KR20190019573A - Apparatus for changing structure of FOSB - Google Patents

Abstract

An apparatus for changing a structure of a FOSB includes: a mounting unit mounting structures on a FOSB while horizontally transporting the FOSB; and a separating unit provided at a different height from the mounting unit and separating the structures from the FOSB while transporting the FOSB on which the structures is mounted in a direction opposite to the horizontal direction.

Description

[0001] Apparatus for changing structure of FOSB [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a FOSB (Front Opening Shipping Box) structure changing apparatus, and more particularly, to an apparatus for changing the structure of a wafer in an EDS (Electrically Die Sorting) (FAB) process for fabricating the semiconductor chips. The present invention also relates to a device for changing a structure similar to a FOUP for transferring a plurality of the wafers.

Generally, a semiconductor chip is fabricated through a fab process that forms a circuit pattern on a wafer. When the semiconductor chips fabricated in the fab process are manufactured, an inspection process for checking the electrical performance of the semiconductor chips is performed.

In the fab process, the wafer is loaded on a FOUP (Front Open Unified Pod) and transferred through an OHT (Overhead Hoist Transport). In the inspection process, the wafer is loaded on a FOSB (Front Open Shipping Box) (Overhead Shuttle System).

Since the FOV is mounted on the upper portion of the FOUP due to the structure of the OHT, the structure of the FOVi is different from that of the top flange due to the OHS structure.

Accordingly, when a plurality of wafers are to be transferred in the fab process and the inspection process, a large number of the FOPS and the FOBS are required to accommodate the wafers individually, and the FOPS and the POSBY are stored A very large space is required for the stocker.

Korean Patent Publication No. 10-2010-0033130 (published on Mar. 29, 2010, POSBI fixing device)

The present invention provides a POSBI structure changing apparatus capable of changing the structure so that POSBI used in an inspection process can be used in a fab process.

The present invention provides a POSBI structure changing apparatus comprising: a mounting unit for mounting a INFO pad and a top flange to a POSBY while transferring the POSBY horizontally; and a mounting unit for mounting the INFO pad and the top flange at different heights, And a separating unit separating the inflap and the top flange from the Fosby while transferring the Fosby in a direction opposite to the horizontal direction.

According to one embodiment of the present invention, the mounting unit includes: a first conveying unit that sequentially conveys the POSBY to a first position, a second position, and a third position; and a second conveying unit that conveys information about the POSBY An information input unit for inputting the information about the FOSHBY to the infopad at the second position, and an information input unit for inputting information about the overhead hoist transport (OHT) to the FOSSIV at the third position, And a flange mounting portion for mounting a top flange so as to be capable of being transported by the top flange.

According to one embodiment of the present invention, the pad mounting portion includes a first mounting portion disposed at one side of the first position and having a rotatable cylindrical structure and having a plurality of inflatable pads mounted on the circumference, 1 position and the first mounting portion, and a first mounting portion for mounting the infofard loaded on the first mounting portion to the FOV.

According to an embodiment of the present invention, the flange mounting portion may include: a second loading portion disposed at one side of the third position, the second loading portion having a cylindrical structure rotatable, A lead portion provided between the third position and the second mounting portion for drawing the top flange from the second mounting portion, and a second connecting portion provided between the third position and the lead portion so as to be capable of rotating, And a second mounting portion for receiving the top flange from the lead portion and mounting the top flange.

According to an embodiment of the present invention, the first mounting portion may include: a first support portion that supports an upper end portion of the top flange; and a second support portion that is disposed behind the first support portion, A second support portion for supporting a rear surface of the upper end portion to prevent the upper end portion from being separated from the first support portion, and a fixing portion for fixing both sides of the upper end portion to prevent the top flange from swinging at the first support portion can do.

According to one embodiment of the present invention, the separating unit includes a second conveying portion for sequentially conveying the Fosby to the fourth position, the fifth position and the sixth position, and a second conveying portion for conveying the top flange of the Fosby at the fourth position An output unit connected to the output unit and configured to output the label output from the output unit to the fifth position, And a pad separating unit for separating the infos pads from which the information about the Fosby is stored at the sixth position.

According to one embodiment of the present invention, the first position and the sixth position, the second position and the fifth position, and the third position and the fourth position may be located on the same vertical line, respectively.

According to an embodiment of the present invention, the flange separating portion may include a third loading portion disposed at one side of the fourth position and having a rotatable cylindrical structure, for loading a plurality of the top flanges along the circumference, A first separating portion provided between the fourth position and the third loading portion so as to be capable of rotating, horizontally moving and vertically moving, for separating the top flange mounted on the FOSBI; And an insertion portion that is provided between the first loading portion and the second loading portion and inserts the top flange into the third loading portion.

According to an embodiment of the present invention, the pad separating unit may include a fourth loading unit disposed at one side of the sixth position and having a cylindrical structure rotatable, for loading a plurality of the infopads along the circumference, And a second separator which is disposed between the sixth position and the first stacking part and separates the infopad mounted on the Fosby and stacks the infopad on the fourth stacking part.

The POSBI structure changing device according to the present invention includes a first conveying unit for sequentially conveying the POSBY to a first position, a second position and a third position along a horizontal direction, a first conveying unit provided at a different height from the first conveying unit, A fourth position, a fourth position, a fifth position, and a sixth position; an information pad for storing information about the Fosby at the first position is attached to the Fosby, And a flange mounting portion for mounting the top flange at the fourth position for separating the top flange of the POSBY from the fourth position, .

According to the POSBI structure changing apparatus of the present invention, the top flange and the INFO pad used in the inspection process can be attached to the fab process, or the top flange and the INFO pad can be separated from the POSBI for use in the inspection process . Therefore, the above-described FOSSI can be used in the inspection process and the fab process in a compatible manner.

Particularly, in the fab process, since the FOVi and the FOUP can be used together, the number of the FOV and the FOUP can be reduced. As the number of the FOVi and the FOUP decreases, the space for storing the FOUP and the POSBI can be reduced.

In addition, since the mounting unit and the removing unit are separate from each other, the above-described structure for changing the structure of the POVSB structure simultaneously includes the steps of mounting the INFO-PAD and the top flange on the POSBY, and separating the INFO-PAD and the top flange from the POSBY can do. Therefore, the efficiency of the above-described structure can be improved.

1 is a block diagram for explaining a POSBI structure changing apparatus according to an embodiment of the present invention.
2 is a schematic plan view for explaining a mounting unit shown in Fig.
3 is a schematic side view for explaining the infopad mount shown in Fig.
4 is a side view for explaining the flange mounting portion shown in Fig.
5 is a schematic plan view for explaining the separation unit shown in Fig.
6 is a schematic side view for explaining an infopad mount according to another embodiment of the present invention.
7 is a side view for explaining a flange mounting portion according to another embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a detailed description will be given of a POSBI structure changing apparatus according to an embodiment of the present invention with reference to the accompanying drawings. The present invention is capable of various modifications and various forms, and specific embodiments are illustrated in the drawings and described in detail in the text. It should be understood, however, that the invention is not intended to be limited to the particular forms disclosed, but includes all modifications, equivalents, and alternatives falling within the spirit and scope of the invention. Like reference numerals are used for like elements in describing each drawing. In the accompanying drawings, the dimensions of the structures are enlarged to illustrate the present invention in order to clarify the present invention.

The terms first, second, etc. may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component.

The terminology used in this application is used only to describe a specific embodiment and is not intended to limit the invention. The singular expressions include plural expressions unless the context clearly dictates otherwise. In this application, the terms "comprises", "having", and the like are used to specify that a feature, a number, a step, an operation, an element, a part or a combination thereof is described in the specification, But do not preclude the presence or addition of one or more other features, integers, steps, operations, components, parts, or combinations thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms such as those defined in commonly used dictionaries are to be interpreted as having a meaning consistent with the contextual meaning of the related art and are to be interpreted as either ideal or overly formal in the sense of the present application Do not.

1 is a block diagram for explaining a POSBI structure changing apparatus according to an embodiment of the present invention.

Referring to FIG. 1, the apparatus for changing the structure of POVBI 100 includes a mounting unit 101 and a separation unit 102.

The mounting unit 101 mounts the structures on the POSBY 10 while transferring the POSBYE 10 in one direction. By mounting the structure, the structure of the FOVi 10 can be modified to resemble the structure of the FOUP. Accordingly, the POSBi 10 used in the inspection (EDS) process for checking the electrical performance of semiconductor chips can be used in a fab (FAB) process for fabricating the semiconductor chips.

The separation unit 102 is provided adjacent to the mounting unit 101 and separates the structures from the FOSB B 10 while transferring the mounted FOSBIES 10 in a direction opposite to the one direction.

By separating the structure, the structure of the FOVi 10 can be restored to its original state. Therefore, the POSBI 10, which is compatible with the fab process, can be used again in the inspection process.

In one example, the one direction may be a horizontal direction. At this time, the mounting unit 101 and the separating unit 102 may be disposed at different heights or at the same height. When the mounting unit 101 and the separating unit 102 are disposed at different heights, the mounting unit 101 and the separating unit 102 can be arranged in a laminated form.

As another example, the one direction may be vertical.

Although the mounting unit 101 and the separating unit 102 described above transfer the POSBYs 10 in opposite directions to each other in the above description, the mounting unit 101 and the separating unit 102 are arranged so as to move the POSBYs 10 in the same direction .

The mounting unit 101 and the separating unit 102 are arranged in a stacked manner so that the mounting unit 101 and the separating unit 102 transfer the POSBIs 10 in the opposite directions along the horizontal direction I explain it as a standard.

Fig. 2 is a schematic plan view for explaining the mounting unit shown in Fig. 1, Fig. 3 is a schematic side view for explaining the infopad mount shown in Fig. 2, and Fig. 4 is a cross- Fig.

2 to 4, the mounting unit 101 includes a first transferring part 200, a pad mounting part 300, an information input part 400, and a flange mounting part 500. As shown in FIG.

The first transfer unit 200 transfers the FOSB B 10 along the horizontal direction. The first transfer unit 200 may sequentially transfer the FOSB B 10 to the first position, the second position, and the third position. Examples of the first transfer unit 200 include a conveyor, a saddle, and the like.

The first transfer part 200 has a first loading port 210 and a first unloading port 220.

The FOSB 10 is inserted into the first transfer part 200 through the first loading port 210 and the FOSB 10 is discharged from the first transfer part 200 through the first unloading port 220.

The pad mounting portion 300 is disposed adjacent to the first position and mounts an infopad 20 on the FOSBE 10 positioned at the first position. For example, the infopad 20 may be mounted on the lower portion of the POV. Here, the infopad 20 may include a radio frequency identification (RFID), which is one of electronic components capable of transmitting and receiving information through a wireless transmission / reception system. Information about the FOSB 10 and information about wafers loaded on the FOSB 10 can be stored in the infopad 20.

The pad mounting portion 300 may include a first mounting portion 310, a first mounting portion 320, and a first rotation portion 330.

The first loading part 310 is disposed at one side of the first position of the first transfer part 200 and has a rotatable cylindrical structure and has a plurality of inflatable pads 20 Is loaded.

Specifically, the first loading unit 310 includes a first rotating base 313 rotatably mounted on a first center axis 312 of the first pivot 311, And a first cradle 314 on which a plurality of infopads 20 are mounted on the outer circumferential surface of the rotating body 313. At this time, a plurality of first shelves 315 may be arranged along the vertical direction along the z-axis of the first holder 314.

Since the infopad 20 is a precision electronic component sensitive to an external impact such as an RFID, a cushioning pad 316 capable of reducing an impact applied to the infopad 20 can be disposed in the first cradle 314. The first protrusion prevention pin 317 may be provided at an end of the first mounting base 314 so that the inflatable pad 20 is not released to the outside due to the rotation of the first rotating body 313. [

The first mounting portion 320 is positioned adjacent to the first mounting portion 310. Specifically, the first mounting portion 320 is provided between the first position and the first mounting portion 310, and the inflatable pad 20 mounted on the first mounting base 314 of the first mounting portion 310 And mounted on the POSBY 10.

The first mounting portion 320 is configured to mount the first cranes 322 and the first cranes 322 supporting or picking up the inflatable pads 20 mounted on the first cradle 314 from the first cradle 314 to the first Position of the first movable body 324 to the position of the first movable body 324. The first mounting part 320 further includes a first optical sensor 326 that irradiates the first holder 314 with light to check whether the infra pad 20 is present on the first holder 314 can do.

On the other hand, a first reflector 318 is provided on the inner surface of the first holder 314. The light irradiated from the first photosensor 326 is reflected on the first reflector 318 and received by the first photosensor 326 again when the infopad 20 is not present in the first mount 314 .

The first rotation part 330 is connected to the first center axis 312 of the first loading part 310. Specifically, the first rotating part 330 may be connected to the first rotating body 313 at the first central axis 312. Each time the first mounting portion 320 mounts the infopad 20 on the FOVbi 10, the first rotating portion 330 substantially rotates the first loading portion 310 by the first intervening angle, 313). Since the first rotation part 330 rotates stepwise, the first rotation part 330 may include a step motor, an indexing motor, or the like.

The information input unit 400 is disposed adjacent to the second position and stores information about the POBSi 10 on the INFO pad 20 mounted on the POBSBY 10 when the POBSBY 10 is located at the second position And inputs information about the wafers loaded on the POSBI.

The flange mounting portion 500 is disposed adjacent to the third position and mounts a top flange 30 on the FOSSBY 10 to allow the transfer of the FOSHIBE 10 by an overhead hoist transport (OHT). At this time, the top flange 30 may be mounted on the upper portion of the POSBY 10.

The flange mounting portion 500 may include a second mounting portion 510, a lead portion 520, a second mounting portion 530, and a second rotation portion 540.

The second loading part 510 is disposed on one side of the third position of the first transfer part 200 and has a rotatable cylindrical structure and a plurality of top flanges 30 are stacked at a constant second angle around the periphery .

Specifically, the second stacking unit 510 includes a circular second support 511, a second rotary body 513 rotatably mounted on a second central axis 512 of the second support 511, And a second mount table 514 on which a plurality of top flanges 30 are mounted on the outer circumferential surface of the rotating body 513. [ At this time, the second shelves 514 may be arranged with a plurality of second shelves 515 along the vertical direction along the z-axis. The second mounting base 514 may be provided with a second protrusion prevention pin 516 at an end thereof so that the top flange 30 is not released to the outside due to the rotation of the second rotating body 513. [

The drawer 520 is positioned adjacent to the second loading portion 510. Specifically, the drawer 520 draws the top flange 30 mounted on the second holder 514 of the second loading unit 510 at a position adjacent to the second loading unit 510. The drawer 520 moves the second crane 522 and the second crane 522 that support or pick up the top flange 30 held on the second cradle 514 to move away from the second cradle 514 And a second moving body 524. The drawer 520 further includes a second photosensor 526 that illuminates the second holder 514 to determine whether the top flange 30 is present on the second holder 514 .

On the other hand, a second reflection plate 517 is provided on the inner surface of the second holder 514. When the top flange 30 is not present on the second mounting table 514, the light emitted from the second photosensor 526 is reflected by the second reflection plate 517 and received by the second photosensor 526 again .

The second mounting portion 530 is provided to be rotatable, horizontally movable, and vertically movable between the third position of the first transfer portion 200 and the lead portion 520. The second mounting portion 530 receives the top flange 30 from the lead portion 520 and mounts the top flange 30 on the FOVi 30 while rotating, horizontally moving, and vertically moving.

The second mounting portion 530 includes a first supporting portion 532, a second supporting portion 534, and a fixing portion 136. The first support portion 532, the second support portion 534, and the fixing portion 136 may be rotated, horizontally moved, and vertically moved.

The first support portion 532 is formed of a pair of members and supports both ends of the top end portion of the top flange 30 transmitted from the drawing portion 520.

The second support portion 534 is disposed at the rear of the first support portion 532 and supports the rear end of the top end of the top flange 30. [ The second support portion 534 may be provided separately from the first support portion 532 or may be integrally formed with the first support portion 532. The upper end of the top flange 30 is detached from the first support portion 532 when the top flange 30 is mounted on the FOSSBY 10 because the second support portion 534 supports the rear end of the top end of the top flange 30 Can be prevented. Therefore, the top flange 30 can be stably mounted on the FOSB B.

The first support portion 532 receives the top flange 30 from the lead portion 520 in a state where the front without the second support portion 534 faces the lead portion 520.

The first support portion 532 may be configured to move the top flange 30 toward the Fosby 10 while the first support portion 532 moves toward the Fosby 10 in a state where the front is facing the Fosby 10 at the third position. .

