TW201925540A - Electrolytic treatment assembly and surface treatment apparatus using same - Google Patents

Abstract

This electrolytic treatment assembly 100, which is fitted to a surface treatment tank 10 that performs an electrolytic treatment on the surface of a work 1 that is set on a negative electrode, comprises a nozzle unit 200 and a positive electrode unit 300 that is integrally connected with the nozzle unit. The nozzle unit comprises a plurality of nozzle pipes 210, a common pipe 220, and a pipe joint 230 which connects the common pipe to an external pipe. The positive electrode unit comprises a positive electrode box 320 and a power receiving part 330 which connects an insoluble positive electrode to an external power feeding part 40 that is set to the surface treatment tank. The positive electrode box comprises at least one insoluble positive electrode 310 which is arranged at a distance from the plurality of nozzle pipes in the horizontal direction, and a partition wall which is arranged at a distance from the insoluble positive electrode in the horizontal direction.

Description

Electrolytic treatment module and surface treatment device using the same

The present invention relates to an electrolytic treatment component arranged in a surface treatment tank of an electrolytic plating device and the like, and a surface treatment device using the same.

In a surface treatment apparatus such as an electrolytic plating apparatus, for example, as shown in Patent Document 1, a mesh box and a nozzle tube are provided on both sides of a conveying path sandwiching a workpiece in a plating tank. An anode ball (a soluble anode) is contained in the conductive mesh case as a consumable. A nozzle tube is arranged between the workpiece and the mesh box. The nozzle tube is provided with a plurality of ejection ports (nozzles) in a columnar manner, and the plating solution can be ejected toward the processed surface of the workpiece.

Patent Document 2 discloses that an insoluble anode plate having a large number of through holes formed therein is integrated with a nozzle tube fixed on the back surface side of the insoluble anode plate. The nozzle tube is fixed to the insoluble anode plate at a position corresponding to the through hole, and the processing liquid is ejected toward the workpiece through the nozzle tube and the through hole.
[Prior technical literature]
[Patent Literature]

[Patent Document 1] Japanese Patent Application Publication No. 2012-046782
[Patent Document 2] Japanese Patent Laid-Open No. 2002-226993

[Problems Solved by Invention]

According to the soluble electrode of Patent Document 1, the electrode material is dissolved and becomes a plating component. Soluble electrodes must be replaced as consumables. In addition, the soluble electrode is not only formed of a plating component, but has a disadvantage of containing impurities (for example, phosphorus P). On the one hand, the insoluble electrode of Patent Document 2 does not dissolve the electrode material, and the metal positive ions (such as copper oxide) in the plating solution in the plating bath become the plating component. The insoluble electrode is only used as an electrode, which is more soluble than Excellent. In particular, if a high current density of, for example, about 10 to 10 A / dm ² is required, the soluble electrode consumes a large amount. Therefore, it is desirable to use an insoluble electrode.

Furthermore, according to Patent Document 2, since the anode and the nozzle tube are integrally connected, the anode and the nozzle tube can be removed from the plating tank integrally at the time of maintenance and the like, thereby improving workability.

However, according to Patent Document 2, since a large number of through holes are indispensable in an insoluble anode plate, the resistance of the anode plate increases. Similarly, in the conductive mesh box of Patent Document 1, an increase in resistance cannot be avoided. The insoluble anode plate of Patent Document 2 is exposed in a plating bath. In order to avoid the degradation of the plating quality caused by the adhesion of negative ions in the plating tank to the insoluble anode plate, the entire surface of the insoluble anode plate must be covered with an ion exchange membrane. If the periphery of the insoluble anode plate is surrounded by a partition wall in an attempt to prevent the intrusion of negative ions, the jet flow from the nozzle tube to the workpiece will also be hindered by the partition wall.

The purpose of several aspects of the present invention is to provide an insoluble anode that can be integrated with a nozzle tube to improve the workability of maintenance, etc., without increasing the resistance of the anode and preventing the negative ions in the processing tank from entering the insoluble anode side. Electrolytic treatment module and surface treatment device using the same.

[Means to solve the problem]

(1) One aspect of the present invention relates to an electrolytic treatment component, which is characterized in that: the electrolytic treatment component is installed in a surface treatment tank that electrolytically treats the surface of a workpiece set as a cathode; and it has :
A nozzle unit and an anode unit integrally connected with the nozzle unit,
The nozzle unit includes:
A plurality of nozzle tubes which respectively eject the processing liquid from different positions in the vertical direction,
A common pipe for supplying the processing solution to the plurality of nozzle pipes and a pipe joint for connecting the common pipe to the external pipe provided with the surface treatment tank;
The anode unit has:
At least one insoluble anode disposed at a position spaced from the plurality of nozzle tubes in a horizontal direction,
An anode box including a partition wall spaced apart from the at least one insoluble anode in the horizontal direction and surrounding the at least one insoluble anode with the partition wall, and an external power supply unit provided on the surface treatment tank connected to the at least A powered part of an insoluble anode.

According to the electrolytic treatment module of one aspect of the present invention, the nozzle unit and the anode unit can be integrally attached to and detached from the surface treatment tank by piping joints for attaching and detaching the nozzle unit to and from the external power supply part and to the powered part of the anode unit. . As a result, the workability of component installation or maintenance is improved. In addition, the insoluble anode does not require a mesh portion or a large number of through holes, and therefore does not increase resistance. In addition, the periphery of the insoluble anode is divided by a partition wall and a surface treatment tank. In addition to generally allowing the metal ions (positive ions) in the treatment solution to pass through, the partition wall can also prevent negative ions generated in the surface treatment tank from entering the insoluble anode plate. side. In addition, the plurality of nozzle tubes are located outside the partition wall, so that the discharge of the processing liquid from the plurality of nozzle tubes is not hindered by the partition wall.

(2) In the aspect (1) of the present invention, the power-supplied portion may include a connection terminal portion electrically connected to the external power-supply portion disposed at an edge portion of the upper opening portion of the surface treatment tank, and the common The piping system communicates with each upper end portion of the plurality of nozzle tubes, and extends horizontally above the plurality of nozzle tubes. In this way, the connection of the piping joint to the module and the external piping of the surface treatment tank, and the connection of the power supply portion of the module and the external power supply portion of the surface treatment tank can be performed on the upper side of the surface treatment tank. This can improve the workability of assembly and disassembly of the component relative to the surface treatment tank.

(3) In the aspect (2) of the present invention, it is feasible that the common pipe is disposed at a position higher than the position of the upper end of the anode unit, and the piping joint passes through the upper surface of the anode unit to the surface treatment tank. The external piping provided at the edge portion of the upper opening is connected. In this way, when the component is inserted into the surface processing tank from directly above the opening in the upper portion of the surface processing tank, there will be no component that interferes with the component. The components inserted into the surface treatment tank are connected to the external power supply portion and the external piping provided at the edge portion of the upper opening of the surface treatment tank. Therefore, the workability of installing the components in the surface treatment tank is improved. This can further improve the workability of assembly and disassembly of the component with respect to the surface treatment tank.

(4) In aspects (1) to (3) of the present invention, it is feasible that the lower end portion of the plurality of nozzle tubes is fixed to the lower end portion of the anode box. In this way, the plurality of nozzle tubes can be stably supported by the upper and lower ends thereof.

(5) In the aspects (1) to (4) of the present invention, it is feasible that at least the surface-side partition wall facing the plurality of nozzle tubes among the partition walls is selected by the metal ions in the treatment liquid. Made of sexually permeable material. In this way, the metal ions generated in the partition wall can be supplied to the workpiece side through the surface-side partition wall, so that the electrolytic treatment of the surface of the workpiece can be promoted.

(6) In the aspect (5) of the present invention, it is feasible that the back side partition wall facing the front side partition wall among the partition walls has an opening through which the treatment liquid flows. In this way, the processing liquid is supplied from above or below the partition wall, and the processing liquid is discharged from the opening on the rear side partition wall, so that the processing liquid in the partition wall can be circulated.

(7) In the aspect (6) of the present invention, it is feasible that the at least one insoluble anode includes a plurality of insoluble anodes arranged in a spaced manner between the two adjacent in the horizontal direction, and the back side partition wall is at The opening is located at a position facing the gap between the two insoluble anodes. In this way, the processing liquid located between the insoluble anode and the surface-side partition wall can be guided to the opening through the gap, and the circulation of the processing liquid in the partition wall can be promoted.

(8) In aspects (1) to (7) of the present invention, it is feasible that the anode box maintains a shielding cover that partially shields a part of an electric field formed between the at least one insoluble anode and the workpiece. The shield can prevent the formation of an electric field in useless areas, and can improve the quality of electrolytic treatment of the workpiece.

(9) In the aspect (8) of the present invention, it is feasible that the above-mentioned shielding cover includes a first shielding cover that shields the lower area of the electrolysis, and a second shielding cover that shields the upper area of the electrolysis. This prevents the electric field from being concentrated on the upper edge and the lower edge of the workpiece.

(10) In the aspect (9) of the present invention, it is feasible that the anode box has an adjusting mechanism for adjusting a vertical mounting position of each of the first shielding cover and the second shielding cover. Thereby, the installation positions in the vertical direction of the first and second shields can be adjusted so that the height of the opening window of the electric field is consistent with the size of the workpiece in the vertical direction.

(11) Another aspect of the present invention relates to a surface treatment device having:
A surface treatment tank for electrolytically treating the surface of a workpiece, and an electrolytic treatment component disposed at any one of the above-mentioned (1) to (10) in the surface treatment tank.
According to another aspect of the present invention, it is possible to provide a surface treatment device capable of exerting the functions and effects described in the above (1) to (10).

Hereinafter, preferred embodiments of the present invention will be described in detail. In addition, the embodiment described below is not an unreasonable limitation on the content of the invention described in the scope of the patent application, and all the structures described in the embodiment are not limited to the solution of the invention.

1. Outline of Continuous Plating Apparatus FIG. 1 is a cross-sectional view of a surface treatment apparatus such as a continuous plating apparatus according to this embodiment, and FIG. 2 is a plan view. In FIG. 1, the plating tank 10 is a tank in which a workpiece 1 supported by the conveyance jig 20 by being suspended is stored in a plating solution 2 and the workpiece 1 is plated. The plating tank 10 has a peripheral wall and a bottom wall, and is used to store a plating solution 2 as a processing solution.

The work 1 is a circuit board, a flexible circuit board, or the like, and for example, both surfaces thereof are surfaces to be processed. In addition to the continuous conveyance of the workpiece, the conveyance jig 20 can also energize the workpiece 1. The work 1 functions as a cathode. Actually, a power supply unit (also a transport rail) that is in sliding contact with the transfer jig 20 is connected to the negative terminal of the power source, and the workpiece 1 is set as a cathode through the power supply unit and the transfer jig 20.

The work piece 1 supported by the conveying jig 20 by being suspended is in a direction orthogonal to the paper surface of FIG. 1 and is continuously conveyed in the conveying direction A shown in FIG. 2. Although the illustration of the means for continuously conveying the workpiece 1 is omitted, it may be constituted by a chain, a cylinder, or the like that is continuously driven by a sprocket. As shown in FIG. 2, a plurality of workpieces 1 held in one piece by the transfer jig 20 are continuously transferred in the plating tank 10. When the work piece 1 is a rigid body like a circuit board, the conveying jig 20 holds the upper end of the work piece 1 with the chuck 21A and holds the work piece 1 in a suspended state. When the work 1 is as flexible as a flexible circuit board or the like, the transport jig 20 has a frame portion 22, and the lower end of the work 1 can be held by the chuck 21B and pulled downward.

2. Electrolytic processing module As shown in FIG. 1, an electrolytic processing module 100 is provided in the plating tank 10. This assembly 100 includes a nozzle unit 200 and an anode unit 300 integrally connected to the nozzle unit 200.

Here, FIG. 2 and FIG. 3 show the module 100 arranged on the most upstream side of the plating tank 10, but as shown in FIG. 4, a plurality of modules 100 may be arranged along the longitudinal direction of the plating tank 10. When processing both sides of the workpiece 1, two modules 100 are arranged on both sides of the workpiece 1, and a total of four modules 100 are arranged in the fourth figure.

As shown in FIGS. 1 to 4, the nozzle unit 200 includes a plurality of nozzle pipes 210, a common pipe 220, and a piping joint 230. As shown in FIG. 1, each of the plurality of nozzle tubes 210 has a plurality of ejection ports at different positions in the vertical direction, such as a plurality of nozzles 211. The plating solution is ejected from each of the nozzles 211. The plurality of nozzle tubes 210 are formed of an insulator and do not adversely affect the electric field acting on the workpiece 1. As shown in FIG. 2, the common bypass tube 220 is in communication with each end portion of the plurality of nozzle tubes 210 and supplies a plating solution to the plurality of nozzle tubes 210. As shown in FIGS. 1 to 3, the piping joint 230 can be attached to and detached from the external piping 30 provided on the plating tank 10.

As shown in FIG. 1, the anode unit 300 includes at least one, for example, a plurality of insoluble anodes 310, an anode box 320, and at least one, for example, two powered portions 330. Each of the plurality of insoluble anodes 310 is disposed at a position spaced apart from the nozzle tube 210 in the horizontal direction as shown in FIG. 2 and FIG. 4. The anode case 320 includes a partition wall 321 (a front-side partition wall 321A, a back-side partition wall 321B, and a side-side partition wall 321C) which are arranged apart from a plurality of insoluble anodes 310 in the horizontal direction and surround the plurality of insoluble anodes 310. The partition wall 321 is formed of an insulator and has no adverse effect on the electric field acting on the workpiece 1. The powered portion 330 is electrically connected to the plurality of insoluble anodes 310 and can be attached to and detached from the external power supply portion provided in the plating tank 10.

The integration of the nozzle unit 200 and the anode unit 300 may be performed by appropriate fixing means. In the present embodiment, as shown in FIGS. 1 and 2, the nozzle unit 200 and the anode unit 300 are integrated by two connecting portions 110. As shown in FIG. 1, the connecting portion 110 has one end fixed to the anode unit 300 such as the partition wall 321 and the other end fixed to the nozzle unit 200 such as the common pipe 220.

According to this assembly 100, the piping joint 230 of the nozzle unit 200 is attached to and detached from the external piping 30, and the powered portion 330 of the anode unit 300 is attached to and detached from the external power supply unit 40, so that the nozzle unit 200 and the anode unit 300 can be integrated. Attached to the plating tank 10. Thereby, the workability of installation or maintenance of the module 100 is improved. In this embodiment, the position of the module 100 in the up-down direction is determined fundamentally by the external power supply unit 40 placing the power-supply portion 330, and the piping joint 230 is connected to the external piping 30 so that the horizontal direction of the module 100 Its position will be determined fundamentally.

In this embodiment, it is not necessary for the insoluble anode 310 to have a mesh portion or a large number of through-holes, so the resistance does not increase. In addition, the periphery of the insoluble anode 310 is divided by a partition wall 321 (321A-321C) and the plating tank 10. Generally, at least a part of the partition wall 321 can transmit metal ions (positive ions) in the plating solution, and on the other hand It is possible to prevent the negative ions generated in the plating tank 10 from entering the insoluble anode 310 (inside the partition wall 321). The plurality of nozzle tubes 210 are located outside the partition wall 321, and therefore, the spraying of the plating solution from the plurality of nozzle tubes 210 is not affected by the partition wall 321 at all.

In this embodiment, the powered portion 330 may include, for example, two connection terminal portions 331 that are electrically connected to, for example, two external power supply portions 40 disposed at the edge portion of the opening portion 11 above the plating tank 10. In addition, the common pipe 220 is in communication with each upper end portion of the plurality of nozzle tubes 210 and is formed by horizontally extending above the plurality of nozzle tubes 210. If so, the connection of the piping joint 230 of the module 100 and the external piping 30 and the connection of the powered portion 330 of the module 100 and the external power supply portion 40 can be performed on the upper side of the plating tank 10. Thereby, the workability of assembling and removing the assembly 100 with respect to the plating tank 10 can be improved. In addition, the positions of the two connection terminal portions 331 are set at both sides of the central pipe joint 230 as shown in FIG. 3 considering the wiring resistance of the plurality of insoluble anodes 310.

Here, when the anode unit 300 has a plurality of insoluble anodes 310, as shown in FIG. 1 and FIG. 5, a horizontally extending anode plate (also referred to as an anode rod) 312 is provided, and a plurality of insoluble anodes 310 and The anode plate 312 is electrically connected and supported. In this case, the powered portion 330 is electrically connected to the anode plate 312 as shown in FIG. 1.

In the present embodiment, as shown in FIG. 1 and FIG. 2, the common wild tube 220 is disposed at a position higher than the upper end portion of the anode unit 300. As shown in FIG. 1, the piping joint 230 is connected to the external piping 30 disposed at the edge of the opening 11 above the plating tank 10 through the anode unit 300. In this way, when the component 100 is inserted into the plating tank 10 from directly above the opening 11 above the plating tank 10, there will no longer be any components that interfere with the component 100. The module 100 inserted into the plating tank 10 is connected to the external power supply portion 40 and the external pipe 30 provided at the edge portion of the opening 11 above the plating tank 10. Therefore, the workability of installing the module 100 in the plating tank 10 is improved. Thereby, the workability of attaching and detaching the module 100 to and from the plating tank 10 is further improved.

In this embodiment, a lower end portion of the plurality of nozzle tubes 210 is fixed to a lower end portion of the anode case 320. For example, as shown in FIG. 1, a protruding portion 322 protruding horizontally from the surface-side partition wall 321A may be provided, and a lower end of a plurality of nozzle tubes 210 may be fixed to the protruding portion 322. In this way, the upper and lower ends of the plurality of nozzle tubes 210 can be stably supported by the common wild tube 220 and the protruding portion 322.

In this embodiment, at least the surface-side partition wall 321A of the partition wall 321 facing the plurality of nozzle tubes 210 is formed of a material (such as a cation exchange membrane or an ion exchange resin) that selectively transmits metal ions in the plating solution. . In this way, the metal ions generated in the partition wall 321 can be supplied to the workpiece 1 side through the partition wall 321 to promote the electrolytic treatment of the surface of the workpiece 1.

In this embodiment, as shown in FIG. 2, the partition wall 321B on the back side of the partition wall 321 may have an opening through which the plating solution circulates (area openings with an X mark in the second figure) 321B1. In this way, the plating solution is supplied from above or below the partition wall 321, and the plating solution is discharged from the opening 321B1 of the rear side partition wall 321B, thereby ensuring a circulation path of the plating solution in the partition wall 321.

In this embodiment, as shown in FIG. 4, the plurality of insoluble anodes 310 may be arranged in a manner that there are gaps 311 between the two adjacent in the horizontal direction. In this case, the back-side partition wall 321B may have an opening 321B1 at a position facing the gap 311 between the two insoluble anodes 310 and 310 (see FIG. 1). If so, directing the plating solution between the insoluble anode 310 and the surface-side partition wall 321A to the opening 321B1 through the gap 311 can promote the circulation of the plating solution in the partition wall 321.

In particular, in this embodiment, as shown in FIGS. 1 and 4, the electroplating tank 10 has overflow grooves 12A and 12B on both sides. If the liquid level of the plating solution in the plating tank 10 exceeds a certain height, the plating solution in the plating tank 10 will be discharged to the overflow tanks 12A and 12B. The above-mentioned gap 311 and the opening 321B1 can form a flow path of the plating solution in the partition wall 321 to the overflow grooves 12A and 12B.

In the present embodiment, as shown in FIG. 5, the anode box 320 can hold a shielding cover 350, which can shield a part of the electric field formed between the insoluble anode 310 and the workpiece 1. The shielding cover 350 can prevent the formation of an electric field in useless areas and improve the plating quality of the workpiece 1. A shielding portion 351 is provided to cover a surface facing the lower end portion of the workpiece 1. The shielding cover 350 shown in FIG. 5 is vertically supported in a region between the surface-side partition wall 321A and the plurality of nozzle tubes 210 as shown in FIG. 1. As shown in FIG. 1, the shielding cover 350 holds the shielding portion 351 by a plurality of protrusions 340 protruding forward from the front-side partition wall 321A. As shown in FIG. 5, the shielding cover 350 further includes vertical portions 352 extending upward from both sides of the shielding portion 351, and the upper end portion of the vertical portion 352 is held by the surface-side partition wall 321A.

As shown in FIG. 6, the shielding cover 350 may include a first shielding cover 350A and a second shielding cover 350B. The first shielding cover 350A shields an electrolytic lower region formed between the insoluble anode 310 and the workpiece 1. The second shielding cover 350B shields the upper area of the electrolysis. The first shielding cover 350A includes a shielding portion 351A that shields a region below the electric field, and vertical portions 352A that extend upward on both sides of the shielding portion 351A. The second shielding cover 350B includes a shielding portion 351B that shields an area above the electric field, and vertical portions 352B that extend upward on both sides of the shielding portion 351B.

The anode case 320 may include an adjustment mechanism that adjusts a vertical mounting position of each of the first shielding cover 350A and the second shielding cover 350B. An example of the adjustment mechanism is shown in Fig. 7 which is an enlarged view of part B of Fig. 6. In FIG. 7, a long hole 353A having a long axis in the vertical direction is formed in a region above the vertical portion 352A of the first shielding cover 350A. The first shield 350A allows vertical movement within the range of the long hole 353A, and is fixed to the mounting plate 321A1 held on the surface-side partition wall 321A of the anode case 320 by a bolt 354A at a desired position. Thereby, the vertical installation position of the first shielding cover 350A is adjusted. Similarly, the second shield 350B allows vertical movement within the range of the long hole 353B, and adjusts the vertical installation position by the bolt 354B at a desired position.

If so, the installation positions in the vertical direction of the first and second shields 350A and 350B are adjusted so that the height H of the opening window of the electric field is consistent with the size of the workpiece 1 in the vertical direction as shown in FIG. 7. In order to make this adjustment easy, vertical scales can be attached near the long holes 353A, 353B.

In addition, as described above, although the present embodiment has been described in detail, those skilled in the art can easily understand that the novel matters and effects of the present invention can make many changes without substantially departing from the spirit thereof. Therefore, such modifications should be included in the scope of the present invention. For example, a term described in a specification or drawing at least once with a different term that is more broadly or synonymously can be replaced with the different term regardless of the position in the specification or the drawing. In addition, all combinations of this embodiment and a modification are included in the scope of the present invention.

1‧‧‧Workpiece

10‧‧‧ surface treatment tank

11‧‧‧ upper opening

20‧‧‧ transport jig

30‧‧‧External Piping

40‧‧‧External power supply department

100‧‧‧Electrolytic components

110‧‧‧Connection Department

200‧‧‧ Nozzle Unit

210‧‧‧ Nozzle tube

211‧‧‧Nozzle (ejection outlet)

220‧‧‧Total wild tube

230‧‧‧Piping connector

300‧‧‧Anode unit

310‧‧‧Insoluble anode

311‧‧‧Gap

312‧‧‧Anode plate (anode rod)

320‧‧‧Anode Box

321‧‧‧ partition

321A‧‧‧ surface side partition

321B‧‧‧ Rear side partition

321B1‧‧‧Open

321C‧‧‧Side side wall

322‧‧‧ protrusion

330‧‧‧ Powered by

331‧‧‧connection terminal

340‧‧‧ protrusion

350‧‧‧Mask

350A‧‧‧The first mask

350B‧‧‧ 2nd shield

353A, 353B, 354A, 354B

FIG. 1 is a cross-sectional view of a continuous plating apparatus according to an embodiment of the present invention.

