KR20230147875A - Transfer unit and stocker having same - Google Patents

Abstract

The present invention relates to a transfer and loading unit capable of transporting and loading a container loaded with items such as wafers in a semiconductor device manufacturing process, and a stocker equipped with the same, which is installed in a body frame forming the skeleton of the stocker, and the container A transfer robot including a robot arm for holding and transporting, a crane unit that raises and lowers the transfer robot upward or downward of the body frame, and a traveling unit that moves the crane unit forward or backward to the front or rear of the body frame; , the running unit may be composed of a plurality of plates stacked up and down to enable multi-stage sliding in a direction toward the front or rear of the body frame.

Description

Transfer unit and stocker having same}

The present invention relates to a transfer unit and a stocker equipped therewith, and more specifically, to a transfer unit capable of transporting and loading containers loaded with items such as wafers in a semiconductor device manufacturing process, and a stocker equipped therewith. .

To manufacture semiconductor devices, various types of processes such as deposition, photography, and etching processes are performed, and devices that perform each of these processes are placed within a semiconductor manufacturing line. Items such as wafers for performing a semiconductor device manufacturing process may be stored in a container such as a FOUP and provided to each semiconductor processing equipment. Additionally, products on which the process has been performed may be recovered as containers from each semiconductor processing equipment, and the recovered containers may be returned to the outside.

At this time, the container may be transported by a vehicle such as an overhead hoist transport (OHT). The OHT can transfer a container containing an article to a load port of any one of the semiconductor processing devices. Additionally, the OHT can pick up a container containing a processed product from a load port and transport it to the outside or to another one of the semiconductor processing equipment.

These containers can be stored in a stocker during the semiconductor device manufacturing process. The stocker may be provided with a plurality of shelves for loading containers, and a transfer and loading unit including a transfer robot for transferring the containers may be installed inside the stocker. The transfer and loading unit can move the transport robot in the horizontal and vertical directions within the stocker and can transport containers.

In general, the driving method in which the transport robot travels in the horizontal direction in the transfer and loading unit is a rolling method in which an LM guide is installed on the bottom of the stocker and driven by a drive motor, and the entire section corresponding to the traveling path on the bottom of the stocker is used. There was a problem with installing the LM guide. Accordingly, when setting up the driving base of the transfer unit in the stocker, the LM guide for all sections corresponding to the driving path needs to be fixed, and it takes a long time to set up the transfer unit due to work setting of the fixed part, etc. There was a problem that maintenance was difficult.

The present invention is intended to solve several problems, including the problems described above, by simplifying the structure of the drive method for driving the transfer robot in the horizontal direction in the transfer and loading unit, making it easy to set up and maintain the driving base of the loading and unloading unit. The purpose is to provide a transfer unit with an improved structure to simplify maintenance and a stocker equipped with the same. However, these tasks are illustrative and do not limit the scope of the present invention.

According to one embodiment of the present invention, a transfer and loading unit is provided. The transfer and loading unit is for transferring and loading the containers onto a plurality of shelves within a stocker provided with a plurality of shelves for loading containers containing goods, and includes a body forming the skeleton of the stocker. A transport robot installed within the frame and including a robot arm that grips and transports the container; a crane unit that lifts and lowers the transport robot upward or downward on the body frame; and a traveling unit that moves the crane unit forward or backward toward the front or rear of the body frame. It can be configured.

According to one embodiment of the present invention, the traveling unit includes a base plate fixedly installed on the bottom surface of a moving passage formed as a space in which the transport robot moves inside the body frame; and a first traveling plate installed on the base plate to enable sliding movement in a direction toward the front or rear of the body frame.

According to one embodiment of the present invention, the base plate includes a fixed plate body formed in a flat plate shape; and at least one support member fixedly supporting the fixed plate body on the bottom surface of the moving passage.

According to one embodiment of the present invention, the first traveling plate includes: a first plate body that is formed in a flat plate shape and is slidably mounted on the fixed plate body; The first plate body is installed below one end of the first plate body so as to apply a driving force to slide the first plate body relative to the fixed plate body, and rolls on the bottom surface of the moving passage by a rotation motor. A first driving roller that does: and is installed between the fixed plate body and the first plate body, which are stacked up and down, so that the first plate body can easily slide on the fixed plate body, and roll motion according to the sliding movement of the first plate body. It may include a first rolling roller that does the following.

According to one embodiment of the present invention, the fixed plate body has a groove (Groove) extending long along the sliding movement direction of the first plate body on its upper surface to guide the rolling movement direction of the first rolling roller. ) is formed in a shape, and may include a 1-1 guide rail groove portion in which at least a portion of the first rolling roller is accommodated.

According to one embodiment of the present invention, the first plate body is interlocked with the 1-1 guide rail groove portion to guide the rolling movement direction of the first rolling roller, and the 1-1 It may include a 1-2 guide rail groove portion that is formed in a groove shape extending long along the extension direction of the guide rail groove portion and accommodates at least another portion of the first rolling roller.

According to one embodiment of the present invention, the traveling unit may further include a second traveling plate installed on the first traveling plate to enable sliding movement in a direction toward the front or rear of the body frame.

According to one embodiment of the present invention, the second traveling plate includes a second plate body that is formed in a flat plate shape and is slidably mounted on the first plate body; The second plate body is installed below one end of the second plate body so that a driving force to slide relative to the first plate body can be applied, and is rolled on the bottom surface of the moving passage by a rotation motor. a second driving roller that moves; and is installed between the first plate body and the second plate body, which are stacked up and down, so that the second plate body can easily slide on the first plate body, according to the sliding movement of the second plate body. It may include a second rolling roller that performs rolling motion.

According to one embodiment of the present invention, the traveling unit may further include an nth traveling plate installed on the n-1th traveling plate to enable sliding movement in a direction toward the front or rear of the body frame. .

According to another embodiment of the present invention, a stalker is provided. The stocker includes a body frame formed in a frame structure so that a plurality of shelves can be formed for loading containers containing goods; a load port formed on one side of the body frame through which the container is loaded or unloaded; and a transfer unit installed in a moving passage inside the body frame to load or unload the container onto one of the plurality of shelves, wherein the transfer unit is installed within the body frame, a transport robot including a robot arm that holds and transports the container; a crane unit that lifts and lowers the transport robot upward or downward on the body frame; and a traveling unit that moves the crane unit forward or backward toward the front or rear of the body frame. You can.

According to an embodiment of the present invention made as described above, the structure of the driving method for moving the transfer robot in the horizontal direction in the transfer and loading unit is different from the method using the conventional LM guide, and the traveling base is multi-stage sliding. By shortening it, the area requiring fixing work on the bottom of the stocker can be minimized. In addition, by simplifying the operation of multi-stage sliding using a motor and rollers, a loading unit with an improved structure and a stocker equipped with the same can be implemented to facilitate setup of the loading unit and simplify maintenance. . Of course, the scope of the present invention is not limited by this effect.

1 is a cross-sectional view schematically showing a transfer system in a semiconductor device manufacturing process in which a stocker including a transfer and loading unit is installed according to an embodiment of the present invention.
Figures 2 and 3 are cross-sectional views schematically showing the side and plane surfaces, respectively, of a stocker according to an embodiment of the present invention.
FIG. 4 is a cross-sectional view schematically showing an embodiment of the traveling portion of the transfer and loading unit provided in the stocker of FIG. 2.
FIGS. 5 and 6 are cross-sectional views schematically showing the side and plane surfaces of the traveling part of FIG. 4 in a multi-stage sliding state, respectively.
Figure 7 is a cross-sectional view schematically showing another embodiment of the traveling part of the transfer and loading unit provided in the stocker of Figure 2.

Hereinafter, various preferred embodiments of the present invention will be described in detail with reference to the attached drawings.

The embodiments of the present invention are provided to more completely explain the present invention to those skilled in the art, and the following examples may be modified into various other forms, and the scope of the present invention is as follows. It is not limited to examples. Rather, these embodiments are provided to make the present disclosure more faithful and complete and to fully convey the spirit of the present invention to those skilled in the art. Additionally, the thickness and size of each layer in the drawings are exaggerated for convenience and clarity of explanation.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will now be described with reference to drawings that schematically show ideal embodiments of the present invention. In the drawings, variations of the depicted shape may be expected, for example, depending on manufacturing technology and/or tolerances. Accordingly, embodiments of the present invention should not be construed as being limited to the specific shape of the area shown in this specification, but should include, for example, changes in shape resulting from manufacturing.

1 is a cross-sectional view schematically showing a transfer system (S) of a semiconductor device manufacturing process in which a stocker 1000 including a transfer and loading unit (100 in FIG. 2) is installed according to an embodiment of the present invention, and FIGS. 3 is a cross-sectional view schematically showing the side and plane surfaces of the stocker 1000 according to an embodiment of the present invention, respectively. And, Figure 4 is a cross-sectional view schematically showing an embodiment of the traveling part 130 of the transfer and loading unit 100 provided in the stocker 1000 of Figure 2, and Figures 5 and 6 are the driving part of Figure 4 ( 130) are cross-sectional views schematically showing the side and plane in a multi-stage sliding state, respectively, and FIG. 7 schematically shows another embodiment of the traveling unit 130 of the transfer unit 100 provided in the stocker 1000 of FIG. 2. It is a cross-sectional view shown as .

As shown in FIG. 1, the transfer system (S) of the semiconductor device manufacturing process in which the stocker 1000 including the transfer and loading unit (100 in FIG. 2) according to an embodiment of the present invention is installed, is used in the semiconductor device manufacturing process. It can be used to transport containers within. For example, the transport system S can transport a container containing an article (F in FIG. 2). Here, the article may be a substrate such as a wafer or a reticle.

More specifically, the container in which the article is stored may be a Front Opening Unified Pod (FOUP). However, the container is not necessarily limited to this, and various types such as POSB, magazine, reticle pod, and tray may be applied depending on the type of the article being stored.

As shown in FIG. 1, the transfer system (S) may largely include a first facility area (A1), a second facility area (A2), a transfer area (A3), and a stocker 1000. .

For example, the first equipment area A1 and the second equipment area A2 may be areas where the semiconductor manufacturing apparatus 1 is installed. Additionally, the transfer area A3 is an area where rails are installed on which a vehicle that holds and transfers the container can run.

More specifically, the first facility area A1 may have a plurality of semiconductor manufacturing devices 1 installed and extend long along the X-axis direction (X). Additionally, the second facility area A2 may have a plurality of semiconductor manufacturing devices 1 installed and extend long along the X-axis direction (X). The plurality of semiconductor manufacturing devices 1 may be, for example, devices capable of performing processes such as photography, etching, ashing, ion implantation, thin film deposition, and cleaning. The first facility area A1 and the second facility area A2 may be formed to be symmetrical to each other with respect to the transfer area A3. However, the first facility area A1 and the second facility area A2 are not necessarily limited to FIG. 1 and may be modified into various forms.

Additionally, the transfer area A3 may be disposed between the first equipment area A1 and the second equipment area A2. In the transfer area A3, at least one transfer rail R3 for moving vehicles may be installed. Additionally, conveyance rails R1 and R2 may be installed in each of the first facility area A1 and the second facility area A2. For example, a first conveyance rail (R1) is installed in the first facility area (A1), a second conveyance rail (R2) is installed in the second facility area (A2), and the first conveyance rail (R1) and the second conveyance rail (R1) are installed in the second facility area (A2). One end and the other end of the transfer rail (R2) may be connected to the transfer rail (R3).

The transport rails R1 and R2 may be placed on top of the semiconductor manufacturing apparatus 1, and the transport rails R1 and R2 and the semiconductor manufacturing apparatus 1 may be placed adjacent to each other. Accordingly, the vehicles traveling on the conveyance rails R1 and R2 deliver containers (F in FIG. 2) to the semiconductor manufacturing device 1 or carry out containers (F in FIG. 2) from the semiconductor manufacturing device 1. can do.

In the above-described transport system (S), the stocker 1000 can load and store containers containing goods. The stocker 1000 may be installed in at least one of the first facility area A1 and the second facility area A2, and may also be installed in the transfer area A3 if necessary.

As shown in FIGS. 2 and 3, the stocker 1000 may largely include a transfer and loading unit 100, a body frame 200, and a load port 300.

For example, the body frame 200 may be formed as a frame structure so that a plurality of shelves 210 can be formed for loading the container F containing the article.

