KR20210042254A - 절삭 블레이드의 식별 방법 및 가공 장치 - Google Patents
절삭 블레이드의 식별 방법 및 가공 장치 Download PDFInfo
- Publication number
- KR20210042254A KR20210042254A KR1020200129290A KR20200129290A KR20210042254A KR 20210042254 A KR20210042254 A KR 20210042254A KR 1020200129290 A KR1020200129290 A KR 1020200129290A KR 20200129290 A KR20200129290 A KR 20200129290A KR 20210042254 A KR20210042254 A KR 20210042254A
- Authority
- KR
- South Korea
- Prior art keywords
- blade
- cutting
- unit
- cutting blade
- information
- Prior art date
Links
- 238000005520 cutting process Methods 0.000 title claims abstract description 420
- 238000000034 method Methods 0.000 title claims abstract description 41
- 238000003754 machining Methods 0.000 title description 10
- 238000003384 imaging method Methods 0.000 claims abstract description 104
- 238000012545 processing Methods 0.000 claims description 143
- 238000012546 transfer Methods 0.000 claims description 6
- 238000012790 confirmation Methods 0.000 abstract description 22
- 238000007726 management method Methods 0.000 description 90
- 238000003825 pressing Methods 0.000 description 49
- 230000000875 corresponding effect Effects 0.000 description 30
- 230000007246 mechanism Effects 0.000 description 15
- 238000013523 data management Methods 0.000 description 12
- 238000012384 transportation and delivery Methods 0.000 description 11
- 238000001514 detection method Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 238000003860 storage Methods 0.000 description 8
- 230000005540 biological transmission Effects 0.000 description 6
- 239000006061 abrasive grain Substances 0.000 description 5
- 210000000078 claw Anatomy 0.000 description 5
- 230000006870 function Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 238000004590 computer program Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 239000002390 adhesive tape Substances 0.000 description 3
- 230000000295 complement effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000002596 correlated effect Effects 0.000 description 2
- 239000000284 extract Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/06—Grinders for cutting-off
-
- G06K9/20—
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Dicing (AREA)
- Automatic Tool Replacement In Machine Tools (AREA)
- Machine Tool Sensing Apparatuses (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-2019-185951 | 2019-10-09 | ||
JP2019185951A JP7316901B2 (ja) | 2019-10-09 | 2019-10-09 | 切削ブレードの識別方法及び加工装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR20210042254A true KR20210042254A (ko) | 2021-04-19 |
Family
ID=75379484
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020200129290A KR20210042254A (ko) | 2019-10-09 | 2020-10-07 | 절삭 블레이드의 식별 방법 및 가공 장치 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP7316901B2 (ja) |
KR (1) | KR20210042254A (ja) |
SG (1) | SG10202009276RA (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI765709B (zh) * | 2021-05-19 | 2022-05-21 | 佳陞科技有限公司 | 換刀裝置及換刀裝置操作方法 |
CN116021654B (zh) * | 2023-04-02 | 2023-07-25 | 西北电子装备技术研究所(中国电子科技集团公司第二研究所) | 一种晶片切割自动换刀装置的换刀方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011079098A (ja) | 2009-10-07 | 2011-04-21 | Disco Abrasive Syst Ltd | ブレード交換装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63123660A (ja) * | 1986-11-10 | 1988-05-27 | Toyota Motor Corp | 物品識別装置 |
JP2000061783A (ja) * | 1998-08-14 | 2000-02-29 | Japan Nuclear Fuel Co Ltd(Jnf) | 研削砥石の表面状態診断方法及び診断装置 |
JP4791813B2 (ja) * | 2005-12-08 | 2011-10-12 | 株式会社ディスコ | 切削装置 |
-
2019
- 2019-10-09 JP JP2019185951A patent/JP7316901B2/ja active Active
-
2020
- 2020-09-21 SG SG10202009276RA patent/SG10202009276RA/en unknown
- 2020-10-07 KR KR1020200129290A patent/KR20210042254A/ko active Search and Examination
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011079098A (ja) | 2009-10-07 | 2011-04-21 | Disco Abrasive Syst Ltd | ブレード交換装置 |
Also Published As
Publication number | Publication date |
---|---|
JP2021058986A (ja) | 2021-04-15 |
SG10202009276RA (en) | 2021-05-28 |
JP7316901B2 (ja) | 2023-07-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination |