KR20220141827A - Methods for handling CVD-reactor and process chamber-cover plates - Google Patents

Abstract

The present invention relates to a CVD-reactor having a housing (1), a susceptor (5) confining a process chamber (23) from below and a susceptor (5) confining said process chamber (23) from above and a cover plate (6) for fixing the housing (1) by means of a lifting element (11) which can be raised from the lowered position to the assembled position. It is liftable to an adjacent position adjacent to the section 21 , wherein the cover plate 6 is fixable to the housing 1 in the fixed section 21 . In order to be able to automatically or semi-automatically fix the cover plate 6 to the housing 1 , a lifting element 11 surrounding the susceptor 5 or supporting it at the edge of the susceptor is provided. is provided. The lifting element 11 may also be formed by a protective tube. The lifting element 11 allows the cover plate 6 to be provided in a position in which the cover plate can be removed via the loading opening 18 .

Description

Methods for handling CVD-reactor and process chamber-cover plates

The present invention relates to a method for handling a cover plate which limits the process chamber of a CVD-reactor from above, in particular for fully or semi-automatic replacement of the cover plate. The invention further relates to a refinement of the CVD-reactor, wherein the cover plate can be raised from a lowered position to an assembly position by a lifting element.

A CVD-reactor is known in advance from the German patent application DE 10 2012 110 125 A1. Wherein the cover plate is a shield plate with gas through openings disposed below a gas outlet plate of a shower head, said shield plate having simultaneous vertical displacement of the susceptor and the cover plate. is provided in an assembly position by means of which the susceptor is vertically displaced by means of a lifting device and supports the shielding plate on its own surface. Fastening means are provided for implementing automated fastening of the cover plate. A similar device is described in the German patent application DE 10 2019 117 479 A1. International patent application WO 2007/060143 A1 also discloses a cover plate fixed under the gas outlet plate by means of fastening elements. Japanese patent application JP 5721132 B2 is also included in the prior art.

It is an object of the present invention to improve a device of a similar kind and a method of a similar kind to be preferred for use.

Said object is solved by the invention set forth in the claims, wherein the dependent claims represent not only preferred developments of the invention set forth in the independent claims, but also independent solutions to the object.

Preferably, and in practice, it is proposed that a body surrounding the susceptor be used as a lifting element, or that a body supporting the susceptor at the edge of the susceptor is used as a lifting element. The body may consist of a single part, or it may consist of several parts. For the body surrounding the susceptor, a closed body or a circumferentially interrupted body can be considered. The lifting element may be, for example, a pipe. The body can be formed from a plurality of partial bodies placed side by side in the circumferential direction, and in this way the body can have a layout corresponding to, for example, a circular ring. In this way the body can have a layout, for example in the form of a circular ring. However, the body may be formed by a plurality of vertically extending rods, columns, etc., which surround the susceptor or heating device and are disposed at different azimuthal positions. In one preferred design of the invention, the lifting element can be formed by a support element supporting the susceptor, as is known, for example, from the German patent application DE 10 2007 027 704 A1. The support element may have the form of an upper edge and a tube. A susceptor is supported on the upper edge in the process position. In this case, the edge of the susceptor rests on the top edge. In order to use such a support element for the purpose of raising the cover plate, a susceptor is previously provided outside the housing of the CVD-reactor through a loading opening. For this purpose, a gate closing the loading opening is opened. To this end, the ring-shaped gas evacuation member surrounding the susceptor must be lowered so that the gas evacuation member does not lie in the travel path of the susceptor moving in its own surface extension plane. The lifting element may be fixed to a carrier device which is displaceable in the vertical direction. The carrier device may be displaceable in a vertical direction. Furthermore, the carrier device can also support a heating device that heats the susceptor from below in the process position. In one variant of the invention, the gas evacuation member can perform the function of a lifting element. In one preferred variant, the assembly of the cover plate is automatic, and in particular fully automatic. In particular, the replacement of the cover plate is made semi-automatically or fully automatically. In one variant of the invention, the cover plate can be fixed to a cover of the housing which closes the housing opening facing upwards. A gas inlet member having the shape of a shower head may be fixed to such a cover. The cover plate may be a protective plate extending parallel to the gas discharge surface of the gas inlet member. The outgassing surface may include a plurality of outgassing openings leading in the direction of the cover plate. A gap may be located between the gas outlet surface and the upper side of the cover plate including the gas through openings, in which the gas discharged from the gas outlet surface may be distributed. The edge of the cover plate may form a sealing bead, which sealingly adjoins a fixing section, for example a retaining ring or the like, in the assembly position of the cover plate. The cover plate can be fixed to the fastening section by fastening means, for example screws, bayonets or the like. The fixing means or a plurality of fixing means may be arranged outside the outer ring region of the cover plate. In order to connect the cover plate with the cover or gas inlet member, fastening means may be provided on the entire surface of the cover plate. The fixing means may be arranged near the center of the cover plate. Such fastening means are preferably designed to permit a slight lateral movement of the plate relative to the gas inlet member without blocking. Different thermal expansions can thereby be compensated for. Upon replacement of the cover plate in the first variant of the invention, the cover plate used in the preceding deposition process, on which the coatings have been formed, is replaced with a cleaned cover plate. To this end, the lifting element may be provided in an elevated position supporting a cover plate fixed to the fixing section. The fixing means for fixing the cover plate to the fixing section are released in such a position where the lifting element abuts the cover plate. The cover plate is provided in a position where it can be gripped by a gripper which engages through the loading opening into the interior space of the housing so that it can be removed from the interior space from the loading opening by lowering of the lifting element. The cleaned cover plate is fixed to the fixing section in the reverse order. In a second variant of the present invention, a cover, which supports the cover plate, and closes the opening of the housing, is raised. Temporary fastening means are used in the raised position to hold the cover plate in the fastening section. The screws or other fastening means securing the cover plate to the fastening section may be released manually or automatically. Subsequently, the cover is lowered to a position where the cover plate is supported by the lifting element. In this position, the temporary fixing means are released. The lowering of the lifting element releases the cover plate from the fixed section and is provided in a position where it can be gripped by the gripper. The cleaned cover plate is placed on the lifting element. The latter lifting element is provided in an elevated position in which the cover plate is adjacent to the fixing section, in which the cover plate is fixed by means of temporary fixing means. The cover may further rise to a position where screws or other fastening means may be assembled. Temporary fixing means are removed. The lid may be provided in a self-closing position. As temporary fixing means C-clamps can be used, by means of which the cover plate is temporarily held in the fixing section, in particular the cover. Transport of the cover plate out of or into the interior space may be effected by a robot arm engageable through a loading opening. In fully automatic assembly, the cover plate is connected to the fixing section by means of automatically actuable fixing means. In semi-automatic assembly, temporary fixing means for temporarily fixing the cover plate to the fixing section are used, for example C-clamps. This preferably takes place in the cover provided in the first opening position, wherein the cover plate is provided over the upper edge of the housing opening by means of a lifting element, so that the edge of the cover plate, on which temporary fastening means can be fastened, is accessible as a result. becomes Then, in semi-automatic assembly, the cover is raised further until it becomes accessible on the wide side of the cover plate facing downwards, whereby fastening means, which can for example be threaded elements, are provided. In fully automatic assembly, these intermediate steps are not necessary. Assembly of the cover plate can take place in a closed lid. After fastening of the fastening means, the lifting element can be lowered. If a support element supporting the susceptor in the process position is used as a lifting element, the susceptor must be removed from the process chamber prior to replacement of the cover plate. This is done after the lowering of the gas evacuation member placed in the travel path of the susceptor to be removed from the process position. After replacement of the cover plate, a susceptor on which the substrates to be coated are mounted may be provided into the process chamber above the lowered gas exhaust member through the loading opening. This is done by a robotic arm that places the susceptor on the support element. Subsequently, the gas exhaust member is raised until the upper edge of the gas exhaust member hits the edge of the cover plate or a section of the housing surrounding the cover plate. The cover plate, which may be made of quartz, steel, in particular stainless steel or ceramic material, has through openings for passing process gas into the gap between the cover plate and the gas inlet member. . The lifting element surrounding the susceptor may consist of steel, in particular stainless steel, quartz or ceramic material. The lifting element may be formed by a tubular body in which a heating device for heating the susceptor is arranged in its cavity. The heating device can be displaced in the vertical direction together with the lifting element. The lifting element may also perform the function of a liner in the process position to shield the space disposed under the susceptor against process gases. The lifting element can thus perform the function of a shield tube.

The invention further relates to an improvement of the cover plate. The cover plate has a ring bead facing the gas inlet member or gas outlet plate near its edge. This ring bead defines a gap between the gas exhaust plate and the cover plate. The ring bead preferably adjoins in a sealing manner to the planar underside of the gas inlet member or to the planar underside of the gas outlet plate formed by the gas inlet member. The outgassing plate may have a beveled edge surface within the area of the bead. The bead extends within the region of this beveled edge face. The bead prevents side venting of the process gas fed into the gap.

Another aspect of the present invention relates to an improvement of the cover of the housing. The gas inlet member is an integral component of the housing cover. To this end, the housing cover forms a ring web which is molded into material conformance to the cover plate of the cover. The ring web has a radially outward facing wall adjacent the inner surface of the wall of the housing with the cover installed. The ring web also has a radially inwardly facing surface to which an outer edge section of the gas inlet member abuts. The gas inlet member is preferably surrounded by and surrounded by a ring web.

Embodiments of the present invention are illustrated in the following by the accompanying drawings.
1 shows that the process chamber 23 is bounded by a susceptor 5 from the bottom and a cover plate 6 from the top, wherein the process chamber 23 is surrounded by a gas outlet member 3 . , showing the CVD-reactor in cross-section in the process position,
Figure 1a shows an enlarged view of section Ia;
2 shows the view according to FIG. 1 in a state in which the gas discharge member 3 is lowered,
3 shows the view according to FIG. 2 with the susceptor 5 removed through the loading opening 18 ,
FIG. 4 shows the view according to FIG. 3 with the lid 2 provided in the first open position, positioned approximately 20 to 30 mm above the edge 24' of the opening 24 of the housing 1 , Temporary fixing means (19) for temporarily fixing the cover plate (6) to the cover (2) are then arranged,
5 shows the view according to FIG. 4 with the lid 2 provided in the second open position,
FIG. 6 shows a view according to FIG. 5 , wherein the threaded elements 20 securing the cover plate 6 to the cover 2 are released, said cover plate 6 only having temporary fastening means ( 19) held on the cover (2) only by
7 shows the view according to FIG. 6 , wherein the cover plate 6 , which is held in the lid 2 only by means of temporary fastening means 19 , is provided in a first open position, with the lifting element 11 . the upper edge of which supports the cover plate (6),
8 shows a view according to FIG. 7 , wherein the temporary fastening means 19 are removed, so that the cover plate 6 is supported only by the lifting element 11 ,
Fig. 9 shows Fig. 8 after the lifting element 11 has been lowered into a position in which the cover plate 6 can be released from the lid 2 and removed through the loading opening 18 by means of a gripper arm. shows a drawing according to
FIG. 10 shows that the interior space 22 also contains no susceptors and the cover plate 6 before the cleaned cover plate fixed to the lid 2 is provided to the interior space 22 in a substantially reverse order. shows the drawing according to FIG. 9 , not including
FIG. 11 shows a view according to FIG. 1a of a second embodiment, in which the gas outlet element 3 performs the function of a lifting element.

1 is a cross-sectional view of a CVD-reactor schematically showing the main components of the CVD-reactor. The CVD-reactor has an airtight housing ( 1 ) comprising an opening ( 24 ) facing upwards. In the process position shown in FIG. 1 , the opening 24 is closed by a lid 2 . The cover 2 supports a gas inlet member 4 in the form of a shower head. The gas inlet member 4 has a gas distribution volume defined at the bottom by a gas outlet plate 21 , the lower side of which forms a gas outlet surface. The gas exhaust plate 21 includes a plurality of gas exhaust openings 17 through which gas can be exhausted from the gas distribution chamber 17 into the gap 15 . The gap 15 extends between the gas outlet plate 21 and a cover plate 6 , which is arranged under the gas inlet member 4 . The edge of the cover plate 6 in the form of a substantially circular disk has a bead 14 supported on the edge section of the gas outlet plate 21, the height of the bead 14 being the gap 15 . define the height of However, to define the gap, further spacer elements, not shown in the figures, may be provided which are arranged on the inside of the surface surrounded by the bead 14 . Thermal deformations can be compensated for by spacer elements of this type. The height of the gap 15 may be further limited by other spacer elements. The cover plate 6 has a plurality of gas through openings 16 , and a process chamber 23 in which gas introduced into the gap 15 through the gas through openings is disposed under the cover plate 6 . can flow in. The cover plate 6 limits the process chamber 23 from above, while the susceptor 5 limits the process chamber 23 from the bottom.

The edge of the cover plate 6 may have a smaller material thickness in the area around which the bead 14 is arranged than in the central area, wherein the material thickness is preferably at the upper side. By reducing, a gap can be given which consequently expands outwardly towards the gas inlet member. The material thickness may decrease on the upper side, resulting in a gap that expands outwardly towards the gas inlet member.

The edge of the susceptor 5 rests on a support element, which in this embodiment may have the form of a tube. Said support element can in particular be formed by a protective tube 11 . The sheath (11) encloses an arrangement with a heating device (7) located below the susceptor (5) and comprising a support plate (12) for supplying an electric current to the heating device (7). The lifting device 10 allows the support element, ie in particular the sheath 11 and the heating device 7 , to rise. In one variant of the present invention, the tube 11 supporting the edge of the susceptor has the function of a support tube. The tube 11 forms the carrier of the susceptor 5 .

The process chamber is surrounded by a ring-shaped gas exhaust member 3 . By means of another lifting device, the gas evacuation member 3 is moved in the process position shown in FIG. 1 in which the gas evacuation member is arranged in front of the loading opening 18 , in the position in which the loading opening 18 is open. descend to In this position, shown in FIG. 2 , the susceptor 5 can be gripped by a gripper that engages through the loading opening 18 into the interior space 22 of the housing, to be replaced with another susceptor 5 . , can be removed from the housing 1 through the loading opening 18 , as shown in FIG. 3 . The element indicated by reference numeral 9 forms a gas discharge pipe, by which the gas collected in the gas discharge member 3 can be conveyed to the outside. However, the element indicated by reference numeral 9 in the drawings may represent another lifting device for lowering and raising the gas discharge member 3 .

Supporting the cover plate 6 , such that the fixing means holding the cover plate on the cover 2 or on the gas inlet member 4 can be automatically released, for example as suggested in the prior art mentioned in the introduction. For this purpose, upon fully automated replacement of the cover plate 6 , the lifting element 11 , which in the present embodiment is formed by a sheath, engages in the edge region of the cover plate 6 from below, moves upward. The cover plate 6 can subsequently be removed from the interior space 22 by lowering of the lifting element 11 by means of a gripper arm engaging into the interior space 22 through the loading opening 18 . A removal position is provided. Fixing the replaced cover plate 6 to the cover 2 or the gas inlet member 4 is performed in the reverse order. The cover plate 6 is arranged on the lifting element 11 . The lifting element 11 rises until the cover plate 6 or bead 14 abuts the gas inlet member 4 or the cover 2 . The fixing means are subsequently provided in the fixing position. Additional centering means can be provided which can provide the cover plate 6 in a centered position. However, the centering means may also be formed by fixing means.

In order to semi-automatically replace the cover plate 6 , the cover 2 is placed in the first opening shown in FIG. 4 , in particular by means of a lifting element 11 , approximately 10 to 30 mm above the opening edge 24 ′. rise to position In this first open position C-shaped clamps 19 are provided on the cover plate 6 fixed to the fixing section 21 of the cover 2 by means of screws 20 (see FIG. 6 ). The lid 2 is subsequently provided in the second open position shown in FIG. 5 . Alternatively to this, the lid 2 may be provided directly in the open position shown in FIG. 5 , in which the temporary fixing means formed by the C-clamps 19 are fixed.

FIG. 6 shows how the above-mentioned screws 20 securing the cover plate 6 permanently to the cover 2 are released in the second open position. The cover 2 is lowered into the first open position with the cover plate 6 held only by clamps 19 . In this embodiment, a protective tube 11 having the function of a lifting element is provided in advance, in an elevated assembly position in which the upper edge of the lifting element 11 supports the cover plate 6 . The clamps 19 are removed, whereby the operating position shown in FIG. 8 is achieved in which the cover plate 6 is supported only by the lifting element 11 . In this position, the lid 2 may be held by other fixing means not shown in the drawings.

The lowering of the lifting element 11 achieves the operating position shown in FIG. 9 in which the cover plate 6 lies in the plane in which the loading opening 18 is located, whereby the cover plate 6 is consequently shown in the figure It can be displaced in its own extending plane by a non-removable gripper arm and removed from the interior space 22 through the loading opening 18 .

The cover plate 6 washed in substantially the reverse order is fixed to the cover 2 . For this purpose, a cover plate 6 is provided, for example, into the interior space 22 of the housing 1 having an operating position according to FIG. 10 . The cover plate 6 rests on the lifting element 11 according to FIG. 9 . The lifting element 11 rises to the first open position shown in FIG. 8 , in which the cover plate 6 adjoins the gas inlet member 4 or the lid 2 . Temporary fastening means 19 shown in FIG. 7 are provided for holding the cover plate 6 to the lid 2 . In this case, the necessary centering may be carried out in some cases. The lid 2 is raised to the second open position shown in FIG. 6 , where screws 20 or other fixing means are provided for permanently fixing the cover plate 6 to the lid 2 . Alternatively to this, the centering of the cover plate 6 can also be achieved by means of permanent fastening means 20 .

The clamps 19 can be removed. However, it is also possible to lower the lid 2 in advance to the position shown in FIG. 4 and remove the clamps 19 in this position. Subsequently the lid 2 is lowered to the closed position shown in FIG. 3 . The lifting element 11 is provided in a lowered position. In this position a new susceptor 5 can be provided via the loading opening 18 into the interior space 22 , where the susceptor is installed on the lifting element 11 .

FIG. 11 shows one variant of the invention in which the edge of the cover plate 6 can be supported by an upper section of a ring-shaped gas discharge element 3 in the view according to FIG. 1a . In this modified example, the gas discharging member 3 may be lowered to the lowered position shown in FIG. 2 . Furthermore, the gas evacuation member 3 may be provided from the process position shown in FIG. 1 to an elevated position not shown in the figure in which the gas evacuation member protrudes above the edge 24', in this way The cover plate 6 is provided in an elevated position.

1 and 1A show a ring web 25 formed by the underside of the cover, which is shaped to conform in material to a cover plate made of metal. Such a ring web 25 has a radially outward facing surface adjacent to the surface of the wall of the housing 1 . When the lid is closed, the ring web 25 projects into the opening 24 .

The ring web 25 surrounds the gas inlet member 4 . The ring web 25 forms a circular receiving chamber in which the gas inlet member 4 fixed and in contact with the lower side of the cover 2 is placed. The outer edge section 26 of the gas inlet member 4 , which is preferably formed in material conformance with the gas outlet plate 21 , has a radius adjacent the radially inwardly facing wall of the ring web 25 . and a wall facing outward in the direction. The height of the ring web 25 preferably corresponds to the height of the gas inlet element 4 , so that the surface of the gas inlet element 4 facing towards the process chamber 23 is axially oriented. It is flush with the surface of the web 25 .

1A shows that the surface of the cover plate 6 facing towards the gas inlet member 4 runs obliquely in the edge region, so that the material thickness of the cover plate 6 is wedge-shaped on the edge side as a result. ) shows that it decreases. Within this region, the bead 14 described above, which is adjacent and abuts against the gas inlet member 4 or the gas outlet plate 21 , extends. In this embodiment, a bead 14 running in a circle abuts the outer edge section 26 . The bead 14 prevents a situation in which the process gas entering the gap 15 through the gas outlet openings 17 is discharged from the gap 15 at the side.

The foregoing embodiments are used to illustrate the inventions fully described by this application, each independently improving upon the prior art by at least the following feature combinations, wherein two, a plurality, or all of them The same feature combinations may be combined with each other:

A CVD-reactor, characterized in that the lifting element (11) is formed by one or a plurality of bodies surrounding the susceptor (5) or supporting it at the edge of the susceptor (5).

Method, characterized in that the lifting element (11) is formed by one or a plurality of bodies surrounding the susceptor (5) or supporting it at the edge of the susceptor (5).

A CVD-reactor or method, characterized in that the lifting element (11) is a support element supporting the susceptor (5) or a gas evacuation element (3) surrounding the susceptor (5).

A CVD-reactor or method, characterized in that the lifting element (11) has a layout in the form of a circular ring, and/or the lifting element (11) has the form of a tube.

The fixing section 21 is formed by a cover 2 sealing the upper opening 24 of the housing 1 , the lifting element 11 being such that at least the upper section of the lifting element 11 has the opening ( 24) CVD-reactor or method, characterized in that it is liftable to a position which projects outwardly above the edge (24') of the CVD-reactor.

The cover plate 6 is fixable, or fixed, to the fixing section 21 by means of temporary and/or permanent fixing means 19 , 20 , and/or the cover plate 6 is a gas inlet member (4) or an encircling ring bead (14) directed towards the gas outlet plate (21), said ring bead sealingly adjacent the gas inlet member (4) or the gas outlet plate (21) and/or the shroud (2) comprises a ring web (25) protruding into the opening (24) and surrounding the gas inlet member (4).

The fixed section 21 is a gas inlet member 4 or surrounds the gas inlet member 4 , wherein the gas inlet member 4 comprises a cover plate 6 and a gas outlet of the gas inlet member 4 . A CVD-reactor or method, characterized in that it comprises a plurality of gas outlet openings (17) leading into the interface gaps (15), wherein the cover plate (6) comprises gas through openings (16).

CVD-reactor or method, characterized in that the gas release member (3) is displaceable from a process position lying within the travel path of the susceptor (5) or cover plate (6) to a lowered position.

A fastening section 21 is assigned to the cover 2 sealing the opening 24 of the housing 1 , and for assembly of the cover plate 6 , the cover 2 is raised on the cover plate 6 . The cover plate 6 , which is provided in the first open position before or upon lifting, and which is supported by the lifting element 11 after the lifting, is secured to the lid 2 by means of first fastening means 19 . is secured and, after raising of the lid 2 to the second open position, during which the cover plate 6 is separated from the lifting element 11 , the lid is secured by means of second fastening means 20 . In order to be fastened to ( 2 ) and/or to remove the cover plate ( 6 ), the cover ( 2 ) is first in a first open position in which the first fastening means ( 19 ) are fixed to the cover ( 2 ). and the second fixing means 20 are released after lifting of the cover 2 to the second open position, and subsequently the cover 2 is provided such that the cover plate 6 is attached to the lifting element ( 11) a CVD-reactor or method, characterized in that it is provided again in said first open position overlying, in which position said first fixing means (19) are removed.

All disclosed features (by themselves, but also in combination with each other) are important to the invention. Accordingly, for the purpose of incorporating features of priority documents together within the claims of this application, the disclosure of this application also includes the disclosure of related/attached priority documents (copy of the preliminary application) in its entirety. In particular for implementing a divisional application on the basis of the dependent claims, the dependent claims characterize independent and progressive improvements of the prior art even by their own features without the features of the cited claim. The invention set forth in each claim may further comprise one or a plurality of features which are given in particular in the preceding description and/or are provided with reference numerals and/or indicated in the referenced list. In particular, the present invention is in a design form in which the individual features recited in the preceding description are not embodied only insofar as the features are clearly unnecessary for the respective purpose of use, or can be replaced by other means of technically equivalent function. are also related to

1 Housing 21 Gas evacuation plate, fixed section
2 cover 22 interior space
3 Outgassing member 23 Process chamber
4 gas inlet member 24 opening
5 Edge of susceptor 24' opening
6 Cover plate 25 Ring web
7 Heating unit 26 Outer edge section
8 shank
9 Lifting device, discharge pipe
10 lifting device
11 Lifting element, sheath
12 support plate
13 carrier
14 bead
15 gap
16 gas through opening
17 gas outlet opening, gas distribution chamber
18 loading opening
19 Fixing clamp, means of fastening
20 screws, fixing means, threaded elements

Claims (11)

A CVD-reactor having a housing (1), comprising:
a susceptor (5) limiting a process chamber (23) from below and a cover plate (6) limiting said process chamber (23) from above, said cover plate (6) is liftable from a lowered position to an adjacent position adjacent to the fixed section (21) by means of a lifting element (11) which is liftable to the assembled position, in the fixed section (21) the cover plate (6) can be fixed to the housing (1),
CVD-reactor, characterized in that the lifting element (11) is formed by one or a plurality of bodies surrounding the susceptor (5) or supporting it at the edge of the susceptor (5). A method for handling a cover plate (6) disposed on top of a susceptor (5), which limits a process chamber (23) of a CVD-reactor, comprising:
Next steps:
1. Placing the cover plate (6) on the lifting element (11) arranged in the housing (1);
2. raising the lifting element (11) supporting the cover plate (6) to an assembly position;
3. fixing the cover plate (6) to the fixing section (21) of the housing (1);
4. lowering the lifting element (11) to the lowered position; and/or
5. raising the lifting element (11) from the lowered position to the assembled position;
6. releasing the cover plate (6) from the fixing section (21) of the housing (1);
7. lowering the lifting element (11) supporting the cover plate (6) to a lowered position;
8. removing the cover plate (6) from the lifting element (11),
The method, characterized in that the lifting element (11) is formed by one or a plurality of bodies surrounding the susceptor (5) or supporting it at the edge of the susceptor (5). 3. The method of claim 1 or 2,
CVD-reactor or method, characterized in that the lifting element (11) is a support element supporting the susceptor (5) or a gas exhaust member (3) surrounding the susceptor (5). 4. The method according to any one of claims 1 to 3,
CVD-reactor or method, characterized in that the lifting element ( 11 ) has a layout in the form of a circular ring, and/or the lifting element ( 11 ) has the form of a pipe . 5. The method according to any one of claims 1 to 4,
The fixing section (21) is formed by a cover (2) sealing the upper opening (24) of the housing (1), the lifting element (11) at least having an upper section of the lifting element (11) CVD-reactor or method, characterized in that it is liftable to a position which projects outwardly above the edge (24') of the opening (24). 6. The method according to any one of claims 1 to 5,
The cover plate 6 is fixable, or fixed, to the fixing section 21 by means of temporary and/or permanent fixing means 19 , 20 , and/or the cover plate 6 is and a surrounding ring bead (14) directed towards an inlet member (4) or a gas outlet plate (21), said ring bead (14) being the gas inlet member (4) or the gas outlet plate (21). sealingly adjacent the gas outlet plate 21 , and/or the cover 2 has a ring web 25 protruding into the opening 24 and surrounding the gas inlet member 4 . A CVD-reactor or method comprising: 7. The method according to any one of claims 1 to 6,
The fixed section 21 is a gas inlet member 4 or surrounds the gas inlet member 4 , wherein the gas inlet member 4 includes the cover plate 6 and the gas of the gas inlet member 4 . A CVD-reactor or method, characterized in that it comprises a plurality of gas outlet openings (17) leading into the gaps (15) between the outlet faces, and the cover plate (6) comprises gas through openings (16). A CVD-reactor having a housing (1), comprising:
a susceptor (5) limiting the process chamber (23) from below, a cover plate (6) limiting the process chamber (23) from above, and a gas exhaust member (4) surrounding the susceptor (5) and the housing 1 comprises a loading opening 18 through which the susceptor 5 or the cover plate 6 is moved in the direction of its own surface extension. It can be provided as the inner space 22 of the housing 1,
CVD-reactor, characterized in that the gas discharge member (3) is displaceable from a process position lying within the movement path of the susceptor (5) or the cover plate (6) to a lowered position. 8. The method according to any one of claims 2 to 7,
The fixing section 21 is assigned to a cover 2 sealing the opening 24 of the housing 1 , for assembly of the cover plate 6 , the cover 2 is connected to the cover plate 6 . ), the cover plate 6 , which is provided in the first open position before or upon lifting, and which is supported by the lifting element 11 after the lifting, is secured to the cover by means of first fastening means 19 . are secured to ( 2 ) and subsequently, after raising of the cover ( 2 ) to the second open position (while the cover plate ( 6 ) is separated from the lifting element ( 11 )), second fastening means ( 20 ) A method, characterized in that it is fixed to the cover (2) by means of 10. The method according to any one of claims 1 to 9,
For the removal of the cover plate 6 , first the cover 2 is provided in a first open position in which first fastening means 19 are fixed to the cover 2 , and in the second open position After lifting of the lid 2 , the second fastening means 20 are released, and subsequently the lid 2 is placed in the first open position in which the cover plate 6 rests on the lifting element 11 . method, characterized in that in this position the first fastening means (19) are removed. A CVD-reactor or method, characterized in that it comprises one or more features of any one of claims 1 to 10.

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