KR20170096575A - 압력 검출 유닛 및 이것을 사용한 압력 센서 - Google Patents

압력 검출 유닛 및 이것을 사용한 압력 센서 Download PDF

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Publication number
KR20170096575A
KR20170096575A KR1020160169288A KR20160169288A KR20170096575A KR 20170096575 A KR20170096575 A KR 20170096575A KR 1020160169288 A KR1020160169288 A KR 1020160169288A KR 20160169288 A KR20160169288 A KR 20160169288A KR 20170096575 A KR20170096575 A KR 20170096575A
Authority
KR
South Korea
Prior art keywords
base
pressure detecting
detecting unit
pressure
receiving member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1020160169288A
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English (en)
Korean (ko)
Inventor
토모히사 아오야마
모토히사 무카이
요우코 타무라
Original Assignee
가부시기가이샤 후지고오키
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 가부시기가이샤 후지고오키 filed Critical 가부시기가이샤 후지고오키
Publication of KR20170096575A publication Critical patent/KR20170096575A/ko
Withdrawn legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0069—Electrical connection means from the sensor to its support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0672—Leakage or rupture protection or detection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/142—Multiple part housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
KR1020160169288A 2016-02-16 2016-12-13 압력 검출 유닛 및 이것을 사용한 압력 센서 Withdrawn KR20170096575A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016026700A JP6703850B2 (ja) 2016-02-16 2016-02-16 圧力検出ユニット及びこれを用いた圧力センサ
JPJP-P-2016-026700 2016-02-16

Publications (1)

Publication Number Publication Date
KR20170096575A true KR20170096575A (ko) 2017-08-24

Family

ID=58056976

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020160169288A Withdrawn KR20170096575A (ko) 2016-02-16 2016-12-13 압력 검출 유닛 및 이것을 사용한 압력 센서

Country Status (5)

Country Link
US (1) US10260978B2 (enExample)
EP (1) EP3208589A1 (enExample)
JP (1) JP6703850B2 (enExample)
KR (1) KR20170096575A (enExample)
CN (1) CN107084813A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230163265A (ko) * 2022-05-23 2023-11-30 주식회사 코멧센서 압력 센서
WO2023229285A1 (ko) * 2022-05-23 2023-11-30 주식회사 코멧센서 압력 센서

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6624966B2 (ja) * 2016-02-16 2019-12-25 株式会社不二工機 圧力検出ユニット及びこれを用いた圧力センサ
JP2017146137A (ja) * 2016-02-16 2017-08-24 株式会社不二工機 圧力検出ユニット及びこれを用いた圧力センサ、並びに圧力検出ユニットの製造方法
JP2020008306A (ja) * 2018-07-03 2020-01-16 株式会社不二工機 圧力検出ユニット及びこれを用いた圧力センサ
JP7079485B2 (ja) * 2018-07-10 2022-06-02 株式会社不二工機 圧力検出ユニット、その製造方法、および圧力検出ユニットを用いた圧力センサ並びにその製造方法

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JPS56102443U (enExample) * 1979-12-30 1981-08-11
JPS58168931A (ja) * 1982-03-30 1983-10-05 Hitachi Ltd 圧力検出器
JPS595931A (ja) * 1982-07-02 1984-01-12 Nippon Denso Co Ltd 半導体圧力センサ
JPS5946831A (ja) * 1982-09-10 1984-03-16 Matsushita Electric Ind Co Ltd 圧力センサ
JP3145274B2 (ja) * 1995-06-07 2001-03-12 株式会社山武 圧力センサ
JPH09222371A (ja) * 1996-02-16 1997-08-26 Fuji Koki:Kk 圧力センサ
JPH11132885A (ja) * 1997-10-28 1999-05-21 Aisin Seiki Co Ltd 圧力検出装置
CN1123764C (zh) * 2000-07-15 2003-10-08 山东省硅酸盐研究设计院 陶瓷压力传感器及差压传感器
WO2003008921A1 (en) * 2001-07-17 2003-01-30 Measurement Specialties, Inc. Isolation technique for pressure sensing structure
JP2003287472A (ja) * 2002-03-28 2003-10-10 Fuji Koki Corp 圧力センサ
JP2004045216A (ja) * 2002-07-11 2004-02-12 Toyoda Mach Works Ltd 圧力センサ
JP3991798B2 (ja) * 2002-07-12 2007-10-17 株式会社ジェイテクト 圧力センサ
EP1570247B1 (en) * 2002-12-12 2012-10-24 Danfoss A/S A pressure sensor
DE102009003178A1 (de) * 2009-05-18 2010-11-25 Endress + Hauser Gmbh + Co. Kg Keramisches Bauteil mit mindestens einer elektrischen Durchführung, Verfahren zu dessen Herstellung und Drucksensor mit einem solchen Bauteil
JP5888843B2 (ja) * 2010-09-22 2016-03-22 株式会社不二工機 圧力センサ
JP5866246B2 (ja) * 2012-04-20 2016-02-17 株式会社不二工機 圧力センサ
CN103148974A (zh) * 2013-01-30 2013-06-12 上海安可泰环保科技有限公司 一种高电压环境下应用的压力传感装置
JP5973357B2 (ja) * 2013-02-05 2016-08-23 株式会社鷺宮製作所 圧力検知ユニット及び圧力検知ユニットの製造方法
TWI633289B (zh) * 2013-03-13 2018-08-21 不二工機股份有限公司 壓力感測器
US9772242B2 (en) * 2013-12-06 2017-09-26 Nagano Keiki Co., Ltd. Physical quantity measuring sensor including an O-ring between a cylindrical portion and a cylindrical projection
JP6624966B2 (ja) * 2016-02-16 2019-12-25 株式会社不二工機 圧力検出ユニット及びこれを用いた圧力センサ
US10481025B2 (en) * 2017-01-26 2019-11-19 Rosemount Aerospace Inc. Piezoresistive sensor with spring flexures for stress isolation

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230163265A (ko) * 2022-05-23 2023-11-30 주식회사 코멧센서 압력 센서
WO2023229285A1 (ko) * 2022-05-23 2023-11-30 주식회사 코멧센서 압력 센서

Also Published As

Publication number Publication date
US10260978B2 (en) 2019-04-16
US20170234749A1 (en) 2017-08-17
CN107084813A (zh) 2017-08-22
JP6703850B2 (ja) 2020-06-03
EP3208589A1 (en) 2017-08-23
JP2017146136A (ja) 2017-08-24

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Legal Events

Date Code Title Description
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 20161213

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination