TWI592673B - Disposer, and parts inspection device - Google Patents

Description

Disposer and part inspection device

The present invention relates to a handler for transporting a transport target, and more particularly to a handler for transporting a transport target to a pressing region and pressing the pressing region, and a component inspection device including the same.

A component inspection device for inspecting the electrical characteristics of an electronic component as described in Patent Document 1 has been known. In the component inspection device, the processor is used to transport the electronic component to be transported to the inspection socket to be the pressing region, and the electronic component is embedded in the inspection socket.

In the above-described handler, an adsorption unit for adsorbing electronic components and a motor for pressing the electronic component adsorbed to the adsorption unit into the inspection socket are mounted. Further, when the electronic component before inspection is inspected by the inspection socket, the motor is driven while the electronic component is adsorbed to the adsorption portion, and the terminal of the electronic component is inserted into the terminal of the inspection socket. At this time, in order to electrically connect the terminal of the electronic component to the terminal of the inspection socket, it is necessary to apply a specific pressing force to the electronic component, and the pressing force is applied by the motor.

On the other hand, in recent years, the number of electronic components embedded in the inspection socket tends to increase, so that the output of the motor cannot be used, and a pressing force sufficient to connect the terminals can be applied to each of the plurality of electronic components. Therefore, a pneumatic cylinder for pressing is mounted on the above-described handler, and a pressing force larger than the above-described motor is applied from the pneumatic cylinder to the electronic component. According to the electronic parts using the pneumatic cylinder as described above In the pressing, since the terminals are reliably connected, the inspection of the electronic components can be performed with high precision.

[Previous Technical Literature]

[license literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2010-101776

However, as described above, in order to form a connection between the terminals of the electronic component, a specific pressing force is required. Therefore, if the number of terminals or the number of electronic components of the electronic component increases, the pressing force of the pneumatic cylinder becomes larger. . On the other hand, if the pressing force of the pneumatic cylinder is increased, the reaction force from the inspection socket is automatically increased. Further, it is necessary to have rigidity to the extent that the member for supporting the pneumatic cylinder or the rail for moving the pneumatic cylinder is deformed by the reaction force. However, in order to increase the rigidity of the above-described member and the rail, it is unavoidable to increase the size or weight of the conveying portion including the member and the rail.

In addition, the above-described problem is not limited to the case where the motor and the pneumatic cylinder are used to press the electronic component as described above, and the problem is common to the processor that presses the transport target by using one or more pressing portions provided in the transport unit.

The present invention has been made in view of the above-described actual circumstances, and an object of the present invention is to provide a processor capable of suppressing an increase in size or weight of a transport unit in a handler for transporting a transport target by a transport unit that transports a transport target, and A part inspection device including the handler.

In one aspect of the present invention, the processor includes a base, a transport unit that transports the transport target, and a pressure receiving unit that is coupled to the base, and the transport unit is configured to press the transport object toward the base The pressing portion is provided with an engaging portion that is engaged with one of the pressing portions in the pressure receiving portion.

The reaction force against the pressing force when the pressing force of the pressing portion acts on the object to be transported Will act on the transport unit. According to the above aspect, one of the reaction forces of the pressing force acts on the conveying portion, and the remaining portion acts on the base via the engaging portion provided in the pressure receiving portion. That is, not all of the reaction force of the pressing force acts on the conveying portion, and a part of the reaction force is dispersed to the base. Thereby, the object to be conveyed is pressed by the desired pressing force, and the rigidity required for the conveying portion is one of the reaction forces capable of withstanding the pressing force. Therefore, it is possible to suppress an increase in size or weight of the conveying unit.

In one aspect of the present invention, the pressing portion includes a first pressing portion that presses the conveying target toward the base, and a second pressing portion that presses the first pressing portion toward the base. The engaging portion of the pressing portion is movable so as to be engaged with a protruding portion provided at a portion of the second pressing portion.

According to the above configuration, the engagement portion between the first pressing portion that constitutes the pressing portion and the pressure receiving portion of the second pressing portion is movable so as to be engaged with the protruding portion provided in one of the second pressing portions. Therefore, by the engagement described above, it is possible to suppress the second pressing portion from being retracted by the pressing force of the first pressing portion. Further, since the pressing force applied to the object to be conveyed is fixed by the mechanical engagement between the pressure receiving portion and the second pressing portion, the pressing force can be suppressed from fluctuating.

In one aspect of the present invention, the pressing portion includes a first pressing portion that presses the conveying target toward the base, and a second pressing portion that presses the first pressing portion toward the base. The engaging portion of the pressing portion is movable so as to release the engagement with the protruding portion provided in one of the second pressing portions.

According to the above configuration, the engagement portion between the first pressing portion that constitutes the pressing portion and the pressure receiving portion of the second pressing portion is movable so as to release the engagement with the protruding portion provided in one of the second pressing portions. Therefore, the engagement of the second pressing portion can be suppressed by the pressing force of the first pressing portion, and the movement of the pressing portion is less likely to be affected by the protruding portion by the release of the engagement. Further, since the pressing force applied to the object to be conveyed is fixed by the mechanical engagement between the pressure receiving portion and the second pressing portion, the pressing force can be suppressed from fluctuating.

In one aspect of the invention, preferably, the first pressing portion is a pressing cylinder, and the second pressing portion The pressing portion includes a motor that raises and lowers the pressing cylinder, and a pressing force of the first pressing portion is larger than a pressing force of the second pressing portion.

The pressing force applied by the pressing cylinder is generally increased by increasing the dynamic pressure of the pressing cylinder, for example, increasing the pressure of the compressed air supplied to the pressing cylinder. In the above aspect, the first pressing portion that requires a relatively large pressing force includes such a pressing cylinder. Therefore, the configuration of the conveying portion can be simplified as compared with the configuration in which a relatively large pressing force is applied by the driving of the motor, and the configuration of the treating device can be simplified. Moreover, it is easier to increase the pressing force applied to the object to be conveyed than in the case where the first pressing portion includes the motor.

One of the aspects of the present invention preferably includes a motor control unit that controls driving of the motor, and the motor control unit drives the motor by torque control in a state where the pressing cylinder presses the transfer target.

The pressing of the transport target using the motor can be performed by at least one of position control and torque control of the motor. In addition, the position control means controlling the rotational position of the motor so that the position of the pressing cylinder becomes a specific position. On the other hand, the torque control means that the torque generated by the motor is controlled such that a specific pressing force is applied to the object to be transported.

Here, the larger the pressing force of the pressing cylinder, the larger the reaction force on the supporting side of the pressing cylinder, that is, the load on the motor. At this time, if the motor is driven by the position control described above, the rotational position of the motor does not reach the target rotational position as long as the output of the motor does not exceed the reaction force. Moreover, the drive current of the motor continues to increase, and an excessive load is applied to the inside of the motor.

In this respect, in the above aspect, the motor is driven by the torque control in a state where the pressing force of the pressing cylinder is applied to the conveying target. Therefore, even if the support side of the pressing cylinder is retracted due to the extension of the pressing cylinder, the motor outputs a specific torque, and thus the excessive load is not applied to the motor.

Preferably, one aspect of the present invention includes a motor control unit that controls driving of the motor, wherein the motor control unit uses torque before the pressing cylinder presses the transfer target Control the drive of the above motor.

According to the above aspect, when the pressing cylinder applies a pressing force to the conveying target, the motor is driven by the torque control. Therefore, an excessive load is not applied to the motor, and the pressing force applied to the object to be conveyed also becomes stable.

In one aspect of the invention, preferably, the engaging portion is a pair of movable arms that face each other, and the pair of movable arms are displaced to a position where the protruding portion is engaged with the protruding portion and a position away from the protruding portion. .

According to the above aspect, one of the pair of movable arms is engaged with the protruding portion provided on the pressing portion, and the reaction force of the pressing force from the pressing portion acts on each of the pair of movable arms facing each other. Therefore, compared with the state in which the reaction force of the pressing force from the pressing portion acts on one portion, the range in which the reaction force is dispersed can be expanded, and the rigidity required for the pressure receiving portion or the base can be suppressed.

