TW201718738A - 氣霧沈積奈米微粒於基材上之裝置及方法 - Google Patents

氣霧沈積奈米微粒於基材上之裝置及方法 Download PDF

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Publication number
TW201718738A
TW201718738A TW105120670A TW105120670A TW201718738A TW 201718738 A TW201718738 A TW 201718738A TW 105120670 A TW105120670 A TW 105120670A TW 105120670 A TW105120670 A TW 105120670A TW 201718738 A TW201718738 A TW 201718738A
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Taiwan
Prior art keywords
substrate
nanoparticle
dielectric
depositing nanoparticles
nanoparticles
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TW105120670A
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English (en)
Chinese (zh)
Inventor
賈奎斯 勒福貝里
派翠克 馬連芬特
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加拿大國家研究委員會
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Publication of TW201718738A publication Critical patent/TW201718738A/zh

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B12/00Arrangements for controlling delivery; Arrangements for controlling the spray area
    • B05B12/08Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means
    • B05B12/082Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means responsive to a condition of the discharged jet or spray, e.g. to jet shape, spray pattern or droplet size
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/025Discharge apparatus, e.g. electrostatic spray guns
    • B05B5/035Discharge apparatus, e.g. electrostatic spray guns characterised by gasless spraying, e.g. electrostatically assisted airless spraying
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/14Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with multiple outlet openings; with strainers in or outside the outlet opening
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B12/00Arrangements for controlling delivery; Arrangements for controlling the spray area
    • B05B12/16Arrangements for controlling delivery; Arrangements for controlling the spray area for controlling the spray area
    • B05B12/20Masking elements, i.e. elements defining uncoated areas on an object to be coated
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/025Discharge apparatus, e.g. electrostatic spray guns
    • B05B5/0255Discharge apparatus, e.g. electrostatic spray guns spraying and depositing by electrostatic forces only
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/08Plant for applying liquids or other fluent materials to objects
    • B05B5/10Arrangements for supplying power, e.g. charging power
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/16Arrangements for supplying liquids or other fluent material
    • B05B5/1608Arrangements for supplying liquids or other fluent material the liquid or other fluent material being electrically conductive
    • B05B5/1616Arrangements for supplying liquids or other fluent material the liquid or other fluent material being electrically conductive and the arrangement comprising means for insulating a grounded material source from high voltage applied to the material
    • B05B5/165Arrangements for supplying liquids or other fluent material the liquid or other fluent material being electrically conductive and the arrangement comprising means for insulating a grounded material source from high voltage applied to the material by dividing the material into discrete quantities, e.g. droplets
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0208Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00Processes for applying liquids or other fluent materials
    • B05D1/007Processes for applying liquids or other fluent materials using an electrostatic field
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00Processes for applying liquids or other fluent materials
    • B05D1/02Processes for applying liquids or other fluent materials performed by spraying
    • B05D1/04Processes for applying liquids or other fluent materials performed by spraying involving the use of an electrostatic field
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00Processes for applying liquids or other fluent materials
    • B05D1/02Processes for applying liquids or other fluent materials performed by spraying
    • B05D1/04Processes for applying liquids or other fluent materials performed by spraying involving the use of an electrostatic field
    • B05D1/045Processes for applying liquids or other fluent materials performed by spraying involving the use of an electrostatic field on non-conductive substrates
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/02Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to macromolecular substances, e.g. rubber
    • B05D7/04Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to macromolecular substances, e.g. rubber to surfaces of films or sheets
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/24Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials for applying particular liquids or other fluent materials
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00Carbon; Compounds thereof
    • C01B32/15Nano-sized carbon materials
    • C01B32/158Carbon nanotubes
    • C01B32/159Carbon nanotubes single-walled
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/04Coating
    • C08J7/06Coating with compositions not containing macromolecular substances
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L25/00Compositions of, homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an aromatic carbocyclic ring; Compositions of derivatives of such polymers
    • C08L25/18Homopolymers or copolymers of aromatic monomers containing elements other than carbon and hydrogen
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L27/00Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers
    • C08L27/02Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment
    • C08L27/12Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • H10D30/6757Thin-film transistors [TFT] characterised by the structure of the channel, e.g. transverse or longitudinal shape or doping profile
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40Organic transistors
    • H10K10/46Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462Insulated gate field-effect transistors [IGFETs]
    • H10K10/468Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics
    • H10K10/471Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics the gate dielectric comprising only organic materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/20Carbon compounds, e.g. carbon nanotubes or fullerenes
    • H10K85/221Carbon nanotubes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2601/00Inorganic fillers
    • B05D2601/20Inorganic fillers used for non-pigmentation effect
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/549Organic PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Nanotechnology (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Composite Materials (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Thin Film Transistor (AREA)
  • Electrostatic Spraying Apparatus (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
TW105120670A 2015-07-31 2016-06-30 氣霧沈積奈米微粒於基材上之裝置及方法 TW201718738A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201562199675P 2015-07-31 2015-07-31
CA2899255A CA2899255A1 (en) 2015-07-31 2015-07-31 Apparatus and method for aerosol deposition of nanoparticles on a substrate

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Publication Number Publication Date
TW201718738A true TW201718738A (zh) 2017-06-01

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US (1) US20190001360A1 (enExample)
EP (1) EP3328921A4 (enExample)
JP (1) JP2018534120A (enExample)
KR (1) KR20180040599A (enExample)
CN (1) CN108026304A (enExample)
CA (2) CA2899255A1 (enExample)
TW (1) TW201718738A (enExample)
WO (1) WO2017021794A1 (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102023106B1 (ko) * 2017-02-20 2019-09-20 광운대학교 산학협력단 용액 공정 기반 고품질 질화 붕소 박막 제조 및 소자 적용 방법
FI129565B (en) 2019-04-24 2022-04-29 Canatu Oy Apparatuses and method for oriented deposition
CN112570217A (zh) * 2019-09-27 2021-03-30 深圳市向宇龙自动化设备有限公司 一种多功能快速点胶系统
US11530479B2 (en) * 2019-10-18 2022-12-20 Taiwan Semiconductor Manufacturing Company, Ltd. Atomic layer deposition tool and method
KR102278712B1 (ko) * 2019-10-28 2021-07-16 광운대학교 산학협력단 실온에서 에어로졸 증착에 의한 페로브스카이트-유도 초민감도와 고안정 습도 센서 시스템
GB2598964B (en) * 2020-09-22 2024-12-25 Brian King Andrew Methods and apparatus for inducing chemical reactions using electro-statics
CN113478809B (zh) * 2021-07-06 2023-05-30 上海科技大学 微纳结构的增材制造方法
CN113387357A (zh) * 2021-07-22 2021-09-14 江西理工大学 一种MXene褶皱纳米球的制备方法
JP7505472B2 (ja) * 2021-10-28 2024-06-25 トヨタ自動車株式会社 電極の製造方法および電極の製造装置
CN114054293A (zh) * 2021-11-17 2022-02-18 珠海格力智能装备有限公司 一种基于嵌入式的喷胶控制系统及其使用方法
CN113941462A (zh) * 2021-11-17 2022-01-18 秦皇岛泰治医疗科技有限公司 一种用于口罩生产光触媒喷涂设备
CN114602747A (zh) * 2022-04-12 2022-06-10 吉水县伟兵信息科技有限公司 一种装修用瓷砖涂胶装置
KR102612286B1 (ko) * 2022-04-22 2023-12-12 한국과학기술원 정전분무 노즐 필름
CN115488003B (zh) * 2022-09-27 2024-11-22 康佳集团股份有限公司 一种工件喷胶装置
KR102885888B1 (ko) * 2023-01-04 2025-11-17 한국에너지기술연구원 섬유 코팅 장치
CN118109807B (zh) * 2024-03-05 2024-10-18 浙江绿岛科技有限公司 一种用于金属件表面形成致密防护层的气雾剂
FI131846B1 (en) * 2024-09-20 2026-01-08 Canatu Finland Oy Method of preparing free-standing film of harm-structures and apparatus
CN120518328B (zh) * 2025-07-22 2026-03-06 电子科技大学 微纳小球自组装掩膜制备随机网栅透明导电薄膜的方法

