KR20150034577A - Apparatus for supplying collets - Google Patents

Abstract

Provided is a collet supply apparatus supplying collets to replace collets to pick up a die in a die bonding process. The collet supply apparatus comprises a cassette having open upper and lower parts and multiple collets stacked therein; multiple permanent magnets applying a magnetic force to the collets in order for the collets to float in the cassette; and an elevator arranged on the lower part of the cassette and lifting up the collets to consecutively supply the collets.

Description

{APPARATUS FOR SUPPLYING COLLETS}

Embodiments of the invention relate to a collet feeder. More particularly, it relates to a device for feeding collets for replacement of a collet for picking up and transporting a die in a die bonding process.

Generally, in the die bonding process, a pick-up unit that picks up and transports the dies from a wafer to bond individualized dies to the substrate through a sawing process can be used. The pick-up unit may include a collet for picking up the die using the vacuum, a pick-up head to which the collet is coupled, and a drive unit for moving the pick-up head.

In one example, the pick-up head and the collet may be coupled to each other using a magnetic force. The pick-up head may be provided with a pneumatic pipe for providing vacuum, and the collet may be provided with a plurality of suction holes connected to the pneumatic pipe to pick up the die.

Meanwhile, the collet may be made of a flexible material, for example, a synthetic rubber or the like in direct contact with the die, and may be required to be replaced due to abrasion after a certain period of use. The replacement of the collet can be done manually by an operator. However, a manual replacement method by the operator may take a considerable time, and the failure incidence rate in the die bonding process may be increased if a new collet is not accurately attached to the pick-up head.

In order to solve the above problems, Korean Patent Application No. 10-2012-0121592 filed by the present applicant discloses an apparatus for automatic replacement of a collet. The collet replacement device may include a panel having an area through which the plurality of collets are disposed and an opening through which the pickup head passes, and latching members disposed in the opening to remove the collet from the pick-up head. However, since the number of collets provided on the panel is limited, there is still a need to relocate the collets on the panel by the operator if the collets disposed on the panel are exhausted.

Embodiments of the present invention are directed to providing a collet feeder capable of feeding a plurality of collets for automatic replacement of a collet used in a die bonding process.

According to embodiments of the present invention, a collet feeder comprises a cassette having an open top and a bottom and a plurality of collets housed in a stacked form, and a plurality of collets disposed below the cassettes and arranged to raise the collets And an elevator for letting the user know.

According to embodiments of the present invention, the pick-up head for picking up the uppermost collet among the collets can pick up the uppermost collet using magnetic force.

According to embodiments of the present invention, the cassette may be provided with protrusions arranged to surround the uppermost collet of the collets, and the protrusions are inserted into the sides of the pickup head for picking up the uppermost collet Recesses may be provided.

According to embodiments of the present invention, the protrusions may be provided with permanent magnets that apply a magnetic force to the uppermost collet so that the uppermost collet is suspended between the protrusions.

According to embodiments of the present invention, the inner surfaces of the protrusions may be provided with protrusions for maintaining the gap between the uppermost collet and the protrusions.

According to embodiments of the present invention, a plurality of permanent magnets may be further provided for applying magnetic force to the collets such that the collets are suspended in the cassette.

According to embodiments of the present invention, the collets suspended by the permanent magnets may be spaced apart from each other by a predetermined distance.

According to embodiments of the present invention, the inner surfaces of the cassette may be provided with protrusions for maintaining the spacing between the collets and the inner surfaces of the cassette.

According to embodiments of the present invention, a vertical frame on which the elevator is mounted may further be provided, and a holder for inserting the cassette may be provided on the vertical frame.

According to embodiments of the present invention, ball plungers for fixing the cassette may be disposed on the inner surfaces of the holder, and grooves for inserting the ball plungers may be formed on the lower outer sides of the cassette .

According to the embodiments of the present invention as described above, a plurality of collets can be stacked in a cassette, and the collets can be sequentially supplied by elevating the elevator. Thus, in the die bonding process The time required to replace the collet can be greatly shortened.

