process for making a low electrical resistivity, high purity aluminum nitride electrostatic chuck
JP7082947B2 (ja) * 2017-02-01 2022-06-09 出光興産株式会社 非晶質酸化物半導体膜、酸化物焼結体、薄膜トランジスタ、スパッタリングターゲット、電子機器及び非晶質酸化物半導体膜の製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60127267A (ja) * 1983-12-12 1985-07-06 株式会社東芝 高熱伝導性窒化アルミニウム焼結体の製造方法
EP0153737B1 (de) * 1984-02-27 1993-07-28 Kabushiki Kaisha Toshiba Schaltungssubstrat mit hoher Wärmeleitfähigkeit

Also Published As

Publication number Publication date
JPH0641390B2 (ja) 1994-06-01
DE3786142T2 (de) 1994-01-27
EP0266277B1 (de) 1993-06-09
KR960001429B1 (ko) 1996-01-27
EP0266277A3 (en) 1989-09-27
CA1277337C (en) 1990-12-04
JPS63218585A (ja) 1988-09-12
EP0266277A2 (de) 1988-05-04
KR880005681A (ko) 1988-06-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition