TWI891701B - 位移擴大機構、致動器、研磨裝置、電子零件處理裝置、分配器以及空氣閥 - Google Patents

位移擴大機構、致動器、研磨裝置、電子零件處理裝置、分配器以及空氣閥

Info

Publication number
TWI891701B
TWI891701B TW110100376A TW110100376A TWI891701B TW I891701 B TWI891701 B TW I891701B TW 110100376 A TW110100376 A TW 110100376A TW 110100376 A TW110100376 A TW 110100376A TW I891701 B TWI891701 B TW I891701B
Authority
TW
Taiwan
Prior art keywords
piezoelectric element
longitudinal direction
displacement
base
support member
Prior art date
Application number
TW110100376A
Other languages
English (en)
Chinese (zh)
Other versions
TW202139494A (zh
Inventor
世傑 徐
矢野健
矢野昭雄
Original Assignee
日商佐竹股份有限公司
日商機械變壓器有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商佐竹股份有限公司, 日商機械變壓器有限公司 filed Critical 日商佐竹股份有限公司
Publication of TW202139494A publication Critical patent/TW202139494A/zh
Application granted granted Critical
Publication of TWI891701B publication Critical patent/TWI891701B/zh

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04—Constructional details
    • H02N2/043—Mechanical transmission means, e.g. for stroke amplification
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
    • B24B31/003—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor whereby the workpieces are mounted on a holder and are immersed in the abrasive material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K17/00—Safety valves; Equalising valves, e.g. pressure relief valves
    • F16K17/02—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F16K31/007—Piezoelectric stacks
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005—Mechanical details, e.g. housings
    • H02N2/0055—Supports for driving or driven bodies; Means for pressing driving body against driven body
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/025—Inertial sliding motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04—Constructional details
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/12—Constructional details

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Locating Faults (AREA)
  • Radiation Pyrometers (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
TW110100376A 2020-01-08 2021-01-06 位移擴大機構、致動器、研磨裝置、電子零件處理裝置、分配器以及空氣閥 TWI891701B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/JP2020/000358 WO2021140598A1 (ja) 2020-01-08 2020-01-08 変位拡大機構、アクチュエータ、研磨装置、電子部品処理装置、ディスペンサ、およびエアバルブ
WOPCT/JP2020/000358 2020-01-08

Publications (2)

Publication Number Publication Date
TW202139494A TW202139494A (zh) 2021-10-16
TWI891701B true TWI891701B (zh) 2025-08-01

Family

ID=76788173

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110100376A TWI891701B (zh) 2020-01-08 2021-01-06 位移擴大機構、致動器、研磨裝置、電子零件處理裝置、分配器以及空氣閥

Country Status (6)

Country Link
US (1) US12580499B2 (https=)
JP (3) JP7001296B2 (https=)
KR (1) KR20220122635A (https=)
CN (1) CN114930707B (https=)
TW (1) TWI891701B (https=)
WO (2) WO2021140598A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021121334A1 (de) * 2021-04-27 2022-10-27 Dürr Systems Ag Piezo-Aktorvorrichtung
JP7741494B2 (ja) * 2021-08-16 2025-09-18 株式会社サタケ 圧電式バルブ
JP7720042B2 (ja) * 2021-10-29 2025-08-07 株式会社サタケ 圧電式バルブ

