CN113270350A - 衬底运输设备 - Google Patents

衬底运输设备 Download PDF

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Publication number
CN113270350A
CN113270350A CN202110464317.0A CN202110464317A CN113270350A CN 113270350 A CN113270350 A CN 113270350A CN 202110464317 A CN202110464317 A CN 202110464317A CN 113270350 A CN113270350 A CN 113270350A
Authority
CN
China
Prior art keywords
drive
axis
arm
arms
end effector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202110464317.0A
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English (en)
Chinese (zh)
Inventor
R.T.卡夫尼
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Borucos Automation Usa Co ltd
Borukos Automation Holding Co ltd
Original Assignee
Brooks Automation Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brooks Automation Inc filed Critical Brooks Automation Inc
Publication of CN113270350A publication Critical patent/CN113270350A/zh
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B25J18/02—Arms extensible
    • B25J18/04—Arms extensible rotatable
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3211—Changing orientation of the substrate, e.g. from a horizontal position to a vertical position
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3402—Mechanical parts of transfer devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
CN202110464317.0A 2014-01-17 2015-01-16 衬底运输设备 Pending CN113270350A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201461928681P 2014-01-17 2014-01-17
US61/928681 2014-01-17
CN201580014344.0A CN106103011A (zh) 2014-01-17 2015-01-16 衬底运输设备

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN201580014344.0A Division CN106103011A (zh) 2014-01-17 2015-01-16 衬底运输设备

Publications (1)

Publication Number Publication Date
CN113270350A true CN113270350A (zh) 2021-08-17

Family

ID=53543480

Family Applications (2)

Application Number Title Priority Date Filing Date
CN202110464317.0A Pending CN113270350A (zh) 2014-01-17 2015-01-16 衬底运输设备
CN201580014344.0A Pending CN106103011A (zh) 2014-01-17 2015-01-16 衬底运输设备

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201580014344.0A Pending CN106103011A (zh) 2014-01-17 2015-01-16 衬底运输设备

Country Status (5)

Country Link
US (2) US11273558B2 (https=)
JP (3) JP6863744B2 (https=)
KR (3) KR20220044392A (https=)
CN (2) CN113270350A (https=)
WO (1) WO2015109189A1 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20180308728A1 (en) * 2017-02-07 2018-10-25 Brooks Automation, Inc. Method and apparatus for substrate transport
US11088004B2 (en) 2018-01-30 2021-08-10 Brooks Automation, Inc. Automatic wafer centering method and apparatus
US11574830B2 (en) 2018-03-16 2023-02-07 Brooks Automation Us, Llc Substrate transport apparatus
US11535460B2 (en) * 2018-05-31 2022-12-27 Brooks Automation Us, Llc Substrate processing apparatus
US11545380B2 (en) * 2018-11-01 2023-01-03 Brooks Automation Us Llc Transport apparatus with linear bearing
JP6522225B2 (ja) * 2018-12-19 2019-05-29 日本たばこ産業株式会社 霧化ユニットの製造方法、非燃焼型香味吸引器、霧化ユニット及び霧化ユニットパッケージ
CN113488422B (zh) * 2021-06-30 2025-08-19 北京屹唐半导体科技股份有限公司 传送装置和处理系统
KR102638655B1 (ko) * 2023-08-07 2024-02-20 에이피티씨 주식회사 멀티 층 efem을 포함하는 기판 이송 장치

Citations (8)

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US5151008A (en) * 1990-05-25 1992-09-29 Matsushita Electric Industrial Co., Ltd. Substrate transfer apparatus
US20050036877A1 (en) * 2003-04-16 2005-02-17 Daihen Corporation Linear moving mechanism and transfer robot using the same
JP2006240867A (ja) * 2005-03-07 2006-09-14 Hitachi Plant Technologies Ltd 移載機におけるテレスコピックアームの旋回機構
CN102069492A (zh) * 2009-11-10 2011-05-25 株式会社安川电机 手臂机构及具备该机构的真空机器人
CN103053017A (zh) * 2010-08-24 2013-04-17 株式会社爱发科 输送装置
CN103237634A (zh) * 2010-10-08 2013-08-07 布鲁克斯自动化公司 同轴驱动的真空机器人
WO2013120054A1 (en) * 2012-02-10 2013-08-15 Brooks Automation, Inc. Substrate processing apparatus
CN103476551A (zh) * 2010-11-10 2013-12-25 布鲁克斯自动化公司 双臂机器人

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US5135349A (en) * 1990-05-17 1992-08-04 Cybeq Systems, Inc. Robotic handling system
US5180276A (en) * 1991-04-18 1993-01-19 Brooks Automation, Inc. Articulated arm transfer device
JP2659676B2 (ja) * 1993-11-02 1997-09-30 シーケーディ株式会社 ウェハ把持装置
JPH11188670A (ja) * 1997-12-26 1999-07-13 Daihen Corp ２アーム方式の搬送用ロボット装置
JP3806272B2 (ja) * 1999-09-13 2006-08-09 三菱重工業株式会社 マルチチャンバ型真空処理システム及び基板搬送装置
US7066707B1 (en) * 2001-08-31 2006-06-27 Asyst Technologies, Inc. Wafer engine
CN1996552B (zh) * 2001-08-31 2012-09-05 克罗辛自动化公司 晶片机
US7891935B2 (en) * 2002-05-09 2011-02-22 Brooks Automation, Inc. Dual arm robot
KR100582697B1 (ko) * 2003-07-16 2006-05-23 동경 엘렉트론 주식회사 피처리 기판의 반송 장치 및 회전 위치를 검출하는 기능을갖는 구동 기구
JP4319504B2 (ja) * 2003-10-06 2009-08-26 東京エレクトロン株式会社 基板搬送装置および基板処理システム
US7797968B2 (en) 2004-06-01 2010-09-21 INVISTA North America S.à.r.l. Method to make circular knit elastic fabric comprising spandex and hard yarns
US8419341B2 (en) 2006-09-19 2013-04-16 Brooks Automation, Inc. Linear vacuum robot with Z motion and articulated arm
JP2008246644A (ja) * 2007-03-30 2008-10-16 Daihen Corp 搬送装置
US8752449B2 (en) * 2007-05-08 2014-06-17 Brooks Automation, Inc. Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism
CN101730613B (zh) * 2007-05-15 2013-11-06 株式会社爱发科 搬送装置及使用该搬送装置的真空处理装置
JP4766274B2 (ja) * 2007-07-18 2011-09-07 株式会社安川電機 基板搬送ロボット及びそれを備えた半導体製造装置
JP4971063B2 (ja) * 2007-07-27 2012-07-11 株式会社ダイヘン 搬送装置
JP4824645B2 (ja) * 2007-08-03 2011-11-30 株式会社アルバック 基板搬送装置
US8777547B2 (en) 2009-01-11 2014-07-15 Applied Materials, Inc. Systems, apparatus and methods for transporting substrates
CN201781112U (zh) 2010-07-22 2011-03-30 番禺得意精密电子工业有限公司 电连接器
JP2012152851A (ja) * 2011-01-26 2012-08-16 Sinfonia Technology Co Ltd 搬送アーム装置
US9188973B2 (en) 2011-07-08 2015-11-17 Restoration Robotics, Inc. Calibration and transformation of a camera system's coordinate system
JP2013084823A (ja) 2011-10-11 2013-05-09 Ulvac Japan Ltd 搬送ロボット及び真空装置
KR20130096072A (ko) * 2012-02-21 2013-08-29 삼성전자주식회사 기판 반송 장치
JP5274702B1 (ja) * 2012-06-28 2013-08-28 株式会社一宮電機 モータ駆動システム
KR101268111B1 (ko) * 2013-03-14 2013-05-29 주식회사 티이에스 기판 이송 장치
KR101246362B1 (ko) 2012-10-11 2013-03-25 주식회사 티이에스 기판 이송 장치
JP5663638B2 (ja) * 2012-10-11 2015-02-04 株式会社ティーイーエス 基板移送装置

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5151008A (en) * 1990-05-25 1992-09-29 Matsushita Electric Industrial Co., Ltd. Substrate transfer apparatus
US20050036877A1 (en) * 2003-04-16 2005-02-17 Daihen Corporation Linear moving mechanism and transfer robot using the same
JP2006240867A (ja) * 2005-03-07 2006-09-14 Hitachi Plant Technologies Ltd 移載機におけるテレスコピックアームの旋回機構
CN102069492A (zh) * 2009-11-10 2011-05-25 株式会社安川电机 手臂机构及具备该机构的真空机器人
CN103053017A (zh) * 2010-08-24 2013-04-17 株式会社爱发科 输送装置
CN103237634A (zh) * 2010-10-08 2013-08-07 布鲁克斯自动化公司 同轴驱动的真空机器人
CN103476551A (zh) * 2010-11-10 2013-12-25 布鲁克斯自动化公司 双臂机器人
WO2013120054A1 (en) * 2012-02-10 2013-08-15 Brooks Automation, Inc. Substrate processing apparatus

Also Published As

Publication number Publication date
WO2015109189A1 (en) 2015-07-23
KR20220044392A (ko) 2022-04-07
KR102381412B1 (ko) 2022-03-31
KR20160107327A (ko) 2016-09-13
CN106103011A (zh) 2016-11-09
US20160325440A1 (en) 2016-11-10
KR20230104993A (ko) 2023-07-11
US11273558B2 (en) 2022-03-15
JP6863744B2 (ja) 2021-04-21
JP2017504492A (ja) 2017-02-09
US20220266460A1 (en) 2022-08-25
JP7280309B2 (ja) 2023-05-23
JP2023100955A (ja) 2023-07-19
JP2021106288A (ja) 2021-07-26

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PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
TA01 Transfer of patent application right
TA01 Transfer of patent application right

Effective date of registration: 20220310

Address after: Massachusetts

Applicant after: Borucos automation USA Co.,Ltd.

Address before: Massachusetts

Applicant before: Borukos automation Holding Co.,Ltd.

Effective date of registration: 20220310

Address after: Massachusetts

Applicant after: Borukos automation Holding Co.,Ltd.

Address before: Massachusetts

Applicant before: BROOKS AUTOMATION, Inc.

WD01 Invention patent application deemed withdrawn after publication
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20210817