KR20250099156A - 반도체 제조용 도전성 필러 모듈 전구체, 반도체 제조용 도전성 필러 모듈, 반도체 또는 반도체 전구체 및 그의 제조 방법 - Google Patents

반도체 제조용 도전성 필러 모듈 전구체, 반도체 제조용 도전성 필러 모듈, 반도체 또는 반도체 전구체 및 그의 제조 방법 Download PDF

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KR20250099156A
KR20250099156A KR1020257016296A KR20257016296A KR20250099156A KR 20250099156 A KR20250099156 A KR 20250099156A KR 1020257016296 A KR1020257016296 A KR 1020257016296A KR 20257016296 A KR20257016296 A KR 20257016296A KR 20250099156 A KR20250099156 A KR 20250099156A
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South Korea
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conductive filler
semiconductor
sheet
manufacturing
precursor
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Pending
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KR1020257016296A
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English (en)
Korean (ko)
Inventor
료스케 야마자키
신 요시다
샹쥔 천
Original Assignee
다우 도레이 캄파니 리미티드
다우 글로벌 테크놀로지스 엘엘씨
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Publication of KR20250099156A publication Critical patent/KR20250099156A/ko
Pending legal-status Critical Current

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    • H—ELECTRICITY
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    • H10W72/00—Interconnections or connectors in packages
    • H10W72/30—Die-attach connectors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H01L21/52—
    • H01L21/563—
    • H01L23/31—
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    • H01L24/83—
    • H—ELECTRICITY
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    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/01—Manufacture or treatment
    • H10W70/05—Manufacture or treatment of insulating or insulated package substrates, or of interposers, or of redistribution layers
    • H10W70/093—Connecting or disconnecting other interconnections thereto or therefrom, e.g. connecting bond wires or bumps
    • H—ELECTRICITY
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    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/68—Shapes or dispositions thereof
    • H10W70/681—Shapes or dispositions thereof comprising holes not having chips therein, e.g. for outgassing, underfilling or bond wire passage
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    • H10W72/00—Interconnections or connectors in packages
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    • H—ELECTRICITY
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    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/01—Manufacture or treatment
    • H10W72/013—Manufacture or treatment of die-attach connectors
    • H10W72/01361—Chemical or physical modification, e.g. by sintering or anodisation
    • H—ELECTRICITY
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    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
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    • H10W72/071—Connecting or disconnecting
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    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
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    • H—ELECTRICITY
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    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/073—Connecting or disconnecting of die-attach connectors
    • H10W72/07331—Connecting techniques
    • H10W72/07337—Connecting techniques using a polymer adhesive, e.g. an adhesive based on silicone or epoxy
    • H10W72/07338—Connecting techniques using a polymer adhesive, e.g. an adhesive based on silicone or epoxy hardening the adhesive by curing, e.g. thermosetting
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    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/30—Die-attach connectors
    • H10W72/321—Structures or relative sizes of die-attach connectors
    • H10W72/325—Die-attach connectors having a filler embedded in a matrix
    • H—ELECTRICITY
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    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/90—Bond pads, in general
    • H10W72/921—Structures or relative sizes of bond pads
    • H10W72/925—Bond pads having a filler embedded in a matrix
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    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/01—Manufacture or treatment
    • H10W74/012—Manufacture or treatment of encapsulations on active surfaces of flip-chip devices, e.g. forming underfills
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    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
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    • H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
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    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/131—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being only partially enclosed
    • H10W74/142—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being only partially enclosed the encapsulations exposing the passive side of the semiconductor body
    • H01L2224/27515—
    • H01L2224/29398—
    • H01L2224/83498—
    • H01L2224/83855—
    • H01L2924/18161—
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    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/611—Insulating or insulated package substrates; Interposers; Redistribution layers for connecting multiple chips together
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/688—Flexible insulating substrates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H10W72/251—Materials
    • H10W72/252—Materials comprising solid metals or solid metalloids, e.g. PbSn, Ag or Cu
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/90—Bond pads, in general
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/15—Encapsulations, e.g. protective coatings characterised by their shape or disposition on active surfaces of flip-chip devices, e.g. underfills
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/401—Package configurations characterised by multiple insulating or insulated package substrates, interposers or RDLs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/721—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
    • H10W90/724—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL

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  • Compositions Of Macromolecular Compounds (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
KR1020257016296A 2022-10-24 2023-10-24 반도체 제조용 도전성 필러 모듈 전구체, 반도체 제조용 도전성 필러 모듈, 반도체 또는 반도체 전구체 및 그의 제조 방법 Pending KR20250099156A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022169954 2022-10-24
JPJP-P-2022-169954 2022-10-24
PCT/JP2023/038262 WO2024090403A1 (ja) 2022-10-24 2023-10-24 半導体製造用導電性ピラーモジュール前駆体、半導体製造用導電性ピラーモジュール、半導体または半導体前駆体、並びにその製造方法

Publications (1)

Publication Number Publication Date
KR20250099156A true KR20250099156A (ko) 2025-07-01

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KR1020257016296A Pending KR20250099156A (ko) 2022-10-24 2023-10-24 반도체 제조용 도전성 필러 모듈 전구체, 반도체 제조용 도전성 필러 모듈, 반도체 또는 반도체 전구체 및 그의 제조 방법

Country Status (7)

Country Link
US (1) US20260047467A1 (https=)
EP (1) EP4597552A1 (https=)
JP (1) JPWO2024090403A1 (https=)
KR (1) KR20250099156A (https=)
CN (1) CN119908026A (https=)
TW (1) TW202501647A (https=)
WO (1) WO2024090403A1 (https=)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016136243A (ja) 2014-12-26 2016-07-28 富士フイルム株式会社 偏光板用組成物、偏光板保護フィルム、セルロースアシレートフィルム、偏光子、偏光板および表示装置
JP2017017300A (ja) 2015-07-01 2017-01-19 ツーハイ アドバンスド チップ キャリアーズ アンド エレクトロニック サブストレート ソリューションズ テクノロジーズ カンパニー リミテッド チップパッケージ
WO2019078140A1 (ja) 2017-10-20 2019-04-25 ダウ・東レ株式会社 硬化性粒状シリコーン組成物、その硬化物、およびその製造方法

Family Cites Families (8)

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Publication number Priority date Publication date Assignee Title
JPS528854B2 (https=) 1972-01-13 1977-03-11
JP3831481B2 (ja) 1996-11-18 2006-10-11 東レ・ダウコーニング株式会社 カルバシラトラン誘導体、その製造方法、接着促進剤、および硬化性シリコーン組成物
JP2002076056A (ja) * 2000-08-28 2002-03-15 Yuken Industry Co Ltd 異方性導電膜とその製造方法
JP2009140869A (ja) * 2007-12-10 2009-06-25 Fujifilm Corp 異方導電性部材
TWI709615B (zh) 2015-02-25 2020-11-11 日商陶氏東麗股份有限公司 硬化性粒狀聚矽氧組合物及其製造方法
TWI762649B (zh) * 2017-06-26 2022-05-01 日商杜邦東麗特殊材料股份有限公司 黏晶用固化性矽組合物
JP7305304B2 (ja) 2018-03-22 2023-07-10 三菱重工業株式会社 排気タービン装置及び排気タービン装置を備えた過給機
JP2019167832A (ja) 2018-03-22 2019-10-03 日立オートモティブシステムズ株式会社 燃料噴射弁の制御装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016136243A (ja) 2014-12-26 2016-07-28 富士フイルム株式会社 偏光板用組成物、偏光板保護フィルム、セルロースアシレートフィルム、偏光子、偏光板および表示装置
JP2017017300A (ja) 2015-07-01 2017-01-19 ツーハイ アドバンスド チップ キャリアーズ アンド エレクトロニック サブストレート ソリューションズ テクノロジーズ カンパニー リミテッド チップパッケージ
WO2019078140A1 (ja) 2017-10-20 2019-04-25 ダウ・東レ株式会社 硬化性粒状シリコーン組成物、その硬化物、およびその製造方法

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EP4597552A1 (en) 2025-08-06
WO2024090403A1 (ja) 2024-05-02
US20260047467A1 (en) 2026-02-12
CN119908026A (zh) 2025-04-29
TW202501647A (zh) 2025-01-01
JPWO2024090403A1 (https=) 2024-05-02

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