KR20220122635A - 변위 확대 기구, 액추에이터, 연마 장치, 전자 부품 처리 장치, 디스펜서, 및 에어 밸브 - Google Patents

변위 확대 기구, 액추에이터, 연마 장치, 전자 부품 처리 장치, 디스펜서, 및 에어 밸브 Download PDF

Info

Publication number
KR20220122635A
KR20220122635A KR1020227021191A KR20227021191A KR20220122635A KR 20220122635 A KR20220122635 A KR 20220122635A KR 1020227021191 A KR1020227021191 A KR 1020227021191A KR 20227021191 A KR20227021191 A KR 20227021191A KR 20220122635 A KR20220122635 A KR 20220122635A
Authority
KR
South Korea
Prior art keywords
longitudinal direction
piezoelectric element
displacement
electronic component
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020227021191A
Other languages
English (en)
Korean (ko)
Inventor
제 케아트 체
다케시 야노
아키오 야노
Original Assignee
유겐가이샤 메카노 트랜스포머
가부시끼가이샤 사따께
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 유겐가이샤 메카노 트랜스포머, 가부시끼가이샤 사따께 filed Critical 유겐가이샤 메카노 트랜스포머
Publication of KR20220122635A publication Critical patent/KR20220122635A/ko
Ceased legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04—Constructional details
    • H02N2/043—Mechanical transmission means, e.g. for stroke amplification
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
    • B24B31/003—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor whereby the workpieces are mounted on a holder and are immersed in the abrasive material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K17/00—Safety valves; Equalising valves, e.g. pressure relief valves
    • F16K17/02—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F16K31/007—Piezoelectric stacks
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005—Mechanical details, e.g. housings
    • H02N2/0055—Supports for driving or driven bodies; Means for pressing driving body against driven body
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/025—Inertial sliding motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04—Constructional details
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/12—Constructional details

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Locating Faults (AREA)
  • Radiation Pyrometers (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
KR1020227021191A 2020-01-08 2021-01-07 변위 확대 기구, 액추에이터, 연마 장치, 전자 부품 처리 장치, 디스펜서, 및 에어 밸브 Ceased KR20220122635A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPPCT/JP2020/000358 2020-01-08
PCT/JP2020/000358 WO2021140598A1 (ja) 2020-01-08 2020-01-08 変位拡大機構、アクチュエータ、研磨装置、電子部品処理装置、ディスペンサ、およびエアバルブ
PCT/JP2021/000411 WO2021141095A1 (ja) 2020-01-08 2021-01-07 変位拡大機構、アクチュエータ、研磨装置、電子部品処理装置、ディスペンサ、およびエアバルブ

Publications (1)

Publication Number Publication Date
KR20220122635A true KR20220122635A (ko) 2022-09-02

Family

ID=76788173

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020227021191A Ceased KR20220122635A (ko) 2020-01-08 2021-01-07 변위 확대 기구, 액추에이터, 연마 장치, 전자 부품 처리 장치, 디스펜서, 및 에어 밸브

Country Status (6)

Country Link
US (1) US12580499B2 (https=)
JP (3) JP7001296B2 (https=)
KR (1) KR20220122635A (https=)
CN (1) CN114930707B (https=)
TW (1) TWI891701B (https=)
WO (2) WO2021140598A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021121334A1 (de) * 2021-04-27 2022-10-27 Dürr Systems Ag Piezo-Aktorvorrichtung
JP7741494B2 (ja) * 2021-08-16 2025-09-18 株式会社サタケ 圧電式バルブ
JP7720042B2 (ja) * 2021-10-29 2025-08-07 株式会社サタケ 圧電式バルブ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019009035A1 (ja) 2017-07-07 2019-01-10 有限会社メカノトランスフォーマ 変位拡大機構、研磨装置、アクチュエータ、ディスペンサ、及びエアバルブ

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2864554B2 (ja) * 1989-09-05 1999-03-03 ブラザー工業株式会社 圧電素子の運動変換装置における圧電素子の組付方法
JPH11328890A (ja) * 1998-05-15 1999-11-30 Toshiba Corp ヘッドアクチュエータ機構、およびこれを備えた磁気ディスク装置
JP3103467U (ja) * 2004-02-18 2004-08-12 扇矢工事株式会社 管内面の研摩装置
JP2007154965A (ja) * 2005-12-02 2007-06-21 Shimadzu Corp 変位拡大機構
FR2959437B1 (fr) * 2010-04-30 2012-06-08 Centre Nat Rech Scient Micro-actionneur et micro-pince
CN101913130B (zh) * 2010-08-25 2012-10-10 清华大学 电致动夹持器
JP5727781B2 (ja) 2010-12-27 2015-06-03 有限会社メカノトランスフォーマ 圧電素子の変位拡大機構
FR2975935B1 (fr) * 2011-06-06 2013-07-05 Centre Nat Rech Scient Outil pour pince microtechnique
JP6286645B2 (ja) * 2014-03-18 2018-03-07 アダマンド並木精密宝石株式会社 アクチュエータの駆動方法
US9640512B2 (en) * 2014-07-24 2017-05-02 Asm Technology Singapore Pte Ltd Wire bonding apparatus comprising an oscillator mechanism
JP6358892B2 (ja) * 2014-07-28 2018-07-18 有限会社メカノトランスフォーマ 圧電アクチュエータ
JP6475441B2 (ja) * 2014-09-01 2019-02-27 株式会社フジキン 圧電素子駆動式バルブ及び圧電素子駆動式バルブを備えた流量制御装置
JP2018019529A (ja) * 2016-07-28 2018-02-01 セイコーエプソン株式会社 圧電アクチュエーター、圧電モーター、ロボットおよび電子部品搬送装置
JP6955137B2 (ja) 2016-11-14 2021-10-27 シンフォニアテクノロジー株式会社 圧電式アクチュエータ及び圧電式バルブ
JP6918309B2 (ja) * 2017-03-31 2021-08-11 有限会社メカノトランスフォーマ 駆動装置および圧電アクチュエータ
JP6849217B2 (ja) 2017-06-01 2021-03-24 有限会社メカノトランスフォーマ ディスペンサ
JP2019103193A (ja) * 2017-11-29 2019-06-24 国立大学法人秋田大学 ベルクランク型駆動装置及び動力伝達型駆動装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019009035A1 (ja) 2017-07-07 2019-01-10 有限会社メカノトランスフォーマ 変位拡大機構、研磨装置、アクチュエータ、ディスペンサ、及びエアバルブ

Also Published As

Publication number Publication date
JP7633626B2 (ja) 2025-02-20
TWI891701B (zh) 2025-08-01
JP7001296B2 (ja) 2022-01-19
JP2022009056A (ja) 2022-01-14
JPWO2021140598A1 (https=) 2021-07-15
TW202139494A (zh) 2021-10-16
WO2021140598A1 (ja) 2021-07-15
JP7461058B2 (ja) 2024-04-03
JPWO2021141095A1 (https=) 2021-07-15
WO2021141095A1 (ja) 2021-07-15
CN114930707A (zh) 2022-08-19
US12580499B2 (en) 2026-03-17
US20230043346A1 (en) 2023-02-09
CN114930707B (zh) 2025-08-26

Similar Documents

Publication Publication Date Title
US11985900B2 (en) Displacement magnifying mechanism, polishing device, actuator, dispenser, and air valve
KR20220122635A (ko) 변위 확대 기구, 액추에이터, 연마 장치, 전자 부품 처리 장치, 디스펜서, 및 에어 밸브
US10794378B2 (en) Fluid control device, decompression device, and compression device
KR20190076938A (ko) 압전 액추에이터
KR20170091003A (ko) 소형 유체 제어 장치
KR20190039489A (ko) 소형 공압 장치
JP4758098B2 (ja) 単体圧電モータ
JP7058046B2 (ja) ディスペンサ
KR20170091002A (ko) 압전 액추에이터
KR20170091021A (ko) 소형 유체 제어 장치
KR102910254B1 (ko) 밸브 장치
CN112752617B (zh) 液体涂敷装置
JP2022166778A (ja) 圧電式バルブ
US20260001328A1 (en) Inkjet device

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

D13-X000 Search requested

St.27 status event code: A-1-2-D10-D13-srh-X000

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

R18 Changes to party contact information recorded

Free format text: ST27 STATUS EVENT CODE: A-3-3-R10-R18-OTH-X000 (AS PROVIDED BY THE NATIONAL OFFICE)

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

B15 Application refused following examination

Free format text: ST27 STATUS EVENT CODE: N-2-6-B10-B15-EXM-PE0601 (AS PROVIDED BY THE NATIONAL OFFICE)

PE0601 Decision on rejection of patent

St.27 status event code: N-2-6-B10-B15-exm-PE0601

T11 Administrative time limit extension requested

Free format text: ST27 STATUS EVENT CODE: U-3-3-T10-T11-OTH-X000 (AS PROVIDED BY THE NATIONAL OFFICE)

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T13 Administrative time limit extension granted

Free format text: ST27 STATUS EVENT CODE: U-3-3-T10-T13-OTH-X000 (AS PROVIDED BY THE NATIONAL OFFICE)

T13-X000 Administrative time limit extension granted

St.27 status event code: U-3-3-T10-T13-oth-X000

P11 Amendment of application requested

Free format text: ST27 STATUS EVENT CODE: A-2-2-P10-P11-NAP-X000 (AS PROVIDED BY THE NATIONAL OFFICE)

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000