KR20180040599A - 기판상의 나노 입자의 에어로솔 증착 장치 및 방법 - Google Patents

기판상의 나노 입자의 에어로솔 증착 장치 및 방법 Download PDF

Info

Publication number
KR20180040599A
KR20180040599A KR1020187006016A KR20187006016A KR20180040599A KR 20180040599 A KR20180040599 A KR 20180040599A KR 1020187006016 A KR1020187006016 A KR 1020187006016A KR 20187006016 A KR20187006016 A KR 20187006016A KR 20180040599 A KR20180040599 A KR 20180040599A
Authority
KR
South Korea
Prior art keywords
rti
substrate
nanoparticles
poly
aerosol
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020187006016A
Other languages
English (en)
Korean (ko)
Inventor
자크 르페브르
패트릭 말렌판트
Original Assignee
내셔날 리서치 카운실 오브 캐나다
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 내셔날 리서치 카운실 오브 캐나다 filed Critical 내셔날 리서치 카운실 오브 캐나다
Publication of KR20180040599A publication Critical patent/KR20180040599A/ko
Ceased legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
    • B05B12/08—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means
    • B05B12/082—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means responsive to a condition of the discharged jet or spray, e.g. to jet shape, spray pattern or droplet size
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/025—Discharge apparatus, e.g. electrostatic spray guns
    • B05B5/035—Discharge apparatus, e.g. electrostatic spray guns characterised by gasless spraying, e.g. electrostatically assisted airless spraying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/14—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with multiple outlet openings; with strainers in or outside the outlet opening
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
    • B05B12/16—Arrangements for controlling delivery; Arrangements for controlling the spray area for controlling the spray area
    • B05B12/20—Masking elements, i.e. elements defining uncoated areas on an object to be coated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/025—Discharge apparatus, e.g. electrostatic spray guns
    • B05B5/0255—Discharge apparatus, e.g. electrostatic spray guns spraying and depositing by electrostatic forces only
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/08—Plant for applying liquids or other fluent materials to objects
    • B05B5/10—Arrangements for supplying power, e.g. charging power
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/16—Arrangements for supplying liquids or other fluent material
    • B05B5/1608—Arrangements for supplying liquids or other fluent material the liquid or other fluent material being electrically conductive
    • B05B5/1616—Arrangements for supplying liquids or other fluent material the liquid or other fluent material being electrically conductive and the arrangement comprising means for insulating a grounded material source from high voltage applied to the material
    • B05B5/165—Arrangements for supplying liquids or other fluent material the liquid or other fluent material being electrically conductive and the arrangement comprising means for insulating a grounded material source from high voltage applied to the material by dividing the material into discrete quantities, e.g. droplets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0208—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/007—Processes for applying liquids or other fluent materials using an electrostatic field
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/02—Processes for applying liquids or other fluent materials performed by spraying
    • B05D1/04—Processes for applying liquids or other fluent materials performed by spraying involving the use of an electrostatic field
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/02—Processes for applying liquids or other fluent materials performed by spraying
    • B05D1/04—Processes for applying liquids or other fluent materials performed by spraying involving the use of an electrostatic field
    • B05D1/045—Processes for applying liquids or other fluent materials performed by spraying involving the use of an electrostatic field on non-conductive substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/02—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to macromolecular substances, e.g. rubber
    • B05D7/04—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to macromolecular substances, e.g. rubber to surfaces of films or sheets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/24—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials for applying particular liquids or other fluent materials
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/158—Carbon nanotubes
    • C01B32/159—Carbon nanotubes single-walled
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/04—Coating
    • C08J7/06—Coating with compositions not containing macromolecular substances
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L25/00—Compositions of, homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an aromatic carbocyclic ring; Compositions of derivatives of such polymers
    • C08L25/18—Homopolymers or copolymers of aromatic monomers containing elements other than carbon and hydrogen
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L27/00—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers
    • C08L27/02—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment
    • C08L27/12—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/6757—Thin-film transistors [TFT] characterised by the structure of the channel, e.g. transverse or longitudinal shape or doping profile
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40—Organic transistors
    • H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462—Insulated gate field-effect transistors [IGFETs]
    • H10K10/468—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics
    • H10K10/471—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics the gate dielectric comprising only organic materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/20—Carbon compounds, e.g. carbon nanotubes or fullerenes
    • H10K85/221—Carbon nanotubes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2601/00—Inorganic fillers
    • B05D2601/20—Inorganic fillers used for non-pigmentation effect
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/549—Organic PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Nanotechnology (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Composite Materials (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Thin Film Transistor (AREA)
  • Electrostatic Spraying Apparatus (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
KR1020187006016A 2015-07-31 2016-06-14 기판상의 나노 입자의 에어로솔 증착 장치 및 방법 Ceased KR20180040599A (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201562199675P 2015-07-31 2015-07-31
US62/199,675 2015-07-31
CA2,899,255 2015-07-31
CA2899255A CA2899255A1 (en) 2015-07-31 2015-07-31 Apparatus and method for aerosol deposition of nanoparticles on a substrate
PCT/IB2016/053502 WO2017021794A1 (en) 2015-07-31 2016-06-14 Apparatus and method for aerosol deposition of nanoparticles on a substrate