In one aspect of the invention, it is preferable that the conveying unit has a state in which a plurality of the objects to be conveyed are adsorbed, and the pressing unit has a state in which a plurality of the objects to be conveyed are pressed.

In the state in which the plurality of transport targets are pressed, the pressing force applied to the entire plurality of transport targets is automatically increased as the number of transport targets increases. At this time, there is a state in which the pressing force corresponding to the entirety of the connection object is applied, and the reaction force of the pressing force is automatically increased. In this regard, according to the above aspect, a part of the reaction force which becomes larger as described above will be dispersed toward the base. Therefore, the effect of suppressing an increase in size or weight of the conveying unit becomes more remarkable.

In one aspect of the present invention, the component inspection device includes a base, a transfer portion for transporting electronic components, a pressure receiving portion coupled to the base, and an inspection socket provided on the base, and the transport portion is provided in the transport portion The pressing portion that presses the electronic component toward the inspection socket is provided with an engaging portion that is engaged with one of the pressing portions in the pressure receiving portion.

When the pressing force of the pressing portion acts on the electronic component, the reaction force against the pressing force acts on the conveying portion. According to the above aspect, one of the reaction forces of the pressing force acts on The conveyance unit has a remaining portion that acts on the base via an engagement portion provided in the pressure receiving portion. That is, not all of the reaction force of the pressing force acts on the conveying portion, and a part of the reaction force is dispersed to the base. Thereby, the object to be conveyed is pressed by the desired pressing force, but the rigidity required for the conveying portion may be one of the reaction forces capable of withstanding the pressing force. Therefore, it is possible to suppress an increase in size or weight of the conveying unit.

10‧‧‧Processor

11‧‧‧Abutment

11a‧‧‧Jacketing surface

12‧‧‧Caps

20‧‧‧Supply manipulator

21‧‧‧Supply side fixed guide

22‧‧‧Supply side movable guide

23‧‧‧Supply unit

31‧‧‧Transport guides

32‧‧‧1st shuttle

32a‧‧‧Supply shuttle

37a‧‧‧Supply shuttle

32b‧‧‧Recycling shuttle

37b‧‧·Recycling shuttle

32c‧‧‧1st guide

33‧‧‧Check socket

33a‧‧‧Checking pockets

34‧‧‧1st transport unit

35‧‧‧pressure arm mechanism

36‧‧‧pressure arm mechanism

35a‧‧‧Support

36a‧‧‧Support

35b‧‧‧pressure arm

36b‧‧‧pressure arm

35s‧‧‧ arm cylinder

36s‧‧‧ arm cylinder

37‧‧‧2nd shuttle

37c‧‧‧1st guide

38‧‧‧2nd transport unit

40‧‧‧Recycling robot

41‧‧‧Recovery side fixed guide

42‧‧‧Recovery side movable guide

43‧‧‧Recycling hand unit

51‧‧‧ horizontal moving arm

51M‧‧‧ Pressing motor

52‧‧‧Vertical moving arm

52a‧‧‧Subjected tablets

53‧‧‧Pressing cylinder

54‧‧‧Adsorption Department

60‧‧‧Control device

61‧‧‧Conveyor drive department

62‧‧‧guide drive department

63‧‧‧ Shuttle Drive Department

64‧‧‧Hand unit drive department

64a‧‧‧Hand motor drive department

64b‧‧‧Suction valve drive

65‧‧‧Transport unit drive unit

65a‧‧‧Transport motor drive unit

65b‧‧‧ Press motor drive

65c‧‧‧Pushing cylinder drive

65d‧‧‧Suction valve drive

66‧‧‧Accepting arm drive

C1‧‧‧Conveyor

C2‧‧‧Conveyor

C3‧‧‧Conveyor

C4‧‧‧Conveyor

C1a‧‧‧Conveyor tray

C2a‧‧‧Conveyor tray

C3a‧‧‧Conveyor tray

C4a‧‧‧Conveyor tray

E51M‧‧‧Encoder

EMC‧‧‧Encoder

EMS‧‧‧Encoder

EMX‧‧‧Encoder

EMY‧‧ Encoder

EMZ‧‧‧Encoder

ESV1‧‧‧sucking sensor

ESV2‧‧‧Suction Sensor

MC‧‧‧Conveyor motor

MS‧‧‧ shuttle motor

MX‧‧‧guide motor

MY‧‧‧Transport motor

MZ‧‧‧Hand motor

SV1‧‧‧ suction valve

SV2‧‧‧ suction valve

T‧‧‧Electronic parts

Fig. 1 is a schematic plan view showing an overall configuration of an embodiment of a component inspection device according to the present invention.

Fig. 2 is a side view showing the side structure of the first conveying unit and the pressure receiving arm mechanism in the handler included in the component inspection device.

Fig. 3 is a block diagram showing the electrical configuration of the handler.

Fig. 4 is a timing chart showing driving states of various motors included in the handler.

Fig. 5 is a view showing a dynamic example of the first conveying unit and the pressure receiving arm mechanism, and showing the plane structure of the (a) first conveying unit and the pressure receiving arm mechanism in correspondence with the (b) end surface structure. .

Fig. 6 is a view showing a dynamic example of the first conveying unit and the pressure receiving arm mechanism, and showing the plane structure of the (a) first conveying unit and the pressure receiving arm mechanism in correspondence with the (b) end surface structure. .

Fig. 7 is a view showing a dynamic example of the first conveying unit and the pressure receiving arm mechanism, and showing the plane structure of the (a) first conveying unit and the pressure receiving arm mechanism in correspondence with the (b) end surface structure. .

Fig. 8 is a view showing a dynamic example of the first conveying unit and the pressure receiving arm mechanism, and showing the plane structure of the first conveying unit and the pressure receiving arm mechanism in accordance with (b) the end surface structure. .

FIG. 9 is a view showing a dynamic example of the first conveying unit and the pressure receiving arm mechanism, and showing the planar structure of the (a) first conveying unit and the pressure receiving arm mechanism in association with the (b) end surface structure. Picture.

Fig. 10 is a view showing a dynamic example of the first conveying unit and the pressure receiving arm mechanism, and showing the plane structure of the (a) first conveying unit and the pressure receiving arm mechanism in correspondence with the (b) end surface structure. .

Fig. 11 is a view showing a dynamic example of the first conveying unit and the pressure receiving arm mechanism, and showing the plane structure of the (a) first conveying unit and the pressure receiving arm mechanism in correspondence with the (b) end surface structure. .

Fig. 12 is a view showing a dynamic example of the first conveying unit and the pressure receiving arm mechanism, and showing the plane structure of the (a) first conveying unit and the pressure receiving arm mechanism in correspondence with the (b) end surface structure. .

Hereinafter, an embodiment in which the treatment device and the component inspection device of the present invention are embodied will be described with reference to Figs. 1 to 12 . First, the configuration of the component inspection device will be described with reference to Fig. 1 .

[Composition of parts inspection device]

As shown in Fig. 1, the mounting surface 11a on which the various robots are mounted is mounted on the base 11 of the handler 10 included in the component inspection device as an upper surface, and most of the mounting surface 11a is covered by the cover member 12. The transport space, which is the space surrounded by the cover member 12 and the mounting surface 11a, maintains the humidity and the temperature at a specific value by the dry air supplied from the outside of the component inspection device.

On the mounting surface 11a of the base 11, four conveyors extending in one direction are arranged in a direction orthogonal to the conveying direction of the conveyor. In the four conveyors, two supply conveyors C1 and C2 are placed on one side of the X direction as the arrangement direction of the conveyor, and two collections are disposed on the other side in the X direction. Conveyor C3, C4. Further, in the supply conveyors C1 and C2, the supply conveyor trays C1a and C2a are conveyed from the outer side of the cover member 12 toward the inside. Moreover, in the conveyors C3 and C4 for recycling, the conveyor for recycling The trays C3a and C4a are conveyed from the inner side of the lid member 12 toward the outside. Further, in the supply conveyor trays C1a and C2a, a plurality of electronic components T before the inspection as the transport target are accommodated, and the plurality of electronic components T after the inspection are stored in the collection conveyor trays C3a and C4a. .

