KR20220006771A - Deposition apparatus - Google Patents

Abstract

An object of the present invention is to provide a deposition apparatus capable of easily attaching a heating wire to a heater bracket and minimizing deformation of the heating wire. A deposition apparatus of an embodiment of the present invention includes a crucible, a zigzag-shaped heating wire, and a heater bracket for supporting the heating wire on the outside of the crucible, wherein the heating wire includes a plurality of unit heating wires long in a vertical direction and spaced apart in a horizontal direction and a return connecting adjacent unit heating wires, the heater bracket includes a guide bracket spaced apart from the crucible and determining a position of the unit heating wire and a ceramic bracket disposed between the guide bracket and the crucible to prevent deformation of the unit heating wire, and a unit heating wire receiving groove for accommodating the unit heating wires one to one is formed between the guide bracket and the ceramic bracket.

Description

Deposition apparatus

The present invention relates to a deposition apparatus, and to a deposition apparatus in which a heater is fixed.

Deposition is a method of coating gaseous particles with a thin solid film on the surface of an object such as metal or glass.

Recently, as organic light emitting diodes (OLED) displays are increasingly used in electronic devices such as TVs and mobile phones, research on devices and processes for manufacturing OLED display panels is active. In particular, an OLED display panel manufacturing process includes a process of depositing an organic material on a substrate such as a glass substrate in a vacuum state.

Specifically, the deposition process includes a process of heating a crucible in which the organic material is accommodated to evaporate the organic material in a gaseous state, and a process in which the gaseous organic material passes through a nozzle and is deposited on a substrate.

The deposition apparatus may install a heating unit such as a heater for heating the crucible outside the crucible.

An example of an evaporation source including a heating unit is disclosed in Republic of Korea Patent Publication No. 10-1930457 B1 (March 11, 2019 announcement), the heating unit is a plurality of strip-shaped having a first surface and a second surface facing each other a heating element comprising a heating unit and a connection unit connecting the plurality of heating units; and a plurality of accommodating holes penetrating up and down to accommodate the plurality of heating units, respectively, and a plurality of insertion holes extending outwardly from each of the plurality of accommodating holes to provide an insertion path for each of the plurality of heating units, Including; a ring-shaped support for supporting the plurality of heating units, the width of the plurality of insertion openings is greater than or equal to the thickness of the plurality of heating units, and the plurality of insertion holes is a state in which the plurality of heating units are accommodated in the plurality of receiving holes is formed at the same inclination angle with respect to the vertical direction of the first surface so as to intersect the vertical direction of the first surface, and the plurality of heating units are simultaneously inserted by the rotation of the heating element.

Republic of Korea Patent Publication No. 10-1930457 B1 (Announced on March 11, 2019)

An object of the present invention is to provide a deposition apparatus capable of easily attaching a heating wire to a heater bracket and minimizing deformation of the heating wire.

The deposition apparatus of this embodiment includes a crucible, A zigzag-shaped heating wire and a heater bracket for supporting the heating wire outside the crucible, the heating wire comprising a plurality of unit heating wires long in an up-down direction and spaced apart in a horizontal direction, and a return heating wire connecting adjacent unit heating wires, the heater bracket comprising: A unit that is spaced apart from the crucible and includes a guide bracket for positioning the unit heating wire, and a ceramic bracket disposed between the guide bracket and the crucible to prevent deformation of the unit heating wire, and a unit accommodating the unit heating wire in a 1:1 ratio between the guide bracket and the ceramic bracket A heating wire receiving groove may be formed.

The guide bracket may be formed to be larger than the ceramic bracket.

The unit heating wire receiving groove may be opened in the vertical direction.

A unit heating wire receiving groove may be formed on the outer peripheral surface of the ceramic bracket.

In the ceramic bracket, unit heating wire receiving grooves and protrusions may be alternately formed in a circumferential direction.

The protrusion may have a contact end contacting the inner circumference of the guide bracket.

A plurality of heater brackets may be spaced apart in the vertical direction. The guide bracket may be disposed outside the ceramic bracket.

The deposition apparatus may include a reflector that reflects the heat of the heating wire to the crucible.

The reflector may surround the outer circumference of the heater bracket.

