CN119731515A - 传感器 - Google Patents

传感器 Download PDF

Info

Publication number
CN119731515A
CN119731515A CN202380059748.6A CN202380059748A CN119731515A CN 119731515 A CN119731515 A CN 119731515A CN 202380059748 A CN202380059748 A CN 202380059748A CN 119731515 A CN119731515 A CN 119731515A
Authority
CN
China
Prior art keywords
flow path
sensor
fluid
sensor element
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202380059748.6A
Other languages
English (en)
Chinese (zh)
Inventor
佐佐木章
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sang Ming Metal Industry Co ltd
Original Assignee
Sang Ming Metal Industry Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sang Ming Metal Industry Co ltd filed Critical Sang Ming Metal Industry Co ltd
Publication of CN119731515A publication Critical patent/CN119731515A/zh
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/30—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by floats
    • G01F23/56—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by floats using elements rigidly fixed to, and rectilinearly moving with, the floats as transmission elements
    • G01F23/62—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by floats using elements rigidly fixed to, and rectilinearly moving with, the floats as transmission elements using magnetically actuated indicating means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
    • G01D11/24—Housings ; Casings for instruments
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/14—Casings, e.g. of special material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/30—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by floats
    • G01F23/32—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by floats using rotatable arms or other pivotable transmission elements
    • G01F23/38—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by floats using rotatable arms or other pivotable transmission elements using magnetically actuated indicating means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/30—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by floats
    • G01F23/56—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by floats using elements rigidly fixed to, and rectilinearly moving with, the floats as transmission elements
    • G01F23/60—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by floats using elements rigidly fixed to, and rectilinearly moving with, the floats as transmission elements using electrically actuated indicating means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/30—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by floats
    • G01F23/64—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by floats of the free float type without mechanical transmission elements
    • G01F23/72—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by floats of the free float type without mechanical transmission elements using magnetically actuated indicating means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/30—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by floats
    • G01F23/64—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by floats of the free float type without mechanical transmission elements
    • G01F23/72—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by floats of the free float type without mechanical transmission elements using magnetically actuated indicating means
    • G01F23/74—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by floats of the free float type without mechanical transmission elements using magnetically actuated indicating means for sensing changes in level only at discrete points

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Measuring Volume Flow (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
CN202380059748.6A 2022-09-01 2023-07-25 传感器 Pending CN119731515A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022-138891 2022-09-01
JP2022138891 2022-09-01
PCT/JP2023/027172 WO2024048134A1 (ja) 2022-09-01 2023-07-25 センサ

Publications (1)

Publication Number Publication Date
CN119731515A true CN119731515A (zh) 2025-03-28

Family

ID=90099143

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202380059748.6A Pending CN119731515A (zh) 2022-09-01 2023-07-25 传感器

Country Status (5)

Country Link
US (1) US20260071905A1 (https=)
JP (1) JPWO2024048134A1 (https=)
KR (1) KR20250056909A (https=)
CN (1) CN119731515A (https=)
WO (1) WO2024048134A1 (https=)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5614922Y2 (https=) * 1977-11-02 1981-04-08
JPH02110830U (https=) * 1989-02-23 1990-09-05
JPH0391927U (https=) * 1989-10-13 1991-09-19
JP4284466B2 (ja) * 2005-01-27 2009-06-24 日本クリンゲージ株式会社 高温液体の液面検知装置
JP5104151B2 (ja) 2007-09-18 2012-12-19 東京エレクトロン株式会社 気化装置、成膜装置、成膜方法及び記憶媒体
JP2021148496A (ja) * 2020-03-17 2021-09-27 東京エレクトロン株式会社 原料供給装置
JP7801998B2 (ja) 2020-06-30 2026-01-19 桑名金属工業株式会社 液位センサ

Also Published As

Publication number Publication date
JPWO2024048134A1 (https=) 2024-03-07
WO2024048134A1 (ja) 2024-03-07
US20260071905A1 (en) 2026-03-12
KR20250056909A (ko) 2025-04-28

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