KR20250056909A - 센서 - Google Patents

센서 Download PDF

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Publication number
KR20250056909A
KR20250056909A KR1020257005765A KR20257005765A KR20250056909A KR 20250056909 A KR20250056909 A KR 20250056909A KR 1020257005765 A KR1020257005765 A KR 1020257005765A KR 20257005765 A KR20257005765 A KR 20257005765A KR 20250056909 A KR20250056909 A KR 20250056909A
Authority
KR
South Korea
Prior art keywords
sensor
fluid
flow path
sensor element
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020257005765A
Other languages
English (en)
Korean (ko)
Inventor
아키라 사사키
Original Assignee
구와나 메탈스, 엘티디.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 구와나 메탈스, 엘티디. filed Critical 구와나 메탈스, 엘티디.
Publication of KR20250056909A publication Critical patent/KR20250056909A/ko
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/30—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by floats
    • G01F23/56—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by floats using elements rigidly fixed to, and rectilinearly moving with, the floats as transmission elements
    • G01F23/62—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by floats using elements rigidly fixed to, and rectilinearly moving with, the floats as transmission elements using magnetically actuated indicating means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
    • G01D11/24—Housings ; Casings for instruments
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/14—Casings, e.g. of special material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/30—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by floats
    • G01F23/32—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by floats using rotatable arms or other pivotable transmission elements
    • G01F23/38—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by floats using rotatable arms or other pivotable transmission elements using magnetically actuated indicating means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/30—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by floats
    • G01F23/56—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by floats using elements rigidly fixed to, and rectilinearly moving with, the floats as transmission elements
    • G01F23/60—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by floats using elements rigidly fixed to, and rectilinearly moving with, the floats as transmission elements using electrically actuated indicating means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/30—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by floats
    • G01F23/64—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by floats of the free float type without mechanical transmission elements
    • G01F23/72—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by floats of the free float type without mechanical transmission elements using magnetically actuated indicating means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/30—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by floats
    • G01F23/64—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by floats of the free float type without mechanical transmission elements
    • G01F23/72—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by floats of the free float type without mechanical transmission elements using magnetically actuated indicating means
    • G01F23/74—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by floats of the free float type without mechanical transmission elements using magnetically actuated indicating means for sensing changes in level only at discrete points

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Measuring Volume Flow (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
KR1020257005765A 2022-09-01 2023-07-25 센서 Pending KR20250056909A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022138891 2022-09-01
JPJP-P-2022-138891 2022-09-01
PCT/JP2023/027172 WO2024048134A1 (ja) 2022-09-01 2023-07-25 センサ

Publications (1)

Publication Number Publication Date
KR20250056909A true KR20250056909A (ko) 2025-04-28

Family

ID=90099143

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020257005765A Pending KR20250056909A (ko) 2022-09-01 2023-07-25 센서

Country Status (5)

Country Link
US (1) US20260071905A1 (https=)
JP (1) JPWO2024048134A1 (https=)
KR (1) KR20250056909A (https=)
CN (1) CN119731515A (https=)
WO (1) WO2024048134A1 (https=)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009074108A (ja) 2007-09-18 2009-04-09 Tokyo Electron Ltd 気化装置、成膜装置、成膜方法及び記憶媒体
WO2022004739A1 (ja) 2020-06-30 2022-01-06 日立金属株式会社 液位センサ

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5614922Y2 (https=) * 1977-11-02 1981-04-08
JPH02110830U (https=) * 1989-02-23 1990-09-05
JPH0391927U (https=) * 1989-10-13 1991-09-19
JP4284466B2 (ja) * 2005-01-27 2009-06-24 日本クリンゲージ株式会社 高温液体の液面検知装置
JP2021148496A (ja) * 2020-03-17 2021-09-27 東京エレクトロン株式会社 原料供給装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009074108A (ja) 2007-09-18 2009-04-09 Tokyo Electron Ltd 気化装置、成膜装置、成膜方法及び記憶媒体
WO2022004739A1 (ja) 2020-06-30 2022-01-06 日立金属株式会社 液位センサ

Also Published As

Publication number Publication date
JPWO2024048134A1 (https=) 2024-03-07
WO2024048134A1 (ja) 2024-03-07
US20260071905A1 (en) 2026-03-12
CN119731515A (zh) 2025-03-28

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Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20250221

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application