A protrusion may protrude from the outer circumferential surface of the guide bracket. The reflector may be formed with a fitting hole into which the protrusion is inserted.

The guide bracket may be an outer bracket disposed on the inner circumference of the reflector, and the ceramic bracket may be an inner bracket disposed on the inner circumference of the guide bracket.

The cross-sectional shape of the plurality of unit heating wires may be a circular shape.

According to an embodiment of the present invention, the unit heating wire is inserted and received from the outside of the ceramic bracket to the inside of the unit heating wire receiving groove, and the guide bracket prevents the unit heating wire from being separated from the outside of the ceramic bracket, so the heating wire can be easily attached to the heater bracket. It can be assembled, and deformation of the heating wire during assembly can be minimized.

In addition, since the ceramic bracket has unit hot wire accommodating grooves and protrusions alternately formed in the circumferential direction, it is possible to prevent circumferential bending of the unit hot wire accommodated in the unit hot wire accommodating groove and to prevent short circuit.

1 is a cross-sectional view showing a deposition apparatus according to an embodiment of the present invention;
2 is a plan view showing an example installed on a heater in a reflector according to the present embodiment;
3 is a plan view showing an example assembled to a heater bracket on the reflector according to the present embodiment;
4 is a partially cut-away perspective view in which the heating wire according to the present embodiment is installed on the heater bracket.

Hereinafter, specific embodiments of the present invention will be described in detail with drawings.

1 is a cross-sectional view showing a deposition apparatus according to an embodiment of the present invention, FIG. 2 is a plan view showing an example installed in a heater in a reflector according to this embodiment, and FIG. 3 is a heater bracket in the reflector according to this embodiment. An assembled example is a plan view, and FIG. 4 is a partially cut-away perspective view in which the heating wire according to the present embodiment is installed in the heater bracket.

The deposition apparatus includes a crucible 2 having a space S1 formed therein, and a nozzle plater 10 covering the space S1.

The crucible 2 may accommodate the deposition raw material 8 in the space S1 . When the crucible 2 is heated, the deposition raw material 8 accommodated in the crucible 2 may be evaporated as a deposition material.

The deposition raw material 8 may be a metal material, and the crucible 2 may contain a metal material.

For example, Ag, Mg, LiF, etc. may be used as the deposition raw material 8 , and the deposition raw material 8 may be determined according to the structure of the OLED.

When the deposition raw material 8 is a metal material such as Ag or Mg, the deposition material may be a conductive gas.

The crucible 2 may include a container having a cross-sectional shape formed in a cup shape with an open upper surface.

An example of the crucible 2 is also possible to be made of a dual structure of the inner container and the outer container. The outer container may be disposed to surround the inner container, and the deposition raw material 8 may be contained in the inner container. The inner container may be inserted into the outer container. The outer container may be formed thinner than the inner container.

The crucible 2 may include a cover 6 . The cover part 6 may protrude upward from the heating wire 70 to be described later in the crucible 2 , and may be seated on the upper surface of the reflector 50 . The cover part 6 may protrude outward in the horizontal direction from the top of the container.

The cover part 6 may be directly seated and supported on the upper surface of the reflector 50 , and may be seated and supported on an insulating ring (not shown) disposed on the upper portion of the reflector 50 .

The nozzle plater 10 may have a plate shape. The nozzle plate 10 may be provided with a nozzle 12 .

The nozzle 12 may be integrally formed with the nozzle plate 10 , and may be detachably coupled to the nozzle plate 10 .

When the nozzle 12 is integrally formed with the nozzle plate 10 , it may protrude from the upper surface of the nozzle plate 10 .

When the nozzle 12 is detachably coupled to the nozzle plate 10 , it may be coupled to the nozzle fastener 13 formed in the nozzle plate 10 . The nozzle 12 may be detachably coupled by being screwed to the nozzle fastener 13 .

In the assembly of the crucible 2 and the nozzle plater 10 configured as described above, the conductive gas (ie, the deposition material) evaporated from the deposition raw material 8 may be sprayed to the nozzle 12 , and the nozzle 12 . The conductive gas sprayed to is deposited in the form of a thin film on a substrate (not shown), and the assembly of the crucible 2 and the nozzle plater 10 is a point evaporation source 20 capable of depositing a metal thin film on the substrate. can be configured.