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0416551A2 (en) * 1989-09-05 1991-03-13 Brother Kogyo Kabushiki Kaisha Method of producing a displacement device
JPH11328890A (ja) * 1998-05-15 1999-11-30 Toshiba Corp ヘッドアクチュエータ機構、およびこれを備えた磁気ディスク装置
JP3103467U (ja) * 2004-02-18 2004-08-12 扇矢工事株式会社 管内面の研摩装置
JP2016034225A (ja) * 2014-07-28 2016-03-10 有限会社メカノトランスフォーマ 圧電アクチュエータ
TW201619534A (zh) * 2014-09-01 2016-06-01 Fujikin Kk 壓電元件驅動式閥及具備壓電元件驅動式閥的流量控制裝置
TW201818012A (zh) * 2016-11-14 2018-05-16 昕芙旎雅股份有限公司 壓電式致動器及壓電式閥
WO2019009035A1 (ja) * 2017-07-07 2019-01-10 有限会社メカノトランスフォーマ 変位拡大機構、研磨装置、アクチュエータ、ディスペンサ、及びエアバルブ
JP2019103193A (ja) * 2017-11-29 2019-06-24 国立大学法人秋田大学 ベルクランク型駆動装置及び動力伝達型駆動装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007154965A (ja) * 2005-12-02 2007-06-21 Shimadzu Corp 変位拡大機構
FR2959437B1 (fr) * 2010-04-30 2012-06-08 Centre Nat Rech Scient Micro-actionneur et micro-pince
CN101913130B (zh) * 2010-08-25 2012-10-10 清华大学 电致动夹持器
JP5727781B2 (ja) 2010-12-27 2015-06-03 有限会社メカノトランスフォーマ 圧電素子の変位拡大機構
FR2975935B1 (fr) * 2011-06-06 2013-07-05 Centre Nat Rech Scient Outil pour pince microtechnique
JP6286645B2 (ja) * 2014-03-18 2018-03-07 アダマンド並木精密宝石株式会社 アクチュエータの駆動方法
US9640512B2 (en) * 2014-07-24 2017-05-02 Asm Technology Singapore Pte Ltd Wire bonding apparatus comprising an oscillator mechanism
JP2018019529A (ja) * 2016-07-28 2018-02-01 セイコーエプソン株式会社 圧電アクチュエーター、圧電モーター、ロボットおよび電子部品搬送装置
JP6918309B2 (ja) * 2017-03-31 2021-08-11 有限会社メカノトランスフォーマ 駆動装置および圧電アクチュエータ
JP6849217B2 (ja) 2017-06-01 2021-03-24 有限会社メカノトランスフォーマ ディスペンサ

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0416551A2 (en) * 1989-09-05 1991-03-13 Brother Kogyo Kabushiki Kaisha Method of producing a displacement device
JPH11328890A (ja) * 1998-05-15 1999-11-30 Toshiba Corp ヘッドアクチュエータ機構、およびこれを備えた磁気ディスク装置
JP3103467U (ja) * 2004-02-18 2004-08-12 扇矢工事株式会社 管内面の研摩装置
JP2016034225A (ja) * 2014-07-28 2016-03-10 有限会社メカノトランスフォーマ 圧電アクチュエータ
TW201619534A (zh) * 2014-09-01 2016-06-01 Fujikin Kk 壓電元件驅動式閥及具備壓電元件驅動式閥的流量控制裝置
TW201818012A (zh) * 2016-11-14 2018-05-16 昕芙旎雅股份有限公司 壓電式致動器及壓電式閥
WO2019009035A1 (ja) * 2017-07-07 2019-01-10 有限会社メカノトランスフォーマ 変位拡大機構、研磨装置、アクチュエータ、ディスペンサ、及びエアバルブ
JP2019103193A (ja) * 2017-11-29 2019-06-24 国立大学法人秋田大学 ベルクランク型駆動装置及び動力伝達型駆動装置

Also Published As

Publication number Publication date
JP7633626B2 (ja) 2025-02-20
JP7001296B2 (ja) 2022-01-19
KR20220122635A (ko) 2022-09-02
JP2022009056A (ja) 2022-01-14
JPWO2021140598A1 (https=) 2021-07-15
TW202139494A (zh) 2021-10-16
WO2021140598A1 (ja) 2021-07-15
JP7461058B2 (ja) 2024-04-03
JPWO2021141095A1 (https=) 2021-07-15
WO2021141095A1 (ja) 2021-07-15
CN114930707A (zh) 2022-08-19
US12580499B2 (en) 2026-03-17
US20230043346A1 (en) 2023-02-09
CN114930707B (zh) 2025-08-26

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