The robot 20 and the recovery robot 40 are mounted on the mounting surface 11a of the base 11 so as to face each other in the X direction. The supply robot 20 is disposed in the Y direction of the supply conveyors C1 and C2, and the recovery robot 40 is disposed in the Y direction of the collection conveyors C3 and C4.

The supply robot 20 includes a supply-side fixed guide 21 as a fixed shaft extending in the Y direction, a supply-side movable guide 22 as a movable shaft coupled to the supply-side fixed guide 21, and a supply-side movable guide 22 And the hand unit 23 is moved along the supply side movable guide 22.

The supply-side movable guide 22 is a movable shaft that extends from the supply-side fixed guide 21 toward the recovery robot 40, and is fixed to the supply-side fixed guide 21 so as to be reciprocally movable in the Y direction. The supply hand unit 23 is an end effector disposed on the mounting surface 11a side of the supply side movable guide 22, and is coupled to the supply side movable guide 22 so as to be reciprocally movable in the X direction. Further, the supply hand unit 23 can be connected to the supply side movable guide 22 from the supply side surface 11a side toward the supply side movable guide 22 so as to be lowered from the supply side movable guide 22 toward the mounting surface 11a.

Further, the supply-side movable guide 22 moves toward the supply conveyors C1 and C2 along the supply-side fixed guide 21, and the supply manual unit 23 moves along the supply-side movable guide 22 to the supply conveyor tray C1a, Just above C2a. Thereby, the electronic component T placed on the supply conveyor trays C1a and C2a is sucked by the supply hand unit 23, and then lifted from the supply conveyor trays C1a and C2a. Further, from this state, the supply-side movable guide 22 is separated from the supply conveyors C1 and C2 along the supply-side fixed guide 21, whereby the electronic component T adsorbed to the supply unit 23 is moved to the above-mentioned conveyance space. Specific location within give.

Similarly to the supply robot 20, the collection robot 40 includes a collection-side fixed guide 41 as a fixed shaft extending in the Y direction, and a recovery-side movable guide 42 as a movable shaft coupled to the recovery-side fixed guide 41, And a recycling hand unit 43 coupled to the recovery-side movable guide 42 and moving along the recovery-side movable guide 42 in the X direction.

The recovery-side movable guide 42 is a movable shaft that extends from the recovery-side fixed guide 41 toward the supply robot 20 side, and is reciprocally coupled to the recovery-side fixed guide 41 in the Y direction. The collection hand unit 43 is an end effector disposed on the side of the mounting surface 11a of the recovery-side movable guide 42 and is reciprocally coupled to the recovery-side movable guide 42 in the X direction. In addition, the recovery hand unit 43 can be lowered from the recovery side movable guide 42 toward the mounting surface 11a, and can be connected to the recovery side movable guide 42 from the mounting surface 11a side toward the recovery side movable guide 42.

Further, the recovery-side movable guide 42 moves along the recovery-side fixed guide 41 toward the recovery conveyors C3 and C4, and the recovery hand unit 43 moves along the recovery-side movable guide 42 to the recovery conveyor tray C3a. Just above C4a. Thereby, the electronic component T adsorbed to the collection hand unit 43 is placed on the collection conveyor trays C3a and C4a.

On the inner side surface of the cover member 12, a conveyance guide 31 extending in the Y direction is fixed to substantially the center of the inner side in the X direction. Below the both end portions of the conveyance guide 31, a first shuttle 32 extending in the X direction and a second shuttle 37 extending in the X direction in the same manner are disposed.

The first shuttle 32 is coupled to the first shuttle plate 32c that is fixed to the mounting surface 11a and extends in the X direction, and overlaps with either the supply-side movable guide 22 and the recovery-side movable guide 42 in the X direction. In the same way, slide in the X direction. The supply bobbin 32a is fixed to the supply robot 20 side of the first shuttle 32, and the recovery bobbin 32b is fixed to the recovery robot 40 side of the first shuttle 32. The supply shuttle 32a accommodates a plurality of electronic components T before the inspection as a transport target, and the collection shuttle 32b stores a plurality of electronic components T after inspection.

The second shuttle 37 is also connected to the second shuttle plate 37c that is fixed to the mounting surface 11a and extends in the X direction, and is in the X direction, and either the supply side movable guide 22 and the recovery side movable guide 42. In the overlapping manner, slide in the X direction. A supply shuttle 37a is fixed to the supply robot 20 side of the second shuttle 37, and a recovery shuttle 37b is fixed to the recovery robot 40 side of the second shuttle 37. In the supply tray 37a, a plurality of electronic components T before the inspection as the object to be transported are accommodated, and a plurality of electronic components T after inspection are accommodated in the recovery tray 37b.

In the mounting surface 11a, a rectangular opening penetrating the mounting surface 11a is provided in the center of the transport space, and an inspection socket 33, which is a connection target for simultaneously inspecting a plurality of electronic components T, is embedded in the rectangular opening. The inspection socket 33 is a socket in which the electronic component T is embedded, and is connected to an inspection unit (not shown) for inspecting the electronic component T. The inspection unit is a device different from the handler housed inside the base 11, and constitutes a component inspection device together with the handler.

On the upper surface of the inspection socket 33, a check recess 33a for accommodating a plurality of electronic components T is recessed, and a bottom surface of the inspection recess 33a is recessed to be embedded with a convex terminal of the electronic component T. A plurality of concave terminals are combined. Further, the electrical characteristics of the electronic component T can be inspected by fitting the male terminal included in the electronic component T into the female terminal of the inspection recess 33a. Further, the terminal included in the inspection recess 33a is connected to an inspection unit which is a different body mounted in the base 11, and the terminal included in the electronic component T is connected to the inspection unit via a terminal included in the inspection recess 33a. Check the circuit. Moreover, the result of the inspection by the inspection socket 33 is output from the inspection unit to the handler 10.

In the conveyance guide 31, the first conveyance unit 34 and the second conveyance unit 38 that constitute the conveyance unit are connected in parallel in the Y direction.

The first transport unit 34 reciprocates in the Y direction between the first shuttle 32 and the inspection socket 33. The lower end portion of the first transport unit 34 is lowered and raised in the Z direction between the transport guide 31 and the mounting surface 11a. Further, the first transport unit 34 uses the first transport order The electronic component T accommodated in the supply tray 32a is held at the lower end of the unit 34, and the held electronic component T is transported to the inspection socket 33, and the electronic component T is fitted into the inspection socket 33. Further, the first transport unit 34 takes out the electronic component T embedded in the inspection socket 33 by the lower end portion of the first transport unit 34, and mounts the taken electronic component T on the recovery shuttle 32b.

The second transport unit 38 reciprocates in the Y direction between the second shuttle 37 and the inspection socket 33. The lower end portion of the second transfer unit 38 is lowered and raised in the Z direction between the conveyance guide 31 and the mounting surface 11a. In addition, the second transport unit 38 holds the electronic component T placed on the supply shuttle 37a by the lower end portion of the second transport unit 38, and transports the held electronic component T to the inspection socket 33 to the electronic component. T is embedded in the inspection socket 33. Further, the second transport unit 38 takes out the electronic component T embedded in the inspection socket 33 by the lower end portion of the second transport unit 38, and mounts the taken electronic component T on the recovery shuttle 37b.

Further, in the mounting surface 11a, one of the pressure receiving portions 35 and 36 constituting the pressure receiving portion is fixedly provided on both sides of the inspection socket 33 in the X direction.