The deposition apparatus may include a heater 40 capable of heating the point evaporation source 20 and a reflector 50 surrounding the heater 40 . The deposition apparatus further includes a cooler 58 in which the point evaporation source 20 , the heater 40 , and the reflector 50 are accommodated.

The heater 40 may heat the crucible 2 from the outside of the crucible 2 . The heater 40 may be disposed on the outer periphery of the crucible (2).

The heater 40 includes an upper heater 42 and a lower heater 44 .

The upper heater 42 may be disposed on the outer periphery of the upper portion of the crucible (2) to heat the upper portion of the crucible (2).

The lower heater 44 may be disposed on the outer periphery of the lower portion of the crucible 2 to heat the lower portion of the crucible 2 .

The upper heater 42 and the lower heater 44 may be vertically spaced apart. One of the upper heater 42 and the lower heater 44 may be formed to be longer than the other one.

The upper heater 42 and the lower heater 44 may have different distances from the crucible 2 . Any one of the upper heater 42 and the lower heater 44 may be closer to the crucible 2 than the other.

The upper heater 42 and the lower heater 44 may be supported by the heater bracket 60 . A plurality of heater brackets 60 may be provided. The positions of the heater bracket supporting the upper heater 42 and the heater bracket supporting the lower heater 44 may be different.

The reflector 50 may surround the outer periphery of the crucible (2). The reflector 50 may be spaced apart from the crucible 2 . A heater accommodating space S2 may be formed between the reflector 50 and the crucible 2 . The heater accommodating space S2 may be formed between the outer circumferential surface of the crucible 2 and the inner circumferential surface of the reflector 50 . The reflector 50 may surround the outer periphery of the crucible 2 and the heater 40 .

The cooler 58 may block heat (ie, radiant heat) emitted by the heater 40 from being emitted to the outside of the deposition apparatus. Heat radiated from the heater 40 may be collected in the center of the heater accommodating space S2.

An accommodating space is formed in the cooler 58 , and a reflector 50 and a heater 40 may be disposed together with the crucible 2 in the accommodating space of the cooler 58 .

The cooler 58 may include a refrigerant tube or refrigerant channel through which a refrigerant such as cooling water passes. The cooler 58 includes a coolant block comprising coolant tubes or coolant channels.

The heater 40 may include a heater bracket 60 installed on the reflector 50 and a heating wire 70 fixed to the heater bracket 60 .

The heater bracket 60 may be disposed in a ring shape as a whole. The heater bracket 60 may be disposed outside the outer circumference of the crucible (2). The heater bracket 60 may support the heating wire 70 outside the crucible 2 . The heater bracket 60 may support the heating wire 70 to be spaced apart from the outer circumferential surface of the crucible 2 , and radiant heat of the heating wire 70 may be transmitted to the crucible 2 .

A plurality of heater brackets 60 may be spaced apart from each other in the vertical direction.

The heater bracket 60 may include a guide bracket 62 and a ceramic bracket 64 .

The guide bracket 62 and the ceramic bracket 64 have internal/external double insulating guides.

The guide bracket 62 may be spaced apart from the crucible 2 . The guide bracket 62 and the crucible 2 may be spaced apart from each other in a horizontal direction.

The guide bracket 62 may determine the position of the heating wire 70 from the outside of the heating wire 70 . The outer surface of the heating wire 70 may be in contact with the guide bracket 62 . The guide bracket 62 may be an outer heater bracket or an outer insulating guide disposed on the outside of the ceramic bracket 64 .

The guide bracket 62 may support the heating wire 70 from the outside of the heating wire 70 so that the heating wire 70 is not deformed in a radially outward direction.

A protrusion 63 may protrude in an angled shape from the outer circumferential surface of the guide bracket 62 , and a fitting hole 53 into which the protrusion 63 is inserted may be formed in the reflector 50 .

A plurality of protrusions 63 and fittings 53 may be provided.

The ceramic bracket 64 may be located inside the guide bracket 62 . The ceramic bracket 64 may be an inner heater bracket or an inner insulating guide.

The ceramic bracket 64 may be made of a ceramic material capable of increasing the amount of radiant heat emitted by the heating wire 70 .

The ceramic bracket 64 may be disposed between the guide bracket 62 and the crucible 2 . The ceramic bracket 64 may prevent deformation of the heating wire 70 . The ceramic bracket 64 may support the heating wire 70 inside the heating wire 70 so that the heating wire 70 is not deformed in a radially inward direction.

A unit heating wire receiving groove 66 for accommodating the unit heating wire 72 of the heating wire 70 in a 1:1 ratio may be formed between the guide bracket 62 and the ceramic bracket 64 .

One unit heating wire 72 may be accommodated by being inserted into one unit heating wire receiving groove 66 .

The unit heating wire receiving groove 66 may be opened in the vertical direction. A unit heating wire receiving groove 66 may be formed in the ceramic bracket 64 . In the ceramic bracket 64 , unit heating wire receiving grooves 66 and protrusions 68 may be alternately formed in the circumferential direction. The unit heating wire receiving groove 66 and the protrusion 68 may be formed on the outer peripheral surface of the ceramic bracket 64 . The protrusion may have a contact end 69 that is in contact with the inner circumference of the guide bracket 62 .

Openings open in the vertical and outward directions are formed in the ceramic bracket 64 , and when the guide bracket 62 comes into contact with the ceramic bracket 64 , there is a unit space between the ceramic bracket 64 and the guide bracket 62 . The heating wire receiving groove 66 may be opened in the vertical direction.

The heating wire 70 may be formed of a conductive metal material having resistance. The heating wire 70 may be thermally deformed and thermally expanded.

The heating wire 70 may have a zigzag shape.

The heating wire 70 may include a plurality of unit heating wires 72 that are long in the vertical direction and spaced apart in the horizontal direction, and return heating wires connecting a pair of adjacent unit heating wires 72 .

The plurality of unit heating wires 72 may be parallel, and a gap may be formed therebetween. The gap may be formed in a size that does not contact each other even if the plurality of unit heating wires 72 are thermally deformed and thermally expanded.

The return heating wire may include an upper return heating wire 73 connecting one of the plurality of unit heating wires 72 to the other, and a lower liter heating wire 74 connecting another one of the plurality of unit heating wires 72 to another. have.

The plurality of unit heating wires 72 may have a vertical long straight shape. The heating wire 70 may be accommodated by inserting a plurality of unit heating wires 72 into the unit heating wire receiving groove 66 formed in the ceramic bracket 64 .

The upper return heating wire 73 may have a '∩' shape, and the lower return heating wire 74 may have a 'U' shape.

The hot wire 70 may be in the order of one unit hot wire 72 , an upper return hot wire 73 , another unit hot wire 72 , and a lower return hot wire 74 .

As an example of the heating wire 70, each of the plurality of unit heating wires 72 and the plurality of return heating wires 73 and 74 may be formed in a sheet shape or a band shape, and a cross-sectional shape thereof may be a rectangular shape.

Another example of the heating wire 70 may be formed in a circular rod shape of each of the plurality of unit heating wires 72 and the plurality of return heating wires 73 and 74, and the cross-sectional shape thereof may be a circular shape.

When the cross-sectional shape of each of the plurality of unit heating wires 72 and the plurality of return heating wires 73 and 74 is a sheet shape or a strip shape, the circumferential width of the plurality of unit heating wires 72 may be greater than a radial thickness. During thermal expansion of the plurality of unit heating wires 72 , the amount of expansion in the circumferential direction may be greater than the amount of expansion in the radial direction, and the possibility that the plurality of unit heating wires 72 contacts the circumference “in the direction” becomes high.

On the other hand, when the cross-sectional shape of each of the plurality of unit heating wires 72 and the plurality of return heating wires 73 and 74 is a circular shape, the plurality of unit heating wires 72 may have the same circumferential width and radial thickness. During thermal expansion of the plurality of unit heating wires 72 , the amount of expansion in the circumferential direction may be the same as the amount of expansion in the radial direction, and the possibility that the plurality of unit heating wires 72 come into contact with the circumference “in the direction” becomes low.

The cross-sectional shape of each of the plurality of unit heating wires 72 and the plurality of return heating wires 73 and 74 is preferably formed in a circular shape.

Hereinafter, the assembly operation of the heater 40 will be described.

When assembling the heater 40 , the worker or robot places the unit heating wire 72 of the heating wire 70 on the outside of the ceramic bracket 64 , and attaches the unit heating wire 72 to the unit heating wire of the ceramic bracket 64 . It may be inserted into the accommodating groove 66 , and the unit heating wire 72 may be inserted and received in the radial direction into the unit heating wire accommodating groove 66 .

Thereafter, when the guide bracket 62 is positioned on the outside of the ceramic bracket 64 and the inner circumferential surface of the guide bracket 62 is in close contact with the outer circumferential surface of the ceramic bracket 64, the radius of the unit heating wire accommodating groove 66 The outer direction is blocked by the guide bracket (62).

Thereafter, the reflector 50 may be coupled to the guide bracket 62 so that the reflector 50 surrounds the guide bracket 62 .

When the unit heating wire accommodating groove 66 and the protrusion 68 are alternately formed in the ceramic bracket 64 and the unit heating wire 72 is inserted and accommodated in the unit heating wire accommodating groove 66, the unit heating wire 72 is a protrusion It is blocked by (68) and can be restricted from bending or deforming in the circumferential direction.

Each unit heating wire 72 may be independently accommodated in each unit heating wire receiving groove 66 , and may not be short-circuited during thermal expansion.

The protrusion 68 may prevent a gap formed between the plurality of unit hot wires 72 from being narrowed, prevent bending of the plurality of unit hot wires 72, and may occur when the plurality of heat insulating hot wires 72 are bent. Short circuit can be prevented.

The above description is merely illustrative of the technical spirit of the present invention, and various modifications and variations will be possible without departing from the essential characteristics of the present invention by those skilled in the art to which the present invention pertains.

Therefore, the embodiments disclosed in the present invention are not intended to limit the technical spirit of the present invention, but to explain, and the scope of the technical spirit of the present invention is not limited by these embodiments.

The protection scope of the present invention should be construed by the following claims, and all technical ideas within the scope equivalent thereto should be construed as being included in the scope of the present invention.

2: crucible 60: heater bracket
62: guide bracket 64: ceramic bracket
66: unit heated wire receiving groove 70: heated wire
72: unit heating wire 73, 74: return heating wire

Claims (10)

crucible,
A zigzag-shaped heating wire,
and a heater bracket for supporting the heating wire to the outside of the crucible,
The hot wire
a plurality of unit heating wires long in the vertical direction and spaced apart in the horizontal direction;
Including a return heating wire connecting adjacent unit heating wire,
The heater bracket
a guide bracket that is spaced apart from the crucible and determines a position of the unit heating wire;
and a ceramic bracket disposed between the guide bracket and the crucible to prevent deformation of the unit heating wire,
A deposition apparatus in which a unit heating wire receiving groove for accommodating the unit heating wire in a 1:1 ratio is formed between the guide bracket and the ceramic bracket. The method of claim 1,
A deposition apparatus in which the guide bracket is formed to be larger than the ceramic bracket. The method of claim 1,
The unit heating wire accommodating groove is opened vertically in the deposition apparatus. The method of claim 1,
A deposition apparatus in which the unit heating wire receiving groove is formed on an outer circumferential surface of the ceramic bracket. 5. The method of claim 4,
The ceramic bracket is a deposition apparatus in which the unit heating wire receiving groove and the protrusion are alternately formed in a circumferential direction. 6. The method of claim 5,
The protrusion has a contact end contacting the inner periphery of the guide bracket. The method of claim 1,
A plurality of the heater brackets are spaced apart in the vertical direction,
The guide bracket is disposed outside the ceramic bracket. The method of claim 1,
Further comprising a reflector surrounding the outer periphery of the heater bracket,
A protrusion protrudes from the outer circumferential surface of the guide bracket,
A deposition apparatus formed with a fitting hole into which a protrusion is inserted in the reflector. The method of claim 1,
Further comprising a reflector for reflecting the heat of the heating wire to the crucible,
The guide bracket is an outer bracket disposed on the inner circumference of the reflector,
The deposition apparatus of the ceramic bracket being an inner bracket disposed on the inner circumference of the guide bracket. The method of claim 1,
A sectional shape of the plurality of unit hot wires is a circular shape.

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