KR20210091115A - 초순수 제조 장치의 기동 방법 및 초순수 제조 장치 - Google Patents
초순수 제조 장치의 기동 방법 및 초순수 제조 장치 Download PDFInfo
- Publication number
- KR20210091115A KR20210091115A KR1020217006613A KR20217006613A KR20210091115A KR 20210091115 A KR20210091115 A KR 20210091115A KR 1020217006613 A KR1020217006613 A KR 1020217006613A KR 20217006613 A KR20217006613 A KR 20217006613A KR 20210091115 A KR20210091115 A KR 20210091115A
- Authority
- KR
- South Korea
- Prior art keywords
- water
- flow path
- ultrapure water
- water production
- starting
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 127
- 229910021642 ultra pure water Inorganic materials 0.000 title claims abstract description 104
- 239000012498 ultrapure water Substances 0.000 title claims abstract description 104
- 238000000034 method Methods 0.000 title claims abstract description 43
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 171
- 239000012528 membrane Substances 0.000 claims abstract description 100
- 238000000108 ultra-filtration Methods 0.000 claims abstract description 32
- 238000004140 cleaning Methods 0.000 claims abstract description 18
- 238000009434 installation Methods 0.000 claims abstract description 8
- 238000001471 micro-filtration Methods 0.000 claims description 55
- 238000005406 washing Methods 0.000 claims description 27
- 230000004087 circulation Effects 0.000 claims description 26
- 239000002245 particle Substances 0.000 claims description 14
- 238000001914 filtration Methods 0.000 claims description 7
- 239000012510 hollow fiber Substances 0.000 claims description 6
- 230000001954 sterilising effect Effects 0.000 claims description 4
- 238000004659 sterilization and disinfection Methods 0.000 claims description 4
- 238000011144 upstream manufacturing Methods 0.000 claims description 4
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 10
- 239000002923 metal particle Substances 0.000 description 10
- 239000004576 sand Substances 0.000 description 9
- 239000000126 substance Substances 0.000 description 9
- 238000011118 depth filtration Methods 0.000 description 6
- 230000003647 oxidation Effects 0.000 description 6
- 238000007254 oxidation reaction Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- 238000007872 degassing Methods 0.000 description 4
- 239000010419 fine particle Substances 0.000 description 4
- 238000005342 ion exchange Methods 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000011148 porous material Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000010828 elution Methods 0.000 description 3
- 239000003456 ion exchange resin Substances 0.000 description 3
- 229920003303 ion-exchange polymer Polymers 0.000 description 3
- 238000001223 reverse osmosis Methods 0.000 description 3
- 238000004904 shortening Methods 0.000 description 3
- 150000001450 anions Chemical class 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 230000014759 maintenance of location Effects 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000002203 pretreatment Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 241001122767 Theaceae Species 0.000 description 1
- 238000005349 anion exchange Methods 0.000 description 1
- 239000003957 anion exchange resin Substances 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000005341 cation exchange Methods 0.000 description 1
- 239000003729 cation exchange resin Substances 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 231100000676 disease causative agent Toxicity 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000008235 industrial water Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000011859 microparticle Substances 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 238000007781 pre-processing Methods 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 238000009287 sand filtration Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 239000008399 tap water Substances 0.000 description 1
- 235000020679 tap water Nutrition 0.000 description 1
- 238000009849 vacuum degassing Methods 0.000 description 1
- 239000002349 well water Substances 0.000 description 1
- 235000020681 well water Nutrition 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/58—Multistep processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D19/00—Degasification of liquids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/14—Ultrafiltration; Microfiltration
- B01D61/145—Ultrafiltration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/14—Ultrafiltration; Microfiltration
- B01D61/145—Ultrafiltration
- B01D61/146—Ultrafiltration comprising multiple ultrafiltration steps
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/14—Ultrafiltration; Microfiltration
- B01D61/147—Microfiltration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/14—Ultrafiltration; Microfiltration
- B01D61/22—Controlling or regulating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D63/00—Apparatus in general for separation processes using semi-permeable membranes
- B01D63/02—Hollow fibre modules
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D65/00—Accessories or auxiliary operations, in general, for separation processes or apparatus using semi-permeable membranes
- B01D65/02—Membrane cleaning or sterilisation ; Membrane regeneration
- B01D65/022—Membrane sterilisation
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/30—Treatment of water, waste water, or sewage by irradiation
- C02F1/32—Treatment of water, waste water, or sewage by irradiation with ultraviolet light
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
- C02F1/444—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis by ultrafiltration or microfiltration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2311/00—Details relating to membrane separation process operations and control
- B01D2311/25—Recirculation, recycling or bypass, e.g. recirculation of concentrate into the feed
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2313/00—Details relating to membrane modules or apparatus
- B01D2313/18—Specific valves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2313/00—Details relating to membrane modules or apparatus
- B01D2313/50—Specific extra tanks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2313/00—Details relating to membrane modules or apparatus
- B01D2313/56—Specific mechanisms for loading the membrane in a module
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2313/00—Details relating to membrane modules or apparatus
- B01D2313/57—Tools used for removal of membranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
- C02F2103/02—Non-contaminated water, e.g. for industrial water supply
- C02F2103/04—Non-contaminated water, e.g. for industrial water supply for obtaining ultra-pure water
Landscapes
- Chemical & Material Sciences (AREA)
- Water Supply & Treatment (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Environmental & Geological Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Hydrology & Water Resources (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Degasification And Air Bubble Elimination (AREA)
- Treatment Of Water By Ion Exchange (AREA)
- Physical Water Treatments (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPJP-P-2018-219467 | 2018-11-22 | ||
| JP2018219467A JP7171386B2 (ja) | 2018-11-22 | 2018-11-22 | 超純水製造装置の立ち上げ方法及び超純水製造装置 |
| PCT/JP2019/044156 WO2020105494A1 (ja) | 2018-11-22 | 2019-11-11 | 超純水製造装置の立ち上げ方法及び超純水製造装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20210091115A true KR20210091115A (ko) | 2021-07-21 |
Family
ID=70773693
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020217006613A KR20210091115A (ko) | 2018-11-22 | 2019-11-11 | 초순수 제조 장치의 기동 방법 및 초순수 제조 장치 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP7171386B2 (ja) |
| KR (1) | KR20210091115A (ja) |
| CN (1) | CN112770825B (ja) |
| TW (1) | TW202039065A (ja) |
| WO (1) | WO2020105494A1 (ja) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7033691B1 (ja) | 2021-10-29 | 2022-03-10 | 野村マイクロ・サイエンス株式会社 | 温超純水製造システムの立ち上げ方法、立ち上げプログラム、及び温超純水製造システム |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004122020A (ja) | 2002-10-03 | 2004-04-22 | Japan Organo Co Ltd | 超純水製造装置及び該装置における超純水製造供給システムの洗浄方法 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2960258B2 (ja) * | 1992-07-03 | 1999-10-06 | オルガノ株式会社 | 超純水製造装置 |
| JP5135654B2 (ja) | 2001-07-02 | 2013-02-06 | 栗田工業株式会社 | 二次純水製造装置 |
| JP4661009B2 (ja) * | 2001-09-04 | 2011-03-30 | 栗田工業株式会社 | 超純水製造システム |
| JP4034668B2 (ja) * | 2003-03-04 | 2008-01-16 | オルガノ株式会社 | 超純水製造システムおよびその運転方法 |
| JP6225487B2 (ja) | 2013-04-11 | 2017-11-08 | 栗田工業株式会社 | 超純水製造システム及び超純水製造供給システム |
| KR102027026B1 (ko) * | 2013-07-24 | 2019-09-30 | 쿠리타 고교 가부시키가이샤 | 초순수 제조 시스템, 초순수 제조 공급 시스템 및 그 세정 방법 |
| CN105517960A (zh) * | 2013-10-04 | 2016-04-20 | 栗田工业株式会社 | 超纯水制造装置 |
| JP6940962B2 (ja) | 2017-03-09 | 2021-09-29 | オルガノ株式会社 | 中空糸膜装置の洗浄方法、限外ろ過膜装置、超純水製造装置及び中空糸膜装置の洗浄装置 |
-
2018
- 2018-11-22 JP JP2018219467A patent/JP7171386B2/ja active Active
-
2019
- 2019-11-11 CN CN201980063396.5A patent/CN112770825B/zh active Active
- 2019-11-11 WO PCT/JP2019/044156 patent/WO2020105494A1/ja active Application Filing
- 2019-11-11 KR KR1020217006613A patent/KR20210091115A/ko unknown
- 2019-11-20 TW TW108142091A patent/TW202039065A/zh unknown
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004122020A (ja) | 2002-10-03 | 2004-04-22 | Japan Organo Co Ltd | 超純水製造装置及び該装置における超純水製造供給システムの洗浄方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP7171386B2 (ja) | 2022-11-15 |
| CN112770825A (zh) | 2021-05-07 |
| WO2020105494A1 (ja) | 2020-05-28 |
| TW202039065A (zh) | 2020-11-01 |
| CN112770825B (zh) | 2023-05-12 |
| JP2020081957A (ja) | 2020-06-04 |
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