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4064295A (en) * 1973-11-06 1977-12-20 National Research Development Corporation Spraying atomized particles
JPH06106096A (ja) * 1992-09-29 1994-04-19 Tokyo Ohka Kogyo Co Ltd 静電塗装装置
US20040101619A1 (en) * 2000-03-30 2004-05-27 Carlo Camorani Object decoration
JP2004160388A (ja) * 2002-11-14 2004-06-10 Matsushita Electric Ind Co Ltd 薄膜の作成方法と作成装置
US7232771B2 (en) * 2003-11-04 2007-06-19 Regents Of The University Of Minnesota Method and apparatus for depositing charge and/or nanoparticles
CN1293649C (zh) * 2004-01-08 2007-01-03 西安交通大学 一种用于场发射显示器阴极的大面积碳纳米管薄膜制备方法
US20060280866A1 (en) * 2004-10-13 2006-12-14 Optomec Design Company Method and apparatus for mesoscale deposition of biological materials and biomaterials
JP2006142159A (ja) * 2004-11-17 2006-06-08 Kawasaki Heavy Ind Ltd 微粒子分散複合薄膜形成方法および形成装置
US7674671B2 (en) * 2004-12-13 2010-03-09 Optomec Design Company Aerodynamic jetting of aerosolized fluids for fabrication of passive structures
US20080317967A1 (en) * 2005-02-14 2008-12-25 Kwang-Leong Choy Deposition of Polymeric Films
JP2008043944A (ja) * 2006-07-21 2008-02-28 Matsushita Electric Ind Co Ltd 微粒子の製造方法及び装置
EP2106903A1 (de) * 2008-02-22 2009-10-07 Hermes Schleifkörper GmbH Verfahren zum Aufstreuen abriebhemmender Werkstoffe und Vorrichtung hierzu
JP2011100879A (ja) * 2009-11-06 2011-05-19 National Institute Of Advanced Industrial Science & Technology 化合物半導体薄膜及びその製造方法、並びに太陽電池
KR101214044B1 (ko) * 2010-11-22 2012-12-20 한국세라믹기술원 전계방출용 cnt-금속 혼합막 제조 방법
EP2766130B1 (en) * 2011-10-12 2020-07-08 1366 Technologies Inc. Apparatus and process for depositing a thin layer of resist on a substrate
US8658256B2 (en) * 2012-06-20 2014-02-25 The Boeing Company Methods of coating substrates with electrically charged conductive materials, electrically conductive coated substrates, and associated apparatuses
JP2014063849A (ja) * 2012-09-20 2014-04-10 Mitsubishi Chemicals Corp 有機半導体素子及びその製造方法、並びに薄膜の製造方法
DE102012113124A1 (de) * 2012-12-27 2014-07-03 Ev Group E. Thallner Gmbh Sprühdüseneinrichtung und Verfahren zum Beschichten
WO2015002326A1 (en) * 2013-07-05 2015-01-08 Nitto Denko Corporation Photocatalyst sheet
FI20135903A7 (fi) * 2013-09-09 2015-03-10 Beneq Oy Laite ja menetelmä aerosolin valmistamiseksi ja kohdistinosa
FI125920B (en) * 2013-09-09 2016-04-15 Beneq Oy A method of coating a substrate
US8940562B1 (en) * 2014-06-02 2015-01-27 Atom Nanoelectronics, Inc Fully-printed carbon nanotube thin film transistor backplanes for active matrix organic light emitting devices and liquid crystal displays
EP3374087B1 (en) * 2015-11-12 2024-09-11 Cornell University Air controlled electrospray manufacturing and products thereof

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Publication number Publication date
WO2017021794A1 (en) 2017-02-09
US20190001360A1 (en) 2019-01-03
CA2899255A1 (en) 2017-01-31
CA2994365A1 (en) 2017-02-09
EP3328921A4 (en) 2019-08-21
JP2018534120A (ja) 2018-11-22
KR20180040599A (ko) 2018-04-20
EP3328921A1 (en) 2018-06-06
CN108026304A (zh) 2018-05-11

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