KR830006809A - 2차 전자 검출장치 - Google Patents
2차 전자 검출장치 Download PDFInfo
- Publication number
- KR830006809A KR830006809A KR1019810002642A KR810002642A KR830006809A KR 830006809 A KR830006809 A KR 830006809A KR 1019810002642 A KR1019810002642 A KR 1019810002642A KR 810002642 A KR810002642 A KR 810002642A KR 830006809 A KR830006809 A KR 830006809A
- Authority
- KR
- South Korea
- Prior art keywords
- optical axis
- detection device
- electronic detection
- electron
- provided around
- Prior art date
Links
- 238000001514 detection method Methods 0.000 title claims 2
- 230000003287 optical effect Effects 0.000 claims 3
- 238000010894 electron beam technology Methods 0.000 claims 1
- 230000005693 optoelectronics Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/261—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/40—Imaging
- G01N2223/418—Imaging electron microscope
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/50—Detectors
- G01N2223/505—Detectors scintillation
- G01N2223/5055—Detectors scintillation scintillation crystal coupled to PMT
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2443—Scintillation detectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2448—Secondary particle detectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2449—Detector devices with moving charges in electric or magnetic fields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/245—Detection characterised by the variable being measured
- H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제 2 도 및 제 3 도는 제각기 본 발명의 일실시예 장치를 도시한 개략도.
Claims (1)
- 전자총에서 광축에 연하여 취출된 전자선을 대몰렌즈의 자장내에 설치된 시료에 조사하여 대물렌즈부터 전자총축에 설치된 신치레이터와 광전자중배관에 의하여 시료부터 발생하는 2차 전자를 검출하게한 주사전자 현미경에 있어서 상기 신치레이터 근방의 광축의 주위에 설치된 편향방지를 위한 파이프형전극의 주위에 설치되어 광축에 관하여 거의 대칭인 형상을 갖는 2차전자 집속용의 전극을 가진것을 특징으로 하는 주사 현미경용 2차 전자 검출장치.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55-105516 | 1980-07-31 | ||
JP10551680A JPS5730253A (en) | 1979-06-28 | 1980-07-31 | Secondary electron detector for scan type electron microscope |
Publications (2)
Publication Number | Publication Date |
---|---|
KR830006809A true KR830006809A (ko) | 1983-10-06 |
KR850001390B1 KR850001390B1 (ko) | 1985-09-24 |
Family
ID=14409758
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019810002642A KR850001390B1 (ko) | 1980-07-31 | 1981-07-21 | 2차 전자 검출장치 |
Country Status (2)
Country | Link |
---|---|
US (1) | US4442355A (ko) |
KR (1) | KR850001390B1 (ko) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB8327737D0 (en) * | 1983-10-17 | 1983-11-16 | Texas Instruments Ltd | Electron detector |
US4596929A (en) * | 1983-11-21 | 1986-06-24 | Nanometrics Incorporated | Three-stage secondary emission electron detection in electron microscopes |
JPS60212953A (ja) * | 1984-04-06 | 1985-10-25 | Hitachi Ltd | 電子線装置 |
DE3576213D1 (de) * | 1984-09-18 | 1990-04-05 | Integrated Circuit Testing | Gegenfeld-spektrometer fuer die elektronenstrahl-messtechnik. |
US4864228A (en) * | 1985-03-15 | 1989-09-05 | Fairchild Camera And Instrument Corporation | Electron beam test probe for integrated circuit testing |
US4680468A (en) * | 1985-08-05 | 1987-07-14 | Canadian Patents And Development Limited-Societe Canadienne Des Brevets Et D'exploitation Limitee | Particle detector |
GB8604181D0 (en) * | 1986-02-20 | 1986-03-26 | Texas Instruments Ltd | Electron beam apparatus |
US4766372A (en) * | 1987-02-10 | 1988-08-23 | Intel Corporation | Electron beam tester |
DE3938660A1 (de) * | 1989-11-21 | 1991-05-23 | Integrated Circuit Testing | Korpuskularstrahlgeraet |
JPH071685B2 (ja) * | 1990-09-06 | 1995-01-11 | 株式会社日立製作所 | 走査電子顕微鏡 |
JP3081393B2 (ja) * | 1992-10-15 | 2000-08-28 | 株式会社日立製作所 | 走査電子顕微鏡 |
DE69501533T2 (de) * | 1994-03-18 | 1998-07-30 | Philips Electronics Nv | Partikel-optisches instrument mit einer ablenkeinheit für sekundärelektronen |
US5475228A (en) * | 1994-11-28 | 1995-12-12 | University Of Puerto Rico | Unipolar blocking method and apparatus for monitoring electrically charged particles |
JPH1167139A (ja) * | 1997-08-25 | 1999-03-09 | Hitachi Ltd | 走査電子顕微鏡 |
EP1022766B1 (en) * | 1998-11-30 | 2004-02-04 | Advantest Corporation | Particle beam apparatus |
GB2367686B (en) * | 2000-08-10 | 2002-12-11 | Leo Electron Microscopy Ltd | Improvements in or relating to particle detectors |
EP1605492B1 (en) * | 2004-06-11 | 2015-11-18 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Charged particle beam device with retarding field analyzer |
JP4636897B2 (ja) * | 2005-02-18 | 2011-02-23 | 株式会社日立ハイテクサイエンスシステムズ | 走査電子顕微鏡 |
CZ2007685A3 (cs) * | 2007-10-04 | 2008-12-17 | Ústav prístrojové techniky AV CR, v.v.i. | Ionizacní detektor environmentálního rastrovacíhoelektronového mikroskopu |
WO2009142550A2 (en) | 2008-05-22 | 2009-11-26 | Vladimir Yegorovich Balakin | Charged particle beam extraction method and apparatus used in conjunction with a charged particle cancer therapy system |
WO2009142546A2 (en) * | 2008-05-22 | 2009-11-26 | Vladimir Yegorovich Balakin | Multi-field charged particle cancer therapy method and apparatus |
EP2283713B1 (en) | 2008-05-22 | 2018-03-28 | Vladimir Yegorovich Balakin | Multi-axis charged particle cancer therapy apparatus |
EP2283709B1 (en) * | 2008-05-22 | 2018-07-11 | Vladimir Yegorovich Balakin | Charged particle cancer therapy patient positioning apparatus |
EP2283711B1 (en) * | 2008-05-22 | 2018-07-11 | Vladimir Yegorovich Balakin | Charged particle beam acceleration apparatus as part of a charged particle cancer therapy system |
US8896239B2 (en) * | 2008-05-22 | 2014-11-25 | Vladimir Yegorovich Balakin | Charged particle beam injection method and apparatus used in conjunction with a charged particle cancer therapy system |
SG173879A1 (en) | 2009-03-04 | 2011-10-28 | Protom Aozt | Multi-field charged particle cancer therapy method and apparatus |
JP5818542B2 (ja) * | 2010-07-29 | 2015-11-18 | 浜松ホトニクス株式会社 | イオン検出装置 |
JP2012138324A (ja) * | 2010-12-28 | 2012-07-19 | Topcon Corp | 二次電子検出器、及び荷電粒子ビーム装置 |
US11239048B2 (en) * | 2020-03-09 | 2022-02-01 | Kla Corporation | Arrayed column detector |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1128107A (en) * | 1965-06-23 | 1968-09-25 | Hitachi Ltd | Scanning electron microscope |
GB1304344A (ko) * | 1969-02-01 | 1973-01-24 | ||
DE2151167C3 (de) * | 1971-10-14 | 1974-05-09 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Elektronenstrahl-Mikroanalysator mit Auger-Elektronen-Nachweis |
GB1447983A (en) * | 1973-01-10 | 1976-09-02 | Nat Res Dev | Detector for electron microscopes |
-
1981
- 1981-07-21 KR KR1019810002642A patent/KR850001390B1/ko active
- 1981-07-22 US US06/286,056 patent/US4442355A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR850001390B1 (ko) | 1985-09-24 |
US4442355A (en) | 1984-04-10 |
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