CN112680698B - Heating crucible for vacuum evaporation and vacuum evaporation device - Google Patents
Heating crucible for vacuum evaporation and vacuum evaporation device Download PDFInfo
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- CN112680698B CN112680698B CN202110273124.7A CN202110273124A CN112680698B CN 112680698 B CN112680698 B CN 112680698B CN 202110273124 A CN202110273124 A CN 202110273124A CN 112680698 B CN112680698 B CN 112680698B
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Abstract
The invention provides a heating crucible for vacuum evaporation and a vacuum evaporation device, wherein the heating crucible for vacuum evaporation comprises a crucible main body, a main body heating assembly for heating the crucible main body, a heating cover body and a nozzle, the heating cover body comprises an upper cover body, a thin heater and a lower cover body which are sequentially stacked, a heat radiation cavity is formed between the upper cover body and the lower cover body, and the nozzle is arranged in the middle of the heating cover body and penetrates through the upper cover body, the thin heater and the lower cover body; the heat radiation cavity is arranged around the nozzle, and the thin heater heats the nozzle through the heat radiation effect. The invention heats the nozzle by the heating cover body, prevents the evaporation material from cooling and condensing at the nozzle to block the nozzle, improves the stability of the coating speed, and can stably control the heating temperature by heating the nozzle through the heat radiation effect instead of direct contact heating, thereby preventing the decomposition and the deterioration of the evaporation material caused by overhigh temperature at the nozzle.
Description
Technical Field
The invention relates to the technical field of display screen manufacturing, in particular to a heating crucible for vacuum evaporation and a vacuum evaporation device.
Background
The OLED display technology has many advantages of all solid state, active light emission, high contrast, ultra-thin, low power consumption, fast effect speed, wide working range, easy realization of flexible display and 3D display, etc., and is applied to many display screens, such as televisions and mobile display devices. The existing OLED device mainly comprises an organic film layer and a metal film layer, wherein the organic film layer and the metal film layer are formed through vacuum evaporation. In the vacuum evaporation process, a material to be evaporated (organic material or inorganic material) needs to be placed in a crucible, a heating device is arranged outside the crucible to heat the material to be evaporated, and the material to be evaporated is vaporized and sprayed onto the surface of an element to be evaporated through a nozzle of a moving point source or line source to form a required film layer.
Vacuum evaporation device generally only sets up heating device in the periphery of crucible, and consequently, the lower part of crucible is inconsistent with upper portion exit temperature, and general crucible exit temperature is lower, and consequently the evaporation coating material of vaporization condenses into the solid easily in the exit for the export diminishes, and spun evaporation coating material volume diminishes, seriously influences the thick homogeneity of membrane, and the solid lasts the accumulation, and the export blocks up easily, not only causes great influence to product quality, influences the convenience that production efficiency and evaporation coating device used moreover. In view of the above problems, the conventional solution is to provide a heating device at the position of the crucible cover to heat the crucible cover and the nozzle, but the heating device is generally separated from the crucible cover, and has a complex structure and is inconvenient to install and maintain, and on the other hand, the heating device directly transfers heat to the crucible cover and the nozzle through the heat conduction effect, so that the heating temperature cannot be stably controlled, and the local temperatures of the crucible cover and the nozzle are easily too high, which causes the decomposition or degradation of the evaporation material.
Therefore, it is necessary to design a heating crucible for vacuum deposition and a vacuum deposition apparatus to solve the above problems.
Disclosure of Invention
The invention aims to provide a heating crucible for vacuum evaporation, which can prevent a deposition material from being blocked at a nozzle, can stably control the heating temperature, prevent local temperature from being overhigh, and further prevent the deposition material from being decomposed and degraded.
In order to achieve the purpose, the invention adopts the following technical scheme: a heating crucible for vacuum evaporation comprises
A crucible main body for accommodating a material to be evaporated;
the main body heating assembly is arranged on the periphery of the crucible main body and used for heating the crucible main body;
the heating cover body is used for sealing the crucible main body and heating the opening of the crucible main body; the heating cover body comprises an upper cover body, a thin heater and a lower cover body which are sequentially stacked, and a heat radiation cavity is formed between the upper cover body and the lower cover body;
the nozzle is arranged in the middle of the heating cover body and penetrates through the upper cover body, the thin heater and the lower cover body, and the nozzle is communicated with the inside and the outside of the crucible main body; the heat radiation cavity is arranged around the nozzle, and the thin heater heats the nozzle through the heat radiation effect.
As a further improved technical solution of the present invention, a first reflective layer is further disposed on a lower surface of the upper cover, a support portion for supporting the thin heater is disposed between the thin heater and the lower cover, the support portion is made of tantalum, and the upper cover and the lower cover are made of tantalum.
As a further improved technical scheme of the invention, the thin heater comprises an upper heating plate, a cover body heating wire and a lower heating plate which are arranged in a stacked mode, the upper heating plate and the lower heating plate are arranged in a close fit mode with the cover body heating wire, the cover body heating wire is in a concentric spiral shape and uniformly covers the upper heating plate and the lower heating plate, and the upper heating plate and the lower heating plate are both made of materials with high thermal emissivity.
As a further improved technical scheme of the invention, the upper heating plate and the lower heating plate are made of aluminum oxide, the heating cover body is also provided with a thermocouple for detecting the heating temperature of the thin heater, and the detection site of the thermocouple is positioned on the upper surface of the upper heating plate.
As a further improved technical solution of the present invention, the heating cover body is in an inverted "convex" shape, and includes an edge portion formed by the lower cover body and a heating portion protruding downward from the middle portion of the lower cover body, the edge portion is erected at the opening of the crucible main body, and the thin heater is located in the heating portion; the main body heating assembly comprises a main body heating wire, and the upper edge of the main body heating wire is higher than the lower edge of the lower cover body.
According to the technical scheme of the further improvement of the invention, an insulating platform is further arranged above the edge part of the lower cover body, the insulating platform is used for separating the heating wire of the cover body from the lower cover body, and the insulating platform is made of boron nitride.
According to the technical scheme, two ends of the cover body heating wire are provided with the positive terminal and the negative terminal, two first threading holes for the positive terminal and the negative terminal to penetrate out upwards are formed in the position, close to the edge, of the upper heating plate, and the cover body heating wire penetrates through the upper part of the upper heating plate from the position between the upper heating plate and the lower heating plate through the first threading holes; two second threading holes for the positive wiring end and the negative wiring end to penetrate out are formed in the side edge of the heating cover body.
As a further improved technical solution of the present invention, the nozzle is fixed to the heating cover body through a fixed cylinder, the fixed cylinder penetrates through upper and lower surfaces of the heating cover body, an external thread is provided on an outer side of the nozzle, an internal thread matched with the external thread is provided on an inner side of the fixed cylinder, and an upper opening of the nozzle protrudes from an upper surface of the heating cover body.
As a further improved technical scheme of the invention, the height of the part of the nozzle protruding out of the heating cover body is half to one third of the whole height of the nozzle.
It is another object of the present invention to provide a vacuum deposition apparatus capable of preventing a deposition material from being clogged at a nozzle, stably controlling a heating temperature, preventing a local temperature from being excessively high, and preventing the deposition material from being decomposed and deteriorated.
In order to achieve the purpose, the invention adopts the following technical scheme:
a vacuum evaporation device comprises any one of the heating crucible for vacuum evaporation, a heat insulation shell arranged on the periphery of the heating crucible for vacuum evaporation, a heat insulation cover arranged above a heating cover body and a base supporting the heating crucible for vacuum evaporation and the heat insulation shell, wherein a heat insulation cavity is formed between the heat insulation cover body and the heating cover body, the upper end of a nozzle penetrates through the heat insulation cavity and the heat insulation cover body, and a second reflection layer is arranged on one side, facing the heating cover body, of the heat insulation cover body.
According to the technical scheme, the heating crucible for vacuum evaporation and the vacuum evaporation device provided by the invention have the advantages that the nozzle is heated by the heating cover body, so that evaporation materials are prevented from being cooled and condensed at the nozzle to block the nozzle, and the stability of the film coating speed is improved; the heating mode of the nozzle is thermal radiation heating instead of direct contact heating, the heating temperature can be stably controlled, and the decomposition and the deterioration of the evaporation material caused by overhigh local temperature of the nozzle are prevented; in addition, the heating cover body is integrated with the upper cover body and the lower cover body through the thin heater, on one hand, the heating cover body has self-heating and heat preservation functions, on the other hand, the heating cover body can be integrally installed and detached relative to the crucible main body, and the use and the maintenance are convenient.
Drawings
Fig. 1 is a perspective view of a vacuum deposition apparatus according to the present invention.
Fig. 2 is a sectional view of the vacuum evaporation apparatus in fig. 1.
Fig. 3 is a perspective view of the vacuum deposition apparatus of the present invention without the heat insulating cover and the upper cover.
FIG. 4 is a perspective view of a heating cover and a nozzle in the vacuum evaporation apparatus of the present invention.
FIG. 5 is a partial cross-sectional view of the heating cap body in cooperation with the nozzle and the crucible body in accordance with the present invention.
Fig. 6 is an exploded view of a thin heater in a vacuum evaporation apparatus according to the present invention.
Fig. 7 is an enlarged view of the circled portion in fig. 2.
Fig. 8 is a partial cross-sectional view of the connector of fig. 7.
Reference numerals: 100-vacuum evaporation device, 11-heat insulation shell, 12-heat insulation cover part, 121-heat insulation cavity, 13-base, 14-second reflection layer, 15-third reflection layer, 20-crucible main body, 30-heating cover part, 31-upper cover part, 32-thin heater, 321-upper heating plate, 322-cover body heating wire, 323-lower heating plate, 324-first threading hole, 33-lower cover part, 331-limiting block, 332-edge part, 333-heating part, 334-second threading hole, 34-first reflection layer, 35-heat radiation cavity, 36-supporting part, 37-thermocouple, 38-fixed cylinder, 39-insulation platform, 40-nozzle, 50-main body heating component, 51-shell layer, 52-main body heating wire, 53-fixing frame, 54-connecting piece, 541-outer circular ring, 542-upper circular ring, 543-inner circular ring and 544-step part.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in detail with reference to the accompanying drawings and specific embodiments.
Referring to fig. 1 to 3, the present invention provides a vacuum evaporation apparatus 100, which is disposed in a vacuum chamber to coat a substrate to be evaporated in the vacuum chamber with a film. The vapor deposition material discharged from the vacuum vapor deposition device 100 is deposited after reaching the surface of the substrate to be vapor deposited, and a thin film of the vapor deposition material is formed on the surface of the substrate. The vacuum deposition apparatus 100 includes a heating crucible, a heat insulating housing 11 provided on the outer periphery of the heating crucible, a heat insulating cover 12, and a base 13 supporting the heating crucible and the heat insulating housing 11.
Referring to fig. 2, the heating crucible includes a crucible main body 20, a heating cover 30, a nozzle 40, and a main body heating unit 50. The crucible body 20 is for containing a material to be evaporated, and has an upper end opened. The heating lid 30 is used to close the crucible body 20 and can heat the opening of the crucible body 20 and the nozzle 40. The body heating unit 50 is provided on the outer circumference of the crucible body 20 to heat the crucible body 20.
Referring to fig. 4 and 5, the heating cover 30 includes an upper cover 31, a thin heater 32, and a lower cover 33 stacked in this order. The upper cover 31 and the lower cover 33 are engaged with each other to enclose the thin heater 32 therein, and a heat radiation cavity 35 is formed between the upper cover 31 and the lower cover 33. The lower surface of the upper cover 31 is further provided with a first reflective layer 34, and the first reflective layer 34 includes a plurality of reflective plates to reflect heat generated by the thin heater 32 and prevent the heat from escaping from the upper cover 31.
A support portion 36 for supporting the thin heater 32 is provided between the thin heater 32 and the lower cover 33, and the support portion 36 is annular. Referring to fig. 3, the lower cover 33 further has a plurality of stoppers 331 located above the edge of the thin heater 32, and the stoppers 331 are uniformly arranged along the edge of the thin heater 32. The thin heater 32 is fixed to the lower cover 33 by the engagement of the stopper 331 above the thin heater and the support 36 below the thin heater. Since the thin heater 32 is in contact with only the support portion 36 and the stopper 331 and is not in direct contact with the upper cover 31, the lower cover 33, and the nozzle 40, the thin heater 32 radiates heat through the heat radiation chamber 35 to indirectly heat the lower cover 33 and the nozzle 40. Preferably, the material of the support portion 36 is tantalum, and the material of the upper lid 31 and the lower lid 33 is tantalum.
Referring to fig. 4 and 5, the heating lid 30 has an inverted "convex" shape as a whole, and includes a rim portion 332 that is disposed on the edge of the crucible main body 20 and a heating portion 333 that protrudes downward from the middle, and a lower surface of the heating portion 333 is lower than a lower surface of the rim portion 332. Specifically, the edge portion 332 and the heating portion 333 are both formed by the lower lid member 33, the edge portion 332 is placed on the opening of the crucible main body 20, and when the heating lid member 30 and the crucible main body 20 are closed, the thin heater 32 is positioned in the heating portion 333. With this arrangement, the vertical distance between the thin heater 32 and the opening of the crucible main body 20 is reduced, and heat loss is reduced. In this embodiment, the lower edge of the heating cover 30 is lower than the upper edge of the main body heating unit 50 in the vertical direction.
The nozzle 40 is provided in the middle of the heating lid body 30 and penetrates the upper lid body 31, the thin heater 32, and the lower lid body 33, and the nozzle 40 penetrates the heating lid body 30 to communicate the inside and the outside of the crucible main body 20. The heat radiation chamber 35 is disposed around the nozzle 40, and the thin heater 32 heats the nozzle 40 by the heat radiation. The nozzle 40 is fixed with the heating cover body 30 through the fixing cylinder 38, the fixing cylinder 38 penetrates through the upper surface and the lower surface of the heating cover body 30, external threads are arranged on the outer side of the nozzle 40, internal threads matched with the external threads are arranged on the inner side of the fixing cylinder 38, and the nozzle 40 and the fixing cylinder 38 are installed in a thread matching mode, so that the nozzle 40 is convenient to detach and replace.
The thin heater 32 includes an upper heating plate 321, a cover heater 322, and a lower heating plate 323 stacked in layers, the upper heating plate 321 and the lower heating plate 323 are closely attached to the cover heater 322, and the cover heater 322 uniformly covers the upper heating plate 321 and the lower heating plate 323. The heat of the cover heater wire 322 is first transferred to the upper and lower heater plates 321 and 323 by the heat transfer function, and since the upper and lower heater plates 321 and 323 are not in direct contact with the upper cover 31, the lower cover 33, and the nozzle 40, the heat is further transferred through the heat radiation chamber 35 by the heat radiation function. In the present invention, the upper heating plate 321 and the lower heating plate 323 are made of a material having high thermal emissivity, and preferably, the upper heating plate 321 and the lower heating plate 323 are made of an aluminum oxide material. The heating cover 30 is further provided with a thermocouple 37 for detecting the heating temperature of the thin heater 32, and the detection of the thermocouple 37 is located on the upper surface of the upper heating plate 321.
Referring to fig. 4 to 6, the cover heater 322 is concentrically and spirally formed, two ends of the cover heater 322 are a positive terminal and a negative terminal, two first threading holes 324 are formed at a position of the upper heater plate 321 near the edge for the positive terminal and the negative terminal to pass through upward, and the cover heater 322 passes through the upper heater plate 321 and the lower heater plate 323 through the first threading holes 324.
Two second threading holes 334 through which the positive terminal and the negative terminal of the cover body heating wire 322 penetrate are formed in the side edge of the heating cover body 30, and the two second threading holes 334 are located on two sides of the heating cover body 30. After the cover heater wire 322 penetrates out of the upper heating plate 321, it continues to bend upwards and towards the second threading hole 334 along the lower cover 33, and penetrates out of the heating cover 30 from the second threading hole 334. So set up, the position that second through wires hole 334 set up staggers in vertical direction with heat radiation chamber 35, reduces the heat that scatters and disappears from second through wires hole 334 department.
The edge 332 of the lower cover 33 is further provided with an insulating platform 39, the insulating platform 39 is used for separating the cover heater 322 from the lower cover 33, and when the cover heater 322 is bent upward from the upper heater 321 toward the second threading hole 334, the insulating platform 39 is supported below the cover heater 322. The insulating platform 39 is made of an insulating and high temperature resistant material, preferably boron nitride.
Referring to fig. 2, an insulating cavity 121 is formed between the insulating cover 12 and the heating cover 30, and the upper end of the nozzle 40 penetrates the insulating cavity 121 and the insulating cover 12. The upper opening of the nozzle 40 protrudes from the upper surface of the heating cap 30, and preferably, the height of the portion of the nozzle 40 protruding from the heating cap 30 is one half to one third of the entire height of the nozzle 40. An opening matching the outlet of the nozzle 40 is formed in the center of the heat insulating cover 12, and the evaporation material is ejected from the outlet of the nozzle 40 and the opening. The side of the heat insulation cover 12 facing the heating cover 30 is provided with a second reflective layer 14 to reflect heat downward, wherein the heat includes heat radiated from the portion of the nozzle 40 protruding the heating cover 30, heat flowing out of the second threading hole 334, and a small amount of heat radiated from the upper cover 31. In this way, the periphery of the nozzle 40 is the thermal insulation chamber 121 and the thermal radiation chamber 35 from top to bottom, thereby forming a gradient temperature for heating the nozzle 40, on one hand, the stability of heating the nozzle 40 can be maintained by the thermal radiation effect, and on the other hand, the temperature of the evaporation material in the nozzle 40 is prevented from being too high, thereby being thermally decomposed or deteriorated.
The heat insulation shell 11 is used for blocking heat transfer between the heating crucible and the main body heating assembly 50 and the outside, the heat insulation shell 11 is cylindrical, the lower end of the heat insulation shell is fixed on the base 13, and the opening at the upper end of the heat insulation shell is matched with the heat insulation cover 12. The base 13 is located below and is installed to be matched with the heat insulation housing 11 and the main body heating assembly 50, and the third reflection layer 15 is arranged on the base 13 in a direction towards the heating crucible.
The main body heating assembly 50 includes an outer shell 51 and a main body heating wire 52 fixed inside the outer shell 51. The outer shell 51 comprises a multi-layer shell, and the multi-layer shell is arranged to reduce heat dissipation. Specifically, the outer shell layer 51 includes a first outer shell, a second outer shell, and a third outer shell that are sequentially disposed from outside to inside. The main body heating wire 52 is arranged up and down and is uniformly covered on the outer side of the crucible main body 20, and is disposed adjacent to the crucible main body 20. The inner side of the third casing is provided with a fixing frame 53 for fixing the main body heating wire 52, specifically, the fixing frame 53 is a circular ring arranged along the inner side of the third casing in the horizontal direction, a hole for the main body heating wire 52 to pass through and fix is formed in the circular ring, and the fixing frame 53 is provided with multiple layers up and down to strengthen the fixing effect of the main body heating wire 52. In this embodiment, the upper edge of the main body heater wire 52 is higher than the lower edge of the lower cover 33.
In the present invention, a main body thermocouple (not shown) is further provided between the outer shell 51 and the main body heater wire 52 to detect the heating temperature of the main body heater wire 52. The main body thermocouples are arranged at the upper part, the middle part and the lower part of the outer side of the crucible main body 20 in the vertical direction respectively, and the heating temperature of each part of the crucible main body 20 can be obtained more accurately through multi-point detection.
Referring to fig. 3, 7 and 8, a connecting member 54 is disposed above the outer shell 51, and the connecting member 54 is located between the outer shell 51 and the crucible main body 20 and closes a gap between the first outer shell and the crucible main body 20. Specifically, the connecting element 54 includes an inner ring 543 and an outer ring 541 concentrically arranged, an upper ring 542 connecting the upper ends of the inner ring 543 and the outer ring 541, and a step portion 544 protruding inward from the bottom of the inner ring 543. The outer ring 541 is fastened to the first housing, and the bottom of the step portion 544 is connected to the upper ends of the second housing and the third housing. The opening edge of the crucible main body 20 extends horizontally outward and is engaged with the step portion 544, and specifically, the opening edge of the crucible main body 20 is disposed above the step portion 544, and the heating cover 30 is disposed above the opening edge of the crucible main body 20. The provision of the connection member 54 reduces the heat loss of the main body heating wire 52 from between the outer sheath 51 and the crucible main body 20 upward.
In summary, the heating crucible and the vacuum evaporation device for vacuum evaporation provided by the invention have the advantages that the heating cover body is arranged to heat and insulate the nozzle, so that evaporation materials are prevented from being cooled and condensed at the nozzle to block the nozzle, the evaporation rate and quality are prevented from being influenced, and the stability of the film coating speed is improved; the heating mode of the nozzle is thermal radiation heating instead of direct contact heating, the heating temperature can be stably controlled, and the decomposition and the deterioration of the evaporation material caused by overhigh local temperature of the nozzle are prevented; in addition, the heating cover body of the invention integrates the thin heater and the upper and lower cover bodies into a whole, on one hand, the heating cover body has self-heating and heat-preserving functions, on the other hand, the heating cover body can be integrally installed and disassembled relative to the crucible main body, and the use and maintenance are convenient, so that the influence on the evaporation operation is reduced; when the heating cover body is matched with the crucible for covering, the gap between the crucible main body and the main body heating assembly can be better sealed by arranging the connecting piece, and the heat loss is reduced.
In the description of the present invention, it should be noted that the terms "upper", "lower", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, which are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and operate, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted" and "connected" are to be interpreted broadly, e.g., as being either fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In addition, the above embodiments are only used for illustrating the invention and not for limiting the technical solutions described in the invention, and the understanding of the present specification should be based on the technical personnel in the field, and although the present specification has described the invention in detail by referring to the above embodiments, the ordinary skilled in the art should understand that the technical personnel in the field can still make modifications or equivalent substitutions to the present invention, and all the technical solutions and modifications thereof without departing from the spirit and scope of the present invention should be covered in the claims of the present invention.
Claims (9)
1. A heating crucible for vacuum evaporation is characterized in that: comprises that
A crucible main body for accommodating a material to be evaporated;
the main body heating assembly is arranged on the periphery of the crucible main body and used for heating the crucible main body;
the heating cover body is used for sealing the crucible main body and heating the opening of the crucible main body; the heating cover body comprises an upper cover body, a thin heater and a lower cover body which are sequentially stacked, and a heat radiation cavity is formed between the upper cover body and the lower cover body;
the nozzle is arranged in the middle of the heating cover body and penetrates through the upper cover body, the thin heater and the lower cover body, and the nozzle is communicated with the inside and the outside of the crucible main body; the heat radiation cavity is arranged around the nozzle, and the thin heater heats the nozzle through the heat radiation effect;
the thin heater comprises an upper heating plate, a cover body heating wire and a lower heating plate which are arranged in a stacked mode, the upper heating plate and the lower heating plate are arranged in a close fit mode with the cover body heating wire, and the cover body heating wire is concentric and spiral and uniformly covers the upper heating plate and the lower heating plate;
the lower surface of the upper cover body is provided with a first reflecting layer, and a supporting part for supporting the thin heater is arranged between the thin heater and the lower cover body.
2. The heating crucible for vacuum evaporation according to claim 1, wherein: the supporting part is made of tantalum, and the upper cover body and the lower cover body are made of tantalum.
3. The heating crucible for vacuum evaporation according to claim 1, wherein: the material of going up hot plate and lower hot plate is aluminium oxide, the heating lid still is equipped with the thermocouple that is used for detecting slim heater heating temperature, the check site of thermocouple is located the upper surface of last hot plate.
4. The heating crucible for vacuum evaporation according to claim 1, wherein: the heating cover body is in an inverted convex shape and comprises an edge part formed by the lower cover body and a heating part protruding downwards from the middle part of the lower cover body, the edge part is erected at an opening of the crucible main body, and the thin heater is positioned in the heating part; the main body heating assembly comprises a main body heating wire, and the upper edge of the main body heating wire is higher than the lower edge of the lower cover body.
5. The heating crucible for vacuum evaporation according to claim 4, wherein: still be equipped with insulating platform on the edge portion of lower lid, insulating platform is used for separating lid heater strip and lower lid, insulating platform's material is boron nitride.
6. The heating crucible for vacuum evaporation according to claim 1, wherein: the two ends of the cover body heating wire are provided with a positive terminal and a negative terminal, two first threading holes for the positive terminal and the negative terminal to penetrate out upwards are formed in the position, close to the edge, of the upper heating plate, and the cover body heating wire penetrates above the upper heating plate from the position between the upper heating plate and the lower heating plate through the first threading holes; two second threading holes for the positive wiring end and the negative wiring end to penetrate out are formed in the side edge of the heating cover body.
7. The heating crucible for vacuum evaporation according to claim 1, wherein: the nozzle is fixed with the heating cover body through a fixed cylinder, the fixed cylinder penetrates through the upper surface and the lower surface of the heating cover body, an external thread is arranged on the outer side of the nozzle, an internal thread matched with the external thread is arranged on the inner side of the fixed cylinder, and an upper opening of the nozzle protrudes out of the upper surface of the heating cover body.
8. The heating crucible for vacuum evaporation according to claim 7, wherein: the height of the part of the nozzle protruding out of the heating cover body is half to one third of the whole height of the nozzle.
9. A vacuum evaporation device is characterized in that: the vacuum evaporation crucible according to any one of claims 1 to 8, a heat insulating housing provided on the outer periphery of the vacuum evaporation crucible, a heat insulating cover provided above the heating lid, and a base for supporting the vacuum evaporation crucible and the heat insulating housing, wherein a heat insulating chamber is formed between the heat insulating cover and the heating lid, the upper end of the nozzle penetrates through the heat insulating chamber and the heat insulating cover, and a second reflective layer is provided on the side of the heat insulating cover facing the heating lid.
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| CN115522167A (en) * | 2022-09-22 | 2022-12-27 | 京东方科技集团股份有限公司 | Evaporation source equipment |
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| CN100340695C (en) * | 2003-08-04 | 2007-10-03 | Lg电子株式会社 | Evaporation source for evaporating an organic electroluminescent layer |
| KR20150071445A (en) * | 2013-12-18 | 2015-06-26 | 주식회사 선익시스템 | Evaporation source and Deposition apparatus including the same |
| CN104762601A (en) * | 2015-04-30 | 2015-07-08 | 京东方科技集团股份有限公司 | Evaporator source, evaporation device and evaporation method |
| CN106756807A (en) * | 2017-01-23 | 2017-05-31 | 京东方科技集团股份有限公司 | A kind of vapor deposition source, evaporation coating device and its evaporation coating method |
| CN107400858A (en) * | 2017-09-18 | 2017-11-28 | 京东方科技集团股份有限公司 | Evaporation source and deposition system |
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