CN112770825B - 超纯水制造装置的启动方法以及超纯水制造装置 - Google Patents

超纯水制造装置的启动方法以及超纯水制造装置 Download PDF

Info

Publication number
CN112770825B
CN112770825B CN201980063396.5A CN201980063396A CN112770825B CN 112770825 B CN112770825 B CN 112770825B CN 201980063396 A CN201980063396 A CN 201980063396A CN 112770825 B CN112770825 B CN 112770825B
Authority
CN
China
Prior art keywords
water
flow path
ultrapure water
starting
water production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201980063396.5A
Other languages
English (en)
Chinese (zh)
Other versions
CN112770825A (zh
Inventor
松井恭则
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nomura Micro Science Co Ltd
Original Assignee
Nomura Micro Science Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nomura Micro Science Co Ltd filed Critical Nomura Micro Science Co Ltd
Publication of CN112770825A publication Critical patent/CN112770825A/zh
Application granted granted Critical
Publication of CN112770825B publication Critical patent/CN112770825B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/58—Multistep processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D19/00—Degasification of liquids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/14—Ultrafiltration; Microfiltration
    • B01D61/145—Ultrafiltration
    • B01D61/146—Ultrafiltration comprising multiple ultrafiltration steps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/14—Ultrafiltration; Microfiltration
    • B01D61/147—Microfiltration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/14—Ultrafiltration; Microfiltration
    • B01D61/22—Controlling or regulating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D63/00—Apparatus in general for separation processes using semi-permeable membranes
    • B01D63/02—Hollow fibre modules
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D65/00—Accessories or auxiliary operations, in general, for separation processes or apparatus using semi-permeable membranes
    • B01D65/02—Membrane cleaning or sterilisation ; Membrane regeneration
    • B01D65/022—Membrane sterilisation
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
    • C02F1/444—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis by ultrafiltration or microfiltration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2311/00—Details relating to membrane separation process operations and control
    • B01D2311/25—Recirculation, recycling or bypass, e.g. recirculation of concentrate into the feed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2313/00—Details relating to membrane modules or apparatus
    • B01D2313/18—Specific valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2313/00—Details relating to membrane modules or apparatus
    • B01D2313/50—Specific extra tanks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2313/00—Details relating to membrane modules or apparatus
    • B01D2313/56—Specific mechanisms for loading the membrane in a module
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2313/00—Details relating to membrane modules or apparatus
    • B01D2313/57—Tools used for removal of membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/30—Treatment of water, waste water, or sewage by irradiation
    • C02F1/32—Treatment of water, waste water, or sewage by irradiation with ultraviolet light
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
    • C02F2103/02—Non-contaminated water, e.g. for industrial water supply
    • C02F2103/04—Non-contaminated water, e.g. for industrial water supply for obtaining ultra-pure water

Landscapes

  • Chemical & Material Sciences (AREA)
  • Water Supply & Treatment (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Environmental & Geological Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Hydrology & Water Resources (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Degasification And Air Bubble Elimination (AREA)
  • Treatment Of Water By Ion Exchange (AREA)
  • Physical Water Treatments (AREA)
CN201980063396.5A 2018-11-22 2019-11-11 超纯水制造装置的启动方法以及超纯水制造装置 Active CN112770825B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2018-219467 2018-11-22
JP2018219467A JP7171386B2 (ja) 2018-11-22 2018-11-22 超純水製造装置の立ち上げ方法及び超純水製造装置
PCT/JP2019/044156 WO2020105494A1 (ja) 2018-11-22 2019-11-11 超純水製造装置の立ち上げ方法及び超純水製造装置

Publications (2)

Publication Number Publication Date
CN112770825A CN112770825A (zh) 2021-05-07
CN112770825B true CN112770825B (zh) 2023-05-12

Family

ID=70773693

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201980063396.5A Active CN112770825B (zh) 2018-11-22 2019-11-11 超纯水制造装置的启动方法以及超纯水制造装置

Country Status (5)

Country Link
JP (1) JP7171386B2 (ja)
KR (1) KR20210091115A (ja)
CN (1) CN112770825B (ja)
TW (1) TW202039065A (ja)
WO (1) WO2020105494A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7033691B1 (ja) 2021-10-29 2022-03-10 野村マイクロ・サイエンス株式会社 温超純水製造システムの立ち上げ方法、立ち上げプログラム、及び温超純水製造システム

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0615264A (ja) * 1992-07-03 1994-01-25 Japan Organo Co Ltd 超純水製造装置
JP2003071444A (ja) * 2001-09-04 2003-03-11 Kurita Water Ind Ltd 超純水製造システム
CN1526649A (zh) * 2003-03-04 2004-09-08 奥加诺株式会社 超纯水制造系统及其运转方法
JP2014217830A (ja) * 2013-04-11 2014-11-20 栗田工業株式会社 超純水製造システム及び超純水製造供給システム
CN105283422A (zh) * 2013-07-24 2016-01-27 栗田工业株式会社 超纯水制造系统、超纯水制造供给系统及其洗涤方法
CN105517960A (zh) * 2013-10-04 2016-04-20 栗田工业株式会社 超纯水制造装置
JP2018144014A (ja) * 2017-03-09 2018-09-20 オルガノ株式会社 中空糸膜装置の洗浄方法、限外ろ過膜装置、超純水製造装置及び中空糸膜装置の洗浄装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5135654B2 (ja) 2001-07-02 2013-02-06 栗田工業株式会社 二次純水製造装置
JP4480061B2 (ja) 2002-10-03 2010-06-16 オルガノ株式会社 超純水製造装置及び該装置における超純水製造供給システムの洗浄方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0615264A (ja) * 1992-07-03 1994-01-25 Japan Organo Co Ltd 超純水製造装置
JP2003071444A (ja) * 2001-09-04 2003-03-11 Kurita Water Ind Ltd 超純水製造システム
CN1526649A (zh) * 2003-03-04 2004-09-08 奥加诺株式会社 超纯水制造系统及其运转方法
JP2014217830A (ja) * 2013-04-11 2014-11-20 栗田工業株式会社 超純水製造システム及び超純水製造供給システム
CN105283422A (zh) * 2013-07-24 2016-01-27 栗田工业株式会社 超纯水制造系统、超纯水制造供给系统及其洗涤方法
CN105517960A (zh) * 2013-10-04 2016-04-20 栗田工业株式会社 超纯水制造装置
JP2018144014A (ja) * 2017-03-09 2018-09-20 オルガノ株式会社 中空糸膜装置の洗浄方法、限外ろ過膜装置、超純水製造装置及び中空糸膜装置の洗浄装置

Also Published As

Publication number Publication date
KR20210091115A (ko) 2021-07-21
JP7171386B2 (ja) 2022-11-15
CN112770825A (zh) 2021-05-07
WO2020105494A1 (ja) 2020-05-28
TW202039065A (zh) 2020-11-01
JP2020081957A (ja) 2020-06-04

Similar Documents

Publication Publication Date Title
KR102092441B1 (ko) 초순수 제조 장치
KR102027026B1 (ko) 초순수 제조 시스템, 초순수 제조 공급 시스템 및 그 세정 방법
KR102463873B1 (ko) 중공사막장치의 세정방법, 한외여과막장치, 초순수 제조장치 및 중공사막장치의 세정장치
JP7093202B2 (ja) 水処理システム
TW201941817A (zh) 超純水製造系統及超純水製造系統之運轉方法
WO2018051551A1 (ja) 超純水製造装置
JP2018043229A (ja) 超純水製造装置
CN112770825B (zh) 超纯水制造装置的启动方法以及超纯水制造装置
KR20190005843A (ko) 초순수 제조 장치의 기동 방법
CN206502694U (zh) 一种蒸汽锅炉的供水系统
JP6344114B2 (ja) 水処理装置及び水処理設備の洗浄方法
JP6141610B2 (ja) 水処理装置の運転方法、及び飲用水を製造する方法
JP4196222B2 (ja) 超純水製造用膜分離装置の洗浄装置
KR101806144B1 (ko) 제어-삼투 및 역삼투를 이용한 담수화 시스템
CN108128848A (zh) 一种新型水净化处理方法
JP2006212540A (ja) 化学洗浄廃液の処理方法
JP2013252505A (ja) 透析用水製造装置
JP4296469B2 (ja) 超純水製造用膜分離装置の洗浄方法
CN206447699U (zh) 一种带有反渗透膜保护装置的除盐系统
JP4552483B2 (ja) 水処理ユニットの熱水通水処理方法および純水製造装置の組立方法
US20230398499A1 (en) Method of cleaning ultrafiltration membrane module and management method of ultrapure water manufacturing system using same
JP2014057911A (ja) 水処理装置及び水処理装置の運転方法
JP2005046801A (ja) 水処理方法および装置
JP2004154713A (ja) 超純水製造装置
JP6981331B2 (ja) 超純水供給装置

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant