KR20230129012A9 - 마스크 블랭크용 기판, 다층 반사막 부착 기판, 마스크 블랭크, 전사용 마스크의 제조 방법, 및 반도체 디바이스의 제조 방법 - Google Patents

마스크 블랭크용 기판, 다층 반사막 부착 기판, 마스크 블랭크, 전사용 마스크의 제조 방법, 및 반도체 디바이스의 제조 방법

Info

Publication number
KR20230129012A9
KR20230129012A9 KR1020237021490A KR20237021490A KR20230129012A9 KR 20230129012 A9 KR20230129012 A9 KR 20230129012A9 KR 1020237021490 A KR1020237021490 A KR 1020237021490A KR 20237021490 A KR20237021490 A KR 20237021490A KR 20230129012 A9 KR20230129012 A9 KR 20230129012A9
Authority
KR
South Korea
Prior art keywords
substrate
mask blank
mask
manufacturing
semiconductor device
Prior art date
Application number
KR1020237021490A
Other languages
English (en)
Other versions
KR20230129012A (ko
Inventor
히데키 나라하라
다카시 우치다
Original Assignee
호야 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 호야 가부시키가이샤 filed Critical 호야 가부시키가이샤
Publication of KR20230129012A publication Critical patent/KR20230129012A/ko
Publication of KR20230129012A9 publication Critical patent/KR20230129012A9/ko

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/60—Substrates
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3655—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating containing at least one conducting layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/22—Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof
    • G03F1/24—Reflection masks; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Optics & Photonics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR1020237021490A 2021-01-05 2021-12-14 마스크 블랭크용 기판, 다층 반사막 부착 기판, 마스크 블랭크, 전사용 마스크의 제조 방법, 및 반도체 디바이스의 제조 방법 KR20230129012A9 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021000517 2021-01-05
JPJP-P-2021-000517 2021-01-05
PCT/JP2021/046020 WO2022149417A1 (ja) 2021-01-05 2021-12-14 マスクブランク用基板、多層反射膜付基板、マスクブランク、転写用マスクの製造方法、及び半導体デバイスの製造方法

Publications (2)

Publication Number Publication Date
KR20230129012A KR20230129012A (ko) 2023-09-05
KR20230129012A9 true KR20230129012A9 (ko) 2024-03-25

Family

ID=82357261

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020237021490A KR20230129012A9 (ko) 2021-01-05 2021-12-14 마스크 블랭크용 기판, 다층 반사막 부착 기판, 마스크 블랭크, 전사용 마스크의 제조 방법, 및 반도체 디바이스의 제조 방법

Country Status (4)

Country Link
JP (1) JPWO2022149417A1 (ko)
KR (1) KR20230129012A9 (ko)
TW (1) TW202227899A (ko)
WO (1) WO2022149417A1 (ko)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59265Y2 (ja) 1980-06-25 1984-01-06 株式会社今仙電機製作所 方向指示灯用ステ−
KR20130007570A (ko) * 2010-03-16 2013-01-18 아사히 가라스 가부시키가이샤 Ｅｕｖ 리소그래피 광학 부재용 기재, 및 그의 제조 방법
KR101807838B1 (ko) * 2012-03-28 2017-12-12 호야 가부시키가이샤 마스크 블랭크용 기판, 다층 반사막 부착 기판, 투과형 마스크 블랭크, 반사형 마스크 블랭크, 투과형 마스크, 반사형 마스크 및 반도체 장치의 제조 방법
KR102519334B1 (ko) * 2014-12-19 2023-04-07 호야 가부시키가이샤 마스크 블랭크용 기판, 마스크 블랭크 및 이들의 제조 방법, 전사용 마스크의 제조 방법 그리고 반도체 디바이스의 제조 방법
JP6668066B2 (ja) * 2015-12-18 2020-03-18 Hoya株式会社 マスクブランク用基板の製造方法、マスクブランクの製造方法及び露光用マスクの製造方法

Also Published As

Publication number Publication date
KR20230129012A (ko) 2023-09-05
WO2022149417A1 (ja) 2022-07-14
TW202227899A (zh) 2022-07-16
JPWO2022149417A1 (ko) 2022-07-14

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Legal Events

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G170 Re-publication after modification of scope of protection [patent]