KR20140054222A - 직사각형 기판 상에 층을 증착하기 위한 마스크 구조물, 장치 및 방법 - Google Patents
직사각형 기판 상에 층을 증착하기 위한 마스크 구조물, 장치 및 방법 Download PDFInfo
- Publication number
- KR20140054222A KR20140054222A KR1020147006486A KR20147006486A KR20140054222A KR 20140054222 A KR20140054222 A KR 20140054222A KR 1020147006486 A KR1020147006486 A KR 1020147006486A KR 20147006486 A KR20147006486 A KR 20147006486A KR 20140054222 A KR20140054222 A KR 20140054222A
- Authority
- KR
- South Korea
- Prior art keywords
- mask
- substrate
- corner
- typically
- edge
- Prior art date
Links
- 239000000758 substrate Substances 0.000 claims abstract description 192
- 230000008021 deposition Effects 0.000 claims abstract description 57
- 238000000151 deposition Methods 0.000 claims description 82
- 239000000463 material Substances 0.000 claims description 67
- 238000000034 method Methods 0.000 claims description 44
- 230000000873 masking effect Effects 0.000 claims description 15
- 238000005229 chemical vapour deposition Methods 0.000 claims description 7
- 230000007717 exclusion Effects 0.000 abstract description 37
- 238000000576 coating method Methods 0.000 description 13
- 230000000694 effects Effects 0.000 description 11
- 239000011248 coating agent Substances 0.000 description 10
- 238000005137 deposition process Methods 0.000 description 10
- 238000005240 physical vapour deposition Methods 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical group [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229920000049 Carbon (fiber) Polymers 0.000 description 2
- 229910001200 Ferrotitanium Inorganic materials 0.000 description 2
- 229910001374 Invar Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 239000004917 carbon fiber Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- -1 etc.) Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical class [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical class [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/04—Treatment of selected surface areas, e.g. using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C10/00—Solid state diffusion of only metal elements or silicon into metallic material surfaces
- C23C10/04—Diffusion into selected surface areas, e.g. using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/042—Coating on selected surface areas, e.g. using masks using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C2/00—Hot-dipping or immersion processes for applying the coating material in the molten state without affecting the shape; Apparatus therefor
- C23C2/006—Pattern or selective deposits
- C23C2/0064—Pattern or selective deposits using masking layers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/01—Selective coating, e.g. pattern coating, without pre-treatment of the material to be coated
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/02—Pretreatment of the material to be coated, e.g. for coating on selected surface areas
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- General Chemical & Material Sciences (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/EP2011/064670 WO2013026493A1 (en) | 2011-08-25 | 2011-08-25 | Corner cut mask |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20140054222A true KR20140054222A (ko) | 2014-05-08 |
Family
ID=44532853
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020147006486A KR20140054222A (ko) | 2011-08-25 | 2011-08-25 | 직사각형 기판 상에 층을 증착하기 위한 마스크 구조물, 장치 및 방법 |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP2748349A1 (ja) |
| JP (1) | JP5911958B2 (ja) |
| KR (1) | KR20140054222A (ja) |
| CN (1) | CN103781935B (ja) |
| TW (1) | TWI541924B (ja) |
| WO (1) | WO2013026493A1 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20200028985A (ko) * | 2018-01-02 | 2020-03-17 | 보에 테크놀로지 그룹 컴퍼니 리미티드 | 마스크 플레이트 |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102099238B1 (ko) * | 2013-05-13 | 2020-04-10 | 삼성디스플레이 주식회사 | 마스크 조립체 및 이를 이용한 박막 증착 방법 |
| JP2015069806A (ja) * | 2013-09-27 | 2015-04-13 | 株式会社ジャパンディスプレイ | 有機エレクトロルミネッセンス表示装置の製造方法 |
| CN106460147B (zh) * | 2014-06-13 | 2020-02-11 | 应用材料公司 | 针对较好的均匀性和增加的边缘寿命的平坦边缘设计 |
| KR101932943B1 (ko) * | 2014-12-05 | 2018-12-27 | 어플라이드 머티어리얼스, 인코포레이티드 | 재료 증착 시스템 및 재료 증착 시스템에서 재료를 증착하기 위한 방법 |
| CN104576828B (zh) * | 2014-12-24 | 2017-08-25 | 新奥光伏能源有限公司 | 异质结太阳能电池的制作方法以及用于生产电池的模具 |
| US20170081757A1 (en) * | 2015-09-23 | 2017-03-23 | Applied Materials, Inc. | Shadow frame with non-uniform gas flow clearance for improved cleaning |
| CN109890732A (zh) * | 2016-10-27 | 2019-06-14 | 康宁股份有限公司 | 用于固定制品的方法和设备 |
| JP7008288B2 (ja) * | 2017-07-05 | 2022-01-25 | 大日本印刷株式会社 | 蒸着マスク、蒸着マスク装置、蒸着マスクの製造方法及び蒸着マスク装置の製造方法 |
| WO2019167115A1 (ja) * | 2018-02-27 | 2019-09-06 | シャープ株式会社 | 成膜用マスク及びそれを用いた表示装置の製造方法 |
| CN109338335B (zh) * | 2018-10-16 | 2020-09-08 | 深圳市华星光电技术有限公司 | 一种用于化学气相沉淀的暗影框结构 |
| JP7383958B2 (ja) * | 2019-10-01 | 2023-11-21 | 大日本印刷株式会社 | 蒸着マスク、蒸着マスク群、有機エレクトロルミネッセンス表示装置用電極、並びに有機エレクトロルミネッセンス表示装置及びその製造方法 |
| WO2023041185A1 (en) * | 2021-09-20 | 2023-03-23 | Applied Materials, Inc. | Mask frame support element, edge exclusion mask, mask frame element, substrate support, substrate processing apparatus, and method of manufacturing one or more devices on a substrate |
| WO2024003603A1 (en) * | 2022-07-01 | 2024-01-04 | Applied Materials, Inc. | Substrate processing system for processing of a plurality of substrates and method of processing a substrate in an in-line substrate processing system |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1058050A (en) * | 1965-10-15 | 1967-02-08 | Standard Telephones Cables Ltd | Masking apparatus |
| JPH10142604A (ja) * | 1996-11-15 | 1998-05-29 | Sharp Corp | 液晶表示素子 |
| JP2000054124A (ja) * | 1998-08-07 | 2000-02-22 | Matsushita Electric Ind Co Ltd | マスク配設装置およびスパッタリング装置 |
| JP2000119841A (ja) * | 1998-10-12 | 2000-04-25 | Toray Ind Inc | 導電膜パターン化用マスク |
| JP4453884B2 (ja) * | 1999-11-24 | 2010-04-21 | 大日本印刷株式会社 | スパッタ用メタルマスクおよびカラーフィルタの製造方法 |
| DE10132348A1 (de) * | 2001-07-04 | 2003-02-06 | Aixtron Ag | Masken- und Substrathalteranordnung |
| TWI236574B (en) * | 2002-02-08 | 2005-07-21 | Sony Corp | Forming method of exposure mask pattern, exposure mask pattern and manufacturing method of semiconductor device |
| JP4463492B2 (ja) * | 2003-04-10 | 2010-05-19 | 株式会社半導体エネルギー研究所 | 製造装置 |
| JP5916384B2 (ja) * | 2008-04-16 | 2016-05-11 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | ウェハ処理堆積物遮蔽構成材 |
| JP4700714B2 (ja) * | 2008-06-04 | 2011-06-15 | キヤノンアネルバ株式会社 | マスク、該マスクを用いた成膜装置、及び、該マスクを用いた成膜方法 |
| CN101750872A (zh) * | 2008-12-16 | 2010-06-23 | 家登精密工业股份有限公司 | 掩模盒 |
-
2011
- 2011-08-25 WO PCT/EP2011/064670 patent/WO2013026493A1/en active Application Filing
- 2011-08-25 JP JP2014526396A patent/JP5911958B2/ja active Active
- 2011-08-25 CN CN201180072988.7A patent/CN103781935B/zh active Active
- 2011-08-25 KR KR1020147006486A patent/KR20140054222A/ko active Search and Examination
- 2011-08-25 EP EP11749406.2A patent/EP2748349A1/en not_active Withdrawn
-
2012
- 2012-07-17 TW TW101125656A patent/TWI541924B/zh active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20200028985A (ko) * | 2018-01-02 | 2020-03-17 | 보에 테크놀로지 그룹 컴퍼니 리미티드 | 마스크 플레이트 |
| US11203808B2 (en) | 2018-01-02 | 2021-12-21 | Boe Technology Group Co., Ltd. | Mask plate |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2748349A1 (en) | 2014-07-02 |
| JP5911958B2 (ja) | 2016-04-27 |
| CN103781935A (zh) | 2014-05-07 |
| CN103781935B (zh) | 2017-07-11 |
| WO2013026493A1 (en) | 2013-02-28 |
| TW201310567A (zh) | 2013-03-01 |
| JP2014529011A (ja) | 2014-10-30 |
| TWI541924B (zh) | 2016-07-11 |
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