The fixing portion 536 presses both sides of the top end of the top flange 30 supported on the first supporting portion 532 to fix the top flange 30. [ For example, the fixing portion 536 can penetrate the paper supporting portion 532 and press the upper end of the top flange 30. The top flange 30 supported on the first support portion 532 can be prevented from swinging and the top flange 30 can be accurately aligned with the center of the first support portion 532. [ The top flange 30 can be aligned to the correct position and prevented from rocking, so that the top flange 30 can be mounted more accurately on the FOSSBY 10.

The second rotation part 540 is connected to the second center axis 512 of the second loading part 510. Specifically, the second rotating portion 540 may be connected to the second rotating body 513 at the second central axis 512. The second rotating portion 540 rotates the second loading portion 510 substantially by the second angle between the second rotating body 513 and the second rotating body 513 when the drawing portion 520 draws the top flange 30. Since the second rotation part 540 performs a stepwise rotation motion in the same manner as the first rotation part 330, the second rotation part 540 may include a step motor, an indexing motor, and the like.

When the FOVi 10 is inserted through the first loading port 210 as described above, the first transfer unit 200 moves the first position, the second position, and the third position, ) And a top flange 30 are mounted on the infoboard 20, and information about the Fosby 10 is input to the infopad 20. Thereafter, the INFO pad 20 and the top flange 30 are mounted, and the PO box 10, to which the information about the PO BOX 10 is input to the INFO pad 20, is taken out through the first unloading port 220 . The removed FOBS 10 is put into the fab process through the OHT and performs the same function as the FOUP.

5 is a schematic plan view for explaining the separation unit shown in Fig.

5, the separation unit 102 includes a second transfer unit 600, a flange separation unit 700, an output unit 800, an attachment unit 850, and a pad separation unit 900.

The second transfer unit 600 transfers the FOSBBY 10 along the horizontal direction. At this time, the direction in which the FOSSBY 10 is conveyed by the second conveyance unit 600 may be the direction opposite to the direction in which the FOSSBY 10 is conveyed by the first conveyance unit 200.

The second transfer unit 600 may sequentially transfer the FOSB B 10 to the fourth position, the fifth position, and the sixth position. Examples of the second transfer unit 600 include a conveyor, a saddle, and the like.

Since the mounting unit 101 and the separating unit 102 are laminated, the first conveying unit 200 and the second conveying unit 600 may be stacked. Since the first transferring part 200 and the second transferring part 600 are arranged in a stacked manner so that the transfer directions of the first transferring part 200 and the second transferring part 600 are opposite to each other and the first transferring part 200 and the second transferring part 600 are stacked, The first position, the second position, and the third position may be on the same vertical line as the sixth position, the fifth position, and the fourth position, respectively, of the second transfer unit 600.

The second transfer part 600 has a second loading port 610 and a second unloading port 620.

The FOSB 10 is inserted into the second transfer part 600 through the second loading port 610 and the FOSB 10 is discharged from the second transfer part 600 through the second unloading port 620.

The flange separator 700 is disposed adjacent to the fourth position and separates the top flange 30 mounted on the Porsby 10 from the fourth position.

The flange separating portion 700 may include a third loading portion 710, an inserting portion 720, a first separating portion 730, and a third rotating portion 740.

The third loading portion 710 loads the top flange 30 separated from the FOSB 10 and the insertion portion 720 loads the top flange 30 Is inserted into the third loading portion 710 and the first separating portion 730 separates the top flange 30 from the FOSB 10 and the third rotating portion 740 separates the insertion portion 720 from the top flange 30, The insertion portion 720, the first separating portion 730, and the third rotating portion 740, except that the third loading portion 710 is rotated each time the first loading portion 730 is inserted. The description of the second mounting portion 510, the lead-out portion 520, the second mounting portion 530, and the second rotation portion 540 of the flange mounting portion 500 will be described with reference to FIGS. They are omitted because they are substantially the same.

The output unit 800 is disposed adjacent to the fifth position and outputs information on the FOSB 10 and information on wafers loaded on the FOSB 10 on a label. In one example, the label may be in the form of a barcode.

Meanwhile, the output unit 800 may separately receive the information about the POSBY 10 and the wafer loaded on the POSBY 10, and may output the label, but the information stored in the INFOPAD 20 may be received And may output the label.

The attachment unit 850 is connected to the output unit 800 and attaches the label output from the output unit 800 to the FOSSBY 10. It is possible to easily confirm the information about the POSBY 10 and the wafer loaded on the POSBY 10 in the inspection process by using the label attached to the POSBYE 10.

The pad separation unit 900 is disposed adjacent to the sixth position and separates the infosphate pad 20 mounted on the FOSSBY 10 from the sixth position.

The pad separating unit 900 may include a fourth loading unit 910, a second separating unit 920, and a fourth rotating unit 930.

The fourth loading section 910 loads the infopat 20 separated from the FOSB 10 and the second separation section 920 loads the infopad 20 from the FOSB 10 into the fourth loading section 910 and the fourth rotary part 930 rotates the fourth loading part 910 every time the second separating part 920 loads the infopad 20 into the fourth loading part 910 A detailed description of the fourth stacking unit 910, the second separating unit 920 and the fourth rotating unit 930 will be omitted for the first stacking unit 310 of the pad mounting unit 300 The first mounting portion 320, and the first rotating portion 330, respectively.

When the top flange 30 and the INFO pad 20 with the INFO pad 20 mounted thereon are inserted through the second loading port 610 as described above, The top flange 30 and the infopad 20 are separated while moving the fifth position and the sixth position and the barcode to which the information about the Fosby 10 is input is outputted and attached to the Fosby 10. Thereafter, the bar code-attached POSBY 10 is carried out through the second unloading port 620. The removed POSBY 10 can be put back into the inspection process.

The POSBI structure changing apparatus 100 uses the mounting unit 101 to mount the INFOPAD 20 and the top flange 30 on the POSBY 10 so that the POSBY 10 can be used in the same fab process . The structure of the POSBI structure changing apparatus 100 can be separated from the INFOPAD 20 and the top flange 30 from the POSBY 10 using the separating unit 102 and put into the inspection process again.

Since the FOVi 10 can be used in a compatible manner in the fab process and the inspection process, the number of the FOVs and the POVBIs 10 can be reduced to about half. Also, the space for storing the FOUP and the POSBY 10 can be reduced.

Since the POSBI structure changing apparatus 100 is provided separately from the mounting unit 101 and the removing unit 102, the process of attaching the INFOPAD 20 and the top flange 30 to the POSBY 10, And the step of separating the inflap pad 20 and the top flange 30 from each other. Therefore, the efficiency of the POSBI structure changing apparatus 100 can be improved.

6 is a schematic side view for explaining a pad mounting portion according to another embodiment of the present invention.

Referring to FIG. 6, the pad mounting portion 300 is disposed adjacent to the first position of the first transfer portion 200 and the sixth position of the second transfer portion 600. The pad mounting portion 300 mounts the infopad 20 to the first position and removes the infopad 20 from the second position. That is, the pad mounting portion 300 can perform the mounting and separation of the inflatable pad 20 in parallel.

When the pad mounting unit 300 performs the process from the FOSB 10 to the separation of the infopad 20, the pad separation unit 900 may not be provided. Accordingly, since it is not necessary to provide the pad mounting portion 300 and the pad separating portion 900 together, the cost required for the POSBI structure changing device 100 can be reduced.

7 is a side view for explaining a flange mounting portion according to another embodiment of the present invention.

Referring to FIG. 7, the flange mounting part 500 is disposed adjacent to the third position of the first transfer part 200 and the fourth position of the second transfer part 600. The flange mounting portion 500 mounts the flange 30 on the POSBY 10 located at the third position and separates the flange 30 from the POSBY 10 located at the fourth position. That is, the flange mounting portion 500 can perform the mounting and separation of the flange 30 concurrently.

In the case where the flange mounting portion 500 performs from the FOSSBY 10 to the separation of the flange 30, the flange separation portion 700 may not be provided. Therefore, since it is not necessary to provide the flange mounting portion 500 and the flange separating portion 700 together, the cost required for the POSBI structure changing device 100 can be reduced.

As described above, the above-described structure for changing the structure of the Porsche can simultaneously mount and separate the top flange and the inflatable pads. Therefore, the efficiency of structural modification of the above-described structure can be enhanced.

In addition, through the structural modification of the above-described POSBi, the POSBI can be used in a fab process as well as an inspection process. Therefore, compatibility of the above-described POSBI can be enhanced.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the present invention as defined by the following claims. It can be understood that it is possible.

