JP7001296B2 - 変位拡大機構、アクチュエータ、研磨装置、電子部品処理装置、ディスペンサ、およびエアバルブ - Google Patents

変位拡大機構、アクチュエータ、研磨装置、電子部品処理装置、ディスペンサ、およびエアバルブ Download PDF

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Publication number
JP7001296B2
JP7001296B2 JP2020550197A JP2020550197A JP7001296B2 JP 7001296 B2 JP7001296 B2 JP 7001296B2 JP 2020550197 A JP2020550197 A JP 2020550197A JP 2020550197 A JP2020550197 A JP 2020550197A JP 7001296 B2 JP7001296 B2 JP 7001296B2
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Japan
Prior art keywords
piezoelectric element
longitudinal direction
support member
displacement
electronic component
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JP2020550197A
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English (en)
Japanese (ja)
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JPWO2021140598A1 (https=
Inventor
世傑 徐
健 矢野
昭雄 矢野
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Mechano Transformer Corp
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Mechano Transformer Corp
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Publication of JPWO2021140598A1 publication Critical patent/JPWO2021140598A1/ja
Priority to JP2021167612A priority Critical patent/JP7461058B2/ja
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04—Constructional details
    • H02N2/043—Mechanical transmission means, e.g. for stroke amplification
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
    • B24B31/003—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor whereby the workpieces are mounted on a holder and are immersed in the abrasive material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K17/00—Safety valves; Equalising valves, e.g. pressure relief valves
    • F16K17/02—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F16K31/007—Piezoelectric stacks
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005—Mechanical details, e.g. housings
    • H02N2/0055—Supports for driving or driven bodies; Means for pressing driving body against driven body
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/025—Inertial sliding motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04—Constructional details
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/12—Constructional details

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Locating Faults (AREA)
  • Radiation Pyrometers (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
JP2020550197A 2020-01-08 2020-01-08 変位拡大機構、アクチュエータ、研磨装置、電子部品処理装置、ディスペンサ、およびエアバルブ Active JP7001296B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2021167612A JP7461058B2 (ja) 2020-01-08 2021-10-12 変位拡大機構、研磨装置、アクチュエータ、ディスペンサ、およびエアバルブ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/000358 WO2021140598A1 (ja) 2020-01-08 2020-01-08 変位拡大機構、アクチュエータ、研磨装置、電子部品処理装置、ディスペンサ、およびエアバルブ

Related Child Applications (1)

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JP2021167612A Division JP7461058B2 (ja) 2020-01-08 2021-10-12 変位拡大機構、研磨装置、アクチュエータ、ディスペンサ、およびエアバルブ

Publications (2)

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JPWO2021140598A1 JPWO2021140598A1 (https=) 2021-07-15
JP7001296B2 true JP7001296B2 (ja) 2022-01-19

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JP2020550197A Active JP7001296B2 (ja) 2020-01-08 2020-01-08 変位拡大機構、アクチュエータ、研磨装置、電子部品処理装置、ディスペンサ、およびエアバルブ
JP2021570093A Active JP7633626B2 (ja) 2020-01-08 2021-01-07 変位拡大機構、研磨装置、アクチュエータ、ディスペンサ、およびエアバルブ
JP2021167612A Active JP7461058B2 (ja) 2020-01-08 2021-10-12 変位拡大機構、研磨装置、アクチュエータ、ディスペンサ、およびエアバルブ

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JP2021570093A Active JP7633626B2 (ja) 2020-01-08 2021-01-07 変位拡大機構、研磨装置、アクチュエータ、ディスペンサ、およびエアバルブ
JP2021167612A Active JP7461058B2 (ja) 2020-01-08 2021-10-12 変位拡大機構、研磨装置、アクチュエータ、ディスペンサ、およびエアバルブ

Country Status (6)

Country Link
US (1) US12580499B2 (https=)
JP (3) JP7001296B2 (https=)
KR (1) KR20220122635A (https=)
CN (1) CN114930707B (https=)
TW (1) TWI891701B (https=)
WO (2) WO2021140598A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021121334A1 (de) * 2021-04-27 2022-10-27 Dürr Systems Ag Piezo-Aktorvorrichtung
JP7741494B2 (ja) * 2021-08-16 2025-09-18 株式会社サタケ 圧電式バルブ
JP7720042B2 (ja) * 2021-10-29 2025-08-07 株式会社サタケ 圧電式バルブ

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007154965A (ja) 2005-12-02 2007-06-21 Shimadzu Corp 変位拡大機構
JP2015177720A (ja) 2014-03-18 2015-10-05 並木精密宝石株式会社 アクチュエータの駆動方法
JP2016034225A (ja) 2014-07-28 2016-03-10 有限会社メカノトランスフォーマ 圧電アクチュエータ
WO2019009035A1 (ja) 2017-07-07 2019-01-10 有限会社メカノトランスフォーマ 変位拡大機構、研磨装置、アクチュエータ、ディスペンサ、及びエアバルブ

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2864554B2 (ja) * 1989-09-05 1999-03-03 ブラザー工業株式会社 圧電素子の運動変換装置における圧電素子の組付方法
JPH11328890A (ja) * 1998-05-15 1999-11-30 Toshiba Corp ヘッドアクチュエータ機構、およびこれを備えた磁気ディスク装置
JP3103467U (ja) * 2004-02-18 2004-08-12 扇矢工事株式会社 管内面の研摩装置
FR2959437B1 (fr) * 2010-04-30 2012-06-08 Centre Nat Rech Scient Micro-actionneur et micro-pince
CN101913130B (zh) * 2010-08-25 2012-10-10 清华大学 电致动夹持器
JP5727781B2 (ja) 2010-12-27 2015-06-03 有限会社メカノトランスフォーマ 圧電素子の変位拡大機構
FR2975935B1 (fr) * 2011-06-06 2013-07-05 Centre Nat Rech Scient Outil pour pince microtechnique
US9640512B2 (en) * 2014-07-24 2017-05-02 Asm Technology Singapore Pte Ltd Wire bonding apparatus comprising an oscillator mechanism
JP6475441B2 (ja) * 2014-09-01 2019-02-27 株式会社フジキン 圧電素子駆動式バルブ及び圧電素子駆動式バルブを備えた流量制御装置
JP2018019529A (ja) * 2016-07-28 2018-02-01 セイコーエプソン株式会社 圧電アクチュエーター、圧電モーター、ロボットおよび電子部品搬送装置
JP6955137B2 (ja) 2016-11-14 2021-10-27 シンフォニアテクノロジー株式会社 圧電式アクチュエータ及び圧電式バルブ
JP6918309B2 (ja) * 2017-03-31 2021-08-11 有限会社メカノトランスフォーマ 駆動装置および圧電アクチュエータ
JP6849217B2 (ja) 2017-06-01 2021-03-24 有限会社メカノトランスフォーマ ディスペンサ
JP2019103193A (ja) * 2017-11-29 2019-06-24 国立大学法人秋田大学 ベルクランク型駆動装置及び動力伝達型駆動装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007154965A (ja) 2005-12-02 2007-06-21 Shimadzu Corp 変位拡大機構
JP2015177720A (ja) 2014-03-18 2015-10-05 並木精密宝石株式会社 アクチュエータの駆動方法
JP2016034225A (ja) 2014-07-28 2016-03-10 有限会社メカノトランスフォーマ 圧電アクチュエータ
WO2019009035A1 (ja) 2017-07-07 2019-01-10 有限会社メカノトランスフォーマ 変位拡大機構、研磨装置、アクチュエータ、ディスペンサ、及びエアバルブ

Also Published As

Publication number Publication date
JP7633626B2 (ja) 2025-02-20
TWI891701B (zh) 2025-08-01
KR20220122635A (ko) 2022-09-02
JP2022009056A (ja) 2022-01-14
JPWO2021140598A1 (https=) 2021-07-15
TW202139494A (zh) 2021-10-16
WO2021140598A1 (ja) 2021-07-15
JP7461058B2 (ja) 2024-04-03
JPWO2021141095A1 (https=) 2021-07-15
WO2021141095A1 (ja) 2021-07-15
CN114930707A (zh) 2022-08-19
US12580499B2 (en) 2026-03-17
US20230043346A1 (en) 2023-02-09
CN114930707B (zh) 2025-08-26

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