KR20240051822A - 검사 소켓 및 검사 장치 - Google Patents

검사 소켓 및 검사 장치 Download PDF

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Publication number
KR20240051822A
KR20240051822A KR1020230121533A KR20230121533A KR20240051822A KR 20240051822 A KR20240051822 A KR 20240051822A KR 1020230121533 A KR1020230121533 A KR 1020230121533A KR 20230121533 A KR20230121533 A KR 20230121533A KR 20240051822 A KR20240051822 A KR 20240051822A
Authority
KR
South Korea
Prior art keywords
probe pin
housing
probe
inspection
electrode
Prior art date
Application number
KR1020230121533A
Other languages
English (en)
Korean (ko)
Inventor
나오야 사사노
다카히로 사카이
다이치 오노야마
Original Assignee
오므론 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 오므론 가부시키가이샤 filed Critical 오므론 가부시키가이샤
Publication of KR20240051822A publication Critical patent/KR20240051822A/ko

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0416—Connectors, terminals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0224—Electrodes

Landscapes

  • Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
KR1020230121533A 2022-10-13 2023-09-13 검사 소켓 및 검사 장치 KR20240051822A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2022-164684 2022-10-13
JP2022164684A JP2024057787A (ja) 2022-10-13 2022-10-13 検査ソケットおよび検査装置

Publications (1)

Publication Number Publication Date
KR20240051822A true KR20240051822A (ko) 2024-04-22

Family

ID=88338660

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020230121533A KR20240051822A (ko) 2022-10-13 2023-09-13 검사 소켓 및 검사 장치

Country Status (3)

Country Link
JP (1) JP2024057787A (zh)
KR (1) KR20240051822A (zh)
CN (2) CN219871495U (zh)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008071989A (ja) 2006-09-15 2008-03-27 Shin Etsu Handotai Co Ltd 太陽電池電極用検査装置及び太陽電池電極の検査方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008071989A (ja) 2006-09-15 2008-03-27 Shin Etsu Handotai Co Ltd 太陽電池電極用検査装置及び太陽電池電極の検査方法

Also Published As

Publication number Publication date
CN219871495U (zh) 2023-10-20
CN117890636A (zh) 2024-04-16
JP2024057787A (ja) 2024-04-25

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