[The role of the parts inspection device]

In the above-described handler 10, first, the electronic component T before inspection is transferred from the external device to the supply conveyor trays C1a and C2a. Then, the electronic components T before inspection are transported into the transport space by driving the supply conveyors C1 and C2. Then, when the electronic component T before inspection is transported into the transport space, the supply-side movable guide 22 moves along the supply-side fixed guide 21 to the supply conveyors C1 and C2. Then, when the supply unit 23 is moved right above the supply conveyor trays C1a and C2a to hold the electronic component T, the supply-side movable guide 22 moves along the supply-side fixed guide 21 to the first shuttle 32. until.

Then, when the supply-side movable guide 22 reaches the first shuttle 32, the supply hand unit 23 moves to the first shuttle 32, and the first shuttle 32 is also positioned by the supply hand unit 23. The supply slides in a manner directly above the shuttle 32a. Then, the electronic component T before inspection which is held by the supply hand unit 23 is transferred from the supply hand unit 23 to the supply shuttle 32a.

When the electronic component T before inspection is transferred to the supply shuttle 32a, the first transport unit 34 moves to the first shuttle 32, and the first shuttle 32 is also positioned at the lower end of the first transport unit 34. Slide with the shuttle 32a directly above. Then, the lower end portion of the first transport unit 34 is lowered toward the supply shuttle 32a, and the electronic component T before the inspection to be transferred to the supply shuttle 32a is held by the lower end portion of the first transport unit 34. Then, the first transport unit 34 is moved to the inspection socket 33, and the electronic component T before the inspection is transported directly above the inspection socket 33. Then, the electronic component T before the inspection is lowered together with the lower end portion of the first transport unit 34, and the male terminal of the electronic component T is inserted into the female terminal in the inspection recess 33a.

When the electronic component T before inspection is embedded in the inspection socket 33, the inspection start signal for starting the inspection of the electronic component T is output from the processor 10 to the inspection unit, whereby the inspection of the electronic component T is started by the inspection unit. .

When the inspection completion signal indicating the completion of the inspection of the electronic component T is output from the inspection unit to the handler 10, the lower end portion of the first conveyance unit 34 is in a state where the electronic component T after inspection is held by the first conveyance unit 34. Ascending, the electronic component T after inspection is taken out from the inspection socket 33. Then, the first transport unit 34 moves from the inspection socket 33 to the first shuttle 32, and the first shuttle 32 slides so that the first transport unit 34 is positioned directly above the recovery shuttle 32b. Then, when the lower end portion of the first transport unit 34 is lowered to release the electronic component T, the electronic component T after the inspection is transferred from the first transport unit 34 to the recovery shuttle 32b.

When the inspected electronic component T is transferred to the recovery shuttle 32b, the recovery-side movable guide 42 moves along the recovery-side fixed guide 41 to the first shuttle 32. Further, when the recovery-side movable guide 42 moves to the first shuttle 32, the recovery hand unit 43 moves to the first shuttle 32, and the first shuttle 32 is also located at the recovery shuttle 32b with the recovery hand unit 43. It Sliding in the way above. Then, the electronic component T that has been transferred to the recovery shuttle 32b is held by the recovery hand unit 43.

When the electronic component T after inspection is held in the recovery hand unit 43, the recovery-side movable guide 42 is moved from the first shuttle 32 to the collection conveyors C3 and C4. Then, the recovery hand unit 43 moves to the front side of the collection conveyor trays C3a and C4a, and the electronic parts T after inspection are transferred to the collection conveyor tray C3a in a state classified for each inspection result. , C4a.

Further, similarly to the above-described supply robot 20 and the first shuttle 32, the electronic component T before inspection is also transferred between the supply robot 20 and the second shuttle 37. Further, similarly to the first shuttle 32 and the first transport unit 34, the electronic component T before the inspection and the electronic component T after the inspection are transferred between the second shuttle 37 and the second transport unit 38. Further, similarly to the first shuttle 32 and the recovery robot 40, the electronic component T after inspection is transferred between the second shuttle 37 and the recovery robot 40.

[Detailed composition of the processor]

Next, the configuration of the first transport unit 34 and the second transport unit 38 included in the handler 10 will be described in detail with reference to FIG. 2 . In addition, the first transport unit 34 and the second transport unit 38 are different from each other in the connection position with the transport guide 31 or the shuttle target, but the configuration for pressing the electronic component T is the same. The first transport unit 34 will be described, and the description of the second transport unit 38 will be omitted. In addition, FIG. 2 is an end view which shows the structure of the surroundings of the 1st conveyance unit 34 from the conveyor side, and shows the state in which the 1st conveyance unit 34 was arrange|positioned on the right side of the inspection-s

The first transport unit 34 for transporting the electronic component T before the inspection is connected to the transport guide 31. The horizontal moving arm 51 constituting the first conveying unit 34 is coupled so as to be reciprocable along the conveying guide 31. At the lower end of the horizontal moving arm 51, the vertical moving arm 52 is coupled so as to be movable up and down with respect to the horizontal moving arm 51. The vertical moving arm 52 is rotated by the pressing motor 51M mounted in the horizontal moving arm 51 with respect to the horizontal shift The boom 51 rises and falls. Further, at the lower end portion of the vertical movement arm 52, a pressure receiving piece 52a as a protruding portion protruding in the X direction is fixedly provided over the entire width of the Y direction, and the lower end portion of the vertical movement arm 52 is mounted toward the lower end portion. A pressing cylinder 53 that is actuated by air pressure is connected to the surface 11a. Here, the pressing cylinder 53 constitutes a first pressing portion, and the pressing motor 51M, the vertical moving arm 52, and the pressure receiving piece 52a constitute a second pressing portion. Further, the first pressing portion and the second pressing portion constitute a pressing portion.

A compressed air supply unit (not shown) is connected to the pressing cylinder 53. The compressed air supply unit includes, for example, a gas supply system included in a facility in which the component inspection device is installed, and a valve that controls supply of compressed air to the gas supply system. The gas supply system supplies a compressed air having a relative pressure of, for example, 0.5 MPa when the atmospheric pressure is used as a reference pressure. Further, the pressing cylinder 53 is extended in the Z direction by supplying compressed air from the compressed air supply unit, and is contracted in the Z direction by discharging the supplied compressed air.

At the lower end portion of the pressing cylinder 53, a plurality of adsorption portions 54 which are end effectors capable of adsorbing the electronic component T by vacuum suction, for example, are connected. The adsorption unit 54 includes, for example, a nozzle for adsorption, a vacuum pump connected to the nozzle, and the like.

The pressure receiving arm mechanisms 35 and 36 that face each other are disposed on both sides of the inspection socket 33 in the X direction on the mounting surface 11a so as to sandwich the inspection socket 33. The pressure receiving arm mechanisms 35 and 36 include support bodies 35a and 36a fixed to the mounting surface 11a, and pressure receiving arms 35b and 36b for reciprocating in the X direction on the upper surfaces of the supporting bodies 35a and 36a. The way to connect. The pressure receiving arms 35b and 36b are engaging portions that are engaged with the pressure receiving piece 52a, which is one of the pressing portions.

An arm cylinder connected to a compressed air supply unit (not shown) is connected to the pressure receiving arms 35b and 36b. The compressed air supply unit has the same configuration as the compressed air supply unit connected to the pressing cylinder 53, for example. Further, the first transport unit 34 is disposed directly above the inspection socket 33, and when compressed air is supplied to the arm cylinders of the pressure receiving arms 35b and 36b, the pressure receiving arms 35b and 36b approach each other in the X direction. The pressure receiving arms 35b, 35b are displaced until they are engageable under pressure The engagement position of the piece 52a. Further, when the compressed air in the arm cylinder is discharged from this state, the pressure receiving arms 35b and 36b are separated from each other in the X direction, and the pressure receiving arms 35b and 36b are displaced to be separated from the pressed piece 52a. position. In this manner, by the movable structure of the pressure receiving arms 35b and 36b, the pressure receiving arms 35b and 36b can be engaged with the pressure receiving piece 52a or the engagement can be released.

[Electrical composition of the processor]

The electrical configuration of the above-described handler 10 will be described with reference to Fig. 3 . The control device 60 included in the processor 10 includes a central processing unit (CPU, Central Processing Unit), non-volatile memory (ROM, Read Only Memory), and volatile memory. The microcomputer (RAM, Random Access Memory, random access memory) is mainly composed of a microcomputer. The control device 60 performs various controls related to the operation of the processor 10 based on various data and programs stored in the ROM and the RAM.

A conveyor drive unit 61 that rotationally drives the conveyor motor MC is connected to the control device 60. An encoder EMC that detects the rotational position of the conveyor motor MC is connected to the conveyor drive unit 61. The conveyor drive unit 61 generates a drive current of the conveyor motor MC based on the position command input from the control unit 60 and the rotational position of the conveyor motor MC input from the encoder EMC, and outputs the drive current to the conveyor motor MC. The conveyor motor MC drives the conveyors C1 to C4 by performing rotation corresponding to the above-described drive current. Further, the conveyor drive unit 61 and the conveyor motor MC are provided for each of the conveyors C1 to C4, and the encoder EMC is provided for each conveyor motor MC.

A movable guide driving portion 62 that rotationally drives the guide motor MX is connected to the control device 60. An encoder EMX that detects the rotational position of the guide motor MX is connected to the movable guide drive unit 62. The movable guide drive unit 62 generates a drive current of the guide motor MX based on the position command input from the control device 60 and the rotational position input from the encoder EMX, and outputs the drive current to the guide motor MX. Guide motor MX by performing and inputting The drive currents are rotated correspondingly to move the movable guides 22, 42 back and forth along the fixed guides 21, 41. Further, the movable guide driving unit 62 and the guide motor MX are provided for each of the supply-side movable guide 22 and the recovery-side movable guide 42, and the encoder EMX is provided for each of the guide motors MX. .

A shuttle drive unit 63 for rotationally driving the shuttle motor MS is connected to the control unit 60. An encoder EMS that detects the rotational position of the shuttle motor MS is connected to the shuttle drive unit 63. The shuttle drive unit 63 generates a drive current of the shuttle motor MS based on the position command input from the control unit 60 and the rotational position input from the encoder EMS, and outputs the drive current to the shuttle motor MS. The shuttle motor MS slides the shuttles 32, 37 along the guides 32c, 37c by performing rotation corresponding to the input drive current. Further, the shuttle drive unit 63 and the shuttle motor MS are provided for each of the first shuttle 32 and the second shuttle 37, and the encoder EMS is provided for each shuttle motor MS.

A hand unit drive unit 64 including a hand motor drive unit 64a and a suction valve drive unit 64b is connected to the control device 60. The encoder motor EMZ that detects the rotational position of the hand motor MZ is connected to the hand motor driving unit 64a. The hand motor drive unit 64a generates a drive current of the hand motor MZ based on the position command input from the control unit 60 and the rotational position input from the encoder EMZ, and outputs the drive current to the hand motor MZ. The hand motor MZ raises and lowers the hand units 23 and 43 by performing rotation corresponding to the input drive current.

A suction sensor ESV1 that detects an opening amount of the suction valve SV1 provided at the front end of the hand units 23, 43 is connected to the suction valve driving portion 64b. The suction valve drive unit 64b generates a drive signal of the suction valve SV1 based on the valve stroke command input from the control device 60 and the opening amount input from the suction sensor ESV1, and outputs the drive signal to the suction valve SV] . The suction valve SV1 suctions the electronic component T by a suction force corresponding to the opening amount by performing opening and closing corresponding to the input drive signal. Furthermore, the hand unit driving unit 64, the hand motor MZ, and the suction valve SV1 are opposite to the supply hand unit 23 and the recycling hand. Each of the units 43 is provided, and the encoder EMZ and the suction sensor ESV1 are provided for each of the hand motor MZ and the suction valve SV1.

The control device 60 is connected to a transport motor drive unit 65a, a push motor drive unit 65b that constitutes a motor control unit, a push cylinder drive unit 65c that constitutes a cylinder control unit, and a transport unit drive unit 65 that forms a suction valve drive unit 65d.

An encoder EMY that detects the rotational position of the transport motor MY is connected to the transport motor drive unit 65a. The conveyance motor drive unit 65a generates a drive current of the transport motor MY based on the position command input from the control device 60 and the rotational position input from the encoder EMY, and outputs the drive current to the transport motor MY. The conveyance motor MY reciprocates the conveyance units 34 and 38 along the conveyance guide 31 by performing rotation corresponding to the input drive current. Further, the transport motor drive unit 65a is provided for each of the first transport unit 34 and the second transport unit 38, and the encoder EMY is also associated with each of the first transport unit 34 and the second transport unit 38. And set.

An encoder E51M that detects the rotational position of the pressing motor 51M is connected to the pressing motor driving unit 65b. The pressing motor driving unit 65b generates a driving current for pressing the motor 51M based on the position command input from the control device 60 and the rotational position input from the encoder E51M, and outputs the driving current to the pressing motor 51M. The pressing motor 51M raises and lowers the vertical moving arm 52 by performing rotation corresponding to the input driving current.

Further, a current measuring unit I51M that measures the actual value of the driving current in the pressing motor 51M is connected to the pressing motor driving unit 65b. The pressing motor driving unit 65b generates a driving current of the pressing motor 51M based on the torque command input from the control device 60 and the measured value input from the current measuring unit I51M, and outputs the driving current to the pressing motor 51M. The pressing motor 51M raises and lowers the vertical moving arm 52 by performing rotation corresponding to the input driving current.

Incidentally, the control device 60 selects the position control mode and the torque control mode as a method of driving control of the pressing motor 51M. Among them, the so-called position control mode refers to the link The method of controlling the driving of the pressing motor 51M based on the position command is such that the suction portion 54 at the end of the conveying units 34 and 38 is at a specific position. On the other hand, the torque control mode is a method of controlling the driving of the pressing motor 51M based on the torque command so that the torque generated by the rotation of the pressing motor 51M is maintained at a specific magnitude. Further, the pressing motor driving unit 65b is provided for each of the first conveying unit 34 and the second conveying unit 38, and the current measuring unit I51M is also provided for each of the first conveying unit 34 and the second conveying unit 38. Set up.

The pressing cylinder drive unit 65c generates a drive signal for supplying the actuation pressure to the pressing cylinder 53 based on the drive command input from the control device 60, and outputs the drive signals to the pressing cylinder 53. Further, the pressing cylinder 53 is extended in accordance with a driving signal for extending it, thereby applying a pressing force to the electronic component T, and contracting according to a driving signal for contracting thereof, thereby releasing the pressing of the electronic component T. pressure. Further, the pressing cylinder drive unit 65c is provided for each of the first transport unit 34 and the second transport unit 38.

A suction sensor ESV2 that detects an opening amount of the suction valve SV2 is connected to the suction valve driving portion 65d. The suction valve drive unit 65d generates a drive signal of the suction valve SV2 based on the valve stroke command input from the control device 60 and the opening amount input from the suction sensor ESV2, and outputs the drive signal to the suction valve SV2. Further, the suction valve SV2 suctions the electronic component T by a suction force corresponding to the above-described opening amount. Further, the suction valve drive unit 65d is provided for each of the first transfer unit 34 and the second transfer unit 38. Further, the suction sensor ESV2 is provided for each of the suction valves SV2.

A pressure receiving arm drive unit 66 that displaces the pressure receiving arms 35b and 36b is connected to the control device 60. The pressure receiving arm drive unit 66 generates a drive signal for supplying the actuation pressure to the arm cylinders 35s and 36s of the pressure receiving arms 35b and 36b based on the drive command input from the control device 60, and outputs the drive signal to the arm cylinder 35s. , 36s. Further, the arm cylinders 35s and 36s are extended in accordance with a drive signal for displacing the pressure receiving arms 35b and 36b, thereby displacing the pressure receiving arms 35b and 36b to the engagement position. On the other hand, the arm cylinders 35s, 36s are driven by a drive letter for contracting The contraction is performed, whereby the pressure receiving arms 35b, 36b are displaced to the above-mentioned leaving position.

[The role of the processor]

According to the above configuration, the driving state of each of the motors and the driving modes of the various cylinders when the electronic component T held by the transport unit is inserted into the inspection socket 33 will be described with reference to FIGS. 4 to 12 . In addition, the embedding pattern by the first transport unit 34 and the embedding pattern by the second transport unit 38 are different from each other in the direction in which the supply source of the electronic component T or the electronic component T is different from each other. In the same manner, the above-described aspects of the first transport unit 34 will be exemplified below.

In addition, in FIG. 4, the position command of the conveyance motor MY and the operation of the first conveyance unit 34 are conveniently shown, and the position command or the torque command for the pressing motor 51M and the movement of the vertical movement arm 52 are conveniently displayed. And control mode. Further, in FIGS. 5 to 12, the driving state of the first transport unit 34 and the driving state of the pressure receiving arm mechanisms 35 and 36 at the respective timings T0 to T10 shown in FIG. 4 are attached to the plane of the first transport unit 35 and 36. The structure is shown in a state in which the end face structure corresponds to each other.

[Transport unit setting period: T0-T1]

First, as shown in FIG. 4, the control device 60 outputs a position command to the transport motor drive unit 65a. At this time, the position command output from the control device 60 is for moving the suction unit 54 of the first transport unit 34 from directly above the supply shuttle 32a to directly above the inspection socket 33. Then, the transport motor drive unit 65a generates a drive current based on the rotational position of the transport motor MY and the position command, and outputs the drive current to the transport motor MY. As a result, the conveyance motor MY starts to rotate in a specific direction from the time series T0, and the first conveyance unit 34 moves to the inspection socket 33 until the suction unit 54 of the first conveyance unit 34 reaches the inspection while holding the electronic component T. The socket 33 is directly above (see Fig. 5(a)).

Further, during the installation of the transport unit, the control device 60 outputs a position command to the push motor drive unit 65b in order to maintain the lower end portion of the vertical movement arm 52 at the highest position. Then, the pressing motor driving portion 65b is in accordance with the rotational position of the pressing motor 51M and the above position. The drive current is commanded and output to the push motor 51M. Thereby, the pressing motor driving unit 65b suppresses the rotation of the pressing motor 51M.

Further, in the period in which the transport unit is installed, the control device 60 outputs a press release command to the push cylinder drive unit 65c so as not to supply the actuation pressure to the press cylinder 53. Thereby, the pressing cylinder drive unit 65c generates a drive signal based on the press release command, thereby maintaining the amount of elongation of the pressing cylinder 53 to a minimum by not supplying the operating pressure to the pressing cylinder 53 (see FIG. 5(b)).

Then, as described above, the lower end portion of the vertical moving arm 52 is maintained at the highest position, and the amount of elongation of the pressing cylinder 53 is maintained at the minimum value, whereby the adsorption portion 54 is disposed at the highest position thereof. The highest position of the adsorption unit 54 is a position at which the adsorption unit 54 does not collide with other members when the horizontal movement arm 51 moves along the conveyance guide 31.

[Descent, pressing period: T1-T3]

When the adsorption unit 54 reaches the inspection socket 33, the control unit 60 presses the motor drive unit at the timing T1, as shown in FIG. 4, in order to accommodate the electronic component T adsorbed to the adsorption unit 54 in the inspection socket 33. 65b output position command. At this time, the control device 60 outputs the position command in the above position control mode. Then, the pressing motor driving unit 65b generates a driving current based on the rotational position of the pressing motor 51M and the position command, and outputs the driving current to the pressing motor 51M. Thereby, the pressing motor 51M starts to rotate in a specific direction from the timing T1, and the vertical moving arm 52 descends until the electronic component T is housed in the inspection socket 33.

Then, when the electronic component T is housed in the inspection socket 33 at the timing T2, the position control of the pressing motor 51M is continued, and the adsorption portion 54 is further lowered such that the position of the adsorption portion 54 becomes a specific position. Thereby, the pressing force from the pressing motor 51M is applied to the electronic component T (see FIG. 6(a) and (b)).

In the above-described falling and pressing period, the control device 60 outputs a position command to the transport motor drive unit 65a in order to maintain the position in the Y direction of the first transport unit 34. Then, the transport motor drive unit 65a is in accordance with the rotational position of the transport motor MY and the position command. A drive current is generated, and the drive current is output to the transfer motor MY to suppress the rotation of the transfer motor MY.

[Loading arm period: T3-T4]

When the electronic component T is positioned at the inspection socket 33, the pressure receiving arms 35b, 36b of the pressure receiving arm mechanisms 35, 36 are displaced to the above-mentioned engagement positions, and the control device 60 is shown in Fig. 4 at timing T3. The pressure receiving arm drive unit 66 outputs an engagement command.

Then, the pressure receiving arm drive unit 66 generates a drive signal based on the engagement command, and outputs the drive signal to the arm cylinders 35s and 36s. Thereby, the arm cylinders 35s and 36s are extended, and the pressure receiving arms 35b and 36b are displaced to the engagement position (refer FIG. 7 (a) (b)).

In the drive arm driving period, the control device 60 outputs a position command to the transport motor drive unit 65a in order to maintain the position in the Y direction of the first transport unit 34. Then, the conveyance motor drive unit 65a generates a drive current based on the rotational position of the transport motor MY and the position command, and outputs the drive current to the transport motor MY to suppress the rotation of the transport motor MY.

Further, during the driving of the pressure receiving arm, in order to apply the pressing force Fbase from the pressing motor 51M to the electronic component T, the control device 60 outputs a position command to the pressing motor driving unit 65b. Then, the pressing motor driving unit 65b generates a driving current based on the rotational position of the pressing motor 51M and the position command, and outputs the driving current to the pressing motor 51M to lower the position of the adsorption unit 54 to a specific position. In addition, the above-mentioned pressing force Fbase is a preset by a test or the like, and the pressing force Fbase is sufficient for positioning the electronic component T in the inspection recess 33a, and is used for the electronic component T or the inspection. The socket 33 is not deformed by the pressing force Fbase.

[Torque Control Period: T4-T5]

When the pressure receiving arms 35b and 35b are displaced to the engagement position, the control device 60 outputs a torque command in the torque control mode to the pressing motor driving unit 65b at timing T4 as shown in FIG. At this time, in order to apply a pressing force Fcon greater than the above-described pressing force Fbase to the electronic component T, Control device 60 outputs a torque command. Then, the pressing motor driving unit 65b generates a driving current based on the measured value of the current measuring unit I51M and the torque command, and outputs the driving current to the pressing motor 51M.

As a result, the pressing motor 51M continues to rotate in a specific direction from the timing T4, and the pressing motor 51M outputs a specific torque and applies the pressing force Fcon to the electronic component T to position the electronic component T with respect to the inspection socket 33 ( Refer to Figure 8(a)).

In the torque control period, the control device 60 outputs a position command to the transport motor drive unit 65a in order to maintain the position in the Y direction of the first transport unit 34. Further, in order to maintain the elongation of the arm cylinders 35s and 36s, the control device 60 outputs an engagement command to the pressure receiving arm drive unit 66.

Then, the conveyance motor drive unit 65a suppresses the rotation of the conveyance motor MY, and the pressure receiving arm drive unit 66 maintains the extension of the arm cylinders 35s and 36s. Then, the pressing motor driving portion 65b continues to press the electronic component T with the pressing force Fcon (see FIG. 8(b)).

