KR20220044392A - 기판 이송 장치 - Google Patents

기판 이송 장치 Download PDF

Info

Publication number
KR20220044392A
KR20220044392A KR1020227010326A KR20227010326A KR20220044392A KR 20220044392 A KR20220044392 A KR 20220044392A KR 1020227010326 A KR1020227010326 A KR 1020227010326A KR 20227010326 A KR20227010326 A KR 20227010326A KR 20220044392 A KR20220044392 A KR 20220044392A
Authority
KR
South Korea
Prior art keywords
drive
axis
arm
arms
power transmission
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020227010326A
Other languages
English (en)
Korean (ko)
Inventor
로버트 티. 케이브니
Original Assignee
브룩스 오토메이션 인코퍼레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 브룩스 오토메이션 인코퍼레이티드 filed Critical 브룩스 오토메이션 인코퍼레이티드
Priority to KR1020237021822A priority Critical patent/KR20230104993A/ko
Publication of KR20220044392A publication Critical patent/KR20220044392A/ko
Ceased legal-status Critical Current

Links

Images

Classifications

    • H01L21/67742—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B25J18/02—Arms extensible
    • B25J18/04—Arms extensible rotatable
    • H01L21/67766—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3211—Changing orientation of the substrate, e.g. from a horizontal position to a vertical position
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3402—Mechanical parts of transfer devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
KR1020227010326A 2014-01-17 2015-01-16 기판 이송 장치 Ceased KR20220044392A (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020237021822A KR20230104993A (ko) 2014-01-17 2015-01-16 기판 이송 장치

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201461928681P 2014-01-17 2014-01-17
US61/928,681 2014-01-17
KR1020167022339A KR102381412B1 (ko) 2014-01-17 2015-01-16 기판 이송 장치
PCT/US2015/011764 WO2015109189A1 (en) 2014-01-17 2015-01-16 Substrate transport apparatus

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020167022339A Division KR102381412B1 (ko) 2014-01-17 2015-01-16 기판 이송 장치

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020237021822A Division KR20230104993A (ko) 2014-01-17 2015-01-16 기판 이송 장치

Publications (1)

Publication Number Publication Date
KR20220044392A true KR20220044392A (ko) 2022-04-07

Family

ID=53543480

Family Applications (3)

Application Number Title Priority Date Filing Date
KR1020227010326A Ceased KR20220044392A (ko) 2014-01-17 2015-01-16 기판 이송 장치
KR1020167022339A Active KR102381412B1 (ko) 2014-01-17 2015-01-16 기판 이송 장치
KR1020237021822A Ceased KR20230104993A (ko) 2014-01-17 2015-01-16 기판 이송 장치

Family Applications After (2)

Application Number Title Priority Date Filing Date
KR1020167022339A Active KR102381412B1 (ko) 2014-01-17 2015-01-16 기판 이송 장치
KR1020237021822A Ceased KR20230104993A (ko) 2014-01-17 2015-01-16 기판 이송 장치

Country Status (5)

Country Link
US (2) US11273558B2 (https=)
JP (3) JP6863744B2 (https=)
KR (3) KR20220044392A (https=)
CN (2) CN113270350A (https=)
WO (1) WO2015109189A1 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20180308728A1 (en) * 2017-02-07 2018-10-25 Brooks Automation, Inc. Method and apparatus for substrate transport
US11088004B2 (en) 2018-01-30 2021-08-10 Brooks Automation, Inc. Automatic wafer centering method and apparatus
US11574830B2 (en) 2018-03-16 2023-02-07 Brooks Automation Us, Llc Substrate transport apparatus
US11535460B2 (en) * 2018-05-31 2022-12-27 Brooks Automation Us, Llc Substrate processing apparatus
US11545380B2 (en) * 2018-11-01 2023-01-03 Brooks Automation Us Llc Transport apparatus with linear bearing
JP6522225B2 (ja) * 2018-12-19 2019-05-29 日本たばこ産業株式会社 霧化ユニットの製造方法、非燃焼型香味吸引器、霧化ユニット及び霧化ユニットパッケージ
CN113488422B (zh) * 2021-06-30 2025-08-19 北京屹唐半导体科技股份有限公司 传送装置和处理系统
KR102638655B1 (ko) * 2023-08-07 2024-02-20 에이피티씨 주식회사 멀티 층 efem을 포함하는 기판 이송 장치

Family Cites Families (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5135349A (en) * 1990-05-17 1992-08-04 Cybeq Systems, Inc. Robotic handling system
JP2808826B2 (ja) * 1990-05-25 1998-10-08 松下電器産業株式会社 基板の移し換え装置
US5180276A (en) * 1991-04-18 1993-01-19 Brooks Automation, Inc. Articulated arm transfer device
JP2659676B2 (ja) * 1993-11-02 1997-09-30 シーケーディ株式会社 ウェハ把持装置
JPH11188670A (ja) * 1997-12-26 1999-07-13 Daihen Corp ２アーム方式の搬送用ロボット装置
JP3806272B2 (ja) * 1999-09-13 2006-08-09 三菱重工業株式会社 マルチチャンバ型真空処理システム及び基板搬送装置
US7066707B1 (en) * 2001-08-31 2006-06-27 Asyst Technologies, Inc. Wafer engine
CN1996552B (zh) * 2001-08-31 2012-09-05 克罗辛自动化公司 晶片机
US7891935B2 (en) * 2002-05-09 2011-02-22 Brooks Automation, Inc. Dual arm robot
JP4291709B2 (ja) * 2003-04-16 2009-07-08 株式会社ダイヘン 直線移動機構およびこれを用いた搬送ロボット
KR100582697B1 (ko) * 2003-07-16 2006-05-23 동경 엘렉트론 주식회사 피처리 기판의 반송 장치 및 회전 위치를 검출하는 기능을갖는 구동 기구
JP4319504B2 (ja) * 2003-10-06 2009-08-26 東京エレクトロン株式会社 基板搬送装置および基板処理システム
US7797968B2 (en) 2004-06-01 2010-09-21 INVISTA North America S.à.r.l. Method to make circular knit elastic fabric comprising spandex and hard yarns
JP2006240867A (ja) * 2005-03-07 2006-09-14 Hitachi Plant Technologies Ltd 移載機におけるテレスコピックアームの旋回機構
US8419341B2 (en) 2006-09-19 2013-04-16 Brooks Automation, Inc. Linear vacuum robot with Z motion and articulated arm
JP2008246644A (ja) * 2007-03-30 2008-10-16 Daihen Corp 搬送装置
US8752449B2 (en) * 2007-05-08 2014-06-17 Brooks Automation, Inc. Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism
CN101730613B (zh) * 2007-05-15 2013-11-06 株式会社爱发科 搬送装置及使用该搬送装置的真空处理装置
JP4766274B2 (ja) * 2007-07-18 2011-09-07 株式会社安川電機 基板搬送ロボット及びそれを備えた半導体製造装置
JP4971063B2 (ja) * 2007-07-27 2012-07-11 株式会社ダイヘン 搬送装置
JP4824645B2 (ja) * 2007-08-03 2011-11-30 株式会社アルバック 基板搬送装置
US8777547B2 (en) 2009-01-11 2014-07-15 Applied Materials, Inc. Systems, apparatus and methods for transporting substrates
JP5304601B2 (ja) * 2009-11-10 2013-10-02 株式会社安川電機 アーム機構およびそれを備えた真空ロボット
CN201781112U (zh) 2010-07-22 2011-03-30 番禺得意精密电子工业有限公司 电连接器
JP5286451B2 (ja) * 2010-08-24 2013-09-11 株式会社アルバック 搬送装置
CN103237634B (zh) * 2010-10-08 2016-12-14 布鲁克斯自动化公司 同轴驱动的真空机器人
US9623555B2 (en) * 2010-11-10 2017-04-18 Brooks Automation, Inc. Dual arm robot
JP2012152851A (ja) * 2011-01-26 2012-08-16 Sinfonia Technology Co Ltd 搬送アーム装置
US9188973B2 (en) 2011-07-08 2015-11-17 Restoration Robotics, Inc. Calibration and transformation of a camera system's coordinate system
JP2013084823A (ja) 2011-10-11 2013-05-09 Ulvac Japan Ltd 搬送ロボット及び真空装置
TWI725303B (zh) * 2012-02-10 2021-04-21 美商布魯克斯自動機械公司 基材處理設備
KR20130096072A (ko) * 2012-02-21 2013-08-29 삼성전자주식회사 기판 반송 장치
JP5274702B1 (ja) * 2012-06-28 2013-08-28 株式会社一宮電機 モータ駆動システム
KR101268111B1 (ko) * 2013-03-14 2013-05-29 주식회사 티이에스 기판 이송 장치
KR101246362B1 (ko) 2012-10-11 2013-03-25 주식회사 티이에스 기판 이송 장치
JP5663638B2 (ja) * 2012-10-11 2015-02-04 株式会社ティーイーエス 基板移送装置

Also Published As

Publication number Publication date
WO2015109189A1 (en) 2015-07-23
KR102381412B1 (ko) 2022-03-31
KR20160107327A (ko) 2016-09-13
CN106103011A (zh) 2016-11-09
US20160325440A1 (en) 2016-11-10
KR20230104993A (ko) 2023-07-11
US11273558B2 (en) 2022-03-15
JP6863744B2 (ja) 2021-04-21
JP2017504492A (ja) 2017-02-09
US20220266460A1 (en) 2022-08-25
JP7280309B2 (ja) 2023-05-23
CN113270350A (zh) 2021-08-17
JP2023100955A (ja) 2023-07-19
JP2021106288A (ja) 2021-07-26

Similar Documents

Publication Publication Date Title
JP7583845B2 (ja) 基板搬送装置
JP7280309B2 (ja) 搬送装置および処理装置
US20230271792A1 (en) Substrate processing apparatus
US11978651B2 (en) Substrate transport apparatus
US11894252B2 (en) Substrate transport apparatus
US11830749B2 (en) Substrate transport apparatus
TWI829700B (zh) 基板運送裝置

Legal Events

Date Code Title Description
A107 Divisional application of patent
PA0104 Divisional application for international application

St.27 status event code: A-0-1-A10-A18-div-PA0104

St.27 status event code: A-0-1-A10-A16-div-PA0104

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

E601 Decision to refuse application
PE0601 Decision on rejection of patent

St.27 status event code: N-2-6-B10-B15-exm-PE0601

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T13-X000 Administrative time limit extension granted

St.27 status event code: U-3-3-T10-T13-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T13-X000 Administrative time limit extension granted

St.27 status event code: U-3-3-T10-T13-oth-X000

J201 Request for trial against refusal decision
PA0104 Divisional application for international application

St.27 status event code: A-0-1-A10-A18-div-PA0104

St.27 status event code: A-0-1-A10-A16-div-PA0104

PJ0201 Trial against decision of rejection

St.27 status event code: A-3-3-V10-V11-apl-PJ0201

J301 Trial decision

Free format text: TRIAL NUMBER: 2023101001379; TRIAL DECISION FOR APPEAL AGAINST DECISION TO DECLINE REFUSAL REQUESTED 20230628

Effective date: 20230831

PJ1301 Trial decision

St.27 status event code: A-3-3-V10-V15-crt-PJ1301

Decision date: 20230831

Appeal event data comment text: Appeal Kind Category : Appeal against decision to decline refusal, Appeal Ground Text : 2022 7010326

Appeal request date: 20230628

Appellate body name: Patent Examination Board

Decision authority category: Office appeal board

Decision identifier: 2023101001379

P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000