KR20250065695A - 몰리브덴 함유 재료 - Google Patents

몰리브덴 함유 재료 Download PDF

Info

Publication number
KR20250065695A
KR20250065695A KR1020257011799A KR20257011799A KR20250065695A KR 20250065695 A KR20250065695 A KR 20250065695A KR 1020257011799 A KR1020257011799 A KR 1020257011799A KR 20257011799 A KR20257011799 A KR 20257011799A KR 20250065695 A KR20250065695 A KR 20250065695A
Authority
KR
South Korea
Prior art keywords
molybdenum
content
less
grain
particle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020257011799A
Other languages
English (en)
Korean (ko)
Inventor
마코토 와타나베
유리 와타나베
다카노리 가도쿠라
Original Assignee
가부시끼가이샤 아라이도 마테리아루
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시끼가이샤 아라이도 마테리아루 filed Critical 가부시끼가이샤 아라이도 마테리아루
Publication of KR20250065695A publication Critical patent/KR20250065695A/ko
Pending legal-status Critical Current

Links

Images

Classifications

    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C27/00Alloys based on rhenium or a refractory metal not mentioned in groups C22C14/00 or C22C16/00
    • C22C27/04Alloys based on tungsten or molybdenum
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C1/00Making non-ferrous alloys
    • C22C1/04Making non-ferrous alloys by powder metallurgy
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22FCHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22FCHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/16Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of other metals or alloys based thereon
    • C22F1/18High-melting or refractory metals or alloys based thereon
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Powder Metallurgy (AREA)
KR1020257011799A 2023-10-12 2024-10-03 몰리브덴 함유 재료 Pending KR20250065695A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2023-176718 2023-10-12
JP2023176718 2023-10-12
PCT/JP2024/035428 WO2025079494A1 (ja) 2023-10-12 2024-10-03 モリブデンを含む材料

Publications (1)

Publication Number Publication Date
KR20250065695A true KR20250065695A (ko) 2025-05-13

Family

ID=95395329

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020257011799A Pending KR20250065695A (ko) 2023-10-12 2024-10-03 몰리브덴 함유 재료

Country Status (4)

Country Link
JP (1) JPWO2025079494A1 (https=)
KR (1) KR20250065695A (https=)
CN (1) CN120167015A (https=)
WO (1) WO2025079494A1 (https=)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0224901A (ja) 1988-07-12 1990-01-26 Stanley Electric Co Ltd 自動車用照明灯
JP2002069628A (ja) 2000-09-04 2002-03-08 Nikko Materials Co Ltd パーティクル発生の少ないスパッタリングターゲット
JP2005133198A (ja) 2003-09-16 2005-05-26 Japan New Metals Co Ltd パーティクル発生のきわめて少ない高純度金属Mo薄膜の形成を可能とするスパッタリング用高純度高密度金属Mo焼結ターゲット
JP2012201930A (ja) 2011-03-25 2012-10-22 Allied Material Corp モリブデン材
JP2015221937A (ja) 2014-04-28 2015-12-10 株式会社アライドマテリアル スパッタリングターゲット用材料
JP2019176962A (ja) 2018-03-30 2019-10-17 株式会社吉野工業所 毛染め用具

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060042728A1 (en) * 2004-08-31 2006-03-02 Brad Lemon Molybdenum sputtering targets
AT15903U1 (de) * 2017-09-29 2018-08-15 Plansee Se Molybdän-Sinterteil
JP7684414B2 (ja) * 2021-10-13 2025-05-27 株式会社アライドマテリアル モリブデン粉末

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0224901A (ja) 1988-07-12 1990-01-26 Stanley Electric Co Ltd 自動車用照明灯
JP2002069628A (ja) 2000-09-04 2002-03-08 Nikko Materials Co Ltd パーティクル発生の少ないスパッタリングターゲット
JP2005133198A (ja) 2003-09-16 2005-05-26 Japan New Metals Co Ltd パーティクル発生のきわめて少ない高純度金属Mo薄膜の形成を可能とするスパッタリング用高純度高密度金属Mo焼結ターゲット
JP2012201930A (ja) 2011-03-25 2012-10-22 Allied Material Corp モリブデン材
JP2015221937A (ja) 2014-04-28 2015-12-10 株式会社アライドマテリアル スパッタリングターゲット用材料
JP2019176962A (ja) 2018-03-30 2019-10-17 株式会社吉野工業所 毛染め用具

Also Published As

Publication number Publication date
WO2025079494A1 (ja) 2025-04-17
CN120167015A (zh) 2025-06-17
JPWO2025079494A1 (https=) 2025-04-17

Similar Documents

Publication Publication Date Title
US9499887B2 (en) Magnesium alloy sheet
KR101201577B1 (ko) 향상된 조직 균일성을 가진 내화 금속판
US12331386B2 (en) Pure copper plate
CN115244197B (zh) 纯铜板
US9773654B2 (en) Fe-Co-based alloy sputtering target material, and method of producing same
WO2009107763A1 (ja) 金属系スパッタリングターゲット材
CN108026612A (zh) 铜合金板材及其制造方法
Pötschke et al. Fundamentals of sintering nanoscaled binderless hardmetals
EP4116450A1 (en) Pure copper plate, copper/ceramic bonded body, and insulated circuit board
JP2010031314A (ja) 高強度かつ成形性に優れたチタン合金板とその製造方法
KR20200123823A (ko) 스퍼터링 타깃 부재 및 그 제조 방법
CN103459631B (zh) 钼材料
JP7108606B2 (ja) スパッタリングターゲット
JP6602550B2 (ja) スパッタリングターゲット用材料
KR20250065695A (ko) 몰리브덴 함유 재료
KR20230017181A (ko) 금속-Si 계 분말, 그 제조 방법, 그리고 금속-Si 계 소결체, 스퍼터링 타깃 및 금속-Si 계 박막의 제조 방법
TW202225126A (zh) 鑽石燒結體、及具備鑽石燒結體之工具
JP7809807B2 (ja) Fe-Ni合金箔、Fe-Ni合金箔の製造方法、および部品
TWI557253B (zh) 靶材及其製造方法
TW202319555A (zh) 濺鍍靶材、其製造方法、及經使用濺鍍靶材的濺鍍膜的製造方法
CN116348624A (zh) 金刚石烧结体以及具备金刚石烧结体的工具

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20250410

Patent event code: PA01051R01D

Comment text: International Patent Application

PA0201 Request for examination
PG1501 Laying open of application