KR20210061926A - 반송차, 반송로 및 반송 시스템 - Google Patents

반송차, 반송로 및 반송 시스템 Download PDF

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Publication number
KR20210061926A
KR20210061926A KR1020200135648A KR20200135648A KR20210061926A KR 20210061926 A KR20210061926 A KR 20210061926A KR 1020200135648 A KR1020200135648 A KR 1020200135648A KR 20200135648 A KR20200135648 A KR 20200135648A KR 20210061926 A KR20210061926 A KR 20210061926A
Authority
KR
South Korea
Prior art keywords
container
unit
transport vehicle
workpiece
frame
Prior art date
Application number
KR1020200135648A
Other languages
English (en)
Korean (ko)
Inventor
타케시 스나가와
Original Assignee
가부시기가이샤 디스코
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시기가이샤 디스코 filed Critical 가부시기가이샤 디스코
Publication of KR20210061926A publication Critical patent/KR20210061926A/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G35/00—Mechanical conveyors not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
KR1020200135648A 2019-11-20 2020-10-20 반송차, 반송로 및 반송 시스템 KR20210061926A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2019-210049 2019-11-20
JP2019210049A JP7366500B2 (ja) 2019-11-20 2019-11-20 搬送車、搬送路及び搬送システム

Publications (1)

Publication Number Publication Date
KR20210061926A true KR20210061926A (ko) 2021-05-28

Family

ID=75907834

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020200135648A KR20210061926A (ko) 2019-11-20 2020-10-20 반송차, 반송로 및 반송 시스템

Country Status (4)

Country Link
JP (1) JP7366500B2 (ja)
KR (1) KR20210061926A (ja)
CN (1) CN112824268A (ja)
TW (1) TW202120412A (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06177244A (ja) 1992-12-01 1994-06-24 Disco Abrasive Syst Ltd ダイシングシステム

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3674065B2 (ja) * 1994-11-11 2005-07-20 株式会社豊田自動織機 搬送システムにおけるバッテリ充電方法及びその装置
JP2004238088A (ja) 2003-02-03 2004-08-26 Murata Mach Ltd 昇降台
JP2005194009A (ja) * 2004-01-05 2005-07-21 Asyst Shinko Inc 懸垂型搬送台車
JP2008510673A (ja) 2004-08-24 2008-04-10 ブルックス オートメーション インコーポレイテッド 搬送システム
JP5382470B2 (ja) * 2010-11-04 2014-01-08 村田機械株式会社 搬送システム及び搬送方法
WO2015011859A1 (ja) 2013-07-23 2015-01-29 村田機械株式会社 天井搬送車および天井搬送車の制御方法
JP6191543B2 (ja) * 2014-05-22 2017-09-06 株式会社ダイフク 搬送装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06177244A (ja) 1992-12-01 1994-06-24 Disco Abrasive Syst Ltd ダイシングシステム

Also Published As

Publication number Publication date
CN112824268A (zh) 2021-05-21
JP7366500B2 (ja) 2023-10-23
TW202120412A (zh) 2021-06-01
JP2021082091A (ja) 2021-05-27

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