TW202202651A - CVD reactor and method for handling a process chamber cover plate - Google Patents

Abstract

The invention relates to a CVD reactor comprising a housing (1), comprising a susceptor (5) bordering a process chamber (23) from below, and comprising a cover plate (6) bordering the process chamber (23) from above, wherein the cover plate (6) can be raised into a contact position on a securing section (21) of the housing (1) by means of a lifting element (11) that can be raised from a lowered position into a mounting position, wherein the cover plate (6) can be secured to the housing (1) at said securing section (21). In order to be able to automatically or semi-automatically secure the cover plate (6) to the housing (1), a lifting element (11) is provided, which either surrounds the susceptor (5) or supports same on its edge. The lifting element (11) can also be formed by a protective tube. Using the lifting element (11), the cover plate (6) can be brought into a position in which it can be removed via a loading opening (18).

Description

CVD reactor and method of operating a process chamber cover

The present invention relates to a method of operating a cover plate defining a process chamber of a CVD reactor upwards, in particular a method of fully automatic or semi-automatic replacement of the cover plate. The present invention further relates to an improvement of a CVD reactor, wherein the cover plate can be lifted from a lowered position to an installation position by means of a lifting element.

DE 10 2012 110 125 A1 discloses a CVD reactor. The cover plate is a cover plate with ventilation openings arranged below the air outlet plate of the shower head. The cover plate is sent into the installation position through the vertical displacement of the base plate base and the cover plate, wherein the lifting device makes the base plate seat in the installation position. Displaced vertically, and the base plate holder carries the cover plate on its surface. A fixing member is provided, which can realize the automatic fixing of the cover plate. A similar device is described in DE 10 2019 117 479 A1. WO 2007/060143 A1 also discloses a cover plate which is fixed under the air outlet plate by means of holding elements. In addition, JP 5721132 B2 also belongs to the prior art.

The purpose of the present invention is to improve the same type of device and the same type of method which are beneficial to use.

This object is achieved by the invention given in the scope of the patent application, wherein the subsidiary item is not only an advantageous improvement of the invention given in the concurrent claim, but also an independent solution to achieve the object.

First and substantially it is proposed to use the object surrounding the substrate holder as the lifting element, or the object supporting the substrate holder at the edge of the substrate holder as the lifting element. The object may be one-piece or multi-piece. The object surrounding the substrate holder can be a closed object or a circumferentially interrupted object. The lifting element can be, for example, a pipe. The object may be formed by several sub-objects arranged side by side in the circumferential direction, for example, the object may have a contour conforming to a circular ring. Thus, the object may have, for example, a circular profile. However, the object may also be formed by several vertically extending rods, columns or the like arranged in different azimuth positions around the base plate holder or the heating device. In a preferred solution of the present invention, the lifting element can be formed by a carrier element carrying a substrate holder, for example as disclosed in DE 10 2007 027 704 A1. The carrier element may have an upper edge and be tubular. In the process position, the substrate holder is supported on the upper edge. Wherein, the edge of the base plate seat is placed on the upper edge. In order to use this carrier element to lift the cover plate, the substrate holder was previously removed from the housing of the CVD reactor through the loading opening. To do this, open the door closing the loading opening. It can be provided that the annular gas outlet member surrounding the substrate holder is also lowered for this purpose, so that the gas outlet member is not located in the movement path of the substrate holder moving in the plane of surface extension. The lifting element can be fastened to a vertically displaceable carrier device. The carrier device may be vertically displaceable. In addition, the carrier device can also carry a heating device, and the heating device heats the substrate holder from below at the process position. In a variant of the invention, the gas outlet member may perform the function of a lifting element. In a preferred variant, the mounting of the cover plate is carried out automatically, and in particular fully automatically. In particular the following settings: the replacement of the cover is semi-automatic or fully automatic. In a variant of the invention, the cover plate can be fastened to a cover of the housing which closes the opening of the housing facing upwards. A showerhead-shaped gas inlet member can be fixed on the cover. The cover plate may be a protective plate extending parallel to the gas outlet face of the gas inlet member. The air outlet surface may have several air outlet openings leading to the cover plate. There is a gap between the gas outlet surface and the top surface of the cover plate with the vent opening, in which gap the gas exhausted from the gas outlet surface can be distributed. The edges of the cover plate may form sealing projections which, after the cover plate has been installed, closely abut against the fixing section, for example against a fixing ring or the like. The cover plate can be fixed to the fixing section by fixing members such as screws, bayonet and the like. The fixing member or several fixing members can also be arranged outside the annular area outside the cover plate. Fixing members may be provided over the entire surface of the cover plate to connect the cover plate to the lid or gas inlet member. The fixing members can also be arranged adjacent to the center of the cover plate. These securing members are preferably designed to allow slight lateral sliding of the cover plate relative to the gas inlet member without jamming. Thereby, different degrees of thermal expansion can be compensated. In a first variant of the invention, when the cover plate is replaced, the cover plate that has been formed with the coating used in the previous deposition process is replaced with a cleaned cover plate. For this purpose, the lifting element can be brought into a lifting position in which it supports the cover plate which is fastened to the fixing section. In this position in which the lifting element rests on the cover plate, the fixing means for fixing the cover plate on the fixing section are released. The lifting element is lowered to feed the cover plate into a position in which the cover plate can be grasped by means of a gripper extending into the interior space of the housing through the loading opening so that it can be removed from the interior space through the loading opening cover plate. Secure the cleaned cover to the securing section in reverse order. In a second variant of the invention, the lid is lifted, which closes the opening of the housing and carries the cover plate. Temporary securing members are used in the raised position to secure the cover plate to the securing section. The screws or other securing means used to secure the cover to the securing section can be loosened manually or automatically. The cover is then lowered to a position where the cover plate is carried by the lifting element. Release the temporary fixing member in this position. The lifting element is lowered to separate the cover plate from the fixing section and feed the cover plate into a position where the cover plate can be grasped by the gripper. Place the cleaned cover on the lift element. The lifting element is brought into the lifting position in which the cover rests against the fixing section and is fixed there by means of the temporary fixing means. The cover can be raised further to a position where screws or other fixing means can be installed. Remove temporary fixing members. The lid can be fed into the closed position. C-shaped clamps can be used as temporary fixing means, by means of which C-shaped clamps the cover plate is temporarily held on the fixing section, in particular on the cover. The cover plate can be transported out of or into the interior space by means of a robotic arm that can pass through the loading opening. In fully automatic installation, the cover plate and the fixing section are connected by means of automatically operable fixing members. In semi-automatic installation, temporary fixing members such as C-shaped clamps are used to temporarily fix the cover plate to the fixing section. This is preferably carried out after the lid has been brought into the first open position, wherein the lifting element moves the lid over the upper edge of the housing opening, making accessible the edge of the lid to which the temporary securing member can be secured superior. The next step in the semi-automatic installation is to further lift the cover until the broad downward facing surface of the cover plate is accessible in order to install there fixing means, which may for example be threaded elements. A fully automatic installation does not require these intermediate steps. The cover can be installed with the cover closed. After the fixing of the fixing member is completed, the lifting element can be lowered. If the carrier element that carries the substrate holder at the process position is used as a lifting element, the substrate holder must be removed from the process chamber before replacing the cover plate. This is done after lowering the gas outlet member, which is located in the motion path of the substrate holder to be removed at the process position. After the cover plate is replaced, the substrate holder with the substrate to be coated can be fed into the process chamber from the lowered gas outlet member through the loading opening. This is done by a robotic arm, which places the substrate holder on the carrier element. The gas outlet member is then lifted until the upper edge of the gas outlet member touches the edge of the cover plate or the section of the housing that surrounds the cover plate. The cover plate, which may be constructed of quartz, steel (especially stainless steel) or ceramic material, has through openings through which process gas is fed into the gap between the cover plate and the gas inlet member. The lifting element surrounding the base plate holder may consist of steel (especially stainless steel), quartz or ceramic material. The lifting element may be formed from a tubular body, in the cavity of which there is provided heating means for heating the substrate holder. The heating device can be displaced vertically together with the lifting element. The lifting element can also act as a lining at the process position, isolating the space below the substrate holder from the process gas. Therefore, the lifting element can provide the function of the isolation tube.

The present invention further relates to the improvement of the cover plate. The cover plate has an annular projection near its edge oriented towards the gas inlet member or the gas outlet plate. The annular protrusion defines the gap between the air outlet plate and the cover plate. Preferably, the annular protrusion is in close contact with the flat bottom surface of the gas inlet member or the gas outlet plate formed by the gas inlet member. The air outlet plate may have a chamfered edge face in the raised area. The protrusions extend in the region of this chamfered edge face. The protrusions prevent lateral escape of the process gas fed into the gap.

Another aspect of the present invention relates to improvements in the cover of the housing. The gas inlet member is an integral part of the housing cover. For this purpose, the housing cover forms an annular web which is formed homogeneously with the cover plate of the cover. The annular tab has a radially outwardly facing wall which abuts the inner surface of the wall of the housing after the cover is in place. The annular tab further has a radially inward facing surface against which the outer edge section of the gas inlet member abuts. The gas inlet member is preferably surrounded by and embedded in the annular tab.

Figure 1 schematically shows the main components of the CVD reactor in the form of a cross-section of the CVD reactor. The CVD reactor has a gas-tight casing 1 with an opening 24 facing upwards. In the process position shown in FIG. 1 , the opening 24 is closed by the cover 2 . The cover 2 carries a gas inlet member 4 in the form of a shower head. The gas inlet member 4 has a gas distribution volume delimited downwards by a gas outlet plate 21 which forms the gas outlet surface with its bottom surface. The gas outlet plate 21 has a plurality of gas outlet openings 17 through which the gas can be discharged from the gas distribution chamber 17 to the gap 15 . The gap 15 extends between the gas outlet plate 21 and the cover plate 6 arranged below the gas inlet member 4 . The edge of the substantially disc-shaped cover plate 6 has a projection 14 which abuts against the edge section of the gas outlet plate 21 , wherein the height of the projection 14 defines the height of the gap 15 . However, other spacer elements may also be provided to define the gap, which are not shown in the figures, and which are arranged within the surface surrounded by the protrusions 14 . Thermal deformations can be compensated for by means of these equally spaced elements. The height of the gap 15 can also be further defined by other spacer elements. The cover plate 6 has several ventilation openings 16 , through which the gas entering the gap 15 can flow into the process chamber 23 arranged below the cover plate 6 . The cover plate 6 defines the process chamber 23 upward, and the substrate holder 5 defines the process chamber 23 downward.

The material thickness of the edge region of the cover plate 6 provided with the surrounding protrusions 14 may be smaller than the material thickness of the central region, wherein the material thickness is preferably reduced on the upper side so as to form a raised outwardly between the gas inlet member and the gas inlet member. gap. The material thickness can also be reduced on the upper side to form an outwardly raised gap with the gas inlet member.

The edge of the substrate holder 5 rests on a carrier element, which in an embodiment can be tubular. The carrier element can in particular be formed by the protective tube 11 . The protective tube 11 encloses an arrangement with a heating device 7 , which is located below the substrate holder 5 and has a carrier plate 12 for supplying the heating device 7 . The carrying element (ie especially the protection tube 11 ) and the heating device 7 can be lifted by means of the lifting device 10 . In a variant of the invention, the tubes 11 for the edge support of the substrate holder have the function of carrying tubes. The tube 11 forms a carrier for the substrate holder 5 .

The process chamber is surrounded by an annular gas outlet member 3 . By means of another lifting device, the gas outlet member 3 can be lowered from the process position shown in FIG. 1 (where the gas outlet member is arranged in front of the loading opening 18 ) to a position where the loading opening 18 is unobstructed. In this position as shown in FIG. 2 , the gripper extending into the inner space 22 of the housing through the loading opening 18 can grasp the substrate holder 5 so that it can be removed from the housing 1 through the loading opening 18 as shown in FIG. 3 . The substrate holder is taken out and replaced with another substrate holder 5 . The elements denoted by the reference numeral 9 form a gas outlet pipe, by means of which the gas collected in the gas outlet member 3 can be conveyed outwards. However, the elements denoted by the symbol 9 in the figures can also refer to the other lifting device that can be used to lift and lower the gas outlet member 3 .

During the fully automatic replacement of the cover plate 6 , the lifting element 11 , which is formed in the exemplary embodiment by a protective tube, which supports the edge region of the cover plate 6 from below, moves upwards to support the cover plate 6 , so that the cover plate is held on the cover 2 or the cover plate 6 . The fixing members on the gas inlet member 4 can be released automatically, eg as suggested in the aforementioned prior art. Next, the lifting element 11 is lowered to bring the cover plate 6 into the extraction position, where the cover plate can be taken out from the inner space 22 by means of a gripping arm extending into the inner space 22 through the loading opening 18 . The replaced cover plate 6 is fastened to the cover 2 or the gas inlet member 4 in the reverse order. The cover plate 6 is placed on the lifting element 11 . Lift the lifting element 11 until the cover plate 6 or the projection 14 abuts the gas inlet member 4 or the cover 2 . The fixing member is then fed into the fixing position. Additional centering elements can be provided, by means of which the cover plate 6 can be brought into the center position. However, the centering member can also be formed by the fixing member.

When the cover plate 6 is replaced semi-automatically, the cover 2 is lifted to the first open position shown in FIG. 30 mm. In this first open position, the C-clamp 19 is mounted on the cover plate 6 fixed to the fixing section 21 of the cover 2 by means of screws 20 (see Fig. 6). Next, the lid 2 is brought into the second open position shown in FIG. 5 . As an alternative, the lid 2 can also be fed directly into the open position shown in FIG. 5 in order to fix the temporary fixing member formed by the C-shaped clamp 19 there.

FIG. 6 shows how the aforementioned screws 20 for permanently fixing the cover plate 6 to the cover 2 are loosened in the second open position. The lid 2 is lowered to the first open position together with the lid plate 6 held only by the clamp 19 . Before this, the protective tube 11 , which in this embodiment has the function of a lifting element, has been brought into a raised installation position in which the upper edge of the lifting element 11 supports the cover plate 6 . The clamps 19 are removed so that the working position shown in FIG. 8 is reached, in which the cover plate 6 is carried only by the lifting element 11 . In this position, the cover 2 can be held by other holding members not shown in the figures.

The lifting element 11 is lowered to reach the working position shown in FIG. 9, in which the cover plate 6 is located in the plane in which the loading opening 18 is located, so that the cover plate is moved by means of a gripping arm (not shown in the figure) Displacement 6 in the plane of its extension allows the cover to be removed from the interior space 22 through the loading opening 18 .

The cleaned cover plate 6 is secured to the lid 2 in a substantially reverse order. For this purpose, the cover plate 6 is introduced into the interior space 22 of the housing 1 , which has the working position shown, for example, in FIG. 10 . As shown in FIG. 9 , the cover plate 6 is placed on the lifting element 11 . The lifting element 11 is lifted to the first open position shown in FIG. 8 , in which the cover plate 6 abuts against the gas inlet member 4 or the cover 2 . Temporary fixing members 19 as shown in FIG. 7 are installed, which hold the cover plate 6 on the cover 2 . In between, centering that may be required can be performed. Lift the cover 2 to the second opening position shown in FIG. 6 , and install screws 20 or other fixing members on the second opening position to permanently fix the cover plate 6 to the cover 2 . As an alternative, the cover plate 6 can also be centred by means of the permanent fixing means 20 .

The clamp 19 can be removed. However, it is also possible to lower the cover 2 to the position shown in FIG. 4 so that the clamp 19 can be removed at this position. The lid 2 is then lowered to the closed position shown in FIG. 3 . The lifting element 11 is fed into the lowered position. In this lowered position, a new substrate holder 5 can be fed through the loading opening 18 into the interior space 22 , where the substrate holder is placed on the lifting element 11 .

FIG. 11 shows a variant of the invention in the view according to FIG. 1 a in which the edge of the cover plate 6 can be carried by the upper section of the annular gas outlet member 3 . In this variant, the gas outlet member 3 can not only be lowered from the lowered position shown in FIG. 2 . The gas outlet member 3 can also be brought from the process position shown in FIG. 1 into a raised position, not shown in the figures, in which the gas outlet member protrudes beyond the edge 24' in order to remove the cover plate in this way. 6 Feed into the lift position.

FIGS. 1 and 1 a show an annular web 25 formed by the underside of the cover, which is formed homogeneously with the cover plate made of metal. This annular web 25 has a radially outwardly facing surface which bears against the surface of the wall of the housing 1 . The annular tab 25 projects into the opening 24 when the lid is closed.

The annular tab 25 surrounds the gas inlet member 4 . The annular tab 25 forms a circular accommodating chamber, and the gas inlet member 4 contacting and being fixed to the bottom surface of the cover 2 is embedded in the accommodating chamber. The outer edge section 26 of the gas inlet member 4 is preferably formed homogeneously from the gas outlet plate 21 and has a radially outwardly facing wall which bears against the radially inwardly facing wall of the annular web 25 . The height of the annular tab 25 is preferably equal to the height of the gas inlet member 4 so that the surface of the gas inlet member 4 facing the process chamber 23 is flush with the axial face of the annular tab 25 .

As shown in FIG. 1 a , the face of the cover plate 6 facing the gas inlet member 4 extends obliquely in the edge region, so that the material thickness of the cover plate 6 decreases in a wedge-shaped manner at the edge. The projections 14 already described above extend into this area and come into contact with the gas inlet member 4 or the gas outlet plate 21 . In the exemplary embodiment, the projections 14 extending in the shape of a circle bear against the outer edge section 26 . The protrusions 14 can prevent the process gas entering the gap 15 through the gas outlet opening 17 from leaking out from the side of the gap 15 .

The foregoing embodiments are used to illustrate the inventions contained in the present application as a whole, and these inventions independently constitute improvements over the prior art through at least the following feature combinations, wherein two, several or all of these feature combinations are combined. Can also be combined with each other, namely:

A CVD reactor, characterized in that the lifting element 11 is formed by one or several objects surrounding the substrate holder 5 or supporting the substrate holder at the edge of the substrate holder.

A method, characterized in that the lifting element 11 is formed by one or several objects surrounding the substrate holder 5 or supporting the substrate holder at its edge.

A CVD reactor or a method, characterized in that: the lifting element 11 is a carrier element for carrying the substrate holder 5 or a gas outlet member 3 surrounding the substrate holder 5 .

A CVD reactor or a method, characterized in that the lifting element 11 has a circular profile and/or the lifting element 11 is tubular.

A CVD reactor or a method, characterized in that the fixed section 21 is formed by a cover 2 closing the upper opening 24 of the housing 1, and the lifting element 11 can be lifted to a position in which the At least one upper section of the lifting element 11 projects outwards beyond the edge 24 ′ of the opening 24 .

A CVD reactor or a method, characterized in that the cover plate 6 can be fixed or fixed to the fixing section 21 by means of temporary and/or permanent fixing members 19, 20, and/or the The cover plate 6 has a surrounding annular protrusion 14 towards the gas inlet member 4 or the gas outlet plate 21, which annular protrusion rests in close contact with the gas inlet member 4 or the gas outlet plate 21 and/or the cover 2 There is an annular tab 25 extending into the opening 24 and surrounding the gas inlet member 4 .

A CVD reactor or a method, characterized in that: the fixed section 21 is a gas inlet member 4 or surrounds the gas inlet member 4, wherein the gas inlet member 4 has a plurality of gas outlet openings 17, the gas outlet openings and the cover The plate 6 communicates with the gap 15 between the gas outlet surfaces of the gas inlet member 4 , wherein the cover plate 6 has ventilation openings 16 .

A CVD reactor or a method, characterized in that: the gas outlet member 3 can be displaced from a process position on the moving path of the substrate holder 5 or the cover plate 6 to a descending position.

A CVD reactor or a method, characterized in that the fixing section 21 corresponds to the cover 2 closing the opening 24 of the casing 1 and that, in order to install the cover 6, before or when the cover 6 is lifted The cover 2 is brought into the first open position, and after the lifting, the cover plate 6 carried by the lifting element 11 is fixed to the cover 2 by the first fixing member 19 , and next, the cover 2 is lifted After reaching the second open position, during which the cover plate 6 is separated from the lifting element 11, the cover plate is fixed to the cover 2 by means of the second fixing member 20, and/or, in order to remove the cover plate 6, First, the cover 2 is brought into the first opening position, the first fixing member 19 is fixed to the cover 2 in the first opening position, and the second fixing is released after the cover 2 is lifted to the second opening position. member 20 and then return the cover 2 to the first open position in which the cover plate 6 rests on the lifting element 11, wherein the first fixing members are removed in this position 19.

All disclosed features (either as a single feature or as a combination of features) are essential to the invention. Therefore, the disclosure content of this application also includes all the content disclosed in the related/attached priority files (copy of the earlier application), and the features described in these files are also included in the patent scope of this application. The subordinate items describe the features of the improvement scheme of the present invention with respect to the prior art with its features, and its purpose is mainly to file a divisional application on the basis of these claims. The invention given in each claim may further have one or more of the features given in the preceding description, in particular indicated by symbols and/or given in the description of symbols. The invention also relates to designs in which individual features mentioned in the preceding description are not implemented, in particular features which are not necessary for a specific application or which can be replaced by other technically equivalent components.

1: Shell 2: cover 3: Gas outlet components 4: Gas inlet components 5: Substrate base 6: Cover 7: Heating device 8: Rod 9: Lifting device, outlet pipe 10: Lifting device 11: Lifting element, protection tube 12: Carrier board 13: Carrier 14: Raised 15: Gap 16: Ventilation opening 17: Outlet opening, gas distribution chamber 18: Loading openings 19: Holding chamber, fixed member 20: Screws, fixing members, threaded elements 21: Air outlet plate, fixed section 22: Interior Space 23: Process room 24: Opening 24': edge of opening 25: Ring Tab 26: Outer edge section

Embodiments of the present invention will be described below with reference to the accompanying drawings. in: 1 is a cross-sectional view of a CVD reactor in a process position in which a process chamber 23 is bounded downwardly by the substrate holder 5 and upwardly by a cover plate 6, wherein the process chamber 23 is surrounded by a gas outlet member 3, Figure 1a is an enlarged view of part Ia, Figure 2 is a view according to Figure 1, but with the gas outlet member 3 lowered, FIG. 3 is a view according to FIG. 2 , wherein the substrate holder 5 is removed through the loading opening 18 , Fig. 4 is a view according to Fig. 3, wherein the lid 2 is brought into the first open position, in which the lid is located approximately 20 mm to 30 mm above the edge 24' of the opening 24 of the housing 1, Among them, the temporary fixing member 19 is placed to temporarily fasten the cover plate 6 on the cover 2, Fig. 5 is a view according to Fig. 4, wherein the lid 2 is brought into the second open position, FIG. 6 is a view according to FIG. 5 , wherein the screw element 20 for fixing the cover plate 6 to the cover 2 is loosened, the cover plate 6 is only held on the cover 2 by means of the temporary fixing means 19 , FIG. 7 is a view according to FIG. 6 , wherein the cover plate 6 , which is held on the cover 2 only by the temporary fixing member 19 , is brought into the first open position, wherein the upper edge of the lifting element 11 supports the cover plate 6 , FIG. 8 is a view according to FIG. 7 , wherein the temporary fixing member 19 has been removed, so that the cover plate 6 is held only by the lifting element 11 , FIG. 9 is a view according to FIG. 8 after the lifting element 11 has been lowered to the position in which the cover plate 6 has been separated from the cover 2 and can be removed by the gripping arm through the loading opening 18 , FIG. 10 is a view according to FIG. 9 , wherein the inner space 22 contains neither the substrate seat nor the cover before the cleaned cover plate is fed into the inner space 22 and fixed to the cover 2 in a substantially reverse order board 6, Figure 11 is a view of a second embodiment such as Figure 1a, in which the gas outlet member 3 performs the function of a lifting element.

1: Shell

2: cover

3: Gas outlet components

4: Gas inlet components

6: Cover

7: Heating device

8: Rod

9: Lifting device, outlet pipe

10: Lifting device

11: Lifting element, protection tube

12: Carrier board

13: Carrier

18: Loading openings

21: Air outlet plate, fixed section

22: Interior Space

24: Opening

25: Ring Tab

26: Outer edge section

Claims (10)

A CVD reactor comprising a shell (1), a substrate holder (5) defining a process chamber (23) downward, and a cover plate (6) defining the process chamber (23) upward, wherein the cover plate (6) The cover plate (6) can be lifted to the abutment position against the fixing section (21) by means of the lifting element (11) which can be lifted from the lowered position to the installation position. Can be fixed to the housing (1), characterized in that the lifting element (11) is formed by one or several objects surrounding the base plate holder (5) or supporting the base plate holder at the edge of the base plate holder . A method of operating a cover plate (6) that defines a process chamber (23) of a CVD reactor and is arranged over a substrate holder (5), comprising the steps of: 1. Place the cover plate (6) on the lifting element (11) arranged in the housing (1); 2. Lift the lifting element (11) carrying the cover plate (6) to the installation position; 3. Fix the cover plate (6) to the fixing section (21) of the housing (1); 4. Lower the lifting element (11) to the lowering position; and/or 5. Lift the lifting element (11) from the lowered position to the installation position; 6. Separate the cover plate (6) from the fixed section (21) of the housing (1); 7. Lower the lifting element (11) carrying the cover plate (6) to the lowering position; 8. Remove the cover (6) from the lifting element (11), It is characterized in that: the lifting element (11) is formed by one or several objects surrounding the base plate holder (5) or supporting the base plate holder at the edge of the base plate holder. The CVD reactor of claim 1, wherein the lifting element (11) is a carrier element for carrying the substrate holder (5) or a gas outlet member (3) surrounding the substrate holder (5). The CVD reactor of claim 1, wherein the lifting element (11) has a circular profile and/or the lifting element (11) is tubular. CVD reactor as claimed in claim 1, wherein the fixed section (21) is formed by a cover (2) closing the opening (24) on the casing (1), and the lifting element (11) can be lifted to a position in which at least one upper section of the lifting element (11) projects outwards beyond the edge (24') of the opening (24). CVD reactor as claimed in claim 1, wherein the cover plate (6) can be fixed to the fixing section (21) by means of temporary fixing members and/or permanent fixing members (19, 20), and/or the The cover plate (6) has a surrounding annular protrusion (14) facing the gas inlet member (4) or the gas outlet plate (21), the annular protrusion abuts the gas inlet member (4) or the gas outlet in close contact The plate (21) and/or the cover (2) has an annular tab (25) extending into the opening (24), the annular tab surrounding the gas inlet member (4). The CVD reactor of claim 1, wherein the stationary section (21) is a gas inlet member (4) or surrounds the gas inlet member (4), wherein the gas inlet member (4) has a plurality of gas outlet openings (17) ), the gas outlet openings communicate with the gap (15) between the cover plate (6) and the gas outlet surface of the gas inlet member (4), wherein the cover plate (6) has a ventilation opening (16). A CVD reactor comprising a casing (1), a substrate seat (5) defining a process chamber (23) downward, a cover plate (6) defining the process chamber (23) upward, and a substrate seat (5) surrounding the substrate seat (5). Gas outlet member (3), wherein the housing (1) has a loading opening (18), the substrate seat (5) or the cover plate (6) can be provided by means of a surface extending on the substrate seat/the cover plate The movement in the direction is sent into the inner space (22) of the housing (1) through the loading opening, characterized in that the gas outlet member (3) can be self-located in the base plate seat (5) or the cover The process position on the movement path of the plate (6) is displaced to the descending position. A method as claimed in claim 2, wherein the fixing section (21) corresponds to a cover (2) closing the opening (24) of the housing (1), and in order to install the cover plate (6), the cover is lifted The cover (2) is brought into the first open position before or at the time of the plate (6), and after the lifting, the cover plate (6) carried by the lifting element (11) is moved by the first fixing member (19) ) is fixed to the cover (2), and subsequently, after lifting the cover (2) to the second open position, during which the cover plate (6) is separated from the lifting element (11), by means of the first Two fixing members (20) fix the cover plate to the cover (2). The method of claim 2, wherein, in order to remove the cover plate (6), the cover (2) is first brought into a first open position, and the first fixing member (19) is fixed to the first open position in the first open position the lid (2), and after raising the lid (2) to the second open position, release the second securing member (20) and then return the lid (2) to the first open position, where In the open position, the cover plate (6) rests on the lifting element (11), wherein in this position the first fixing members (19) are removed.

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