KR20140105379A - 생성 방법, 기억 매체 및 정보 처리 장치 - Google Patents

생성 방법, 기억 매체 및 정보 처리 장치 Download PDF

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Publication number
KR20140105379A
KR20140105379A KR1020140017053A KR20140017053A KR20140105379A KR 20140105379 A KR20140105379 A KR 20140105379A KR 1020140017053 A KR1020140017053 A KR 1020140017053A KR 20140017053 A KR20140017053 A KR 20140017053A KR 20140105379 A KR20140105379 A KR 20140105379A
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KR
South Korea
Prior art keywords
pattern
target pattern
pattern elements
points
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1020140017053A
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English (en)
Korean (ko)
Inventor
다다시 아라이
Original Assignee
캐논 가부시끼가이샤
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Publication date
Application filed by 캐논 가부시끼가이샤 filed Critical 캐논 가부시끼가이샤
Publication of KR20140105379A publication Critical patent/KR20140105379A/ko
Withdrawn legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/20—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials
    • H10P76/204—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials of organic photoresist masks
    • H10P76/2041—Photolithographic processes
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F30/00—Computer-aided design [CAD]
    • G06F30/30—Circuit design
    • G06F30/39—Circuit design at the physical level
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F30/00—Computer-aided design [CAD]
    • G06F30/30—Circuit design
    • G06F30/39—Circuit design at the physical level
    • G06F30/398—Design verification or optimisation, e.g. using design rule check [DRC], layout versus schematics [LVS] or finite element methods [FEM]
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2119/00—Details relating to the type or aim of the analysis or the optimisation
    • G06F2119/18—Manufacturability analysis or optimisation for manufacturability
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Evolutionary Computation (AREA)
  • Geometry (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR1020140017053A 2013-02-22 2014-02-14 생성 방법, 기억 매체 및 정보 처리 장치 Withdrawn KR20140105379A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013033870A JP6141044B2 (ja) 2013-02-22 2013-02-22 生成方法、プログラム及び情報処理装置
JPJP-P-2013-033870 2013-02-22

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020160097715A Division KR101682336B1 (ko) 2013-02-22 2016-08-01 생성 방법, 기억 매체 및 정보 처리 장치

Publications (1)

Publication Number Publication Date
KR20140105379A true KR20140105379A (ko) 2014-09-01

Family

ID=51368335

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020140017053A Withdrawn KR20140105379A (ko) 2013-02-22 2014-02-14 생성 방법, 기억 매체 및 정보 처리 장치
KR1020160097715A Expired - Fee Related KR101682336B1 (ko) 2013-02-22 2016-08-01 생성 방법, 기억 매체 및 정보 처리 장치

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020160097715A Expired - Fee Related KR101682336B1 (ko) 2013-02-22 2016-08-01 생성 방법, 기억 매체 및 정보 처리 장치

Country Status (5)

Country Link
US (1) US8943446B2 (https=)
JP (1) JP6141044B2 (https=)
KR (2) KR20140105379A (https=)
CN (1) CN104007607B (https=)
TW (1) TWI536093B (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6712527B2 (ja) * 2016-09-30 2020-06-24 株式会社ブイ・テクノロジー プロキシミティ露光方法
US10318698B2 (en) * 2016-12-14 2019-06-11 Taiwan Semiconductor Manufacturing Co., Ltd. System and method for assigning color pattern
CN114638189B (zh) * 2022-03-16 2026-02-10 东方晶源微电子科技(北京)股份有限公司 一种解决掩模版着色边界冲突的方法、装置和计算机设备

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7018753B2 (en) * 2003-05-05 2006-03-28 Lsi Logic Corporation Variable mask field exposure
JP4585197B2 (ja) * 2003-12-22 2010-11-24 ルネサスエレクトロニクス株式会社 レイアウト設計方法およびフォトマスク
JP4229829B2 (ja) * 2003-12-26 2009-02-25 Ｎｅｃエレクトロニクス株式会社 ホールパターン設計方法、およびフォトマスク
US7310797B2 (en) 2005-05-13 2007-12-18 Cadence Design Systems, Inc. Method and system for printing lithographic images with multiple exposures
US7745067B2 (en) * 2005-07-28 2010-06-29 Texas Instruments Incorporated Method for performing place-and-route of contacts and vias in technologies with forbidden pitch requirements
JP2007258366A (ja) * 2006-03-22 2007-10-04 Toshiba Corp パターン処理方法
CN101657827B (zh) * 2007-04-19 2013-03-20 D-波系统公司 用于自动图像识别的系统、方法及装置
JP4779003B2 (ja) * 2007-11-13 2011-09-21 エーエスエムエル ネザーランズ ビー．ブイ． フルチップ設計のパターン分解を行うための方法
JP5100625B2 (ja) * 2008-12-11 2012-12-19 株式会社東芝 パターンレイアウト設計方法
US8402396B2 (en) 2009-09-29 2013-03-19 The Regents Of The University Of California Layout decomposition for double patterning lithography
US8448120B2 (en) * 2011-05-09 2013-05-21 Taiwan Semiconductor Manufacturing Co., Ltd. RC extraction for single patterning spacer technique

Also Published As

Publication number Publication date
JP6141044B2 (ja) 2017-06-07
TW201433879A (zh) 2014-09-01
KR101682336B1 (ko) 2016-12-05
US8943446B2 (en) 2015-01-27
JP2014164054A (ja) 2014-09-08
CN104007607A (zh) 2014-08-27
US20140245241A1 (en) 2014-08-28
TWI536093B (zh) 2016-06-01
KR20160096573A (ko) 2016-08-16
CN104007607B (zh) 2018-01-26

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