KR20130139814A - Handler, and device for testing component - Google Patents

Abstract

A device for testing components comprises a base including a socket for testing electronic components; a returning unit for returning the electronic components mounted in the base to the socket for testing the electronic components; a vertical moving arm for compressing the electronic components with the socket installed in the returning unit; and a water compression arm unit connected to the base, combined with a compression cylinder compressing the electronic components, and provides displacement to the compression cylinder for the base.

Description

Handler and part inspection device {HANDLER, AND DEVICE FOR TESTING COMPONENT}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a handler for conveying a conveying object, and more particularly to a handler for conveying a conveying object to a pressurized region and pressurizing the pressurized region, and a component inspection device including the handler.

Conventionally, the component test | inspection apparatus which inspects the electrical characteristic of an electronic component is known, for example as described in patent document 1. In this kind of component inspection apparatus, a handler which conveys an electronic component to be conveyed to an inspection socket which becomes a pressurized region and inserts an electronic component into the inspection socket is used.

The above-mentioned handler is equipped with the adsorption | suction part for adsorption | suction of an electronic component, and the pressurizing motor for fitting the electronic component adsorbed by the adsorption | suction part to an inspection socket. When the electronic component before inspection is inspected by the inspection socket, the motor is driven while the electronic component is adsorbed to the adsorption unit, and the terminal of the electronic component is inserted into the terminal of the inspection socket. At this time, in order for the terminal of the electronic component and the terminal of the inspection socket to be electrically connected, a predetermined pressing force is required on the electronic component, and such pressing force is applied by the motor.

On the other hand, in recent years, since the number of electronic components inserted into the inspection socket tends to increase, sufficient pressure is not applied to the connection between the terminals to each of the plurality of electronic components at the output of the motor. . Therefore, while the above-mentioned handler is equipped with a pneumatic cylinder for pressurization, a pressing force larger than that of the motor is applied to the electronic component from the pneumatic cylinder. According to the pressurization of the electronic component by such a pneumatic cylinder, since the terminal mentioned above is connected reliably, the inspection of an electronic component is performed with high precision.

Japanese Patent Laid-Open No. 2010-101776

By the way, as mentioned above, since connection of each terminal formed in the electronic component requires predetermined pressing force, when the number of terminals of an electronic component and the number of electronic components increase, the pressing force required for the said pneumatic cylinder will also become large. On the other hand, when the pressing force of the pneumatic cylinder increases in this way, the reaction force from the inspection socket also increases by itself. And the rigidity of the grade which is not deformed by the said reaction force is required for the member which supports the said pneumatic cylinder, or the rail for moving a pneumatic cylinder. However, in order to raise the rigidity of such a member and a rail, the enlargement and weight of the conveyance part which has this member and a rail cannot be avoided.

In addition, as described above, the problem is not limited to a handler for pressurizing an electronic component using a motor and a pneumatic cylinder, but is a problem common to a handler for pressing a conveying object using at least one pressurizing unit provided in the conveying unit. .

This invention is made | formed in view of the said situation, The objective is providing the handler which can suppress the enlargement and weight of a conveyance part in the handler which pressurizes a conveyance object by the conveyance part which conveys a conveyance object, and its handler is provided. It is to provide a component inspection device.

One of the aspects of this invention is that a handler is equipped with a base, the conveyance part which conveys a conveying object, and the hydraulic pressure part connected to the said base, The press part which is provided with the pressurizing part which presses the said conveyance object toward the said base is provided, The pressure receiving portion is provided with a coupling portion that engages with a portion of the pressing portion.

When the pressing force by the pressurizing part acts on the object to be conveyed, reaction force resisting the pressing force acts on the conveying part. According to the above aspect, a part of the reaction force of the pressing force acts on the conveying part, but the remainder acts on the base via the engaging part provided in the hydraulic part. That is, all of the reaction forces of the pressing force do not act on the conveying unit, and part of the reaction forces are dispersed to the base. Thereby, although a conveying object is pressurized by a desired pressing force, the rigidity requested | required of a conveying part is enough that it can endure a part of reaction force of a pressing force. Therefore, enlargement and weight of a conveyance part can be suppressed.

One of the aspects of this invention, the said press part is provided with the 1st press part which presses the said conveyance object toward the said base, and the 2nd press part which presses the said 1st press part toward the said base, The said hydraulic part said combination It is preferable to operate a part so that it may engage with the protrusion provided in a part of said 2nd press part.

According to the said structure, the engagement part of a water pressure part of a 1st press part and a 2nd press part which comprises a press part moves to engage with the protrusion provided in a part of 2nd press part. Therefore, it is possible to suppress that a 2nd press part is pushed back by the pressing force of a 1st press part by the said coupling. In addition, since the pressing force applied to the conveying object is determined by the mechanical coupling between the hydraulic pressure unit and the second pressing unit, it is also possible to suppress the fluctuation of the pressing force.

One of the aspects of this invention is a said press part provided with the 1st press part which presses the said conveyance object toward the said base, and the 2nd press part which presses the said 1st press part toward the said base, Preferably, the engaging portion is movable to release engagement with the protrusion provided on a part of the second pressing portion.

According to the said structure, the engagement part of a water pressure part of a 1st press part and a 2nd press part which comprises a press part moves to release engagement of the protrusion provided in a part of 2nd press part. Therefore, it is possible to suppress the second pressing portion from being pushed back by the pressing force of the first pressing portion by the coupling, and the movement of the pressing portion is less likely to be affected by the protrusion by the release of the coupling. In addition, since the pressing force applied to the conveying object is determined by the mechanical coupling between the hydraulic pressure unit and the second pressing unit, it is also possible to suppress the fluctuation of the pressing force.

One of the aspects of this invention is a said 1st press part is a pressurization cylinder, the said 2nd press part comprises a motor which raises and lowers the said pressurization cylinder, and the pressing force of a said 1st press part is a said 2nd It is preferable that it is larger than the pressing force of a pressurization part.

The pressing force applied from the pressurizing cylinder is usually increased by increasing the operating pressure of the pressurizing cylinder, for example, by increasing the pressure of the compressed air supplied to the pressurizing cylinder. In the above-mentioned form, the 1st press part which requires a relatively large pressing force is comprised by such a pressurization cylinder. Therefore, it becomes possible to simplify the structure of a conveyance part and to simplify the structure of a handler compared with the structure by which a relatively large pressing force is applied by the drive of a motor. Moreover, compared with the case where a 1st press part is comprised by a motor, it also becomes easy to enlarge the pressing force applied to a conveyance object.

One of the aspects of this invention is equipped with the motor control part which controls the drive of the said motor, It is preferable that the said motor control part drives the said motor by torque control in the state in which the said pressurization cylinder presses the said conveyance object. Do.

Pressurization of the conveying object using the motor can be performed by at least one of position control and torque control of the motor. In addition, position control controls the rotation position of a motor so that the position of a pressurization cylinder may become a predetermined position. On the other hand, the torque control is to control the generated torque of the motor so that a predetermined pressing force is applied to the conveying object.

Here, the greater the pressing force of the pressurizing cylinder, the greater the reaction force on the support side of the pressurizing cylinder, that is, the load on the motor. At this time, if the motor is driven by the position control described above, the rotational position of the motor does not reach the intended rotational position unless the output of the motor exceeds the reaction force. Then, the drive current of the motor continues to increase, and an excessive load is applied to the inside of the motor.

In this regard, in the above aspect, the motor is driven by torque control in a state where the pressing force of the pressure cylinder is applied to the conveying object. Therefore, even if the support side of the pressurized cylinder is pushed back by the expansion of the pressurized cylinder, an excessive load is not applied to the motor as long as the motor outputs a predetermined torque.

One of the aspects of this invention is equipped with the motor control part which controls the drive of the said motor, It is preferable that the said motor control part drives the said motor by torque control before the said pressurization cylinder pressurizes a said conveyance object. .

According to the above aspect, when the pressure cylinder applies the pressing force to the conveying object, the motor is driven by torque control. Therefore, excessive load is not applied to the motor, and the pressing force applied to the conveying object is also stabilized.

One of the aspects of this invention is that the said coupling part is a pair of movable arm which mutually opposes, It is preferable that the said pair of movable arms displace | displace to the position which engages with the said protrusion part, and the position spaced apart from the said protrusion part. .

According to the above aspect, the pair of movable arms facing each other and the protrusions provided on the pressing portion are engaged, and the reaction force of the pressing force from the pressing portion acts on each of the pair of movable arms facing each other. Therefore, compared with the form in which the reaction force of the pressing force from the pressing portion acts in one place, it is possible to widen the range in which the reaction force disperses, and furthermore, it is possible to suppress the rigidity required for the hydraulic pressure portion and the base.

One of the aspects of this invention, It is preferable that the said conveyance part has a state which adsorb | sucks a some said conveyance object, and the said press part has a state which pressurizes the said some conveyance object.

In the form which has the state which pressurizes several conveyance object, as the number of conveyance objects becomes large, the pressing force applied to the whole of several conveyance object will also have the state which grows spontaneously. At this time, in response to the pressing force applied to the entire connection object, the reaction force of the pressing force also becomes large. In this regard, according to the above aspect, a part of the reaction force that is increased as described above is dispersed to the base. Therefore, the effect that the size and weight of a conveyance part can be suppressed becomes more remarkable.