More specifically, the plurality of shelves 210 of the body frame 200 are arranged in the horizontal direction (X-axis direction, Y-axis direction) and the vertical direction (Z-axis direction), as shown in FIGS. 2 and 3. It can be. For example, the plurality of shelves 210 may be arranged in a plurality of rows and columns side by side in the horizontal direction, and a plurality of shelves 210 may be arranged side by side in the vertical direction. In the embodiment of the present invention, the plurality of shelves 210 are arranged in 2 columns, 6 rows, and 5 tiers as an example, but it is not necessarily limited to FIGS. 2 and 3, and rows and rows of very various shapes are used depending on the semiconductor manufacturing process. , can be arranged in columns and columns.

Additionally, the plurality of shelves 210 may have alignment pins (not shown) installed on the bottom of each shelf. Accordingly, when the container F is loaded on each shelf, the alignment pin is inserted into an alignment groove (not shown) of the container F, so that the container F can be accurately loaded on each shelf.

Additionally, the load port 300 is formed on one side of the body frame 200, so that the container F can be loaded or unloaded. The load port 300 provides a space in which a container F accommodating a number of items such as wafers or reticles used in the manufacture of semiconductor devices is seated, and can load or unload the container F. . For example, the load port 300 is for transferring the container F from the outside of the stocker 1000 to the interior space of the stocker 1000, or from the interior space of the stocker 1000 to the outside of the stocker 1000. .

In addition, the transfer unit 100 is installed in the moving passage 220 inside the body frame 200 and can load or unload the container F on any one of the plurality of shelves 210. This transfer and loading unit 100 may largely include a transfer robot 110, a crane unit 120, and a traveling unit 130.

For example, as shown in FIGS. 2 and 3, the transfer robot 110 is installed in the moving passage 220, which is formed as a space in which the transfer robot 110 moves inside the body frame 200, and the container It may include a robot arm 111 that grips and transports (F).

More specifically, the transfer robot 110 is moved in each direction of the The container (F) can be transported, and the container (F) can be transported between the load port 300 and any one of the plurality of shelves 210 or from one of the plurality of shelves 210 to another shelf. It may be possible.

In addition, the robot arm 111 installed on the transfer robot 110 is a multi-joint robot arm, and moves in the Y-axis direction (Y) and Z-axis direction (Z) in the transfer robot 110 to transfer the held container (F). It can be provided to enable movement and rotation. For example, although not shown, the transfer robot 110 includes a Y-axis drive unit (not shown) for linearly moving the robot arm 111 in the Y-axis direction (Y), and a Y-axis drive unit (not shown) for linearly moving the robot arm 111 in the Z-axis direction (Z). ) may be provided as a driving unit for driving the robot arm 111, including a Z-axis driving unit (not shown) for linear movement and a rotational driving unit (not shown) for rotating the robot arm 111.

As described above, the robot arm 111 of the transfer robot 110 may be configured to move and rotate toward any one of the plurality of shelves 210 or the load port 300 on the transfer robot 110. The fork-shaped arm can be used to transport the container (F) by holding the upper part of the container (F), or by gripping the side of the container (F).

Additionally, the crane unit 120 can raise and lower the transport robot 110 upward or downward on the body frame 200, that is, in the Z-axis direction (Z).

For example, the crane unit 120 may be configured to include a plurality of raising and lowering rails installed on the traveling unit 130, which will be described later, and extending long in the Z-axis direction (Z). More specifically, any type of rail member that can guide the linear movement of the transport robot 110 in the Z-axis direction (Z), such as an LM guide, may be applied to the plurality of raising and lowering rails.

Accordingly, the transfer robot 110 moves upward or downward (Z-axis direction) of the body frame 200 within the moving passage 220 of the body frame 200 along the plurality of raising and lowering rails of the crane unit 120. You can go up and down.

Additionally, the traveling unit 130 may move the crane unit 120 forward or backward toward the front or rear of the body frame 200, that is, in the X-axis direction (X).

For example, the traveling unit 130 moves the crane unit 120, on which the transfer robot 110 is installed, to raise and lower the transfer robot 110 forward and backward in the X-axis direction (X), thereby moving the transfer robot 110. A traveling structure for moving the body frame 200 to the front or rear (X-axis direction) within the moving passage 220 of the body frame 200, and moves to the front or rear (X-axis direction) of the body frame 200. It may be composed of a plurality of plates stacked to enable multi-level sliding in the facing direction.

More specifically, as shown in FIG. 4, the traveling unit 130 is located on the bottom surface 221 of the moving passage 220, which is formed as a space in which the transport robot 110 moves inside the body frame 200. A base plate 131 fixedly installed on the base plate 131, and a first traveling plate 132 installed on the base plate 131 to enable sliding movement in a direction (X direction) toward the front or rear of the body frame 200. And it may include a second traveling plate 133 installed on the first traveling plate 132 to enable sliding movement in a direction (X direction) toward the front or rear of the body frame 200.

For example, the base plate 131 includes a fixed plate body 131a formed in a flat plate shape and at least one support member that fixedly supports the fixed plate body 131a on the bottom surface 221 of the moving passage 220. (131b) may be included.

In addition, the first traveling plate 132 includes a first plate body 132a that is formed in a flat plate shape and is slidably mounted on a fixed plate body 131a, and the first plate body 132a is a fixed plate. It is installed below one end of the first plate body 132a so as to apply a driving force for sliding movement based on the body 131a, and causes rolling movement on the bottom surface 221 of the moving passage 220 by a rotation motor. The fixed plate body 131a and the first plate body 132a are stacked up and down so that the first driving roller 132b and the first plate body 132a can easily slide on the fixed plate body 131a. It may include a first rolling roller 132c that is installed between them and performs a rolling motion according to the sliding movement of the first plate body 132a.

In addition, the second traveling plate 133 includes a second plate body 133a that is formed in a flat plate shape and is slidably mounted on the first plate body 132a; It is installed below one end of the second plate body 133a so as to apply a driving force for sliding movement based on the first plate body 132a, and is moved by a rotation motor to the bottom surface 221 of the moving passage 220. The first plate body (132a) and the second plate body (132a) are stacked up and down so that the second driving roller (133b) and the second plate body (133a), which roll on top, can easily slide on the first plate body (132a). It may include a second rolling roller 133c that is installed between the plate bodies 133a and performs a rolling motion according to the sliding movement of the second plate body 133a.

According to the configuration of the traveling unit 130 as described above, as shown in FIGS. 5 and 6, only the base plate 131 is fixedly installed on the bottom surface 221 of the moving passage 220, and the first The traveling plate 132 can slide in the X-axis direction (X) based on the base plate 131, and the second traveling plate 133 can slide in the X-axis direction ( By being able to slide in X), the base plate 131, the first traveling plate 132, and the second traveling plate 133 extend in the Alternatively, it can be formed into a structure capable of shrinking and multi-stage sliding.

At this time, in order to stably guide the multi-stage sliding direction of the first traveling plate 132 and the second traveling plate 133, the fixed plate body on which the first rolling roller 132c of the first traveling plate 132 is seated On the upper surface of (131a) and the upper surface of the first plate body 132a where the second rolling roller 133c of the second traveling plate 133 is seated, a first rolling roller 132c and a second rolling roller 133c are formed, respectively. ) A guide rail groove may be formed to serve as a rail that guides the direction of rolling motion.

For example, as shown in FIGS. 5 and 6, the fixed plate body 131a is configured to slide the first plate body 132a on its upper surface so as to guide the direction of rolling movement of the first rolling roller 132c. It is formed in the shape of a groove extending long along the moving direction and includes a 1-1 guide rail groove portion (R1-1) in which at least a portion of the first rolling roller 132c is accommodated, and a first plate body ( 132a) is formed in the shape of a groove extending long along the sliding movement direction of the second plate body 133a on its upper surface so as to guide the rolling movement direction of the second rolling roller 133c, so as to guide the rolling movement direction of the second rolling roller 133c. It may include a 2-1 guide rail groove portion (R2-1) in which at least a portion of (133c) is accommodated.

Accordingly, when the first traveling plate 132 and the second traveling plate 133 are multi-stage sliding, the first rolling roller 132c of the first traveling plate 132 moves into the 1-1 guide rail groove (R1-1). ), the rolling movement direction is guided in the sliding movement direction of the first plate body (132a), and the second rolling roller (133c) of the second traveling plate (133) is guided by the 2-1 guide rail groove (R2-1) By guiding the direction of rolling movement in the sliding direction of the second plate body 133a, multi-stage sliding of the first traveling plate 132 and the second traveling plate 133 based on the base plate 131 is stable. It can be done.