100: POSBI structure changing device 101: mounting unit
102: Separation unit 200: First transfer part
300: Pad mounting part 400: Information input part
500: flange mounting part 600: second conveying part
700: flange removing unit 800: output unit
850: Attachment part 900: Pad removal
10: POSBY 20: INFO PAD
30: Top flange

Claims (10)

A mounting unit for mounting the structures on the FOSB while transferring a front opening shipping box (FOSB) horizontally; And
And a separating unit provided at a different height from the mounting unit and separating the structures from the POV by transferring the POVs mounted with the structures in a direction opposite to the horizontal direction. 2. The apparatus of claim 1, wherein the mounting unit
A first transfer unit for sequentially transferring the FOSSI to a first position, a second position and a third position;
A pad attaching portion for attaching an infopad for storing information on the Fosby to the Fosby at the first position;
An information input unit for inputting information about the FOSSee to the infopad at the second position; And
And a flange mounting portion for mounting a top flange so as to be capable of being transported by the overhead hoist transport (OHT) to the FOSSIV at the third position. The pad mounting apparatus according to claim 2,
A first stacking part disposed at one side of the first position and having a rotatable cylindrical structure and having a plurality of inflatable pads peripherally mounted on the peripheries; And
And a first mounting portion which is disposed between the first position and the first mounting portion and mounts inflatable pads loaded on the first mounting portion to the fossil. The connector according to claim 2, wherein the flange-
A second stacking part disposed at one side of the third position and having a rotatable cylindrical structure and having a plurality of the top flanges along the circumference;
A withdrawing portion provided between the third position and the second stacking portion and pulling out the top flange from the second stacking portion; And
And a second mounting portion provided to be able to rotate, horizontally move, and vertically move between the third position and the drawing portion, and to receive the top flange from the drawing portion to mount the top flange. Change device. The connector according to claim 4,
A first support for supporting an upper end of the top flange;
A second support portion disposed at the rear of the first support portion and supporting the rear surface of the upper end portion to prevent the upper end portion from being separated from the first support portion when the top flange is mounted to the POSTBY; And
And a fixing portion for fixing both ends of the upper end portion to prevent the top flange from swinging in the first support portion. 3. The apparatus of claim 2, wherein the separation unit
A second conveying unit for sequentially conveying the FOSSI to the fourth position, the fifth position and the sixth position;
A flange separating portion for separating the top flange of the POSTBY at the fourth position;
An output unit disposed adjacent to the fifth position and outputting information about the Fosby to a label;
An attaching portion connected to the output portion and attaching the label outputted from the output portion to the FOSBE at the fifth position; And
And a pad separating unit for separating the infomation pad storing information on the Fosby at the sixth position. 7. The method of claim 6, wherein the first position and the sixth position, the second position and the fifth position, and the third position and the fourth position are located on the same vertical line, respectively Device. 7. The apparatus of claim 6, wherein the flange-
A third loading unit disposed at one side of the fourth position and having a rotatable cylindrical structure for loading a plurality of the top flanges along the periphery;
A first separator arranged to be able to rotate, horizontally move and vertically move between the fourth position and the third stacking portion, and to separate the top flange mounted on the POSTBY; And
And an insertion portion which is provided between the first separating portion and the third loading portion and inserts the top flange into the third loading portion. [7] The apparatus of claim 6,
A fourth loading unit disposed at one side of the sixth position and having a rotatable cylindrical structure for loading a plurality of inflatable pads along the perimeter; And
And a second separating unit disposed between the sixth position and the first loading unit and separating the infopass mounted on the Fosby and loading the infopass on the fourth loading unit. A first conveying unit for sequentially conveying the POSBY to the first position, the second position and the third position along the horizontal direction;
A second conveyance unit provided at a different height from the first conveyance unit and sequentially conveying the POSBY to a fourth position, a fifth position and a sixth position;
A pad attaching portion for attaching an infopad storing information on the Fosby at the first position to the Fosby or for separating an infopad storing information about the Fosby at the sixth position; And
And a flange mounting portion for mounting a top flange at the third position so as to allow the FOSHIBI to be conveyed by OHT and for separating the top flange of the POVBI at the fourth position.

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