One of the aspects of this invention is that a component inspection apparatus is equipped with the base, the conveyance part which conveys an electronic component, the hydraulic pressure part connected to the said base, and the inspection socket provided in the said base, The said conveyance part is a said electronic A pressing part for pressing the component toward the inspection socket is provided, and the hydraulic part is provided with a coupling part for engaging with a part of the pressing part.

When the pressing force by the pressing portion acts on the electronic component, the reaction force resisting the pressing force acts on the conveying portion. According to the above aspect, a part of the reaction force of the pressing force acts on the conveying part, but the remainder acts on the base via the engaging part provided in the hydraulic part. That is, all of the reaction forces of the pressing force do not act on the conveying unit, and part of the reaction forces are dispersed to the base. Thereby, although a conveying object is pressurized by a desired pressing force, the rigidity requested | required of a conveying part is sufficient that it can endure a part of reaction force of a pressing force. Therefore, enlargement and weight of a conveyance part can be suppressed.

BRIEF DESCRIPTION OF THE DRAWINGS The schematic top view which shows the whole structure of one Embodiment of the component inspection apparatus in this invention.
The side view which shows the side structure of the 1st conveyance unit and the hydraulic arm mechanism in the handler with which the same component inspection apparatus is equipped.
3 is a block diagram showing the electrical configuration of the same handler.
4 is a timing chart showing a driving mode of various motors included in the same handler.
FIG. 5 is a view showing an operation form of the first conveying unit and the hydraulic arm mechanism, in which (a) the planar structure of the first conveying unit and the hydraulic arm mechanism and (b) the cross-sectional structure are shown in correspondence. FIG.
FIG. 6 is a view showing an operation form of the first conveying unit and the hydraulic arm mechanism, in which (a) the planar structure of the first conveying unit and the hydraulic arm mechanism and (b) the cross-sectional structure are shown in correspondence. FIG.
The figure which shows the operation form of a 1st conveyance unit and a hydraulic arm mechanism, Comprising: The planar structure of (a) 1st conveyance unit and a hydraulic arm mechanism, and (b) cross-sectional structure are shown in correspondence.
FIG. 8 is a view showing an operation form of the first conveying unit and the hydraulic arm mechanism, in which (a) the planar structure of the first conveying unit and the hydraulic arm mechanism and (b) the cross-sectional structure are shown in correspondence. FIG.
The figure which shows the operation form of a 1st conveying unit and a hydraulic arm mechanism, Comprising: The planar structure of (a) 1st conveying unit and a hydraulic arm mechanism, and (b) cross-sectional structure are shown in correspondence.
FIG. 10 is a view showing an operation form of the first conveying unit and the hydraulic arm mechanism, in which (a) the planar structure of the first conveying unit and the hydraulic arm mechanism and (b) the cross-sectional structure are shown in correspondence. FIG.
It is a figure which shows the operation form of a 1st conveyance unit and a hydraulic arm mechanism, Comprising: The planar structure of (a) 1st conveyance unit and a hydraulic arm mechanism, and (b) cross-sectional structure are shown in correspondence.
It is a figure which shows the operation form of a 1st conveying unit and a hydraulic arm mechanism, Comprising: The planar structure of (a) 1st conveying unit and a hydraulic arm mechanism, and (b) cross-sectional structure are shown in correspondence.

EMBODIMENT OF THE INVENTION Hereinafter, one Embodiment which actualized the handler and component inspection apparatus of this invention is described with reference to FIGS. First, the structure of a component inspection apparatus is demonstrated with reference to FIG.

[Configuration of Part Inspection Device]

As shown in FIG. 1, a mounting surface 11a on which various robots are mounted is provided as an upper surface on the base 11 of the handler 10 included in the component inspection device, and most of the mounting surface 11a is disposed. It is covered by the cover member 12. In the conveyance space which is the space enclosed by these cover member 12 and the mounting surface 11a, the humidity and temperature are maintained by predetermined value by the dry air supplied from the exterior of a component inspection apparatus.

Four conveyors extending in one direction are arranged on the mounting surface 11a of the base 11 in a direction orthogonal to the conveying direction of the conveyor. Of the four conveyors, two supply conveyors C1 and C2 are attached to one side in the X direction, which is the arrangement direction of the conveyors, while two recovery conveyors C3 and C4 are attached to the other side in the X direction. And in supply conveyor C1, C2, supply conveyor trays C1a and C2a are conveyed toward the inner side from the outer side of the cover member 12. As shown in FIG. In the recovery conveyors C3 and C4, the recovery conveyor trays C3a and C4a are transported from the inside of the cover member 12 to the outside. Moreover, the some electronic component T before the test | inspection which is a conveyance object is accommodated in the conveyor trays C1a and C2a for supply, and the some electronic component T after an inspection is accommodated in the conveyor tray C3a and C4a for collection | recovery.

On the mounting surface 11a of the base 11, a supply robot 20 and a recovery robot 40 facing each other in the X direction are mounted. The supply robot 20 is arrange | positioned in the Y direction of the supply conveyors C1 and C2, and the collection robot 40 is arrange | positioned in the Y direction of the collection conveyors C3 and C4.

The supply robot 20 is connected to a supply side fixing guide 21 which is a fixed shaft extending in the Y direction, a supply side movable guide 22 which is a movable shaft connected to the supply side fixing guide 21, and a supply side movable guide 22. And a supply hand unit 23 which moves along the supply side movable guide 22.

The supply side movable guide 22 is a movable shaft extending from the supply side fixed guide 21 to the recovery robot 40 side, and is connected to the supply side fixed guide 21 in a Y-direction so as to move forward and return. The supply hand unit 23 is an end effector arranged on the mounting surface 11a side of the supply-side movable guide 22 and is connected to the supply-side movable guide 22 so as to move forward and return in the X direction. . In addition, the supply hand unit 23 is capable of descending from the supply side movable guide 22 toward the mounting surface 11a and ascending from the mounting surface 11a side toward the supply side movable guide 22 to enable the supply side to be movable. It is connected to the guide 22.

Then, the supply side movable guide 22 moves along the supply side fixing guide 21 to the supply conveyors C1 and C2, and the supply hand unit 23 follows the supply side movable guide 22 to supply the conveyor tray C1a. , To the top of C2a. Thereby, the electronic component T loaded in the conveyor trays C1a and C2a for supply is attracted by the supply hand unit 23, and is lifted up from the conveyor trays C1a and C2a for supply after that. In addition, in this state, the supply side movable guide 22 falls along the supply side fixing guide 21 from above on the supply conveyors C1 and C2, whereby the electronic component T adsorbed to the supply unit 23 is transported. It is supplied to the predetermined position in the inside.

Similar to the supply robot 20, the recovery robot 40 has a recovery side fixing guide 41 which is a fixed shaft extending in the Y direction and a recovery side movable guide 42 which is a movable shaft connected to the recovery side fixing guide 41. And a recovery hand unit 43 which is connected to the recovery side movable guide 42 and moves along the recovery side movable guide 42 in the X direction.

The recovery-side movable guide 42 is a movable shaft extending from the recovery-side fixed guide 41 toward the supply robot 20 side, and is connected to the recovery-side fixed guide 41 in a Y-direction so as to move forward and return. have. The recovery hand unit 43 is an end effector disposed on the mounting surface 11a side of the recovery-side movable guide 42 and is connected to the recovery-side movable guide 42 in a X-direction so as to move forward and return. It is. Moreover, the collection | recovery hand unit 43 collect | recovers so that descending toward the mounting surface 11a from the collection side movable guide 42 and ascending toward the collection side movable guide 42 from the mounting surface 11a side is possible. It is connected to the side movable guide 42.

And while the collection | recovery side movable guide 42 moves to the collection | recovery conveyor C3, C4 side along the collection | recovery side fixed guide 41, the collection | recovery hand unit 43 follows the collection | recovery-side movable guide 42. And move to just above the recovery conveyor trays C3a and C4a. Thereby, the electronic component T adsorbed by the collection | recovery hand unit 43 is mounted in the collection | recovery conveyor trays C3a and C4a.

The conveyance guide 31 which extends in a Y direction is being fixed to the inner surface of the cover member 12 in the substantially center of the X direction in the said inner surface. Below the both ends in this conveyance guide 31, the 1st shuttle 32 extended in the X direction and the 2nd shuttle 37 extended in the X direction are arrange | positioned similarly.

The 1st shuttle 32 is connected to the 1st shuttle guide 32c extended in the X direction fixedly attached to the mounting surface 11a, and is supply side movable guide 22 and collection | recovery side movable guide 42 in X direction. Slide in the X direction so as to overlap with either side. A shuttle tray 32a for supply is fixed to the supply robot 20 side in the first shuttle 32, and a shuttle tray for recovery is provided on the recovery robot 40 side in the first shuttle 32. 32b is fixed. In the shuttle tray 32a for supply, the some electronic component T before the test | inspection which is a conveyance object is accommodated, and the some electronic component T after an inspection is accommodated in the recovery shuttle tray 32b.