However, the configuration of the guide rail groove is not necessarily limited to Figures 5 and 6, and is based on each rolling roller (132c, 133c) so as to more stably guide the direction of rolling motion of each rolling roller (132c, 133c). It may be composed of a pair facing each other up and down.

For example, as shown in FIG. 7, the first plate body 132a is interlocked with the 1-1 guide rail groove portion R1-1 formed on the upper surface of the fixed plate body 131a to form the first rolling roller 132c. ) is formed in a groove shape extending long along the extension direction of the 1-1 guide rail groove portion (R1-1) on its lower surface so as to guide the direction of rolling motion of the first rolling roller (132c). It includes a 1-2 guide rail groove portion (R1-2) in which a portion is accommodated, and the second plate body (133a) has a 2-1 guide rail groove portion (R2-) formed on the upper surface of the first plate body (132a). 1), and is formed in a groove shape extending long along the direction of extension of the 2-1 guide rail groove portion (R2-1) on its lower surface so as to guide the direction of rolling motion of the second rolling roller (133c). , It may include a 2-2 guide rail groove portion (R2-2) in which at least another part of the second rolling roller 133c is accommodated.

Accordingly, when the first traveling plate 132 and the second traveling plate 133 are multi-stage sliding, the first rolling rollers 132c of the first traveling plate 132 are formed as a pair of 1-1 guides vertically. The rolling motion direction is guided in the sliding movement direction of the first plate body 132a by the rail groove portion R1-1 and the 1-2 guide rail groove portion R1-2, and the second travel plate 133 2 The rolling motion direction is controlled by the 2-1 guide rail groove (R2-1) and the 2-2 guide rail groove (R2-2) in which the rolling rollers (133c) are formed as a pair in the upper and lower directions of the second plate body (133a). ), the multi-stage sliding of the first traveling plate 132 and the second traveling plate 133 based on the base plate 131 can be performed more stably.

In addition, in various embodiments of the above-described traveling unit 130, three plates 131, 132, and 133 are stacked to enable multi-stage sliding, but this is not necessarily limited to this, and the interior of the body frame 200 Of course, it can be configured in a very diverse number depending on the length of the movement passage 220 formed in.

For example, the traveling unit 130 may further include an n-th traveling plate installed on the n-1th traveling plate to enable sliding movement in a direction (X-axis direction) toward the front or rear of the body frame 200. You can. Here, n can be selectively determined by the designer in consideration of the sliding stroke of each multi-stage sliding plate and the length of the moving passage 220 formed inside the body frame 200.

Therefore, according to the transfer and loading unit 100 and the stocker 1000 provided therewith according to various embodiments of the present invention, the transfer robot 110 is driven in the horizontal direction (X-axis direction) in the transfer and loading unit 100. Unlike the conventional method using an LM guide, the structure of the traveling unit 130 is multi-staged with a plurality of plates in a multi-stage sliding method, thereby enabling multi-stage sliding on the bottom surface 221 of the moving passage 220 of the stocker 1000. By fixing only the base plate 131, which serves as the standard, the portion requiring fixing work can be minimized. In addition, by simplifying the multi-stage sliding operation using a rotating motor and driving rollers 132b and 133b, the structure has been improved to facilitate setup of the transfer and loading unit 100 and simplify maintenance. You can have it.

The present invention has been described with reference to the embodiments shown in the drawings, but these are merely exemplary, and those skilled in the art will understand that various modifications and equivalent other embodiments are possible therefrom. Therefore, the true scope of technical protection of the present invention should be determined by the technical spirit of the attached patent claims.