Fig. 2 is a front view of the electrolytic treatment assembly in the electroplating bath of Fig. 1 as viewed from the workpiece side.

Fig. 3 is a plan view of a part of the continuous plating apparatus of Fig. 1.

Fig. 4 is a diagram showing two components arranged along the longitudinal direction of the plating tank of Fig. 1.

Fig. 5 is a view showing a shielding cover held by the module.

Fig. 6 is a diagram showing a first mask and a second mask.

FIG. 7 is a cross-sectional view of an adjustment mechanism that adjusts the vertical mounting positions of the first mask and the second mask.

Claims (11)

An electrolytic treatment component is installed in a surface treatment tank. The surface treatment tank is used to electrolytically treat the surface of a workpiece set as a cathode; it is characterized by: Nozzle unit, and The anode unit integrated with the above nozzle unit, The nozzle unit includes: A plurality of nozzle tubes which respectively eject the processing liquid from different positions in the vertical direction, A common pipe for supplying the processing liquid to the plurality of nozzle pipes, and A piping joint for connecting an external piping provided in the surface treatment tank to the common wild pipe; The anode unit has: At least one insoluble anode disposed at a position spaced from the plurality of nozzle tubes in a horizontal direction, An anode box including a partition wall arranged apart from the at least one insoluble anode in the horizontal direction, and surrounding the at least one insoluble anode with the partition wall, and The external power supply part provided in the surface treatment tank is connected to the power supply part of the at least one insoluble anode. For example, the electrolytic treatment module of the scope of application for a patent, wherein the power-supplying portion includes a connection terminal portion electrically connected to the external power-supply portion provided at an edge portion of the opening above the surface-treatment groove, The common wild tube system is in communication with each upper end portion of the plurality of nozzle tubes, and extends horizontally above the plurality of nozzle tubes. For example, the electrolytic treatment module of the scope of application for patent No. 2 in which the above common wild tube is arranged at a position higher than the upper end of the anode unit, The piping joint is connected to the external piping provided at the edge portion of the upper opening of the surface treatment tank through the anode unit. For example, the electrolytic treatment module of the scope of application for a patent, wherein the lower end of the plurality of nozzle tubes is fixed to the lower end of the anode box. For example, the electrolytic treatment module of the scope of application for a patent, wherein at least the surface-side partition wall facing the plurality of nozzle tubes among the partition walls is formed of a material that selectively transmits metal ions in the processing liquid. For example, in the electrolytic treatment module of the scope of application for a patent, the partition wall on the back side facing the partition wall on the front side among the partition walls has an opening through which the treatment liquid flows. For example, the electrolytic treatment module of the sixth scope of the application for patent, wherein the at least one insoluble anode includes a plurality of insoluble anodes arranged in a manner with a gap between the two adjacent in the horizontal direction, The back side partition wall has the opening at a position facing the gap between the two insoluble anodes. For example, in the electrolytic treatment module of the first patent application scope, the anode box maintains a shielding cover that partially shields a part of an electric field formed between the at least one insoluble anode and the workpiece. For example, the electrolytic treatment module according to item 8 of the patent application scope, wherein the shielding cover includes a first shielding cover that covers the lower area of the electrolysis, and a second shielding cover that covers the upper area of the electrolysis. For example, in the electrolytic treatment module of the ninth scope of the patent application, the anode box has an adjustment mechanism for adjusting a vertical installation position of each of the first shielding cover and the second shielding cover. A surface treatment device, comprising: Surface treatment tank for electrolytically treating the surface of a workpiece, and An electrolytic treatment module disposed in the surface treatment tank as described in any one of claims 1 to 10 of the scope of patent application.