The 2nd shuttle 37 is also connected to the 2nd shuttle guide 37c extended in the X direction fixedly attached to the mounting surface 11a, and is supply side movable guide 22 and collection | recovery side movable guide in X direction. It slides in a X direction so that it may overlap with either of (42). A supply shuttle tray 37a is fixed to the supply robot 20 side in the second shuttle 37, and a recovery shuttle tray is provided on the recovery robot 40 side in the second shuttle 37. 37b is fixed. The plurality of electronic components T before the inspection to be transported are accommodated in the supply shuttle tray 37a, and the plurality of electronic components T after the inspection are accommodated in the recovery shuttle tray 37b.

In the mounting surface 11a, the rectangular opening which penetrates the mounting surface 11a is formed in the substantially center of the conveyance space, and the inspection socket 33 as a connection object which performs the test | inspection of several electronic component T simultaneously is It is embedded in a rectangular opening. The inspection socket 33 is a socket into which the electronic component T is inserted, and is connected to an inspection unit (not shown) for inspecting the electronic component T. The inspection unit is a device separate from the handler accommodated inside the base 11 and constitutes a component inspection device together with the handler.

An inspection pocket 33a that can accommodate a plurality of electronic components T at the same time is recessed on an upper surface of the inspection socket 33, and a male terminal of the electronic component T is provided on a bottom surface of the inspection pocket 33a. The female terminal which can be fitted is recessed. And since the male terminal which the electronic component T has is inserted in the female terminal of the pocket 33a for a test | inspection, the electrical characteristic of the electronic component T is testable. In addition, the terminal of the inspection pocket 33a is connected to the inspection unit which is a separate body mounted in the base 11, and the terminal of the electronic component T is inspected through the terminal which the inspection pocket 33a has. It is connected to the inspection circuit in the unit. And the test result by the test | inspection socket 33 is output to the handler 10 from the said test unit.

The 1st conveyance unit 34 and the 2nd conveyance unit 38 which comprise a conveyance part are connected to the said conveyance guide 31 side by side in the Y direction.

The 1st conveyance unit 34 moves advancing and returning between the 1st shuttle 32 and the test | inspection socket 33 along a Y direction. The lower end part of the 1st conveyance unit 34 descends and raises along the Z direction between the conveyance guide 31 and the mounting surface 11a. And the 1st conveyance unit 34 hold | maintains the electronic component T accommodated in the supply shuttle tray 32a in the lower end part of the 1st conveyance unit 34, or holds the electronic component T which hold | maintained the test socket 33 ), Or the electronic component T is inserted into the inspection socket 33. Moreover, the 1st conveyance unit 34 takes out the electronic component T inserted in the test | inspection socket 33 from the lower end part of the 1st conveyance unit 34, or takes out the electronic component T which was taken out, The shuttle tray 32b for collection | recovery Or).

The 2nd conveyance unit 38 moves advancing and returning between the 2nd shuttle 37 and the test | inspection socket 33 along a Y direction. The lower end part of the 2nd conveyance unit 38 descends and raises along the Z direction between the conveyance guide 31 and the mounting surface 11a. And the 2nd conveyance unit 38 hold | maintains the electronic component T loaded in the supply shuttle tray 37a at the lower end part of the 2nd conveyance unit 38, or holds the electronic component T which hold | maintained the test socket It conveys to (33), or inserts the electronic component T into the test | inspection socket 33. As shown to FIG. Moreover, the 2nd conveyance unit 38 removes the electronic component T inserted in the test | inspection socket 33 from the lower end part of the 2nd conveyance unit 38, or removes the electronic component T taken out from the shuttle tray 37b for collection | recovery. Should be loaded in.

Moreover, the pair of hydraulic arm mechanisms 35 and 36 which comprise a hydraulic pressure part are fixedly installed in the both sides in the X direction of the test | inspection socket 33 among the mounting surfaces 11a.

[Operation of parts inspection device]

In the handler 10, the electronic component T before the inspection is first mounted on the conveyor trays C1a and C2a for supply from an external device. Subsequently, the supply conveyors C1 and C2 are driven, so that the electronic component T before the inspection is carried to the conveyance space. And if the electronic component T before an inspection is conveyed to the conveyance space, the supply side movable guide 22 will move along the supply side fixing guide 21 to the supply conveyors C1 and C2. Subsequently, when the supply hand unit 23 moves to just above the supply conveyor trays C1a and C2a to hold the electronic component T, the supply-side movable guide 22 moves along the supply-side fixing guide 21. 1 Move up the shuttle (32).

Subsequently, when the supply-side movable guide 22 reaches the first shuttle 32, the supply hand unit 23 moves to the first shuttle 32, and immediately above the supply shuttle tray 32a. The first shuttle 32 also slides so that the supply hand unit 23 is positioned above. And the electronic component T before the test | inspection which the supply hand unit 23 hold | maintains is carried and moved from the supply hand unit 23 to the supply shuttle tray 32a.

When the electronic component T before the test is moved and mounted on the supply shuttle tray 32a, the first conveying unit 34 moves to the first shuttle 32, and is directly placed on the supply shuttle tray 32a. The 1st shuttle 32 also slides so that the lower end part of the 1st conveying unit 34 may be located. Subsequently, the lower end part of the 1st conveyance unit 34 descend | falls toward the supply shuttle tray 32a, and the electronic component T before the test | inspection which moved and mounted to the supply shuttle tray 32a is the 1st conveyance unit 34 Is held at the bottom of the Then, the 1st conveyance unit 34 moves to the test | inspection socket 33, and the electronic component T before an inspection is conveyed to just above the test | inspection socket 33. Then, as shown in FIG. And the electronic component T before an inspection descends with the lower end part of the 1st conveyance unit 34, and the male terminal of the electronic component T is fitted with respect to the female terminal in the pocket 33a for inspection.

In this way, when the electronic component T before the inspection is inserted into the inspection socket 33, the inspection start signal for starting the inspection of the electronic component T is output from the handler 10 to the inspection unit, whereby the electronic component T The inspection of is started at the inspection unit.

Then, when the test | inspection end signal which shows that the test | inspection of the electronic component T was complete | finished is output from the test | inspection unit to the handler 10, in the state in which the electronic component T after a test | inspection is hold | maintained by the 1st conveyance unit 34, The lower end part of the 1st conveying unit 34 raises, and the electronic component T after an inspection is taken out from the inspection socket 33 by this. Subsequently, while the 1st conveyance unit 34 moves from the inspection socket 33 to the 1st shuttle 32, the 1st conveyance unit 34 is just over the collection shuttle tray 32b. The 1st shuttle 32 slides so that it may be located. And when the lower end part of the 1st conveyance unit 34 descend | falls and the holding | maintenance of the electronic component T is released, the electronic component T after an inspection will be mounted and moved from the 1st conveyance unit 34 to the collection | recovery shuttle tray 32b.

When the electronic component T after the inspection is moved and mounted on the recovery shuttle tray 32b, the recovery side movable guide 42 moves along the recovery side fixing guide 41 to the first shuttle 32. In addition, when the collection side movable guide 42 moves over the first shuttle 32, the recovery hand unit 43 moves up on the first shuttle 32, and is directly at the recovery shuttle tray 32b. The first shuttle 32 also slides so that the recovery hand unit 43 is located thereon. And the electronic component T after the test | movement mounted to the collection shuttle tray 32b is hold | maintained by the collection | recovery hand unit 43. As shown in FIG.

When the electronic component T after the inspection is held by the recovery hand unit 43, the recovery side movable guide 42 moves from the first shuttle 32 to the recovery conveyors C3 and C4. Subsequently, the recovery hand unit 43 moves to just above the recovery conveyor trays C3a and C4a, and the electronic component T after the inspection is moved to the recovery conveyor trays C3a and C4a in a state classified for each inspection result. do.

In addition, between the supply robot 20 and the 2nd shuttle 37, the electronic component T before inspection is moved and mounted similarly to the supply robot 20 and the 1st shuttle 32 mentioned above. Moreover, also between the 2nd shuttle 37 and the 2nd conveyance unit 38, the electronic component T before a test | inspection, and the electronic component T after a test | inspection similarly between the 1st shuttle 32 and the 1st conveyance unit 34 mentioned above. Is mounted to move. In addition, between the second shuttle 37 and the recovery robot 40, the electronic component T after the inspection is moved and mounted similarly to the above-described first shuttle 32 and the recovery robot 40.

[Detailed Configuration of Handler]

Next, the structure of the 1st conveyance unit 34 and the 2nd conveyance unit 38 with which the handler 10 is equipped is demonstrated in detail with reference to FIG. In addition, although the 1st conveyance unit 34 and the 2nd conveyance unit 38 are mutually different from the connection position with the conveyance guide 31, and the shuttle used as a moving destination, since the structure for pressurizing the electronic component T is the same, it is the following. In the following, the first transfer unit 34 will be described, and the description of the second transfer unit 38 will be omitted. 2 is sectional drawing which looked at the periphery structure of the 1st conveyance unit 34 from the conveyor side, and has shown the state in which the 1st conveyance unit 34 was arrange | positioned immediately above the inspection socket 33. As shown in FIG.

The 1st conveyance unit 34 for conveying the electronic component T before an inspection is connected to the conveyance guide 31 mentioned above. The horizontal movement arm 51 which comprises the 1st conveyance unit 34 is connected so that advancing movement and return movement are possible along the conveyance guide 31. The vertical movement arm 52 is connected to the lower end part of the horizontal movement arm 51 so that raising and lowering is possible with respect to the horizontal movement arm 51. The vertical movement arm 52 moves up and down with respect to the horizontal movement arm 51 by rotating the pressurizing motor 51M mounted in the horizontal movement arm 51. Moreover, the to-be-received piece 52a which is a protrusion which protrudes in the X direction is fixedly installed in the lower end part of the vertical movement arm 52, and the lower end part of the vertical movement arm 52 is applied to air pressure at the lower end part of the vertical movement arm 52. The pressurizing cylinder 53 which is operated by this is connected toward the mounting surface 11a. Here, the pressurizing cylinder 53 comprises the 1st press part, and the pressurizing motor 51M, the vertical movement arm 52, and the to-be-pressed piece 52a comprise the 2nd press part. And a 1st press part and a 2nd press part comprise a press part.

The pressurized cylinder 53 is connected with the compressed air supply part which is not shown in figure. The compressed air supply unit includes, for example, a gas supply system provided in a facility provided with a component inspection device, a valve for controlling supply of compressed air of the gas supply system, and the like. The gas supply system supplies compressed air whose relative pressure when the atmospheric pressure is the reference pressure is, for example, 0.5 MPa. And the pressurization cylinder 53 expands in a Z direction by supplying compressed air from a compressed air supply part, and contracts it in a Z direction by exhausting the supplied compressed air.

The lower end part of the pressurizing cylinder 53 is connected with the some adsorption part 54 which is an end effector which can adsorb the electronic component T by vacuum adsorption, for example. The adsorption part 54 is comprised by the adsorption nozzle and the vacuum pump connected to the said nozzle, for example.

On both sides of the X-direction of the inspection socket 33 on the mounting surface 11a, the hydraulic arm mechanisms 35 and 36 facing each other are arranged so as to sandwich the inspection socket 33 therebetween. The hydraulic arm mechanisms 35 and 36 are the support bodies 35a and 36a fixed to the mounting surface 11a, and the hydraulic arm connected so that advancing movement and return movement in the X direction can be carried out from the upper surfaces of the support bodies 35a and 36a. 35b, 36b). Hydraulic arm 35b, 36b is an engaging part couple | bonded with the hydraulic-pressure piece 52a which is a part of pressurization part.

Arm cylinders connected to the compressed air supply unit (not shown) are connected to the hydraulic arms 35b and 36b. The compressed air supply part is the same structure as the compressed air supply part connected to the said pressurization cylinder 53, for example. And if the 1st conveyance unit 34 is arrange | positioned directly above the test | inspection socket 33, and compressed air is supplied to the arm cylinder of the hydraulic arm 35b, 36b, the hydraulic arm 35b, 36b will be X direction. And close to each other, the hydraulic arms 35b and 35b are displaced to the engaging position engageable with the hydraulic pressure piece 52a. Further, in this state, when the compressed air in the arm cylinder is exhausted, the hydraulic arms 35b and 36b are separated from each other in the X direction, and the hydraulic arms 35b and 36b are displaced to a spaced position spaced apart from the hydraulic pressure piece 52a. do. As described above, the hydraulic arms 35b and 36b operate to engage the hydraulic arms 35b and 36b with the hydraulic member 52a or release the coupling.

[Electrical Configuration of Handler]

An electrical configuration of the handler 10 will be described with reference to FIG. 3. The control device 60 included in the handler 10 is configured around a microcomputer having a central processing unit (CPU), a nonvolatile memory (ROM), and a volatile memory (RAM). The control apparatus 60 performs various control according to the operation of the handler 10 based on various data and programs stored in the ROM and RAM.

The control device 60 is connected to a conveyor drive unit 61 for rotating the conveyor motor MC. The encoder EMC which detects the rotational position of the conveyor motor MC is connected to the conveyor drive part 61. The conveyor drive unit 61 generates a drive current of the conveyor motor MC based on the position command input from the control device 60 and the rotational position of the conveyor motor MC input from the encoder EMC, and generates the drive current. Output to the conveyor motor MC. The conveyor motor MC drives the said conveyor C1-C4 by rotating according to the said drive current. In addition, the said conveyor drive part 61 and the conveyor motor MC are provided for every conveyor C1-C4, and the encoder EMC is provided with respect to each conveyor motor MC.

The control apparatus 60 is connected with the movable guide drive part 62 which rotationally drives the guide motor MX. The encoder EMX which detects the rotation position of the guide motor MX is connected to the movable guide drive part 62. The movable guide drive part 62 generates the drive current of the guide motor MX based on the position command input from the control apparatus 60, and the rotation position input from the encoder EMX, and it drives the drive current into the guide motor MX. Output to. The guide motor MX rotates the movable guides 22 and 42 along the fixed guides 21 and 41 by rotating in accordance with the input drive current. The movable guide driver 62 and the guide motor MX are provided for each of the supply-side movable guide 22 and the recovery-side movable guide 42, and the encoder EMX is provided for each guide motor MX.

The shuttle drive part 63 which drives rotational drive of the shuttle motor MS is connected to the control apparatus 60. The encoder EMS which detects the rotation position of the shuttle motor MS is connected to the shuttle drive part 63. The shuttle drive unit 63 generates a drive current of the shuttle motor MS based on the position command input from the control device 60 and the rotational position input from the encoder EMS, and transmits the drive current to the shuttle motor MS. Output The shuttle motor MS slides the shuttles 32 and 37 along the guides 32c and 37c by rotating according to the input drive current. The shuttle drive unit 63 and the shuttle motor MS are provided for each of the first shuttle 32 and the second shuttle 37, and the encoder EMS is provided for each shuttle motor MS.

The control unit 60 is connected with a hand unit drive unit 64 having a hand motor drive unit 64a and a suction valve drive unit 64b. Among these, the encoder EMZ which detects the rotation position of the hand motor MZ is connected to the hand motor drive part 64a. The hand motor drive unit 64a generates a drive current of the hand motor MZ based on the position command input from the control device 60 and the rotation position input from the encoder EMZ, and generates the drive current of the hand motor MZ. Output to. The hand motor MZ raises and lowers the hand units 23 and 43 by rotating according to the input drive current.

A suction sensor ESV1 which detects the opening amount of the suction valve SV1 provided at the front-end | tip of the hand unit 23, 43 is connected to the suction valve drive part 64b. The suction valve drive unit 64b generates a drive signal of the suction valve SV1 based on the opening degree command input from the control device 60 and the opening amount input from the suction sensor ESV1, and sucks the drive signal. Output to valve SV1. Suction valve SV1 opens and closes according to the input said drive signal, and attracts the said electronic component T with the suction force according to the opening amount. The hand unit drive unit 64, the hand motor MZ, and the suction valve SV1 are provided for each of the supply hand unit 23 and the recovery hand unit 43, and the encoder EMZ, the suction sensor ESV1, Each of the hand motor MZ and the suction valve SV1 is provided.

The control unit 60 includes a conveying motor driver 65a, a pressurized motor driver 65b constituting the motor controller, a pressurized cylinder driver 65c constituting the cylinder controller, and a suction unit driver 65d. 65) is connected.

The encoder EMY which detects the rotational position of the conveying motor MY is connected to the conveying motor drive part 65a. The conveying motor drive part 65a generates the drive current of the conveying motor MY based on the position command input from the control apparatus 60 and the rotation position input from the encoder EMY, and transmits the drive current to the conveying motor MY. Output The conveying motor MY moves the conveying units 34 and 38 along the conveying guide 31 and moves the conveying unit 31 by rotating according to the input drive current. Moreover, the said conveying motor drive part 65a is provided with respect to each of the 1st conveyance unit 34 and the 2nd conveyance unit 38, and also the encoder EMY also has the 1st conveyance unit 34 and the 2nd conveyance unit ( 38) is provided for each.

The encoder E51M which detects the rotational position of the pressurized motor 51M is connected to the pressurized motor drive part 65b. The pressurization motor drive part 65b generates the drive current of the pressurized motor 51M based on the position command input from the control apparatus 60, and the rotation position input from the encoder E51M, and pressurizes the drive current. Output to motor 51M. The pressurizing motor 51M raises and lowers the vertical movement arm 52 by rotating according to the input said drive current.

Moreover, the current measuring part I51M which measures the actual value of the drive current in 51M of pressure motors is connected to the pressure motor drive part 65b. The pressurized motor driver 65b generates the drive current of the pressurized motor 51M based on the torque command input from the control device 60 and the measured value input from the current measuring unit I51M, and generates the drive current. Output to pressurization motor 51M. The pressurizing motor 51M raises and lowers the vertical movement arm 52 by rotating according to the input said drive current.

In addition, the control apparatus 60 selects a position control mode and a torque control mode as a method of drive control of the pressurization motor 51M. Among these, the position control mode is a method of controlling the drive of the pressurizing motor 51M based on the position command so that the suction unit 54 connected to the ends of the transfer units 34 and 38 is in a predetermined position. . On the other hand, the torque control mode is a method of controlling the drive of the pressurized motor 51M based on the torque command so that the torque generated by the rotation of the pressurized motor 51M is maintained at a predetermined magnitude. Moreover, the said pressurized motor drive part 65b is provided with respect to each of the 1st conveyance unit 34 and the 2nd conveyance unit 38, and the electric current measuring part I51M also has the 1st conveyance unit 34 and the 2nd conveyance unit. (38) It is provided about each.

The pressurization cylinder drive part 65c produces | generates the drive signal for supplying an operating pressure to the pressurization cylinder 53 based on the drive command input from the control apparatus 60, and supplies each drive signal to the pressurization cylinder ( 53). Then, the pressurizing cylinder 53 applies the pressing force to the electronic component T by stretching in accordance with the drive signal for stretching thereof, and releases the pressing force on the electronic component T by shrinking in accordance with the driving signal for shrinking thereof. Moreover, the said pressurized cylinder drive part 65c is provided with respect to each of the 1st conveyance unit 34 and the 2nd conveyance unit 38. As shown in FIG.

Suction sensor ESV2 which detects the opening amount of suction valve SV2 is connected to suction valve drive part 65d. The suction valve drive unit 65d generates the drive signal of the suction valve SV2 based on the opening degree command input from the control device 60 and the opening amount input from the suction sensor ESV2, and sucks the drive signal. Output to valve SV2. And the suction valve SV2 sucks the said electronic component T with the suction force according to the opening amount. Moreover, the suction valve drive part 65d is provided with respect to each of the 1st conveyance unit 34 and the 2nd conveyance unit 38. As shown in FIG. In addition, the suction sensor ESV2 is provided with respect to each of the suction valves SV2.

The hydraulic pressure arm drive part 66 which displaces the hydraulic pressure arms 35b and 36b is connected to the control device 60. The hydraulic arm driver 66 generates a drive signal for supplying an operating pressure to the arm cylinders 35s and 36s of the hydraulic arms 35b and 36b based on the drive command input from the control device 60. Together, the drive signal is output to the arm cylinders 35s and 36s. The arm cylinders 35s and 36s displace the hydraulic arms 35b and 36b to the engagement position by extending in accordance with a drive signal for displacing the hydraulic arms 35b and 36b. On the other hand, the arm cylinders 35s and 36s are retracted in accordance with a drive signal for contracting them, thereby displacing the hydraulic arms 35b and 36b to the spaced apart position.

[Action of handler]

Next, the form of the drive of various motors and the form of the drive of various cylinders when the electronic component T held by the conveying unit is inserted into the inspection socket 33 is based on the above-mentioned structure, This will be described with reference to FIGS. 4 to 12. In addition, although the insertion form by the 1st conveyance unit 34 and the insertion form by the 2nd conveyance unit 38 differ from each other, the supply source of the electronic component T and the conveyance direction of the electronic component T are mutually different, Since it is a form, below, only the said form in the 1st conveyance unit 34 is illustrated.

In addition, in FIG. 4, the position command with respect to the conveying motor MY is conveniently shown with the operation | movement of the 1st conveying unit 34, and the position command and the torque command with respect to the pressurizing motor 51M are the vertical movement arm ( 52 is conveniently illustrated with the operation and control mode. In addition, in FIG. 5-12, the drive form of the 1st conveyance unit 34 and the drive form of the hydraulic arm mechanism 35, 36 in each timing T0-T10 shown in FIG. 4 are these planar structures and a cross section. The structures are shown in correspondence with one another.

[Return Unit Set Period: T0-T1]

First, as shown in FIG. 4, the control apparatus 60 outputs a position command with respect to the conveyance motor drive part 65a. At this time, the position command output by the control device 60 moves the suction part 54 of the 1st conveyance unit 34 from just above the supply shuttle tray 32a to just above the inspection socket 33. It is to move. And the conveyance motor drive part 65a produces | generates the drive current based on the rotational position of the conveyance motor MY, and the said position command, and outputs the drive current to the conveyance motor MY. Thereby, the conveying motor MY starts to rotate in the predetermined direction from timing T0, and the adsorption | suction part 54 of the 1st conveying unit 34 keeps the electronic component T of the test | inspection socket 33 The first conveying unit 34 travels toward the inspection socket 33 until it reaches just above (see FIG. 5A).

In addition, in the above-mentioned conveying unit set period, the control apparatus 60 outputs a position command to the pressurized motor drive part 65b so that the lower end part of the vertical movement arm 52 may maintain the uppermost position. And the pressurizing motor drive part 65b produces | generates the drive current based on the rotational position of the pressurization motor 51M, and the said position command, and outputs the drive current to the pressurization motor 51M. Thereby, the pressurization motor drive part 65b suppresses rotation of the pressurization motor 51M.

In addition, in the above-mentioned conveying unit set period, the control apparatus 60 outputs a pressurization release command to the pressurization cylinder drive part 65c so that a working pressure may not be supplied to the pressurization cylinder 53. Thereby, the pressurization cylinder drive part 65c produces | generates the drive signal based on a pressurization release command, and thereby does not supply operating pressure to the pressurization cylinder 53, and maintains the extension amount of the pressurization cylinder 53 to a minimum value. (See FIG. 5B).

As described above, the lower end portion of the vertical movement arm 52 is maintained at the uppermost position, and the extension amount of the pressurizing cylinder 53 is kept at the minimum value, whereby the adsorption portion 54 is disposed at the uppermost position. In addition, the uppermost position of the adsorption part 54 is a position where the adsorption part 54 and another member do not collide when the horizontal movement arm 51 moves along the conveyance guide 31.

[Down and pressure period: T1-T3]

When the adsorption part 54 reaches directly above the inspection socket 33, the control device 60 is shown in FIG. 4 so that the electronic component T adsorbed by the adsorption part 54 is accommodated in the inspection socket 33. As described above, at timing T1, a position command is output to the pressurized motor drive unit 65b. At this time, the control device 60 outputs the position command in the above-described position control mode. And the pressurizing motor drive part 65b produces | generates the drive current based on the rotational position of the pressurization motor 51M, and the said position command, and outputs the drive current to the pressurization motor 51M. Thereby, the vertical movement arm 52 descends until the pressurization motor 51M starts rotation from the timing T1 to a predetermined direction, and the electronic component T is accommodated in the test | inspection socket 33.

And if the electronic component T is accommodated in the test | inspection socket 33 in timing T2, the position control of the pressurization motor 51M will continue, and the adsorption | suction part 54 will be set so that the position of the adsorption | suction part 54 may become a predetermined position. ) Drops further. Thereby, the pressing force from the pressurizing motor 51M is applied to the electronic component T (refer FIG. 6 (a), (b)).

In addition, in the above-mentioned lowering / pressing period, the control apparatus 60 outputs a position command to the conveying motor drive part 65a so that the position of the Y direction in the 1st conveying unit 34 is maintained. And the conveyance motor drive part 65a produces | generates the drive current based on the rotational position of the conveyance motor MY, and the said position command, outputs the drive current to the conveyance motor MY, and suppresses rotation of the said conveying motor MY.

[Hydraulic Arm Drive Period: T3-T4]

Once the electronic component T is positioned in the inspection socket 33, the control device 60 is shown in FIG. 4 so that the hydraulic arms 35b, 36b of the hydraulic arm mechanisms 35, 36 are displaced to the engaged position. As described above, at timing T3, a coupling command is output to the hydraulic arm driver 66.

The hydraulic arm driver 66 generates a drive signal based on the coupling command, and outputs the drive signal to the arm cylinders 35s and 36s. As a result, the arm cylinders 35s and 36s extend and the hydraulic arms 35b and 36b are displaced to the engaged position (see FIGS. 7A and 7B).

Moreover, in such a hydraulic arm drive period, the control apparatus 60 outputs a position command to the conveyance motor drive part 65a so that the position of the Y direction in the 1st conveyance unit 34 is maintained. And the conveying motor drive part 65a produces | generates the drive current based on the rotation position of the conveying motor MY, and the said position command, outputs the drive current to the conveying motor MY, and suppresses rotation of the conveying motor MY.

Moreover, in such a hydraulic arm drive period, the control apparatus 60 outputs a position command to the pressurized motor drive part 65b so that the pressurization force Fbase from 51M of pressurization motors is added with respect to the electronic component T. FIG. Then, the pressurized motor driver 65b generates a drive current based on the rotational position of the pressurized motor 51M and the position command, and outputs the drive current to the pressurized motor 51M to adjust the position of the suction unit 54. Lower to a predetermined position. The pressing force Fbase is set in advance by a test or the like, and the pressing force Fbase is a force sufficient to position the electronic component T in the inspection pocket 33a, and the pressing component Fbase is used by the pressing force Fbase. It is a degree to which (33) does not deform | transform.

[Torque Control Period: T4-T5]

When the hydraulic arms 35b and 35b are displaced to the engaged position, the control device 60 outputs a torque command in torque control mode to the pressurized motor drive 65b at timing T4, as shown in FIG. . At this time, the control device 60 outputs a torque command so that a pressing force Fcon larger than the pressing force Fbase described above is applied to the electronic component T. The pressurized motor driver 65b generates a drive current based on the measured value and torque command of the current measurement unit I51M, and outputs the drive current to the pressurized motor 51M.

As a result, the pressurizing motor 51M continues to rotate in the predetermined direction from the timing T4, and the pressurizing motor 51M outputs a predetermined torque to apply the pressing force Fcon described above to the electronic component T for inspection. The electronic component T is positioned with respect to the socket 33 (see Fig. 8A).

Moreover, in the torque control period mentioned above, the control apparatus 60 outputs a position command to the conveyance motor drive part 65a so that the position of the Y direction in the 1st conveyance unit 34 is maintained. In addition, the control device 60 outputs the engagement command to the hydraulic arm drive unit 66 so that the extension of the arm cylinders 35s and 36s is maintained.

And the conveyance motor drive part 65a suppresses rotation of the conveyance motor MY, and the hydraulic arm drive part 66 maintains elongation of arm cylinder 35s, 36s. And the pressurization motor drive part 65b continues to pressurize the electronic component T with the pressing force Fcon (refer FIG. 8 (b)).

[Cylinder pressurization period: T5-T6]

When the electronic component T is pressurized by the pressing force Fcon, the control device 60 instructs the pressurizing cylinder drive unit 65c to pressurize the pressurizing cylinder drive 65c at timing T5, as shown in FIG. 4, to supply the operating pressure to the pressurizing cylinder 53. Outputs And the pressurization cylinder drive part 65c produces | generates the drive signal based on a pressurization command, and outputs the drive signal to a compressed air supply system. Thereby, the pressurization cylinder drive part 65c supplies the operating pressure to the pressurization cylinder 53, and adds the pressing force Fhigh to the electronic component T further.

This pressing force Fhigh is a force larger than the above-mentioned pressing force Fbase, and is the grade which the electronic component T and the test | inspection socket 33 do not deform | transform by pressurization by the said pressing force Fhigh. Then, when such pressing force Fhigh is applied to the electronic component T, the electrical connection between the male terminal of the electronic component T and the female terminal of the inspection socket 33 is reliably performed.

When the operating pressure is supplied to the pressurizing cylinder 53, the control device 60 outputs an inspection start signal for starting the inspection to the inspection unit.

At this time, the reaction force which resists the pressing force Fhigh is applied with respect to the vertical movement arm 52 which is a support side in the 1st conveyance unit 34. As shown in FIG. Thereby, the vertical movement arm 52 is pushed back to the conveyance guide 31 side, and the said hydraulic pressure piece 52a and hydraulic pressure arms 35b and 36b couple | bond (refer FIG. 9 (a), (b)). ).

Therefore, the reaction force of the pressing force by the pressurizing cylinder 53 acts on the base 11 via the hydraulic arm mechanisms 35 and 36, although a part thereof acts on the first conveying unit 34. do. That is, although the vertical movement arm 52 pushes back to the extension of the pressurizing cylinder 53, as long as the extension of the pressurization cylinder 53 is suppressed by the hydraulic arm mechanisms 35 and 36, the vertical movement arm 52 is The degree of pushback is moderately suppressed. Therefore, although the pressing force larger than the pressing force Fcon by the vertical moving arm 52 is applied to the electronic component T, all the reaction forces of the pressing force which the electronic component T receives do not act on the 1st conveyance unit 34, but part of the reaction force is a part of the reaction force. Is dispersed into the base 11. Thereby, although electronic component T is pressurized by a desired pressing force, the rigidity requested | required of the 1st conveying unit 34 is sufficient that it can endure a part of reaction force of the pressing force. Therefore, enlargement and weight of the 1st conveyance unit 34 can be suppressed.

In addition, in the form in which the amount of expansion of the pressurizing cylinder 53 is not forcibly determined by the hydraulic arm mechanisms 35 and 36, the amount of expansion of the pressurizing cylinder 53 also changes depending on the form of the driving of the pressurizing motor 51M. do. And although the drive of the pressurization motor 51M is a torque control mode, compared with the form by which the press force is determined by the mechanical coupling of the to-be-pressured piece 52a and the hydraulic arm 35b, 36b, The pressing force will also fluctuate. In view of this, since the extension amount of the pressurizing cylinder 53 is determined to a predetermined value by the coupling of the hydraulic pressure piece 52a and the hydraulic arms 35b and 36b in the above-described form, the pressing force on the electronic component T is also reduced. It becomes stable.

Moreover, in the cylinder pressurization period mentioned above, similarly to the torque control period mentioned above, the control apparatus 60 is located with respect to the conveyance motor drive part 65a so that the position of the Y direction in the 1st conveyance unit 34 is maintained. Print the command. In addition, the control device 60 outputs the engagement command to the hydraulic arm drive unit 66 so that the extension of the arm cylinders 35s and 36s is maintained. In addition, as described above, the control device 60 outputs a torque command to the pressurizing motor drive unit 65b so that the pressurizing motor 51M can pressurize the pressurizing cylinder 53 with the pressing force Fcon.

And the conveyance motor drive part 65a suppresses rotation of the conveyance motor MY, and the hydraulic arm drive part 66 maintains elongation of arm cylinder 35s, 36s. And the pressurization motor drive part 65b continues to pressurize the pressurization cylinder 53 with the pressing force Fcon.

In addition, pressurization of the electronic component T using the pressurization motor 51M can be performed by at least one of position control and torque control of the pressurization motor 51M. Here, as the pressing force of the pressurizing cylinder 53 increases, the reaction force to the support side of the pressurizing cylinder 53, that is, the load on the pressurizing motor 51M also increases. At this time, if the pressurizing motor 51M is driven by the position control mode mentioned above, unless the output of the pressurizing motor 51M exceeds the said reaction force, the rotation position of the pressurizing motor 51M will be set to the target rotation position. You can't reach it. The driving current of the pressurizing motor 51M continues to increase, and an excessive load is applied to the inside of the pressurizing motor 51M.

In this regard, in the above-described cylinder pressurizing period, the pressurizing motor 51M is driven by the torque control mode in a state where the pressing force of the pressurizing cylinder 53 is applied to the electronic component T. FIG. Therefore, even if the vertical movement arm 52 is pushed back by the elongation of the pressurizing cylinder 53, the abnormality which the pressurization motor 51M outputs predetermined torque overloads the pressurization motor 51M. There is nothing to add.

[Cylinder press release period: T6-T7]

When the inspection of the electronic component T is finished in the inspection unit, an inspection end signal for starting the recovery of the electronic component T is output from the inspection unit to the control device 60. Subsequently, the control device 60 outputs a press release command to the pressurized cylinder drive 65c at timing T6 so that the pressurized cylinder 53 contracts. Thereby, the pressurization cylinder drive part 65c produces | generates the drive signal based on a pressurization release command, and releases the press force by extension of the pressurization cylinder 53. As shown in FIG. Since reaction force with respect to the 1st conveyance unit 34 becomes small by this, the engagement of the hydraulic pressure piece 52a of the vertical movement arm 52, and hydraulic pressure arms 35b, 36b is also canceled | released (FIG. 10 (a) ), (b)).

In addition, in the cylinder press release period mentioned above, the control apparatus 60 outputs a position command to the conveyance motor drive part 65a so that the position of the Y direction in the 1st conveyance unit 34 is maintained. In addition, the control device 60 outputs the engagement command to the hydraulic arm drive unit 66 so that the extension of the arm cylinders 35s and 36s is maintained. In addition, as described above, the control device 60 outputs a torque command to the pressurized motor drive unit 65b so that the pressurized motor 51M can pressurize the electronic component T with the pressing force Fcon.

And the conveyance motor drive part 65a suppresses rotation of the conveyance motor MY, and the hydraulic pressure arm drive part 66 maintains elongation of arm cylinder 35s, 36s. And the pressurization motor drive part 65b continues to pressurize the electronic component T with the pressing force Fcon.

[Position control period: T7-T8]

When the pressurization by the pressurization cylinder 53 is released, the control apparatus 60 outputs a position command to the pressurization motor drive part 65b at timing T7, as shown in FIG. And the pressurizing motor drive part 65b produces | generates the drive current based on the rotational position of the pressurization motor 51M, and the said position command, and outputs the drive current to the pressurization motor 51M. As a result, the pressurizing motor 51M starts to press the electronic component T with the pressing force Fbase by starting rotation in the predetermined direction (see FIGS. 11A and 11B).

In addition, in the position control period mentioned above, the control apparatus 60 outputs a position command to the conveying motor drive part 65a so that the position of the Y direction in the 1st conveying unit 34 is maintained. In addition, the control device 60 outputs the engagement command to the hydraulic arm drive unit 66 so that the extension of the arm cylinders 35s and 36s is maintained.

And the conveyance motor drive part 65a suppresses rotation of the conveyance motor MY, and the hydraulic pressure arm drive part 66 maintains elongation of arm cylinder 35s, 36s.

[Hydraulic Arm Release Period: T8-T9]

When the pressurizing motor 51M is driven by the position control, the control device 60 controls the hydraulic arm driver 66 at timing T8 so that the hydraulic arms 35b and 36b return to the spaced position. Output the unbind command for). Then, the hydraulic arm driver 66 generates and outputs a drive signal based on the disengagement command, the arm cylinders 35s and 36s contract, and the hydraulic arms 35b and 36b return to the spaced apart position (Fig. 12). (A), (b)).

In addition, in the above-mentioned hydraulic arm mechanism releasing period, the control apparatus 60 outputs a position command to the conveying motor drive part 65a so that the position of the Y direction in the 1st conveying unit 34 is maintained. In addition, the control device 60 outputs a position command to the pressurized motor drive unit 65b so that the electronic component T is pressed by the pressing force Fbase.

And the conveyance motor drive part 65a suppresses rotation of the conveyance motor MY, and the pressurization motor drive part 65b suppresses rotation of the pressurization motor 51M.

[Rise period: T9-T10]

When the hydraulic arms 35b and 36b return to the spaced position, the control device 60 causes the pressurized motor at timing T9, as shown in FIG. 4, so that the lower end of the vertical movable arm 52 returns to the top position. A position command is output to the drive part 65b. And the pressurizing motor drive part 65b produces | generates the drive current based on the rotational position of the pressurization motor 51M, and the said position command, and outputs the drive current to the pressurization motor 51M. Thereby, the pressurizing motor 51M rotates in the opposite direction to before timing T9, and returns the vertical movement arm 52 to the uppermost position.

Subsequently, when the lower end part of the vertical movement arm 52 reaches the uppermost position, the control apparatus 60 so that the adsorption part 54 of the 1st conveying unit 34 may arrange | position directly on the collection | recovery shuttle tray 32b. 4 outputs a position command to the conveying motor driver 65a at timing T10. And the conveyance motor drive part 65a produces | generates the drive current based on the rotational position of the conveyance motor MY, and the said position command, and outputs the drive current to the conveyance motor MY. Thereby, the 1st conveyance unit until conveyance motor MY starts rotation in the predetermined direction from timing T10, and the electronic component T adsorbed by the adsorption | suction part 54 reaches just above the collection shuttle tray 32b. 34 moves back toward the first shuttle.

As explained above, according to the said embodiment, the effect enumerated below is acquired.

(1) The reaction force of the pressing force by the pressurizing cylinder 53 has a part acting on the conveying units 34 and 38 and the conveying guide 31, but the remainder passes through the hydraulic arm mechanisms 35 and 36 to the base. It acts on (11). That is, neither reaction force of the pressing force acts on the conveying units 34 and 38, and part of the reaction force is distributed to the base 11. Thereby, although the electronic component T is pressurized by a desired pressing force, the rigidity requested | required of the conveying units 34 and 38 is sufficient that it can endure a part of reaction force of a pressing force. Therefore, enlargement and weight of the conveying units 34 and 38 can be suppressed.

(2) Of the vertical movement arm 52 and the pressurization cylinder 53 which pressurize the electronic component T, the hydraulic arm mechanisms 35 and 36 couple only by the hydraulic pressure piece 52a provided in the vertical movement arm 52. . Therefore, it is possible to suppress the vertical movement arm 52 from being pushed back by the pressing force of the pressurizing cylinder 53. In addition, it becomes possible to suppress the fluctuation of the pressing force applied to the electronic component T.

(3) Since the conveying units 34 and 38 have a pressurizing cylinder 53 which presses the electronic component T at a relatively large pressing force, the conveying units 34 and 38 are conveyed in comparison with the configuration in which the relatively large pressing force is applied by driving of the motor. The configuration of the units 34 and 38 can be simplified, and further, the configuration of the handler 10 can be simplified. Moreover, compared with the structure provided with a motor instead of the pressurization cylinder 53, it becomes easy to enlarge the pressing force applied to the electronic component T.

(4) The pressurizing motor 51M is driven by torque control in a state where the pressing force of the pressurizing cylinder 53 is applied to the electronic component T. FIG. Therefore, even if the vertical movement arm 52 is pushed back by the expansion of the pressurizing cylinder 53, the load which the pressurized motor 51M outputs predetermined torque does not apply an excessive load to the said motor. .

(5) When the pressurizing cylinder 53 applies the pressing force to the electronic component T, the pressurizing motor 51M is driven by torque control. Therefore, excessive load is not applied to the pressurizing motor 51M, and the pressing force applied to the electronic component T is also stabilized.

(6) The reaction force of the pressing force from the pressurizing cylinder 53 acts on each of the pair of hydraulic arms 35b and 36b facing each other. Therefore, compared with the form which the reaction force which resists the pressing force from the pressurization cylinder 53 acts on one place of the mounting surface 11a, it is possible to widen the range which the reaction force distribute | disperses, and also the hydraulic arm It is possible to suppress the rigidity required for the mechanisms 35 and 36 and the base 11.

(7) When the plurality of electronic components T are pressurized at the same time, since the pressing force applied to the entirety of the inspection socket 33 is increased by itself, the reaction force of the pressing force is also increased accordingly. Therefore, the effect that the enlargement and weight of the conveying units 34 and 38 can be suppressed becomes more remarkable.

In addition, the said embodiment can be changed and implemented suitably as follows.

In addition to the above-mentioned electronic component T, various objects, such as an optical component and a precision instrument component, may be sufficient as the conveyance object, In other words, what is conveyed and pressurized may be sufficient. Even with such a conveyance object, it is possible to obtain the effects according to the above (1) to (7).

The form in which the holding support holds the object to be conveyed is not limited to the form of adsorbing the object to be conveyed as described above, and may be, for example, a form in which the object to be conveyed is held. It should just be a form which can hold | maintain and hold | maintain the conveyed object hold | maintained by the test | inspection socket 33. Even in the form of such a holding | maintenance, the effect according to said (1)-(7) can be acquired.

The handler 10 may not necessarily be configured to convey a plurality of electronic components T at the same time and pressurize them at the same time. That is, what is necessary is just to have the state which conveys a some electronic component T simultaneously, and the state which presses a some electronic component T simultaneously. According to this configuration, since the pressing force applied to the entirety of the inspection socket 33 is increased, the reaction force of the pressing force is also increased accordingly. Therefore, the effect of being able to suppress enlargement and weight of the conveying units 34 and 38 becomes more remarkable.

The number of conveying objects conveyed by one conveying unit may be one. Even with such a configuration, it is possible to obtain the effects according to the above (1) to (6).

The structure to which the hydraulic pressure piece 52a and one hydraulic arm mechanism couple | bond together may be sufficient, and even if it is such a structure, the effect according to said (1)-(5), (7) can be acquired, and the hydraulic arm mechanism of the As long as the number is small, the structure of the handler 10 can be made simple.

When the pressurizing cylinder 53 which is a 1st press part applies a press force with respect to the electronic component T, the structure by which the pressurizing motor 51M which comprises the 2nd press part simultaneously with the application of the press force is driven in a torque control mode. Even in such a configuration, it is possible to obtain the effects in accordance with the above (1) to (4), (6) and (7), and the timing in which the pressurizing cylinder 53 is driven and the pressurizing motor 51M are in torque control mode. It is also possible to synchronize the timing driven by the common control signal. Therefore, matching between the timing at which the pressure cylinder 53 is driven and the timing at which the pressure motor 51M is driven in the torque control mode becomes easy.

When the pressurizing cylinder 53 applies pressurization force to the electronic component T, the form which drives the pressurization motor 51M by position control may be sufficient. Even in such a configuration, the effects according to the above (1) to (3), (5) to (7) can be obtained, and the current measuring unit I51M for measuring the drive current of the pressurized motor 51M can be omitted. Do.

The pressure cylinder is not limited to the configuration in which compressed air at a predetermined pressure is supplied via a valve, but may be a configuration in which air compressed at a predetermined pressure is supplied by an electric regulator. In addition, the pressurized cylinder is not limited to the cylinder which supplies a working pressure by compressed air, but may be a cylinder which supplies a working pressure by hydraulic pressure.

The conveying units 34 and 38 may have a configuration in which the pressurizing motor is different from the pressurizing motor 51M instead of the pressurizing cylinder 53, and even in such a configuration, the above-mentioned (1), (2), (6), ( It is possible to obtain the effect according to 7).

The conveying units 34 and 38 may pressurize a conveying object only by the pressurizing cylinder 53. Even in such a configuration, it is possible to obtain the effects according to the above (1), (2), (6) and (7).

The conveyance units 34 and 38 do not have the pressurizing cylinder 53, and the pressurization of conveyance object may be performed only by the pressurization motor 51M. Even with such a configuration, it is possible to obtain the effects according to the above (1), (2), (6), and (7), and also to simplify the configuration of the conveying unit.

The hydraulic pressure piece 52a engaged with the hydraulic arms 35b and 36b is not limited to the lower end of the vertical movement arm 52 but is provided on the horizontal movement arm 51 side than the lower end of the vertical movement arm 52. It may be possible.

The hydraulic arm may be provided on the vertical moving arm and the pressurized cylinder, and the hydraulic arm mechanisms 35 and 36 engage with both of the hydraulic arm. Even in such a configuration, it is possible to obtain the effects according to the above (1), (3) to (7), and the reaction force of the pressing force by the pressurizing motor 51M and the pressurizing cylinder 53 is increased by the number of the number of the pressure-sensitive pieces. The pressure is more reliably received by the hydraulic arm mechanisms 35 and 36.

The pressure cylinder may include a cylinder main body and a plunger connected to the adsorption unit, and a hydraulic pressure piece may be provided in the cylinder main body. Even with such a configuration, it is possible to obtain the effects according to the above (1), (3) to (7).

The hydraulic arms 35b and 36b may be driven by a mechanism other than the arm cylinders 35s and 36s, for example, a mechanism driven by a motor.