Publications (1)

Publication Number Publication Date
KR20180040599A true KR20180040599A (ko) 2018-04-20

Family

ID=57937673

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020187006016A Ceased KR20180040599A (ko) 2015-07-31 2016-06-14 기판상의 나노 입자의 에어로솔 증착 장치 및 방법

Country Status (8)

Country Link
US (1) US20190001360A1 (enExample)
EP (1) EP3328921A4 (enExample)
JP (1) JP2018534120A (enExample)
KR (1) KR20180040599A (enExample)
CN (1) CN108026304A (enExample)
CA (2) CA2899255A1 (enExample)
TW (1) TW201718738A (enExample)
WO (1) WO2017021794A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210050386A (ko) * 2019-10-28 2021-05-07 광운대학교 산학협력단 실온에서 에어로졸 증착에 의한 페로브스카이트-유도 초민감도와 고안정 습도 센서 시스템
KR20230150637A (ko) * 2022-04-22 2023-10-31 한국과학기술원 정전분무 노즐 필름
KR20240109431A (ko) * 2023-01-04 2024-07-11 한국에너지기술연구원 섬유 코팅 장치

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102023106B1 (ko) * 2017-02-20 2019-09-20 광운대학교 산학협력단 용액 공정 기반 고품질 질화 붕소 박막 제조 및 소자 적용 방법
FI129565B (en) 2019-04-24 2022-04-29 Canatu Oy Apparatuses and method for oriented deposition
CN112570217A (zh) * 2019-09-27 2021-03-30 深圳市向宇龙自动化设备有限公司 一种多功能快速点胶系统
US11530479B2 (en) * 2019-10-18 2022-12-20 Taiwan Semiconductor Manufacturing Company, Ltd. Atomic layer deposition tool and method
GB2598964B (en) * 2020-09-22 2024-12-25 Brian King Andrew Methods and apparatus for inducing chemical reactions using electro-statics
CN113478809B (zh) * 2021-07-06 2023-05-30 上海科技大学 微纳结构的增材制造方法
CN113387357A (zh) * 2021-07-22 2021-09-14 江西理工大学 一种MXene褶皱纳米球的制备方法
JP7505472B2 (ja) * 2021-10-28 2024-06-25 トヨタ自動車株式会社 電極の製造方法および電極の製造装置
CN114054293A (zh) * 2021-11-17 2022-02-18 珠海格力智能装备有限公司 一种基于嵌入式的喷胶控制系统及其使用方法
CN113941462A (zh) * 2021-11-17 2022-01-18 秦皇岛泰治医疗科技有限公司 一种用于口罩生产光触媒喷涂设备
CN114602747A (zh) * 2022-04-12 2022-06-10 吉水县伟兵信息科技有限公司 一种装修用瓷砖涂胶装置
CN115488003B (zh) * 2022-09-27 2024-11-22 康佳集团股份有限公司 一种工件喷胶装置
CN118109807B (zh) * 2024-03-05 2024-10-18 浙江绿岛科技有限公司 一种用于金属件表面形成致密防护层的气雾剂
FI131846B1 (en) * 2024-09-20 2026-01-08 Canatu Finland Oy Method of preparing free-standing film of harm-structures and apparatus
CN120518328B (zh) * 2025-07-22 2026-03-06 电子科技大学 微纳小球自组装掩膜制备随机网栅透明导电薄膜的方法

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4064295A (en) * 1973-11-06 1977-12-20 National Research Development Corporation Spraying atomized particles
JPH06106096A (ja) * 1992-09-29 1994-04-19 Tokyo Ohka Kogyo Co Ltd 静電塗装装置
US20040101619A1 (en) * 2000-03-30 2004-05-27 Carlo Camorani Object decoration
JP2004160388A (ja) * 2002-11-14 2004-06-10 Matsushita Electric Ind Co Ltd 薄膜の作成方法と作成装置
US7232771B2 (en) * 2003-11-04 2007-06-19 Regents Of The University Of Minnesota Method and apparatus for depositing charge and/or nanoparticles
CN1293649C (zh) * 2004-01-08 2007-01-03 西安交通大学 一种用于场发射显示器阴极的大面积碳纳米管薄膜制备方法
US20060280866A1 (en) * 2004-10-13 2006-12-14 Optomec Design Company Method and apparatus for mesoscale deposition of biological materials and biomaterials
JP2006142159A (ja) * 2004-11-17 2006-06-08 Kawasaki Heavy Ind Ltd 微粒子分散複合薄膜形成方法および形成装置
US7674671B2 (en) * 2004-12-13 2010-03-09 Optomec Design Company Aerodynamic jetting of aerosolized fluids for fabrication of passive structures
US20080317967A1 (en) * 2005-02-14 2008-12-25 Kwang-Leong Choy Deposition of Polymeric Films
JP2008043944A (ja) * 2006-07-21 2008-02-28 Matsushita Electric Ind Co Ltd 微粒子の製造方法及び装置
EP2106903A1 (de) * 2008-02-22 2009-10-07 Hermes Schleifkörper GmbH Verfahren zum Aufstreuen abriebhemmender Werkstoffe und Vorrichtung hierzu
JP2011100879A (ja) * 2009-11-06 2011-05-19 National Institute Of Advanced Industrial Science & Technology 化合物半導体薄膜及びその製造方法、並びに太陽電池
KR101214044B1 (ko) * 2010-11-22 2012-12-20 한국세라믹기술원 전계방출용 ｃｎｔ-금속 혼합막 제조 방법
EP2766130B1 (en) * 2011-10-12 2020-07-08 1366 Technologies Inc. Apparatus and process for depositing a thin layer of resist on a substrate
US8658256B2 (en) * 2012-06-20 2014-02-25 The Boeing Company Methods of coating substrates with electrically charged conductive materials, electrically conductive coated substrates, and associated apparatuses
JP2014063849A (ja) * 2012-09-20 2014-04-10 Mitsubishi Chemicals Corp 有機半導体素子及びその製造方法、並びに薄膜の製造方法
DE102012113124A1 (de) * 2012-12-27 2014-07-03 Ev Group E. Thallner Gmbh Sprühdüseneinrichtung und Verfahren zum Beschichten
WO2015002326A1 (en) * 2013-07-05 2015-01-08 Nitto Denko Corporation Photocatalyst sheet
FI20135903A7 (fi) * 2013-09-09 2015-03-10 Beneq Oy Laite ja menetelmä aerosolin valmistamiseksi ja kohdistinosa
FI125920B (en) * 2013-09-09 2016-04-15 Beneq Oy A method of coating a substrate
US8940562B1 (en) * 2014-06-02 2015-01-27 Atom Nanoelectronics, Inc Fully-printed carbon nanotube thin film transistor backplanes for active matrix organic light emitting devices and liquid crystal displays
EP3374087B1 (en) * 2015-11-12 2024-09-11 Cornell University Air controlled electrospray manufacturing and products thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210050386A (ko) * 2019-10-28 2021-05-07 광운대학교 산학협력단 실온에서 에어로졸 증착에 의한 페로브스카이트-유도 초민감도와 고안정 습도 센서 시스템
KR20230150637A (ko) * 2022-04-22 2023-10-31 한국과학기술원 정전분무 노즐 필름
KR20240109431A (ko) * 2023-01-04 2024-07-11 한국에너지기술연구원 섬유 코팅 장치

