KR20200054134A - Electrolytic treatment assembly and surface treatment device using the same - Google Patents

Abstract

The electrolytic treatment assembly 100 mounted on the surface treatment tank 10 for electrolytically treating the surface of the workpiece 1 set on the cathode comprises a nozzle unit 200 and an anode unit 300 integrally connected to the nozzle unit. Includes. The nozzle unit includes a plurality of nozzle pipes 210, a common pipe 220, and a pipe joint 230 connecting the common pipe to the external pipe. The positive electrode unit includes a positive electrode box 320 and a feeder 330 that connects the insoluble positive electrode to the external feeder 40 installed in the surface treatment tank. The anode box includes a plurality of nozzle tubes and at least one insoluble anode 310 disposed at a position away from the horizontal direction, and a partition wall disposed at a distance away from the insoluble anode.

Description

Electrolytic treatment assembly and surface treatment device using the same

The present invention relates to an electrolytic treatment assembly disposed in a surface treatment tank such as an electrolytic plating apparatus, and a surface treatment apparatus using the same.

In a surface treatment apparatus such as an electroplating apparatus, as shown in Patent Document 1, for example, a net-shaped box and a nozzle tube are provided on both sides of a plated bath that conveys a work path. In the conductive net-shaped box, a consumable anode ball (soluble anode) is accommodated. A nozzle tube is disposed between the work and the net-shaped box. A plurality of ejection openings (nozzles) are arranged in a vertical line in the nozzle tube, and the plating solution can be ejected toward the surface to be processed of the workpiece.

In Patent Document 2, an insoluble positive electrode plate in which a number of through holes are formed and a nozzle tube fixed on the back side of the insoluble positive electrode plate are integrated. The nozzle tube is fixed to the insoluble anode plate at a position corresponding to the through hole, and the processing liquid is ejected toward the work through the nozzle tube and through hole.

Japanese Patent Application Publication No. 2012-046782 Japanese Patent Application Publication No. 2002-226993

In the soluble electrode of Patent Document 1, an electrode material is dissolved and becomes a plating component. Fusible electrodes are consumables and require replacement. In addition, the soluble electrode is not formed only with a plating component, and has a defect that includes impurities (for example, phosphorus P). On the other hand, in the insoluble electrode of Patent Document 2, the electrode material is not dissolved, and the metal plus ion (for example, cupric oxide) in the plating solution in the plating bath is a plating component, and the insoluble electrode is used only as an electrode, so that it is more than a soluble electrode. outstanding. Particularly, when a high current density of, for example, 10 to 10 A / dm ² is achieved, it is preferable to use an insoluble electrode because the soluble electrode has high consumption.

Moreover, in Patent Document 2, since the anode and the nozzle tube are integrally connected, the anode and the nozzle tube can be integrally separated from the plating bath during maintenance, and workability is improved.

However, in Patent Document 2, since many through-holes are indispensable to the insoluble positive electrode plate, the electrical resistance of the positive electrode plate increases. Likewise, in the conductive net-shaped box of Patent Document 1, an increase in electrical resistance is unavoidable. In addition, the insoluble positive electrode plate of Patent Document 2 is exposed in a plating bath. In order to avoid deterioration in plating quality due to negative ions in the plating bath adhering to the insoluble positive electrode plate, the entire surface of the insoluble positive electrode plate must be covered by the ion exchange membrane. If the surrounding of the insoluble anode plate is surrounded by a partition wall to prevent the invasion of negative ions, the flow from the nozzle tube toward the workpiece is also blocked by the diaphragm.

In some embodiments of the present invention, it is possible to improve maintenance workability and the like by integrating the insoluble anode and the nozzle tube while preventing negative ions in the treatment tank from entering the insoluble anode side without increasing the electrical resistance of the anode. It is an object to provide an electrolytic treatment assembly and a surface treatment apparatus using the same.

(1) An aspect of the present invention is an electrolytic treatment assembly mounted on a surface treatment tank for electrolytically treating the surface of a work set on the cathode,

A nozzle unit,

It has an anode unit integrally connected to the nozzle unit,

The nozzle unit,

A plurality of nozzle tubes for ejecting treatment liquid from different positions in the vertical direction,

A common pipe supplying the processing liquid to the plurality of nozzle pipes,

It includes a pipe joint for connecting the common pipe to the external pipe installed in the surface treatment tank,

The anode unit,

At least one insoluble anode disposed at a position away from the plurality of nozzle tubes in a horizontal direction,

An anode box including the at least one insoluble anode and a partition wall disposed apart from the horizontal direction, and surrounding the at least one insoluble anode by the partition wall;

It relates to an electrolytic treatment assembly having a feeding portion for connecting the at least one insoluble anode to an external feeding portion installed in the surface treatment tank.

According to the electrolytic treatment assembly according to one aspect of the present invention, the nozzle unit and the anode unit are integrally attached to the surface treatment tank by detaching the feeding portion of the anode unit with respect to the external feeding portion while detaching the pipe joint of the nozzle unit with respect to the external pipe. Can be removed. As a result, installation of the assembly and workability of maintenance are improved. Moreover, since the insoluble anode does not require a net-like portion or a large number of through holes, electrical resistance is not increased. In addition, the periphery of the insoluble anode is partitioned from the surface treatment tank by a partition wall, and the partition wall generally transmits metal ions (plus ions) in the treatment liquid, while negative ions generated in the surface treatment tank enter the insoluble anode plate side. You can stop. Since the plurality of nozzle pipes are outside the partition walls, the ejection of the processing liquid from the plurality of nozzle pipes is not obstructed by the partition walls.

(2) In one aspect (1) of the present invention, the feeding portion includes a connecting terminal portion electrically connected to the outer feeding portion disposed at an edge portion of an upper opening of the surface treatment tank, and the common piping is The upper end of each of the plurality of nozzle pipes may be formed to communicate with each other and extend horizontally from the top of the plurality of nozzle pipes. In this way, the connection between the piping joint of the assembly and the external piping of the surface treatment tank and the connection between the feed portion of the assembly and the external feed portion of the surface treatment tank can be performed from the upper side of the surface treatment tank. Thereby, the workability of detaching the assembly from the surface treatment tank is improved.

(3) In one aspect (2) of the present invention, the common piping is disposed at a position higher than the position of the upper end of the anode unit, and the piping joint passes through the top of the anode unit to open the upper opening of the surface treatment tank. You may connect with the said external piping arrange | positioned at the said edge part. In this way, when inserting the assembly into the surface treatment tank from directly above the upper opening of the surface treatment tank, the member interfering with the assembly is eliminated. Since the assembly inserted in the surface treatment tank is connected to the external feeder and the external pipe installed at the edge of the upper opening of the surface treatment tank, the workability of installing the assembly in the surface treatment tank is improved. Thereby, the workability to detach the assembly from the surface treatment tank is further improved.

(4) In one aspect (1) to (3) of the present invention, the lower end portions of the plurality of nozzle tubes may be fixed to the lower end portions of the positive electrode box. In this way, the plurality of nozzle tubes are stably supported at the upper and lower ends.

(5) In one aspect (1) to (4) of the present invention, at least one of the partition walls may be formed of a material on the surface side partition wall facing the plurality of nozzle tubes to selectively transmit metal ions in the treatment liquid. In this way, metal ions generated in the partition wall can be supplied to the work side through the surface side partition wall, and the electrolytic treatment of the work surface is promoted.

(6) In one aspect (5) of the present invention, a back side partition wall facing the front wall side partition wall among the partition walls may have an opening through which the treatment liquid flows. In this way, the processing liquid is supplied from above or below the partition wall, the processing liquid is discharged from the opening of the rear side partition wall, and the processing liquid in the partition wall can be circulated.

(7) In one aspect (6) of the present invention, the at least one insoluble anode includes a plurality of insoluble anodes arranged with a gap between two neighboring each other in the horizontal direction, and the rear side partition wall comprises the two It may have the opening at a position facing the gap between the insoluble anodes of the dog. In this way, the processing liquid between the insoluble anode and the surface-side partition wall can be guided through the gap to the opening to promote circulation of the processing liquid within the partition wall.

(8) In one aspect (1) to (7) of the present invention, the anode box may hold a shielding mask that shields a portion of the electric field formed between the at least one insoluble anode and the work. By preventing an electric field from being formed in an unnecessary area by the shielding mask, it is possible to increase the electrolytic treatment quality of the work.

(9) In one aspect (8) of the present invention, the shielding mask may include a first shielding mask that shields the lower region of the electrolysis and a second shielding mask that shields the upper region of the electrolysis. Thereby, it is possible to prevent the electric field from being concentrated on the upper edge and the lower edge of the work.

(10) In one aspect (9) of the present invention, the anode box may have an adjustment mechanism that adjusts a vertical mounting position of each of the first shielding mask and the second shielding mask. Thereby, the mounting positions of the first and second shielding masks in the vertical direction are respectively adjusted such that the heights of the opening windows of the electric field fit the sizes of the vertical directions of the work.

(11) Another aspect of the present invention,

A surface treatment tank for electrolytically treating the surface of the work;

It relates to a surface treatment apparatus having the electrolytic treatment assembly according to any one of the above (1) to (10) disposed in the surface treatment tank.

According to another aspect of the present invention, it is possible to provide a surface treatment apparatus that exerts the actions and effects described in (1) to (10) above.

1 is a cross-sectional view of a continuous plating apparatus according to an embodiment of the present invention.
FIG. 2 is a front view of the electrolytic treatment assembly in the plating bath of FIG. 1 as viewed from the work side.
3 is a plan view of a portion of the continuous plating apparatus of FIG. 1.
FIG. 4 is a view showing two assemblies arranged along the long direction of the plating bath of FIG. 1.
5 is a view showing a shielding mask held in the assembly.
6 is a view showing a first shielding mask and a second shielding mask.
7 is a cross-sectional view of the adjustment mechanism for adjusting the vertical mounting positions of the first shielding mask and the second shielding mask.

Hereinafter, suitable embodiments of the present invention will be described in detail. On the other hand, the present embodiment described below does not unduly limit the contents of the present invention as set forth in the claims, and the entire structure described in this embodiment cannot be said to be essential as a solution to the present invention.

1. Overview of continuous plating equipment

1 is a cross-sectional view of a surface treatment apparatus according to the present embodiment, for example, a continuous plating apparatus, and FIG. 2 is a plan view. In FIG. 1, the plating bath 10 is a bath for plating the work 1 by receiving the work 1, which is stretched down and supported by the conveying jig 20, in the plating liquid 2. The plating bath 10 has a main wall and a bottom wall, and accommodates the plating liquid 2 as a processing liquid.

The work 1 is a circuit board, a flexible circuit board, or the like, and, for example, both surfaces thereof are processed surfaces. The conveying jig 20 can continuously convey the workpiece and energize the workpiece 1. The work 1 functions as a cathode. In practice, a feeding part (which may be a conveying rail) in sliding contact with the conveying jig 20 is connected to the negative terminal of the power source, and the work 1 is set to the negative electrode through the feeding part and conveying jig 20.