The hydraulic arms 35b and 36b are fixed to the supports 35a and 36a at their engagement positions, and the hydraulic pieces 52a are in the Y direction between the hydraulic arms 35b and 36b and the inspection socket 33. It may be a configuration in which a gap capable of moving in the direction is provided. With such a configuration, under the fixed hydraulic arms 35b and 36b, carrying and unloading of the electronic component T with respect to the inspection socket 33 are carried out, and the pressure-retaining piece pushed back by the reaction force of the pressing force ( 52a) is engaged with the hydraulic arms 35b and 36b. In addition, since the mechanism necessary for the operation of the hydraulic arms 35b and 36b can be omitted, the configuration of the hydraulic arms 35b and 36b can be simplified.

The hydraulic arms 35b and 36b and the hydraulic pressure piece 52a may be configured to operate as follows. That is, in the clearance gap between the hydraulic arm 35b, 36b in the engagement position, and the test | inspection socket 33, the hydraulic pressure piece 52a moves from a Y direction. Subsequently, after the hydraulic pressure piece 52a and the hydraulic arms 35b and 36b are engaged, the hydraulic arms 35b and 36b are displaced to a spaced position. Then, the hydraulic pressure piece 52a moves in the Z direction.

According to this operation, when pressurization of the electronic component T by the first conveying unit 34 is performed, the period for moving the hydraulic arms 35b and 36b at the separated position to the engaged position, that is, the timing T3 to the timing T4. The period of can be omitted. The hydraulic arms 35b and 36b displaced to the separation position may be displaced to the engaged position at an arbitrary timing.

The hydraulic arms 35b and 36b and the hydraulic pressure piece 52a may be configured to operate as follows. That is, between hydraulic pressure arms 35b and 36b in the spaced apart position, the hydraulic pressure piece 52a moves from the Z direction, and hydraulic pressure arms 35b and 36b move to the engaged position. Subsequently, after the hydraulic pressure piece 52a and the hydraulic arms 35b and 36b are engaged, the hydraulic pressure piece 52a is in the Y direction from the gap between the hydraulic arms 35b and 36b and the test socket 33. By moving, the engagement with the hydraulic arms 35b and 36b is released.

According to this operation, when the pressurization of the electronic component T by the first conveying unit 34 is performed, the period of moving the hydraulic arms 35b and 36b displaced to the engaged position to the separation position, that is, the timing T9 from the timing T8. The period up to can be omitted. The hydraulic arms 35b and 36b displaced to the engaged position may be displaced to the separated position at an arbitrary timing after the release of the hydraulic pressure piece 52a.

The configuration may be such that a portion of the pressing portion is movable to engage with the engaging portion of the fixed hydraulic portion, or may be configured to move to release the engagement portion.

The hydraulic pressure unit can also be embodied as a structure that suppresses the pressing unit from moving toward the opposite side to the pressing direction due to friction generated by the contact of the pressing unit. In addition, the lower end part of a pressurization part may be sufficient as the contact place of a hydraulic pressure part and a pressurization part. In this case, the structure in which the concave portion is provided in the pressing portion, the convex portion is provided in the hydraulic pressure portion, or the convex portion is provided in the pressing portion, and the concave portion may be provided in the hydraulic pressure portion. The friction generated between these recesses and the convex portions can significantly suppress the movement of the pressing portion. That is, a hydraulic pressure part should just be a structure which can be pushed back by the reaction force which generate | occur | produces when a press part pressurizes a conveying object.

Although the pressing force of the pressurizing cylinder 53 is larger than the pressing force of the pressurizing motor 51M, the pressing force of the pressurizing motor 51M is larger than the pressing force of the pressurizing cylinder 53 or the pressurizing motor 51M. The pressing force and the pressing force of the pressurizing cylinder 53 may have the same configuration.

The handler 10 has the hydraulic arm mechanisms 35 and 36 which are subjected to reaction when the first conveying unit 34 inserts the electronic component T into the inspection socket 33. Not only this but the 1st conveyance unit 34 presses the electronic component T with the supply shuttle tray 32a, the collection shuttle tray 37b, or the conveyor trays C1a, C2a, C3a, C4a, etc. The handler 10 may have a hydraulic arm mechanism for receiving the reaction force.

The configuration in which the pressing force of the pressurizing motor 51M is larger than the pressing force of the pressurizing cylinder 53 or the pressing force of the pressurizing motor 51M and the pressing pressure of the pressurizing cylinder 53 may be the same.

While the supply side movable guide 22 moves relative to the fixed supply side fixed guide 21 and the recovery side movable guide 42 moves relative to the fixed recovery side fixed guide 41, the fixed side is fixed. The structure in which two movable guides which can move relative to a single fixed guide may be provided. In this case, the fixing guide is formed in the cover member 12 and is formed in parallel with one side extending in the X direction on the upper surface of the base 11 and over approximately the entire width of the X direction of the base 11. It is desirable to be. In addition, it is preferable that two movable guides are provided in the cover member 12 and on the opposite side across the said conveyance guide 31.

The number of conveying units that the handler 10 has is not limited to two, but may be one or three.

The electronic component T accommodated in the supply shuttle tray 32a is conveyed to the inspection socket 33 by the first transfer unit 34, and the electronic component T accommodated in the inspection socket 33 is the second transfer unit. The form pressurized by (38) may be sufficient. That is, what is necessary is just the form which conveys a conveyance object and pressurizes the said conveyance object.

A handler is not limited to the component inspection apparatus which inspects a conveyance object, What is necessary is just to be used for the apparatus which conveys and pressurizes a conveyance object.

10: Handler
11: Base
11a: mounting surface
12:
20: supply robot
21: supply side fixing guide
22: supply side operation guide
23: hand unit for supply
31: Return Guide
32: first shuttle
32a, 37a: Shuttle tray for supply
32b, 37b: Recovery Shuttle Tray
32c: first shuttle guide
33: inspection socket
33a: inspection pocket
34: first conveying unit
35, 36: hydraulic arm mechanism
35a, 36a: support
35b, 36b: hydraulic arm
35s, 36s: Arm Cylinder
37: the second shuttle
37c: 1st Shuttle Guide
38: second conveying unit
40: recovery robot
41: recovery side fixing guide
42: recovery side operation guide
43: recovery unit
51: horizontal moving arm
51M: Pressurized Motor
52: vertical moving arm
52a: Blood pressure piece
53: pressurized cylinder
54: adsorption unit
60: Control device
61: conveyor drive unit
62: guide drive unit
63: shuttle drive unit
64: hand unit drive unit
64a: hand motor drive unit
64b: suction valve driving unit
65 conveying unit drive unit
65a: conveying motor drive unit
65b: pressurized motor drive unit
65c: pressure cylinder drive unit
65d: suction valve drive unit
66: hydraulic arm drive unit
C1, C2, C3, C4: Conveyor
C1a, C2a, C3a, C4a: Conveyor Tray
Encoder: E51M, EMC, EMS, EMX, EMY, EMZ
ESV1, ESV2: Suction Sensor
MC: Conveyor Motor
MS: Shuttle Motor
MX: Guide Motor
MY: conveying motor
MZ: Hand Motor
SV1, SV2: Suction Valve
T: Electronic Component

Claims (9)

A base,
A return unit for returning a return object;
Hydraulic unit provided in the base
And,
The conveying section is provided with a pressurizing section for pressurizing the conveying object toward the base,
The said hydraulic part is a handler characterized by the contact part which contacts the said press part. The method of claim 1,
The pressing portion
A first pressing portion for pressing the conveying object toward the base;
A second pressing portion for pressing the first pressing portion toward the base
And,
The said contact part of the said hydraulic pressure part is a handler which moves to contact with the protrusion provided in the said 2nd press part. 3. The method of claim 2,
The pressing portion
A first pressing portion for pressing the conveying object toward the base;
A second pressing portion for pressing the first pressing portion toward the base
And,
The said contact part of the said hydraulic pressure part is a handler which moves in the direction spaced apart from the protrusion provided in the said 2nd press part. The method of claim 3,
The first pressing portion is a pressing cylinder,
The second pressing portion includes a motor for raising and lowering the pressing cylinder,
The pressing force of the said 1st press part is larger than the pressing force of a said 2nd press part. 5. The method of claim 4,
A motor controller for controlling driving of the motor,
The motor control unit includes:
In the state where the pressurized cylinder pressurizes the conveying object,
A handler for driving the motor by torque control. The method according to claim 4 or 5,
A motor controller for controlling driving of the motor,
The motor control unit includes:
Before the pressurizing cylinder pressurizes the conveying object,
A handler for driving the motor by torque control. 6. The method according to any one of claims 2 to 5,
The contact portion
A pair of movable arms facing each other,
The pair of movable arms,
A position in contact with the protrusion,
A handler displaced to a position spaced apart from the protrusion. The method according to any one of claims 1 to 5,
The said conveyance part has a state which adsorb | sucks a some said conveyance object,
The said press part is a handler which has a state which presses the some said conveyance object. A base,
A conveying unit for conveying the electronic component;
A hydraulic unit connected to the base;
Inspection socket installed on the base
And,
The conveying portion is provided with a pressing portion for pressing the electronic component toward the inspection socket of the base,
The said hydraulic part is provided with the contact part which contact | connects the said press part, The component inspection apparatus characterized by the above-mentioned.

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