GB1213527A - Electron probe - Google Patents

Electron probe

Info

Publication number
GB1213527A
GB1213527A GB1153868A GB1153868A GB1213527A GB 1213527 A GB1213527 A GB 1213527A GB 1153868 A GB1153868 A GB 1153868A GB 1153868 A GB1153868 A GB 1153868A GB 1213527 A GB1213527 A GB 1213527A
Authority
GB
United Kingdom
Prior art keywords
specimen
lens
electron
microscope
plates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1153868A
Inventor
Victor G Macres
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to GB1153868A priority Critical patent/GB1213527A/en
Publication of GB1213527A publication Critical patent/GB1213527A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams

Abstract

1,213,527. Electron microscopes; X-ray tubes. V. G. MACRES. 8 March, 1968, No. 11538/68. Heading H1D. An electron probe comprises a short focal length electron lens 34 disposed entirely between an electron gun and the specimen S to be examined for focusing the beam on the specimen, the lens having an internal convergent configuration in the direction of electron motion and a lens centre closely adjacent the specimen. As shown the upper polepiece 36 and the lower polepiece 40 are inclined at an angle of slightly greater than 30 degrees and enclose an energizing coil (not shown). The centre of the lower polepiece is provided with an inward and downward taper to restrict the fringing fields of the lens from the space occupied by the specimen. A non-magnetic tube 52 of an optical microscope extends through the lens to the vicinity of the specimen; the microscope includes a light source (not shown) and extends to an external eyepiece 60. A small cylindrical metal shield 62 is attached to the microscope body to isolate the electron beam from any electric charges which may accumulate on the glass lens of the microscope. A plurality of specimens S are mounted on an inclined rotatable disc 74 which is mounted for translation in two directions under the control of micrometer screws 82 and 86. The disc 74 is preferably normal to the optical axis of the microscope tube 52. One of the specimens may be fluorescent to facilitate focusing, and a window 64 allows X-rays generated by a specimen to pass to associated spectrographic equipment (not shown). One of four apertured plates 24 is disposed in the path of the electron beam, to restrict the beam to a required diameter, by rotating the external knob 26 to select the required plate. Instead of an aperture, one of the plates 24 may be provided with a fluorescent surface with cross-hair line indicia 24b which may be observed through a window 28. Adjustably-supported electrostatic deflection plates 32 allow the beam to be centred or to be scanned across the specimen.
GB1153868A 1968-03-08 1968-03-08 Electron probe Expired GB1213527A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB1153868A GB1213527A (en) 1968-03-08 1968-03-08 Electron probe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1153868A GB1213527A (en) 1968-03-08 1968-03-08 Electron probe

Publications (1)

Publication Number Publication Date
GB1213527A true GB1213527A (en) 1970-11-25

Family

ID=9988075

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1153868A Expired GB1213527A (en) 1968-03-08 1968-03-08 Electron probe

Country Status (1)

Country Link
GB (1) GB1213527A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2238426A (en) * 1989-11-16 1991-05-29 Jeol Ltd Electromagnetic lens.
EP3332417A4 (en) * 2016-10-11 2018-11-07 Focus-eBeam Technology (Beijing) Co., Ltd. Charged particle beam system, opto-electro simultaneous detection system and method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2238426A (en) * 1989-11-16 1991-05-29 Jeol Ltd Electromagnetic lens.
GB2238426B (en) * 1989-11-16 1994-04-13 Jeol Ltd Electromagnetic lens
EP3332417A4 (en) * 2016-10-11 2018-11-07 Focus-eBeam Technology (Beijing) Co., Ltd. Charged particle beam system, opto-electro simultaneous detection system and method
US10879036B2 (en) 2016-10-11 2020-12-29 Focus-Ebeam Technology (Beijing) Co., Ltd. Charged particle beam system, opto-electro simultaneous detection system and method

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Legal Events

Date Code Title Description
PS Patent sealed
PLE Entries relating assignments, transmissions, licences in the register of patents
PCNP Patent ceased through non-payment of renewal fee