In particular, it is possible to stably hold the collets in the cassette by using magnetic force to float the collets inside the cassette, and also the top collet can be stably picked up by the pick-up head.

FIG. 1 is a schematic diagram for explaining a collet feeder according to an embodiment of the present invention.
2 is a schematic cross-sectional view for explaining a pick-up head and a collet.
Fig. 3 is a bottom view for explaining the pick-up head shown in Fig. 2. Fig.
4 is a schematic perspective view for explaining the cassette shown in Fig.
5 is a schematic cross-sectional view for explaining another example of the cassette shown in Fig.
6 is a schematic perspective view for explaining the cassette shown in Fig.
Fig. 7 is a schematic sectional view for explaining another example of the cassette shown in Fig. 1. Fig.
8 is a schematic perspective view for explaining the cassette shown in Fig.
9 is a schematic cross-sectional view for explaining another example of the holder and the cassette shown in Fig.

Hereinafter, a head replacement apparatus and a die bonding system including the head replacement apparatus according to embodiments of the present invention will be described in detail with reference to the accompanying drawings. The present invention is capable of various modifications and various forms, and specific embodiments are illustrated in the drawings and described in detail in the text. It should be understood, however, that the invention is not intended to be limited to the particular forms disclosed, but includes all modifications, equivalents, and alternatives falling within the spirit and scope of the invention. Like reference numerals are used for like elements in describing each drawing. In the accompanying drawings, the dimensions of the structures are enlarged to illustrate the present invention in order to clarify the present invention.

The terms first, second, etc. may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component.

The terminology used in this application is used only to describe a specific embodiment and is not intended to limit the invention. The singular expressions include plural expressions unless the context clearly dictates otherwise. In this application, the terms "comprises", "having", and the like are used to specify that a feature, a number, a step, an operation, an element, a part or a combination thereof is described in the specification, But do not preclude the presence or addition of one or more other features, integers, steps, operations, components, parts, or combinations thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms such as those defined in commonly used dictionaries are to be interpreted as having a meaning consistent with the contextual meaning of the related art and are to be interpreted as either ideal or overly formal in the sense of the present application Do not.

2 is a schematic cross-sectional view for explaining a pick-up head and a collet, and Fig. 3 is a cross-sectional view of the pick-up head shown in Fig. 2, Fig.

1 to 3, the collet feeder 100 according to an exemplary embodiment of the present invention may be used to feed a new collet 20 when replacement of the collet 20 is required due to abrasion or the like in the die bonding process Can be used. In particular, it is possible to shorten the time required for replacing the collet 20 by preparing a plurality of collets 20 in advance and supplying the collets 20 sequentially.

Specifically, in the die bonding process, the pick-up unit 10 can be used for picking up and transporting the die. As an example, the wafer may be divided into a plurality of dies through a dicing process, and may be loaded on the stage of the die bonding apparatus after being attached to the dicing tape. The pick-up unit 10 can pick up a die from the wafer and transfer it, and can also bond the picked-up die onto a substrate such as a printed circuit board, a lead frame or the like.

The pick-up unit 10 may include a pick-up head 30 and a collet 20 attached to the pick-up head 30 as shown in FIG. 2, And can be mounted on the pick-up head 30. Particularly, the collet 20 may be provided with a plurality of suction holes 22 for suctioning the die, and the pickup head 30 is provided with a vacuum pipe (32) may be provided.

The collet 20 may have a generally rectangular shape and may include a hard top pad 24 and a soft bottom pad 26. The suction holes 22 for suctioning the die may be provided through the upper pad 24 and the lower pad 26 and may communicate with the vacuum pipe 32 of the pickup head 30 . The upper surface of the upper pad 24 may be provided with a vacuum channel 28 connected to the vacuum pipe 32. The suction holes 22 are connected to the vacuum channel 28 .

The pick-up head 30 may include a drive shaft connected to a transfer unit (not shown) for transferring the pick-up unit 10 and may have a substantially rectangular shape so that the collet 20 can be mounted thereon. The drive shaft may be a hollow shaft, and may function as the pneumatic piping (32).

