KR20240002802A - Body frame and stocker including same - Google Patents

Abstract

The present invention relates to a body frame capable of transporting and loading a container loaded with items such as wafers in a semiconductor device manufacturing process and a stocker including the same, wherein the body frame includes at least two frames that can be separated in the vertical direction It is formed by a combination of structures, and the frame structure has at least one guide block or guide pin on the top of the outermost vertical frame to guide the docking position when docking another frame structure seated on the top. This can be formed.

Description

Body frame and stocker including same}

The present invention relates to a body frame and a stocker including the same, and more specifically, to a body frame and a stocker including the same that can transport and load containers loaded with items such as wafers in a semiconductor device manufacturing process.

To manufacture semiconductor devices, various types of processes such as deposition, photography, and etching processes are performed, and devices that perform each of these processes are placed within a semiconductor manufacturing line. Items such as wafers for performing a semiconductor device manufacturing process may be stored in a container such as a FOUP and provided to each semiconductor processing equipment. Additionally, products on which the process has been performed may be recovered as containers from each semiconductor processing equipment, and the recovered containers may be returned to the outside.

At this time, the container may be transported by a vehicle such as an overhead hoist transport (OHT). The OHT can transfer a container containing an article to a load port of any one of the semiconductor processing devices. Additionally, the OHT can pick up a container containing a processed product from a load port and transport it to the outside or to another one of the semiconductor processing equipment.

These containers can be stored in a stocker during the semiconductor device manufacturing process. The stocker may be provided with a plurality of shelves for loading containers, and a transfer and loading unit including a transfer robot for transferring the containers may be installed inside the stocker. The transfer and loading unit can move the transport robot in the horizontal and vertical directions within the stocker and can transport containers.

In general, the body frame that forms the skeleton of the stalker is formed by stacking a plurality of frame structures. When docking another frame structure on top of one frame structure, there is no reference for seating at the docking area, so the cut surface of the frame There was a problem in that the docking of the frame structure was not in the correct position or a safety accident could occur due to the frame structure breaking away during docking due to the worker adjusting it manually based on . In addition, there was a problem in that it took a lot of time to manually adjust the docking positions.

The present invention is intended to solve several problems including the problems described above, and includes a body frame in which the frame structure can be naturally aligned to the correct docking position during the docking process when docking another frame structure on top of one frame structure; The purpose is to provide a stalker that includes this. However, these tasks are illustrative and do not limit the scope of the present invention.

According to one embodiment of the present invention, a body frame is provided. In the body frame of the stocker, the body frame is formed in a frame structure so that a plurality of shelves for loading containers containing goods can be formed in at least one of the horizontal and vertical directions, The body frame is formed by a combination of at least two frame structures that can be separated in the vertical direction, and the frame structure guides the docking position when docking another frame structure mounted on the top, At least one guide block or guide pin may be formed on the top of the outermost vertical frame.

According to one embodiment of the present invention, the guide block includes: a first block installed on one side of the top of the vertical frame; and a second block installed on the other side of the top of the vertical frame so as to be formed in a direction perpendicular to the first block.

According to one embodiment of the present invention, the first block and the second block are, at least in part, a guide formed to be inclined at a predetermined angle toward the docking position so as to guide the docking position of the other frame structure. A slope may be formed.

According to one embodiment of the present invention, the other frame structure includes the guide block at the bottom of the outermost vertical frame so that the docking position can be guided by the guide block when docked at the top of the frame structure. At least one seating block that can be joined can be formed.

According to one embodiment of the present invention, the seating block is formed to be inclined at the same inclination angle as the guide inclined surface, but is inclined in a direction opposite to the guide inclined surface, so that when the other frame structure is docked on the upper part of the frame structure, A seating inclined surface that can be seated on the guide inclined surface may be formed at least in part.

According to one embodiment of the present invention, the first block and the second block may be formed as two-stage inclined surfaces in which the guide inclined surfaces are inclined at different inclination angles.

According to one embodiment of the present invention, the guide inclined surface is formed so that the upper inclined surface located at the upper part of the two-stage inclined surface is inclined at a first angle with respect to the horizontal direction, and the lower inclined surface located below the upper inclined surface is formed at the It may be formed to be inclined at a second angle greater than the first angle based on the horizontal direction.

According to one embodiment of the present invention, the guide pin may be inserted into a through hole formed in the center of the vertical frame.

According to one embodiment of the present invention, the guide pin has a part inserted into the through-hole part called a tapping screw (Tapping screw) so that the inner diameter surface of the through-hole part can be screwed when inserted into the through-hole part of the vertical frame. It can be formed as a screw).

According to another embodiment of the present invention, a stalker is provided. The stocker includes a body frame formed in a frame structure so that a plurality of shelves for loading containers containing goods can be formed in at least one of the horizontal and vertical directions; a load port formed on one side of the body frame through which the container is loaded or unloaded; and a transfer unit installed in a moving passage inside the body frame to load or unload the container onto any one of the plurality of shelves, wherein the body frame can be separated in the vertical direction. It is formed by a combination of at least two frame structures, and the frame structure has at least one guide at the top of the outermost vertical frame to guide the docking position when docking another frame structure seated on top. Blocks or guide pins may be formed.

According to one embodiment of the present invention made as described above, by installing at least one guide block or guide pin with an inclined surface formed on the top of the frame located at the outermost part of the frame structure, when docking another frame structure on top of the frame structure , the docking position can be naturally guided during the docking process of another frame structure by a guide block or guide pin.

Accordingly, it is possible to ensure that the docking of the frame structure is carried out accurately at the correct position, and the risk of a safety accident occurring due to the frame structure being separated during docking can be reduced, and the docking position of the frame structure during the work process can be ensured. By being naturally aligned in the correct position, it is possible to implement a body frame and a stocker including it that can dramatically reduce work time. Of course, the scope of the present invention is not limited by this effect.

1 is a cross-sectional view schematically showing a transfer system in a semiconductor device manufacturing process in which a stocker including a body frame is installed according to an embodiment of the present invention.
Figures 2 and 3 are cross-sectional views schematically showing the plane and side, respectively, of a stocker according to an embodiment of the present invention.
FIG. 4 is an enlarged perspective view schematically showing an enlarged portion “A” of the body frame included in the stocker of FIG. 3.
FIG. 5 is a cross-sectional view schematically showing an embodiment of the body frame included in the stocker of FIGS. 2 and 3 based on a cross-section taken along the cutting line BB of FIG. 4.
Figures 6 to 8 are cross-sectional views showing step by step the docking process of the frame structure of the body frame of Figure 5.
FIGS. 9 and 10 are cross-sectional views schematically showing another embodiment of the body frame included in the stocker of FIGS. 2 and 3 based on a cross-section taken along the cutting line BB of FIG. 4.
FIG. 11 is a cross-sectional view schematically showing another embodiment of the body frame included in the stocker of FIGS. 2 and 3 based on a cross-section taken along the cutting line BB of FIG. 4.
FIGS. 12 and 13 are cross-sectional views schematically showing another embodiment of the body frame included in the stocker of FIGS. 2 and 3 based on a cross section taken along the cutting line BB of FIG. 4.

Hereinafter, various preferred embodiments of the present invention will be described in detail with reference to the attached drawings.

The embodiments of the present invention are provided to more completely explain the present invention to those skilled in the art, and the following examples may be modified into various other forms, and the scope of the present invention is as follows. It is not limited to examples. Rather, these embodiments are provided to make the present disclosure more faithful and complete and to fully convey the spirit of the present invention to those skilled in the art. Additionally, the thickness and size of each layer in the drawings are exaggerated for convenience and clarity of explanation.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will now be described with reference to drawings that schematically show ideal embodiments of the present invention. In the drawings, variations of the depicted shape may be expected, for example, depending on manufacturing technology and/or tolerances. Accordingly, embodiments of the present invention should not be construed as being limited to the specific shape of the area shown in this specification, but should include, for example, changes in shape resulting from manufacturing.

1 is a cross-sectional view schematically showing a transfer system (S) of a semiconductor device manufacturing process in which a stocker 1000 including a body frame (200 in FIG. 3) is installed according to an embodiment of the present invention, and FIGS. 3 is cross-sectional views schematically showing the plan and side surfaces of the stocker 1000 according to an embodiment of the present invention, respectively. And, FIG. 4 is an enlarged perspective view schematically showing the enlarged portion “A” of the body frame 200 included in the stocker 1000 of FIG. 3, and FIG. 5 is an enlarged view of the stocker of FIGS. 2 and 3 ( 1000) is a cross-sectional view schematically showing an embodiment of the body frame 200 included in the body frame 200 of FIG. 4 based on a cross-section taken along the cutting line B-B of FIG. These are cross-sectional views showing the docking process of the structures 201 and 202 step by step. In addition, FIGS. 9 and 10 are cross-sectional views schematically showing another embodiment of the body frame 200 included in the stocker 1000 of FIGS. 2 and 3 based on a cross-section taken along the cutting line B-B of FIG. 4, FIG. 11 is a cross-sectional view schematically showing another embodiment of the body frame 200 included in the stocker 1000 of FIGS. 2 and 3 based on a cross section taken along the cutting line B-B of FIG. 4, and FIG. 12 and FIG. 13 is a cross-sectional view schematically showing another embodiment of the body frame 200 included in the stocker 1000 of FIGS. 2 and 3 based on a cross section taken along the cutting line B-B of FIG. 4.

As shown in FIG. 1, the transfer system (S) of the semiconductor manufacturing process in which the stocker 1000 having a body frame (200 in FIG. 3) according to an embodiment of the present invention is installed is installed within the semiconductor device manufacturing process. Can be used to transport containers. For example, the transport system S can transport a container (F in FIG. 3) containing an article. Here, the article may be a substrate such as a wafer or a reticle.

More specifically, the container in which the article is stored may be a Front Opening Unified Pod (FOUP). However, the container is not necessarily limited to this, and various types such as POSB, magazine, reticle pod, and tray may be applied depending on the type of the article being stored.

As shown in FIG. 1, the transfer system (S) may largely include a first facility area (A1), a second facility area (A2), a transfer area (A3), and a stocker 1000. .

For example, the first equipment area A1 and the second equipment area A2 may be areas where the semiconductor manufacturing apparatus 1 is installed. Additionally, the transfer area A3 is an area where rails are installed on which a vehicle that holds and transfers the container can run.

More specifically, the first facility area A1 may have a plurality of semiconductor manufacturing devices 1 installed and extend long along the X-axis direction (X). Additionally, the second facility area A2 may have a plurality of semiconductor manufacturing devices 1 installed and extend long along the X-axis direction (X). The plurality of semiconductor manufacturing devices 1 may be, for example, devices capable of performing processes such as photography, etching, ashing, ion implantation, thin film deposition, and cleaning. The first facility area A1 and the second facility area A2 may be formed to be symmetrical to each other with respect to the transfer area A3. However, the first facility area A1 and the second facility area A2 are not necessarily limited to FIG. 1 and may be modified into various forms.

Additionally, the transfer area A3 may be disposed between the first equipment area A1 and the second equipment area A2. In the transfer area A3, at least one transfer rail R3 for moving vehicles may be installed. Additionally, conveyance rails R1 and R2 may be installed in each of the first facility area A1 and the second facility area A2. For example, a first conveyance rail (R1) is installed in the first facility area (A1), a second conveyance rail (R2) is installed in the second facility area (A2), and the first conveyance rail (R1) and the second conveyance rail (R1) are installed in the second facility area (A2). One end and the other end of the transfer rail (R2) may be connected to the transfer rail (R3).

The transport rails R1 and R2 may be placed on top of the semiconductor manufacturing apparatus 1, and the transport rails R1 and R2 and the semiconductor manufacturing apparatus 1 may be placed adjacent to each other. Accordingly, the vehicles traveling on the conveyance rails R1 and R2 deliver containers (F in FIG. 3) to the semiconductor manufacturing device 1 or carry out containers (F in FIG. 3) from the semiconductor manufacturing device 1. can do.

In the above-described transport system (S), the stocker 1000 can load and store containers containing goods. The stocker 1000 may be installed in at least one of the first facility area (A1) and the second facility area (A2), and may also be installed in the transfer area (A3) if necessary.

As shown in FIGS. 2 and 3, the stocker 1000 may largely include a transfer and loading unit 100, a body frame 200, and a load port 300.

For example, the load port 300 is formed on one side of the body frame 200, which will be described later, so that the container F can be loaded or unloaded. The load port 300 provides a space in which a container F accommodating a number of items such as wafers or reticles used in the manufacture of semiconductor devices is seated, and can load or unload the container F. . For example, the load port 300 is for transferring the container F from the outside of the stocker 1000 to the interior space of the stocker 1000, or from the interior space of the stocker 1000 to the outside of the stocker 1000. .

In addition, the transfer unit 100 is installed in the moving passage 220 inside the body frame 200, which will be described later, and can load or unload the container F on any one of the plurality of shelves 210. there is. This transfer and loading unit 100 may largely include a transfer robot 110, a crane unit 120, and a traveling unit 130.

For example, as shown in FIGS. 2 and 3, the transfer robot 110 is installed in the moving passage 220, which is formed as a space in which the transfer robot 110 moves inside the body frame 200, and the container It may include a robot arm 111 that holds and transports (F).

More specifically, the transport robot 110 moves the container (F ) can be transported, and the container (F) can be transported between the load port 300 and any one of the plurality of shelves 210, or from one of the plurality of shelves 210 to another shelf. .

In addition, the robot arm 111 installed on the transfer robot 110 is a multi-joint robot arm, and is used in the horizontal direction (Y-axis direction) and the vertical direction (Z-axis) in the transfer robot 110 to transfer the held container F. direction) and can be provided to enable rotational movement. For example, although not shown, the transfer robot 110 includes a Y-axis driver (not shown) for linearly moving the robot arm 111 in the Y-axis direction, and a Y-axis drive unit (not shown) for linearly moving the robot arm 111 in the Z-axis direction. A Z-axis driving unit (not shown) and a rotation driving unit (not shown) for rotating the robot arm 111 may be provided as driving units for driving the robot arm 111.

As described above, the robot arm 111 of the transfer robot 110 may be configured to move and rotate toward any one of the plurality of shelves 210 or the load port 300 on the transfer robot 110. The fork-shaped arm can be used to transport the container (F) by holding the upper part of the container (F), or by gripping the side of the container (F).

Additionally, the crane unit 120 can raise and lower the transport robot 110 upward or downward, that is, in the vertical direction (Z-axis direction) of the body frame 200.

For example, the crane unit 120 may be configured to include a plurality of raising and lowering rails installed on the traveling unit 130 and extending long in the vertical direction (Z-axis direction). More specifically, any type of rail member that can guide linear movement in the vertical direction (Z-axis direction) of the transport robot 110, such as an LM guide, may be applied to the plurality of raising and lowering rails.

Accordingly, the transfer robot 110 moves upward or downward (in the vertical direction) of the body frame 200 within the moving passage 220 of the body frame 200 along the plurality of raising and lowering rails of the crane unit 120. You can go up and down.

Additionally, the traveling unit 130 may slide the crane unit 120 to the front or rear of the body frame 200, that is, in the X-axis direction among the horizontal directions.

For example, the traveling unit 130 extends the direction of the movement passage 220 on the bottom surface 221 of the movement passage 220, which is formed as a space in which the transfer robot 110 moves inside the body frame 200. It may include a traveling rail 132 formed to extend long in the

More specifically, the traveling rail 132 may be any type of rail member that can linearly move the traveling plate 131 in the X-axis direction, which is the extension direction of the moving passage 220, such as an LM guide. In addition, the traveling plate 131 is a kind of vehicle-like traveling body that can move on the traveling rail 132, supports the crane portion 120 on the upper surface, and travels along the extending direction of the traveling rail 132, thereby forming a linear You can move by sliding.

Accordingly, as the traveling plate 131 travels and slides in the X-axis direction within the moving passage 220 of the body frame 200 along the traveling rail 132, the crane unit 120 installed on the upper surface thereof The provided transport robot 110 can also move forward and backward in the X-axis direction within the moving passage 220 of the body frame 200.

As shown in FIGS. 2 and 3, the body frame 200 has a plurality of shelves 210 for loading containers F containing goods in the horizontal direction (X-axis direction and Y-axis direction) and vertically. A combination of at least two frame structures 201 and 202 that are formed as a frame structure so that they can be formed in at least one direction (Z-axis direction), but can be separated in the vertical direction (Z-axis direction) can be formed.

At this time, the frame structure 201 forming the lower part of the body frame 200 has a vertical frame (located on the outermost side) to guide the docking position when docking the other frame structure 202 mounted on the upper part. 201a) At least one guide block 400 may be formed at the top.

For example, as shown in FIG. 4, the guide block 400 is formed in a direction perpendicular to the first block 410 and the first block 410 installed on one side of the upper end of the vertical frame 201a. It is configured to include a second block 420 installed on the other side of the top of the vertical frame 201a, so that the corner where the lower end of the vertical frame 202a of the other frame structure 202 seated on the upper part is accommodated A wall shape can be formed.

As shown in FIGS. 4 and 5, the first block 410 and the second block 420 guide the docking position of the other frame structure 202 mounted on the upper part of the frame structure 201. To do this, a guide inclined surface SL-1 that is inclined at a predetermined angle toward the docking position may be formed at least in part.

For example, as shown in FIG. 6, when docking another frame structure 202 on top of the frame structure 201, the other frame structure 202 descending toward the frame structure 201 is positioned at the docking position. Even if it descends in a state that is out of the way, as shown in FIG. 7, it is in contact with the guide slope (SL-1) of the guide block 400 and slopes toward the normal position of the docking position along the guide slope (SL-1). By descending, it can finally be easily seated in the docking position, as shown in FIG. 8.

At this time, in order to more effectively guide the anchoring of the other frame structure 202 at the docking position, as shown in FIG. 9, the other frame structure 202 is docked on the upper part of the frame structure 201. , At least one seating block 430 that can be fitted with the guide block 400 may be formed at the bottom of the outermost vertical frame 202a so that the docking position can be guided by the guide block 400. there is.

This seating block 430 is formed to be inclined at the same inclination angle as the guide inclined surface (SL-1) of the guide block 400, but is formed to be inclined in the opposite direction to the guide inclined surface (SL-1), so as to form another frame structure 202 ) When docked to the upper part of the frame structure 201, a seating inclined surface (SL-2) that can be seated on the guide inclined surface (SL-1) may be formed at least in part.

Accordingly, as shown in FIG. 10, when docking another frame structure 202 on top of the frame structure 201, the other frame structure 202 descending toward the frame structure 201 is at the correct docking position. Even if it is lowered out of position, the seating inclined surface (SL-2) is guided by the contact between the guide inclined surface (SL-1) of the guide block 400 and the seating inclined surface (SL-2) of the seating block 430. By guiding the other frame structure 202 toward the docking position along the inclined surface SL-1, ultimately, the other frame structure 202 can be easily seated in the docking position.

In addition, as shown in FIG. 11, the first block 410 and the second block 420 of the guide block 400 are two-stage inclined surfaces in which the guide inclined surfaces SL-1 are formed to be inclined at different inclination angles. It may be formed as

For example, the guide inclined surface SL-1 is such that the upper inclined surface SL-1a located at the top of the two-stage inclined surfaces is inclined at a first angle a1 based on the horizontal direction (X-axis direction or Y-axis direction). is formed, and the lower slope (SL-1b) located below the upper slope (SL-1a) has a second angle (a2) greater than the first angle (a1) relative to the horizontal direction (X-axis direction or Y-axis direction). It can be formed inclinedly.

Accordingly, when viewed from above, the entrance of the guide inclined surface of the guide block 400 is formed to spread further outward, so that when docking another frame structure 202 on top of the frame structure 201, the frame structure 201 ) Even if the other frame structure 202 descending toward deviates somewhat from the docking position, it first contacts the widely inclined upper inclined surface SL-1a, thereby contacting the guide block 400, Finally, it can be easily seated in the docking position by contacting the narrowly inclined lower slope (SL-1b).

In addition, as shown in FIG. 12, the frame structure 201 is located at the top of the outermost vertical frame 201a so as to guide the docking position when docking another frame structure 202 mounted on the top. A guide pin 500 may be formed in .

For example, the vertical frames 201a and 202a are aluminum profiles formed through an extrusion process, and through-hole portions H1 and H2 may be formed in the center. Accordingly, when the guide pin 500 is inserted into the through-hole portion H1 formed in the center of the vertical frame 201a on the frame structure 201 side, the other frame structure 202 descends toward the frame structure 201 and docks. In the process of inserting the upper portion of the upwardly protruding guide pin 500 into the through-hole portion H2 of the other frame structure 202, as shown in FIG. The docking position can be guided to the correct position.

At this time, a guide inclined surface (SL-3) is formed at the upper end of the guide pin 500 for the same purpose as the guide inclined surface (SL-1) of the guide block 400 described above, and is formed at the upper part of the frame structure 201. When docking another frame structure 202, even if the other frame structure 202 descending toward the frame structure 201 is lowered in a state that deviates from the docking position, the upper end of the guide pin 500 can easily be moved to another frame structure 201. It can be guided to be inserted into the through-hole portion (H2) of the frame structure 202.

In addition, in order to firmly fix the guide pin 500, the part inserted into the through hole portion (H1) of the guide pin 500 is formed with a tapping screw, and the guide pin 500 is attached to the vertical frame 201a. When inserting into the through hole portion (H1), the guide pin 500 may be inserted while rotating and the inner diameter surface of the through hole portion (H1) may be threaded to be inserted.

Accordingly, the lower portion of the guide pin 500 is screwed to the through-hole portion H1 of the frame structure 201, so that the guide pin 500 can be firmly fixed.

Therefore, according to the body frame 200 and the stocker 1000 including the same according to various embodiments of the present invention, guide slopes (SL-1, SL-3) are provided at the top of the frame located at the outermost part of the frame structure 201. By installing the formed at least one guide block 400 or guide pin 500, when docking the other frame structure 202 on the upper part of the frame structure 201, the guide block 400 or the guide pin 500 As a result, the docking position can be naturally guided to the correct position during the docking process of another frame structure 202.

Therefore, the docking of the frame structures 201 and 202 can be induced to be performed accurately at the correct position, and the frame structures 201 and 202 may be separated while docking the frame structures 201 and 202, thereby preventing a safety accident from occurring. This can reduce the risk of damage and have the effect of dramatically reducing work time by naturally aligning the docking positions of the frame structures 201 and 202 to their correct positions during the work process.

The present invention has been described with reference to the embodiments shown in the drawings, but these are merely exemplary, and those skilled in the art will understand that various modifications and equivalent other embodiments are possible therefrom. Therefore, the true scope of technical protection of the present invention should be determined by the technical spirit of the attached patent claims.

1: Semiconductor manufacturing equipment
100: Transfer unit
110: Transfer robot
111: Robot arm
120: Crane unit
130: Running unit
131: Running plate
132: Running rail
200: body frame
201, 202: frame structure
201a, 202a: vertical frame
210: Vengeance Lathe
220: moving passage
221: bottom surface
300: load port
400: Guide block
410: first block
420: second block
430: Seating block
500: Guide pin
1000: Stalker
S: conveying system
A1: First facility area
A2: Second facility area
A3: Third facility area
R1: first conveying rail
R2: second transport rail
R3: Transport rail
R1-1: 1-1 guide rail
R1-2: 1-2 guide rail
R2-1: 2-1 guide rail
R2-2: 2-2 guide rail
F: Courage
SL-1: Guide slope
SL-1a: Upper slope
SL-1b: lower slope
SL-2: Seating slope
SL-3: Guide slope
H1, H2: Through hole part

Claims (10)

In the body frame of the stocker, which is formed as a frame structure so that a plurality of shelves for loading containers containing goods can be formed in at least one of the horizontal and vertical directions,
The body frame is,
Formed by a combination of at least two frame structures that can be separated in the vertical direction,
The frame structure is,
A body frame in which at least one guide block or guide pin is formed on the top of the outermost vertical frame to guide the docking position when docking another frame structure seated on the top. According to claim 1,
The guide block is,
A first block installed on one side of the top of the vertical frame; and
a second block installed on the other side of the top of the vertical frame so as to be formed in a direction perpendicular to the first block;
Including, body frame. According to claim 2,
The first block and the second block are,
A body frame wherein at least a portion of the body frame is formed with a guide inclined surface inclined at a predetermined angle toward the docking position so as to guide the docking position of the other frame structure. According to claim 3,
The other frame structures above are,
A body frame in which at least one seating block that can be fitted with the guide block is formed at the bottom of the outermost vertical frame so that the docking position can be guided by the guide block when docked to the upper part of the frame structure. . According to claim 4,
The seating block is,
It is formed to be inclined at the same inclination angle as the guide inclined surface, but is inclined in a direction opposite to the guide inclined surface, so that when the other frame structure is docked on the upper part of the frame structure, at least a portion of the seating inclined surface that can be seated on the guide inclined surface is provided. Formed body frame. According to claim 3,
The first block and the second block are,
A body frame wherein the guide inclined surface is formed as a two-stage inclined surface inclined at different inclination angles. According to claim 6,
The guide slope is,
The upper slope located at the upper part of the two-stage slope is formed to be inclined at a first angle with respect to the horizontal direction, and the lower slope located below the upper slope is formed at a second angle greater than the first angle with respect to the horizontal direction. A body frame formed inclinedly. According to claim 1,
The guide pin is,
A body frame inserted into a through hole formed in the center of the vertical frame. According to claim 8,
The guide pin is,
A body frame wherein a portion inserted into the through-hole portion is formed of a tapping screw so that an inner diameter surface of the through-hole portion can be screwed when inserted into the through-hole portion of the vertical frame. A body frame formed in a frame structure so that a plurality of shelves for loading containers containing goods can be formed in at least one of the horizontal and vertical directions;
a load port formed on one side of the body frame through which the container is loaded or unloaded; and
A transfer unit installed in a moving passage inside the body frame to load or unload the container onto one of the plurality of shelves,
The body frame is,
Formed by a combination of at least two frame structures that can be separated in the vertical direction,
The frame structure is,
A stocker in which at least one guide block or guide pin is formed on the top of the outermost vertical frame to guide the docking position when docking another frame structure mounted on the upper part.

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