1: Semiconductor manufacturing equipment
100: Transfer unit
110: Transfer robot
111: Robot arm
120: Crane unit
130: Running unit
131: base plate
131a: Fixed plate body
131b: support member
132: first running plate
132a: first plate body
132b: first driving roller
132c: second rolling roller
133: second running plate
133a: second plate body
133b: second driving roller
133c: second rolling roller
200: body frame
210: Vengeance Lathe
220: moving passage
221: bottom surface
300: load port
1000: Stalker
S: conveying system
A1: First facility area
A2: Second facility area
A3: Third facility area
R1: first conveying rail
R2: second transport rail
R3: Transport rail
R1-1: 1-1 guide rail
R1-2: 1-2 guide rail
R2-1: 2-1 guide rail
R2-2: 2-2 guide rail
F: Courage

Claims (10)

In the transfer and loading unit for transferring and loading containers onto a plurality of shelves in a stocker provided with a plurality of shelves for loading containers containing goods,
a transport robot installed within a body frame forming the skeleton of the stocker and including a robot arm for gripping and transporting the container;
a crane unit that lifts and lowers the transport robot upward or downward on the body frame; and
It includes a traveling unit that moves the crane unit forward or backward to the front or rear of the body frame,
The running part,
A transfer and loading unit consisting of a plurality of plates stacked up and down to enable multi-stage sliding in a direction toward the front or rear of the body frame. According to claim 1,
The running part,
a base plate fixedly installed on the bottom surface of a moving passage formed as a space in which the transport robot moves inside the body frame; and
a first travel plate installed on the base plate to enable sliding movement in a direction toward the front or rear of the body frame;
Containing a transfer and loading unit. According to claim 2,
The base plate is,
A fixed plate body formed in a flat plate shape; and
at least one support member fixedly supporting the fixed plate body on the bottom surface of the moving passage;
Containing a transfer and loading unit. According to claim 3,
The first running plate is,
a first plate body formed in a flat plate shape and slidably mounted on the fixed plate body;
The first plate body is installed below one end of the first plate body so as to apply a driving force to slide the first plate body relative to the fixed plate body, and rolls on the bottom surface of the moving passage by a rotation motor. A first driving roller that does: and
The first plate body is installed between the fixed plate body, which is stacked up and down, and the first plate body so that the first plate body can easily slide on the fixed plate body, and causes a rolling movement according to the sliding movement of the first plate body. a first rolling roller;
Containing a transfer and loading unit. According to claim 4,
The fixed plate body is,
In order to guide the direction of rolling movement of the first rolling roller, a groove is formed on the upper surface in the shape of a groove extending long along the sliding direction of the first plate body, so that at least a portion of the first rolling roller A 1-1 guide rail groove portion accommodated;
Containing a transfer and loading unit. According to claim 5,
The first plate body,
It is formed in a groove shape extending long along the extension direction of the 1-1 guide rail groove on its lower surface so as to be interlocked with the 1-1 guide rail groove and guide the rolling movement direction of the first rolling roller. , a 1-2 guide rail groove portion in which at least another portion of the first rolling roller is accommodated;
Containing a transfer and loading unit. According to claim 4,
The running part,
a second traveling plate installed on the first traveling plate to enable sliding movement in a direction toward the front or rear of the body frame;
Further comprising a transfer unit. According to claim 7,
The second running plate is,
a second plate body formed in a flat plate shape and slidably mounted on the first plate body;
The second plate body is installed below one end of the second plate body so that a driving force to slide relative to the first plate body can be applied, and is rolled on the bottom surface of the moving passage by a rotation motor. a second driving roller that moves; and
The second plate body is installed between the first plate body and the second plate body, which are stacked up and down, so that the second plate body can easily slide on the first plate body, and rolls according to the sliding movement of the second plate body. 2nd rolling roller doing movement;
Containing a transfer and loading unit. According to claim 7,
The running part,
an n-th traveling plate installed on the n-1th traveling plate to enable sliding movement in a direction toward the front or rear of the body frame;
Further comprising a transfer unit. A body frame formed as a frame structure so that a plurality of shelves can be formed for loading containers containing goods;
a load port formed on one side of the body frame through which the container is loaded or unloaded; and
A transfer unit installed in a moving passage inside the body frame to load or unload the container onto one of the plurality of shelves,
The transfer unit is,
a transport robot installed within the body frame and including a robot arm that grips and transports the container;
a crane unit that lifts and lowers the transport robot upward or downward on the body frame; and
It includes a traveling unit that moves the crane unit forward or backward to the front or rear of the body frame,
The running part,
A stocker consisting of a plurality of plates stacked to enable multi-stage sliding in a direction toward the front or rear of the body frame.

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