Meanwhile, the pick-up head 30 and the collet 20 can be coupled to each other by a magnetic force. As an example, the pick-up head 30 may be provided with a first permanent magnet 34 to provide the magnetic force, and the upper pad 24 of the collet 20 may be made of a magnetic material. On the other hand, guide members 36 for guiding the mounting position of the collet 20 may be disposed on the lower edge of the pick-up head 30, and the lower pad 26 may be made of rubber Lt; / RTI >

According to an embodiment of the present invention, the collet feeding device 100 includes a cassette 110 having upper and lower openings and a plurality of collets 20 stacked therein, And an elevator (120) disposed in the collet (20) and raising the collets (20) to sequentially feed the collets (20). At this time, the lower side surfaces of the cassette 110 may be provided with stoppers 111 for preventing the collets 20 from falling downward.

In addition, the collet feeder 100 may include a vertical frame 102 on which the cassette 110 and the elevator 120 are mounted. The cassette 110 may be mounted on the vertical frame 102 and the elevator 120 may be mounted on the vertical frame 102 to be positioned below the cassette 110. In particular, a holder 104 for inserting the cassette 110 may be provided on the vertical frame 102. As an example, the holder 104 may have a rectangular ring shape and may have a latching jaw for supporting the cassette 110 as shown.

The elevator 120 includes a support head 122 for supporting the collets 20 and a drive unit 130 for moving the support head 122 in a vertical direction and a drive unit 130 for moving the support head 122 and the drive unit 130 (Not shown). The driving unit 130 includes a belt 136 connecting between the motor 132 and the pulleys 134 and the pulleys 134 and a belt 136 connected to the belt 136 to move in the vertical direction And the movable member 138 may be vertically guided by a linear motion guide mounted on the vertical frame 102. The movable member 138 may be a vertical motion guide. However, since the configuration of the driving unit 130 can be variously modified, the scope of the present invention is not limited thereto.

4 is a schematic perspective view for explaining the cassette shown in Fig.

4, a plurality of protrusions 112, for example, the uppermost collet 20, disposed on the upper portion of the cassette 110 so as to surround the uppermost collet 20 of the collets 20, Four protrusions 112 facing the sides of the cassette 110 may be provided on top of the side walls of the cassette 110, respectively. The side surfaces of the pickup head 30 may be provided with recesses 38 (see FIG. 3) into which the protrusions 112 are inserted.

The uppermost collet 20 of the collets 20 may be positioned between the protrusions 112 and the pick-up head 30 may be engaged with the uppermost collet 20.

Fig. 5 is a schematic cross-sectional view for explaining another example of the cassette shown in Fig. 1, and Fig. 6 is a schematic perspective view for explaining the cassette shown in Fig.

5 and 6, the second permanent magnets 114 for holding the uppermost collet 20 of the collets 20 in a floating state may be mounted on the protrusions 112, respectively . The second permanent magnets 114 may be embedded in the protrusions 112 and the collet 20 at the uppermost end of the collets 20 may be embedded in the second permanent magnets 114. [ It can be floated by the magnetic force of. At this time, the protrusions 112 may be spaced apart from the sides of the uppermost collet 20 by a predetermined distance.

Particularly, when the collets 20 are lifted by the elevator 120, the collet 20 at the uppermost stage can be suspended by the magnetic force of the second permanent magnets 114 at a predetermined position, The uppermost collet 20 can be picked up by the pick-up head 30.

The protrusions 116 may be formed on the inner surfaces of the protrusions 112 to maintain a gap between the protrusions 112 and the uppermost collet 20. That is, the protrusions 116 may be used to prevent the uppermost collet 20 from being attached to any one of the second permanent magnets 114. At this time, the thickness of the protrusions 116 is preferably smaller than the gap between the uppermost collet 20 and the protrusions 112, and the protrusions 116 are preferably made of a non-magnetic material.

Fig. 7 is a schematic cross-sectional view for explaining another example of the cassette shown in Fig. 1, and Fig. 8 is a schematic perspective view for explaining the cassette shown in Fig.

7 and 8, the sidewalls and protrusions 112 of the cassette 110 are provided with a plurality of second permanent magnets (not shown) such that the collets 20 inside the cassette 110 are suspended by magnetic force 114 may be mounted.

The second permanent magnets 114 may be embedded in the sidewalls and the protrusions 112 of the cassette 110 so as to be spaced apart from each other by a predetermined distance in the vertical direction, The collets 20 may be suspended by the magnetic force of the second permanent magnets 114 so as to be spaced apart from each other by a predetermined distance.

In addition, on the inner surfaces of the sidewalls and the protrusions 114 of the cassette 110, protrusions (not shown) for preventing the collets 20 from being attached to any one of the second permanent magnets 114 116 may be provided.

According to the embodiments of the present invention as described above, the plurality of collets 20 are housed in the cassette 110 in a stacked manner, and the elevator 120 is used to raise the collets 20, It is possible to sequentially supply the collets 20, thereby greatly shortening the time required for the replacement of the collet 20 in the die bonding process.

Particularly, when the collets 20 are held in a floating state by using a magnetic force in the cassette 110, the collets 20 can be supplied in units of cassettes. In this case, Can be further reduced.

9 is a schematic cross-sectional view for explaining another example of the holder and the cassette shown in Fig.

9, the holder 104 into which the cassette 110 is inserted may have a substantially rectangular ring shape and may have a latching jaw 106 for supporting the cassette 110. [ The inner surface of the holder 104 may be provided with ball plungers 108 for fixing the cassette 110. The lower outer surfaces of the cassette 110 may include ball plungers 108 May be provided in the ring-shaped groove 118 into which the ring-shaped groove 118 is inserted.

According to the embodiments of the present invention as described above, the plurality of collets 20 are housed in the cassette 110 in a stacked manner, and the elevator 120 is used to raise the collets 20, It is possible to sequentially supply the collets 20, thereby greatly shortening the time required for the replacement of the collet 20 in the die bonding process.

Particularly, since the collets 20 can be floated in the cassette 110 using magnetic force, the collets 20 can be stably maintained in the cassette 110, 30, the uppermost collet 20 can be stably picked up.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the present invention as defined by the following claims. It can be understood that it is possible.

10: pick-up unit 20: collet
30: pick-up head 34: first permanent magnet
100: Collet feeder 110: Cassette
112: protrusion 114: second permanent magnet
116: projection 120: elevator
130:

Claims (10)

A cassette in which upper and lower portions are opened and a plurality of collets are housed in a stacked form; And
And an elevator disposed below the cassette and elevating the collets to sequentially supply the collets. The collet feeding device according to claim 1, wherein the pick-up head for picking up the uppermost collet among the collets picks up the uppermost collet by using a magnetic force. 2. The pick-up head according to claim 1, wherein protrusions arranged to surround the uppermost collet of the collets are provided on the upper portion of the cassette, and recesses into which the protrusions are inserted are provided on the sides of the pickup head for picking up the uppermost collet Wherein the collet supply device comprises: The collet supplying apparatus according to claim 3, wherein the protrusions are mounted with permanent magnets that apply magnetic force to the uppermost collet so that the uppermost collet is suspended between the protrusions. 5. The collet feeding apparatus according to claim 4, wherein protrusions are provided on inner surfaces of the protrusions to maintain a gap between the uppermost collet and the protrusions. 2. The collet feeder of claim 1, further comprising a plurality of permanent magnets that apply magnetic force to the collets such that the collets are suspended within the cassette. The collet supplying apparatus according to claim 6, wherein the collets suspended by the permanent magnets are spaced apart from each other by a predetermined distance. 7. The collet feeder of claim 6, wherein the inner surfaces of the cassette are provided with protrusions for maintaining the spacing between the collets and the inner surfaces of the cassette. The collet feeder of claim 1, further comprising a vertical frame on which the elevator is mounted, and a holder on which the cassette is inserted is provided on the vertical frame. [10] The apparatus as claimed in claim 9, wherein ball holders for fixing the cassette are disposed on inner surfaces of the holder, and grooves for inserting the ball plungers are formed on lower outer surfaces of the cassette .

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