The workpiece | work 1 which hangs down and is supported by the conveyance jig 20 is a direction orthogonal to the ground surface of FIG. 1, and is continuously conveyed along the conveyance direction A shown in FIG. The illustration of the means for continuously conveying the work 1 is omitted, and may be formed of a chain, a cylinder, or the like, which are continuously driven by a sprocket. One workpiece 1 is held in the conveying jig 20, and a plurality of workpieces 1 are continuously conveyed in the plating bath 10 as shown in FIG. On the other hand, the conveying jig 20, if the work 1 is a rigid body such as a circuit board, the upper end of the work 1 can be maintained by the chuck 21A, and the work 1 can be kept in a downwardly extended state. When the work 1 is flexible, such as a flexible circuit board, the conveying jig 20 has a frame portion 22, and the lower end of the work 1 can be held by the chuck 21B and towed downward.

2. Electrolytic treatment assembly

As shown in FIG. 1, the electrolytic treatment assembly 100 is provided in the plating bath 10. The assembly 100 has a nozzle unit 200 and an anode unit 300 integrally connected to the nozzle unit 200.

Here, FIGS. 2 and 3 show the assembly 100 disposed on the uppermost side of the plating bath 10, as shown in FIG. 4, a plurality of assemblies 100 along the long direction of the plating bath 10 Can be placed. In addition, when processing both surfaces of the work 1, two assemblies 100 are arranged on both sides of the work 1, and in FIG. 4, four assemblies 100 in total are arranged.

1 to 4, the nozzle unit 200 has a plurality of nozzle pipes 210, a common pipe 220, and a pipe joint 230. 1, each of the plurality of nozzle pipes 210 has a plurality of jet ports, for example, a plurality of nozzles 211 at different positions in the vertical direction. The plating solution is ejected from each nozzle 211. The plurality of nozzle tubes 210 are formed of an insulator and do not adversely affect the electric field acting on the work 1. As shown in FIG. 2, the common piping 220 communicates with one end of the plurality of nozzle pipes 210 to supply the plating liquid to the plurality of nozzle pipes 210. As shown in FIGS. 1 to 3, the pipe joint 230 is detachable from the external pipe 30 installed in the plating tank 10.

The positive electrode unit 300 has at least one, for example, a plurality of insoluble positive electrodes 310, a positive electrode box 320, and at least one, for example, two feeding parts 330. 2 and 4, each of the plurality of insoluble anodes 310 is disposed at a position away from the nozzle tube 210 in a horizontal direction. The anode box 320 includes a plurality of insoluble anodes 310 and a partition wall 321 disposed in a horizontal direction (surface side partition wall 321A, rear side partition wall 321B, side side partition wall 321C), A plurality of insoluble anode 310 is enclosed. The partition wall 321 is formed of an insulator and does not adversely affect the electric field acting on the work 1. The feeding part 330 is electrically connected to the plurality of insoluble anodes 310 and is detachable from an external feeding part installed in the plating tank 10.

The integration of the nozzle unit 200 and the anode unit 300 can be performed by appropriate fixing means. In this embodiment, as shown in FIGS. 1 and 2, the nozzle unit 200 and the anode unit 300 are integrated by two connecting portions 110. As shown in FIG. 1, the connection part 110 is fixed to one end of the anode unit 300, for example, the partition wall 321, and the other end of the nozzle unit 200, for example, common piping 220. ).

According to this assembly 100, the feed portion 330 of the positive electrode unit 300 is detached from the outer feed portion 40 while the pipe joint 230 of the nozzle unit 200 is detached from the outer pipe 30. By doing so, the nozzle unit 200 and the anode unit 300 can be detachably attached to the plating bath 10. As a result, the installation and maintenance workability of the assembly 100 is improved. On the other hand, in the present embodiment, the position in the vertical direction of the assembly 100 is uniquely determined by placing the feeder 330 on the outer feeder 40, and the pipe joint 230 with respect to the outer pipe 30 ), The horizontal position of the assembly 100 is uniquely determined.

In this embodiment, since the insoluble anode 310 does not require a net-like portion or a plurality of through holes, electrical resistance is not increased. In addition, the periphery of the insoluble anode 310 is partitioned from the plating bath 10 by partitions 321 (321A to 321C), and the partitions 321 generally transmit at least a portion of metal ions (plus ions) in the plating solution. On the other hand, negative ions generated in the plating tank 10 can be prevented from invading the insoluble anode 310 side (in the partition wall 321). Since the plurality of nozzle tubes 210 are outside the partition wall 321, the ejection of the plating solution from the plurality of nozzle tubes 210 is not blocked by the partition wall 321.

In the present embodiment, the feeding part 330 is disposed at the edge of the upper opening 11 of the plating bath 10, for example, two connections, for example, electrically connected to two external feeding parts 40. It may include a terminal portion 331. In addition, the common pipe 220 is formed to extend horizontally from the top of the plurality of nozzle pipes 210 in communication with each upper end of the plurality of nozzle pipes 210. In this way, the connection between the piping joint 230 of the assembly 100 and the external piping 30 and the connection between the power feeding part 330 and the external power feeding part 40 of the assembly 100 are upper parts of the plating bath 10. It can be done by the side. As a result, the workability of detaching the assembly 100 from the plating bath 10 is improved. On the other hand, the positions of the two connection terminal portions 331 are positioned on both sides of the pipe joint 230 located in the center, as shown in FIG. 3, considering the wiring resistance of the plurality of insoluble anodes 310.

Here, when the positive electrode unit 300 has a plurality of insoluble positive electrode 310, as shown in Figures 1 and 5, it has a positive electrode plate (also called a positive electrode bar) 312 extending in the horizontal direction, a plurality of insoluble The anode 310 is supported while being electrically connected to the anode plate 312. In this case, the power feeding portion 330 is electrically connected to the positive electrode plate 312 as shown in FIG. 1.

In this embodiment, the common piping 220 is disposed at a position higher than the position of the upper end portion of the anode unit 300, as shown in FIGS. 1 and 2. As shown in FIG. 1, the piping joint 230 passes over the anode unit 300 and is connected to the external piping 30 disposed at the edge of the upper opening 11 of the plating bath 10. In this way, when inserting the assembly 100 into the plating bath 10 from directly above the upper opening 11 of the plating bath 10, the member interfering with the assembly 100 is eliminated. Since the assembly 100 inserted into the plating bath 10 is connected to the external feeder 40 and the external pipe 30 installed at the edge of the upper opening 11 of the plating bath 10, the assembly 100 The workability to install the plating bath 10 is improved. As a result, the workability of detaching the assembly 100 from the plating bath 10 is further improved.

In the present embodiment, the lower ends of the plurality of nozzle tubes 210 are fixed to the lower ends of the anode box 320. For example, as shown in FIG. 1, a protrusion 322 protruding horizontally from the surface-side partition wall 321A can be provided, and the lower ends of the plurality of nozzle tubes 210 can be fixed to the protrusion 322. In this way, the plurality of nozzle pipes 210 are stably supported by the upper and lower ends of the common pipe 220 and the protrusions 322.

In the present embodiment, the surface-side partition wall 321A facing at least a plurality of nozzle tubes 210 of the partition wall 321 is made of a material (for example, a cation exchange membrane or ion exchange resin) that selectively permeates metal ions in the plating solution. Is formed. In this way, metal ions generated in the partition wall 321 can be supplied to the work 1 side through the partition wall 321, and the electrolytic treatment of the surface of the work 1 is promoted.

In the present embodiment, as shown in FIG. 2, the back side partition wall 321B of the partition wall 321 may have an opening (the area with an X mark in FIG. 2) through which the plating solution flows (321B1). In this way, the plating solution is supplied from above or below the partition wall 321, the plating solution is discharged from the opening 321B1 of the rear side partition wall 321B, and a circulation path of the plating solution in the partition wall 321 is secured.

In this embodiment, the plurality of insoluble anodes 310 can be arranged with a gap 311 between two neighboring one another in the horizontal direction, as shown in FIG. 4. In this case, the rear side partition wall 321B may have an opening 321B1 at a position facing the gap 311 between the two insoluble anodes 310 and 310 (see FIG. 1). In this way, the plating solution between the insoluble anode 310 and the surface-side partition wall 321A can be guided to the opening 321B1 through the gap 311 to promote circulation of the plating solution in the partition wall 321.

Particularly, in this embodiment, as shown in Figs. 1 and 4, overflow baths 12A and 12B are provided on both sides of the plating bath 10. When the liquid level of the plating liquid in the plating tank 10 exceeds a certain height, the plating liquid in the plating tank 10 is discharged to the overflow tanks 12A and 12B. The above-described gap 311 and the opening 321B1 may form a flow path in which the plating solution in the partition wall 321 faces the overflow tanks 12A and 12B.

In the present embodiment, the anode box 320 can hold a shielding mask 350 that shields a part of the electric field formed between the insoluble anode 310 and the work 1, as shown in FIG. 5. The shielding mask 350 prevents an electric field from being formed in unnecessary areas, thereby improving the plating quality of the work 1. It has a mask portion 351 covering the surface facing the lower end of the work (1). As shown in FIG. 1, the shielding mask 350 illustrated in FIG. 5 is vertically supported in an area between the surface side partition wall 321A and the plurality of nozzle tubes 210. As shown in FIG. 1, the mask part 351 is held by the shielding mask 350 by a plurality of protrusions 340 protruding forward from the surface-side partition wall 321A. The shielding mask 350 has vertical portions 352 extending upward from both sides of the mask portion 351, as shown in FIG. 5, and the upper ends of the vertical portions 352 are held on the surface-side partition walls 321A. do.

6, the shielding mask 350 may include a first shielding mask 350A and a second shielding mask 350B. The first shielding mask 350A shields the lower region of electrolysis formed between the insoluble anode 310 and the work 1. The second shielding mask 350B shields the region above the electrolysis. The first shielding mask 350A includes a mask portion 351A that shields a region under the electric field and a vertical portion 352A extending upwardly from both sides of the mask portion 351A. The second shielding mask 350B includes a mask portion 351B that shields the upper region of the electric field and a vertical portion 352B extending upwardly from both sides of the mask portion 351B.

The anode box 320 may have an adjustment mechanism that adjusts a mounting position in the vertical direction of each of the first shielding mask 350A and the second shielding mask 350B. An example of the adjustment mechanism is shown in FIG. 7, which is an enlarged view of a portion B in FIG. 6. 7 shows an elongated hole 353A having an elongated axis in the vertical direction in an upper region of the vertical portion 352A of the first shielding mask 350A. The first shielding mask 350A is allowed to move in the vertical direction in the range of the long hole 353A, and is mounted on the surface side partition wall 321A of the anode box 320 by the bolt 354A at a desired position. It is fixed to the plate 321A1. Thereby, the mounting position in the vertical direction of the first shielding mask 350A is adjusted. Similarly, the second shielding mask 350B is allowed to move in the vertical direction in the range of the long hole 353B, and the mounting position in the vertical direction is adjusted by the bolt 354B at the desired position.

In this way, the mounting positions of the first and second shielding masks 350A and 350B in the vertical direction are respectively adjusted so that the height H of the opening window of the electric field shown in Fig. 7 fits the size of the work 1 in the vertical direction. . To facilitate this adjustment, a vertical scale may be attached to the long holes 353A and 353B.

On the other hand, as described above, this embodiment has been described in detail, it will be readily understood by those skilled in the art that many modifications are possible without departing substantially from the novelty and effects of the present invention. Therefore, it is assumed that all such modifications are included in the scope of the present invention. For example, a term that is described at least once in a specification or a drawing, along with other terms that are broader or more synonymous, may be substituted for the other term in any part of the specification or drawing. Moreover, all combinations of the present embodiment and the modification are also included in the scope of the present invention.

1: Work 10: Surface treatment tank
11: upper opening 20: conveying jig
30: external piping 40: external power supply
100: electrolytic treatment assembly 110: connection
200: nozzle unit 210: nozzle tube
211: nozzle (spout) 220: common piping
230: piping joint 300: anode unit
310: insoluble anode 311: crevice
312: anode plate (anode bar) 320: anode box
321: bulkhead 321A: surface side bulkhead
321B: Back side partition wall 321B1: Opening
321C: side-side partition wall 322: protrusion
330: power supply unit 331: connection terminal unit
340: projection 350: shielding mask
350A: 1st shielding mask 350B: 2nd shielding mask
353A, 353B, 354A, 354B: Adjustment mechanism

Claims (11)

An electrolytic treatment assembly mounted on a surface treatment tank for electrolytically treating the surface of a workpiece set on a cathode,
A nozzle unit,
It has an anode unit integrally connected to the nozzle unit,
The nozzle unit,
A plurality of nozzle tubes for ejecting treatment liquid from different positions in the vertical direction,
A common pipe supplying the processing liquid to the plurality of nozzle pipes,
It includes a pipe joint for connecting the common pipe to the external pipe installed in the surface treatment tank,
The anode unit,
At least one insoluble anode disposed at a position away from the plurality of nozzle tubes in a horizontal direction,
An anode box including the at least one insoluble anode and a partition wall disposed apart from the horizontal direction, and surrounding the at least one insoluble anode by the partition wall;
An electrolytic treatment assembly, characterized in that it has a feeding portion for connecting the at least one insoluble anode to an external feeding portion installed in the surface treatment tank. According to claim 1,
The feeding portion includes a connecting terminal portion electrically connected to the outer feeding portion provided at an edge portion of an upper opening of the surface treatment tank,
The common pipe is in communication with each upper end (上端 部) of the plurality of nozzle pipes, characterized in that extending horizontally from the top of the plurality of nozzle pipes, electrolytic treatment assembly. According to claim 2,
The common pipe is disposed at a position higher than the upper end of the anode unit,
The piping joint is passed through the upper portion of the anode unit, characterized in that the electrolytic treatment assembly, characterized in that connected to the external piping provided in the edge portion of the upper opening of the surface treatment tank. The method according to any one of claims 1 to 3,
The lower end of the plurality of nozzle tubes (下端 部) is characterized in that fixed to the lower end of the anode box, the electrolytic treatment assembly. The method according to any one of claims 1 to 4,
The at least one of the partition walls, the surface-side partition walls facing the plurality of nozzle tubes, characterized in that formed of a material that selectively permeates the metal ions in the treatment liquid, the electrolytic treatment assembly. The method of claim 5,
Electrolytic treatment assembly, characterized in that the rear side of the partition wall facing the partition wall has an opening through which the treatment liquid flows. The method of claim 6,
The at least one insoluble anode includes a plurality of insoluble anodes arranged with a gap between two neighboring each other in the horizontal direction,
The rear side partition wall has the opening at a position facing the gap between the two insoluble anodes, the electrolytic treatment assembly. The method according to any one of claims 1 to 7,
The anode box is characterized in that it maintains a shielding mask that shields a portion of the electric field formed between the at least one insoluble anode and the work, electrolytic treatment assembly. The method of claim 8,
The shielding mask is characterized in that it comprises a first shielding mask for shielding the lower region of the electrolysis and a second shielding mask for shielding the upper region of the electrolysis, the electrolytic treatment assembly. The method of claim 9,
The anode box, characterized in that it has an adjustment mechanism for adjusting the mounting position in the vertical direction of each of the first shielding mask and the second shielding mask, the electrolytic treatment assembly. A surface treatment tank for electrolytically treating the surface of the work;
A surface treatment apparatus comprising the electrolytic treatment assembly according to any one of claims 1 to 10 disposed in the surface treatment tank.

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