JPWO2024048134A5 - - Google Patents
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- Publication number
- JPWO2024048134A5 JPWO2024048134A5 JP2024544025A JP2024544025A JPWO2024048134A5 JP WO2024048134 A5 JPWO2024048134 A5 JP WO2024048134A5 JP 2024544025 A JP2024544025 A JP 2024544025A JP 2024544025 A JP2024544025 A JP 2024544025A JP WO2024048134 A5 JPWO2024048134 A5 JP WO2024048134A5
- Authority
- JP
- Japan
- Prior art keywords
- flow path
- protective tube
- sensor
- fluid
- sensor element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001681 protective effect Effects 0.000 claims description 36
- 239000012530 fluid Substances 0.000 claims description 31
- 239000007788 liquid Substances 0.000 claims description 17
- 239000006200 vaporizer Substances 0.000 claims description 10
- 239000002243 precursor Substances 0.000 claims description 4
- 230000008016 vaporization Effects 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims 2
- 239000011261 inert gas Substances 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- 238000010926 purge Methods 0.000 claims 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- 229910001873 dinitrogen Inorganic materials 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 7
- 238000001816 cooling Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 238000009529 body temperature measurement Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000011344 liquid material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022138891 | 2022-09-01 | ||
| PCT/JP2023/027172 WO2024048134A1 (ja) | 2022-09-01 | 2023-07-25 | センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2024048134A1 JPWO2024048134A1 (https=) | 2024-03-07 |
| JPWO2024048134A5 true JPWO2024048134A5 (https=) | 2025-05-16 |
Family
ID=90099143
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024544025A Pending JPWO2024048134A1 (https=) | 2022-09-01 | 2023-07-25 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20260071905A1 (https=) |
| JP (1) | JPWO2024048134A1 (https=) |
| KR (1) | KR20250056909A (https=) |
| CN (1) | CN119731515A (https=) |
| WO (1) | WO2024048134A1 (https=) |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5614922Y2 (https=) * | 1977-11-02 | 1981-04-08 | ||
| JPH02110830U (https=) * | 1989-02-23 | 1990-09-05 | ||
| JPH0391927U (https=) * | 1989-10-13 | 1991-09-19 | ||
| JP4284466B2 (ja) * | 2005-01-27 | 2009-06-24 | 日本クリンゲージ株式会社 | 高温液体の液面検知装置 |
| JP5104151B2 (ja) | 2007-09-18 | 2012-12-19 | 東京エレクトロン株式会社 | 気化装置、成膜装置、成膜方法及び記憶媒体 |
| JP2021148496A (ja) * | 2020-03-17 | 2021-09-27 | 東京エレクトロン株式会社 | 原料供給装置 |
| JP7801998B2 (ja) | 2020-06-30 | 2026-01-19 | 桑名金属工業株式会社 | 液位センサ |
-
2023
- 2023-07-25 JP JP2024544025A patent/JPWO2024048134A1/ja active Pending
- 2023-07-25 CN CN202380059748.6A patent/CN119731515A/zh active Pending
- 2023-07-25 WO PCT/JP2023/027172 patent/WO2024048134A1/ja not_active Ceased
- 2023-07-25 US US19/107,635 patent/US20260071905A1/en active Pending
- 2023-07-25 KR KR1020257005765A patent/KR20250056909A/ko active Pending
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