Also Published As

Publication number Publication date
WO2017021794A1 (en) 2017-02-09
US20190001360A1 (en) 2019-01-03
CA2899255A1 (en) 2017-01-31
TW201718738A (zh) 2017-06-01
CA2994365A1 (en) 2017-02-09
EP3328921A4 (en) 2019-08-21
JP2018534120A (ja) 2018-11-22
EP3328921A1 (en) 2018-06-06
CN108026304A (zh) 2018-05-11

Similar Documents

Publication Publication Date Title
KR20180040599A (ko) 기판상의 나노 입자의 에어로솔 증착 장치 및 방법
Khan et al. Direct patterning and electrospray deposition through EHD for fabrication of printed thin film transistors
US8389346B2 (en) Method and structure for establishing contacts in thin film transistor devices
US8211782B2 (en) Printed material constrained by well structures
Li et al. Direct writing of silver nanowire electrodes via dragging mode electrohydrodynamic jet printing for organic thin film transistors
Li et al. Surface effects on network formation of conjugated polymer wrapped semiconducting single walled carbon nanotubes and thin film transistor performance
Tang et al. Controlling the surface wettability of the polymer dielectric for improved resolution of inkjet-printed electrodes and patterned channel regions in low-voltage solution-processed organic thin film transistors
Li et al. Electrohydrodynamic (EHD) jet printing of carbon-black composites for solution-processed organic field-effect transistors
US20080157128A1 (en) Methods for producing multiple distinct transistors from a single semiconductor
Park et al. Optimization of electrohydrodynamic-printed organic electrodes for bottom-contact organic thin film transistors
US20150108429A1 (en) Carbon nanotube printed electronics devices
CN101595568A (zh) 薄膜半导体装置的制作方法及薄膜半导体装置
US20160072086A1 (en) Thin film transistor, transistor array, method of manufacturing thin film transistor, and method of manufacturing transistor array
Wu et al. Screen printing of silver nanoparticles on the source/drain electrodes of organic thin-film transistors
KR20180096248A (ko) 유기박막 트랜지스터 소스-드레인 전극 형성용 조성물
Fukuda et al. Influence of spray conditions on droplet charge per unit volume for electrospray deposition
Li et al. Facile method for enhancing conductivity of printed carbon nanotubes electrode via simple rinsing process
JP5449736B2 (ja) ボトムゲート型有機薄膜トランジスタ及びその製造方法
KR100884357B1 (ko) 유기 게이트 절연막 및 이를 이용한 유기 박막 트랜지스터
KR102079317B1 (ko) 용액 공정 기반의 박막 트랜지스터의 성능을 향상시키는 선택적인 표면 처리를 이용한 패터닝 방법
Park et al. Massive fabrication of carbon nanotube transistors by surface tension-driven inkjet-printing method
JP6393937B2 (ja) 薄膜トランジスタの製造方法、薄膜トランジスタ及びトランジスタアレイ
US20050233065A1 (en) Conductive member and process of producing the same
WO2014080575A1 (en) Method for treating metal surface with thiol
Jeong et al. Performance improvement of organic thin film transistors with carbon nanotube/metal hybrid electrodes for S/D contacts

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20180228

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20210614

Comment text: Request for Examination of Application

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20230407

Patent event code: PE09021S01D

E601 Decision to refuse application
PE0601 Decision on rejection of patent

Patent event date: 20231005

Comment text: Decision to Refuse Application

Patent event code: PE06012S01D

Patent event date: 20230407

Comment text: Notification of reason for refusal

Patent event code: PE06011S01I