[Cylinder pressing period: T5-T6]

When the electronic component T is pressed by the pressing force Fcon, the control device 60 outputs a pressing command to the pressing cylinder driving unit 65c at the timing T5 as shown in FIG. 4 in order to supply the operating pressure to the pressing cylinder 53. Then, the pressing cylinder drive unit 65c generates a drive signal based on the pressing command, and outputs the drive signal to the compressed air supply system. Thereby, the pressing cylinder drive unit 65c supplies the actuation pressure to the pressing cylinder 53, and further applies a pressing force Fhigh to the electronic component T.

The pressing force Fhigh means a force greater than the pressing force Fbase, and the electronic component T or the inspection socket 33 is not deformed by the pressing of the pressing force Fhigh. By applying the pressing force Fhigh as described above to the electronic component T, the electrical connection between the male terminal of the electronic component T and the female terminal of the inspection socket 33 can be reliably performed.

Then, when the operating pressure is supplied to the pressing cylinder 53, the control device 60 outputs an inspection start signal for starting the inspection to the inspection unit.

At this time, a resistance is applied to the vertical moving arm 52 on the support side of the first transport unit 34. The reaction of the pressure Fhigh. As a result, the vertically movable arm 52 is retracted to the side of the conveyance guide 31, and the pressure receiving piece 52a is engaged with the pressure receiving arms 35b and 36b (see FIGS. 9(a) and 9(b)).

Therefore, one of the reaction forces of the pressing force of the pressing cylinder 53 acts on the first conveying unit 34, and the remaining portion acts on the base 11 via the pressure receiving arm mechanisms 35 and 36. That is, although the vertical moving arm 52 is pushed back by the extension of the pressing cylinder 53, the degree of retraction of the vertical moving arm 52 is suppressed notably because the extension of the pressing cylinder 53 is suppressed by the pressure receiving arm mechanisms 35, 36. . Therefore, although the pressing force of the pressing force Fcon larger than the vertical moving arm 52 is applied to the electronic component T, the reaction force against the pressing force of the electronic component T is not applied to the first conveying unit 34, and one part of the reaction force is directed to The base 11 is dispersed. Thereby, although the electronic component T is pressed with a desired pressing force, it is sufficient that the rigidity required for the first conveying unit 34 is one of the reaction forces capable of withstanding the pressing force. Therefore, it is possible to suppress an increase in size or weight of the first transport unit 34.

Incidentally, in the case where the amount of elongation of the pressing cylinder 53 is not forcibly defined by the pressure receiving arm mechanisms 35 and 36, the amount of elongation of the pressing cylinder 53 also changes depending on the driving state of the pressing motor 51M. Further, although the driving of the pressing motor 51M is in the torque control mode, the electronic component is compared with the state in which the pressing force is fixed under the mechanical engagement of the pressure receiving piece 52a and the pressure receiving arms 35b and 36b. The pressing pressure of T will also change. In this regard, in the above-described manner, since the amount of elongation of the pressing cylinder 53 is fixed to a specific value by the engagement of the pressure receiving piece 52a and the pressure receiving arms 35b and 36b, the pressing force for the electronic component T is also Become stable.

In the same manner as the previous torque control period, the control device 60 outputs a position command to the transport motor drive unit 65a in order to maintain the position of the first transport unit 34 in the Y direction. Further, in order to maintain the elongation of the arm cylinders 35s and 36s, the control device 60 outputs an engagement command to the pressure receiving arm drive unit 66. Further, as described above, the pressing device 51 can press the pressing cylinder 53 with the pressing force Fcon, and the control device 60 outputs a torque command to the pressing motor driving unit 65b.

Then, the transport motor drive unit 65a suppresses the rotation of the transport motor MY, and the pressure arm The drive unit 66 maintains the elongation of the arm cylinders 35s and 36s. Then, the pressing motor driving portion 65b continues to press the pressing cylinder 53 with the pressing force Fcon.

Incidentally, the pressing of the electronic component T using the pressing motor 51M can be performed by at least one of the position control and the torque control of the pressing motor 51M. Here, the larger the pressing force of the pressing cylinder 53, the larger the reaction force with respect to the supporting side of the pressing cylinder 53, that is, the load on the pressing motor 51M. At this time, when the pressing motor 51M is driven by the above-described position control mode, as long as the output of the pressing motor 51M does not exceed the reaction force, the rotational position of the pressing motor 51M does not reach the target rotational position. Further, the drive current of the pressing motor 51M continues to increase, and an excessive load is applied to the inside of the pressing motor 51M.

At this point, during the cylinder pressing period, the pressing motor 51M is driven by the torque control mode in a state where the pressing force of the pressing cylinder 53 is applied to the electronic component T. Therefore, even if the vertical moving arm 52 is retracted due to the extension of the pressing cylinder 53, the pressing motor 51M outputs a specific torque, and thus the excessive pressing force is not applied to the pressing motor 51M.

[Cylinder press release period: T6-T7]

When the inspection of the electronic component T in the inspection unit is completed, the inspection end signal for starting the recovery of the electronic component T is output from the inspection unit to the control device 60. Then, in order to contract the pressing cylinder 53, the control device 60 outputs a pressing release command to the pressing cylinder driving unit 65c at timing T6 as shown in Fig. 4 . Thereby, the pressing cylinder drive unit 65c cancels the pressing force due to the elongation of the pressing cylinder 53 by generating a driving signal in accordance with the pressing release command. As a result, the reaction force with respect to the first transport unit 34 is reduced, so that the engagement between the pressed piece 52a of the vertical moving arm 52 and the pressure receiving arms 35b and 36b is also released (see FIG. 10(a)(b)). .

In the cylinder press release period, the control device 60 outputs a position command to the transport motor drive unit 65a in order to maintain the position in the Y direction of the first transport unit 34. Further, in order to maintain the elongation of the arm cylinders 35s and 36s, the control device 60 outputs an engagement command to the pressure receiving arm drive unit 66. Further, as described above, in order to press the motor 51M, the electronic component T can be pressed by the pressing force Fcon, and the control device 60 outputs a torque command to the pressing motor driving unit 65b.

Then, the conveyance motor drive unit 65a suppresses the rotation of the conveyance motor MY, and the pressure receiving arm drive unit 66 maintains the extension of the arm cylinders 35s and 36s. Then, the pressing motor driving portion 65b continues to press the electronic component T with the pressing force Fcon.

[Location Control Period: T7-T8]

When the pressing of the pressing cylinder 53 is released, the control device 60 outputs a position command to the pressing motor driving unit 65b at timing T7 as shown in Fig. 4 . Then, the pressing motor driving unit 65b generates a driving current based on the rotational position of the pressing motor 51M and the position command, and outputs the driving current to the pressing motor 51M. Thereby, the pressing motor 51M starts to press the electronic component T with the pressing force Fbase by starting the rotation in a specific direction (see FIG. 11(a) and (b)).

In the position control period, the control device 60 outputs a position command to the transport motor drive unit 65a in order to maintain the position in the Y direction of the first transport unit 34. Further, in order to maintain the elongation of the arm cylinders 35s and 36s, the control device 60 outputs an engagement command to the pressure receiving arm drive unit 66.

Then, the conveyance motor drive unit 65a suppresses the rotation of the conveyance motor MY, and the pressure receiving arm drive unit 66 maintains the extension of the arm cylinders 35s and 36s.

[Responsive arm release period: T8-T9]

When the pressing motor 51M is driven by the position control, in order to return the pressure receiving arms 35b and 36b to the separated position, the control device 60 outputs the engagement release to the pressure receiving arm driving unit 66 at the timing T8 as shown in FIG. instruction. Then, the pressure receiving arm drive unit 66 generates and outputs a drive signal based on the engagement release command, and the arm cylinders 35s and 36s contract, and the pressure receiving arms 35b and 36b return to the separated position (see FIGS. 12(a) and (b)).

In addition, during the release of the pressure receiving arm mechanism, the control device 60 outputs a position command to the transport motor drive unit 65a in order to maintain the position in the Y direction of the first transport unit 34. Further, in order to press the electronic component T with the pressing force Fbase, the control device 60 outputs a position command to the pressing motor driving unit 65b.

Then, the conveyance motor drive unit 65a suppresses the rotation of the conveyance motor MY, and the pressing motor drive unit 65b suppresses the rotation of the pressing motor 51M.

[Rise period: T9-T10]

When the pressure receiving arms 35b and 36b are returned to the separated position, the control device 60 outputs the lower end portion of the vertical moving arm 52 to the highest position, and the control device 60 outputs the pressing motor driving portion 65b at timing T9 as shown in FIG. Position command. Then, the pressing motor driving unit 65b generates a driving current based on the rotational position of the pressing motor 51M and the position command, and outputs the driving current to the pressing motor 51M. Thereby, the pressing motor 51M rotates in the opposite direction to the time T9 before the vertical moving arm 52 returns to the highest position.

Then, when the lower end portion of the vertical moving arm 52 reaches the highest position, in order to arrange the adsorption portion 54 of the first conveying unit 34 directly above the collecting shuttle 32b, the control device 60 is as shown in FIG. The position command is output to the transport motor drive unit 65a. Then, the transport motor drive unit 65a generates a drive current based on the rotational position of the transport motor MY and the position command, and outputs the drive current to the transport motor MY. As a result, the transport motor MY starts to rotate in a specific direction from the timing T10, and the first transport unit 34 moves back toward the first shuttle until the electronic component T adsorbed to the adsorption unit 54 reaches the top of the recovery shuttle 32b. .

As described above, according to the above embodiment, the effects listed below can be obtained.

(1) One of the reaction forces of the pressing force of the pressing cylinder 53 acts on the conveying units 34, 38 or the conveying guide 31, but the remaining portion acts on the base 11 via the pressure receiving arm mechanisms 35, 36. That is, not all of the reaction force of the pressing force acts on the conveying units 34, 38, and a part of the reaction force is dispersed to the base 11. Thereby, although the electronic component T is pressed with a desired pressing force, the rigidity required for the conveying units 34 and 38 may be one of the reaction forces capable of withstanding the pressing force. Therefore, it is possible to suppress an increase in size or weight of the transport units 34 and 38.

(2) pressing the vertical moving arm 52 of the electronic component T and the pressing cylinder 53, the pressure arm mechanism 35, 36 are only engaged with the pressed piece 52a provided on the vertical moving arm 52. Therefore, it is possible to suppress the vertical movement arm 52 from being retracted by the pressing force of the pressing cylinder 53. Further, it is also possible to suppress a change in the pressing force applied to the electronic component T.

(3) Since the conveying units 34 and 38 include the pressing cylinder 53 that presses the electronic component T with a relatively large pressing force, the conveying unit 34 can be made larger than the configuration in which a relatively large pressing force is applied by the driving of the motor. The configuration of 38 is simple, and the configuration of the handler 10 can be simplified. Moreover, it is easier to increase the pressing force applied to the electronic component T than the configuration including the motor instead of the pressing cylinder 53.

(4) The pressing motor 51M is driven by the torque control in a state where the pressing force of the pressing cylinder 53 is applied to the electronic component T. Therefore, even if the vertical moving arm 52 is retracted by the extension of the pressing cylinder 53, the pressing motor 51M outputs a specific torque, and thus the excessive load is not applied to the motor.

(5) When the pressing force is applied to the electronic component T by the pressing cylinder 53, the pressing motor 51M is driven by the torque control. Therefore, an excessive load is not applied to the pressing motor 51M, and the pressing force applied to the electronic component T also becomes stable.

(6) The reaction force from the pressing force of the pressing cylinder 53 acts on each of the pair of pressure receiving arms 35b, 36b facing each other. Therefore, compared with the aspect in which the reaction force against the pressing force from the pressing cylinder 53 acts on one portion of the mounting surface 11a, the range in which the reaction force is dispersed can be expanded, and the pressure receiving arm mechanism 35, 36 or the base can be suppressed. 11 required rigidity.

(7) If the above-described aspect of the plurality of electronic components T is pressed at the same time, the pressing force applied to the entire inspection socket 33 is automatically increased, and accordingly, the reaction force of the pressing force is automatically increased. Therefore, the effect of suppressing the enlargement or weight of the conveyance units 34 and 38 becomes more remarkable.

Further, the above embodiment can be implemented by appropriately changing the following aspects.

● In addition to the electronic component T described above, the object to be transported may be various components such as optical components or precision machine components. In short, it may be transported and pressed. Even for the above The object can also obtain the effects obtained according to the above (1) to (7).

The aspect in which the holding unit holds the object to be transported is not limited to the case of adsorbing the object to be transported as described above, and may be, for example, a state in which the object to be transported is held, and in the end, it is possible to hold the object to be transported on the various trays. Further, the inspection socket 33 can be pressed by the inspection target 33 to hold the object to be conveyed. Even in the case of maintaining as described above, the effects obtained in accordance with the above (1) to (7) can be obtained.

The processor 10 may not be configured to simultaneously transport a plurality of electronic components T at the same time. In short, it is sufficient to have at least a state in which a plurality of electronic components T are simultaneously conveyed and a state in which a plurality of electronic components T are simultaneously pressed. According to the above configuration, since the pressing force applied to the entire inspection socket 33 is increased, the reaction force of the pressing force is also increased. Therefore, the effect of suppressing the enlargement or weight of the conveyance units 34 and 38 becomes more remarkable.

● The number of transport objects to be transported by one transport unit may be one. Even in the configuration as described above, the effects obtained in accordance with the above (1) to (6) can be obtained.

- It can also be configured such that the pressure receiving piece 52a is engaged with one of the pressure receiving arm mechanisms, and even if it is configured as described above, the effects obtained by the above (1) to (5) and (7) can be obtained, and The number of the pressure-receiving arm mechanisms is small, and accordingly, the configuration of the handler 10 can be simplified.

In the case where the pressing force is applied to the electronic component T by the pressing cylinder 53 as the first pressing portion, the pressing motor constituting the second pressing portion is driven in the torque control mode simultaneously with the application of the pressing force. 51M. Even in the configuration described above, the effects obtained by the above (1) to (4), (6), and (7) can be obtained, and the timing of driving the pressing cylinder 53 can be made by using a common control signal. The moment control mode drives the timing synchronization of the pressing motor 51M. Therefore, the matching between the timing of driving the pressing cylinder 53 and the timing of driving the pressing motor 51M in the torque control mode is also facilitated.

The state in which the pressing motor 51M is driven by the position control when the pressing force is applied to the electronic component T by the pressing cylinder 53 is also possible. Even if it is configured as described above, it can be obtained on the basis of The effects obtained by (1) to (3), (5) to (7) are described, and the current measuring unit I51M for measuring the driving current of the pressing motor 51M may be omitted.

The pressing cylinder is not limited to a configuration in which compressed air of a specific pressure is supplied through a valve, and may be configured to supply air compressed to a specific pressure by an electric regulator. Further, the pressing cylinder is not limited to a cylinder that is actuated by compressed air, and may be a cylinder that is actuated by hydraulic pressure.

The transport unit 34 and 38 may be configured to include a motor for pressing that is different from the push motor 51M in place of the push cylinder 53. Even in the above configuration, the above (1), (2), 6), (7) The effect obtained.

The configuration may be such that the transporting units 34 and 38 press the transport target only by the pressing cylinder 53. Even in the configuration as described above, the effects obtained by the above (1), (2), (6), and (7) can be obtained.

The configuration in which the transfer units 34 and 38 do not include the pressing cylinder 53 and the pressing of the transport target by the pressing motor 51M may be employed. Even in the configuration described above, the effects obtained by the above (1), (2), (6), and (7) can be obtained, and the configuration of the transport unit can be simplified.

The pressed piece 52a that is engaged with the pressure receiving arms 35b and 36b is not limited to the lower end of the vertical moving arm 52, and may be provided on the horizontal moving arm 51 side than the lower end of the vertical moving arm 52.

Further, the vertically movable arm and the pressing cylinder may be provided with a pressure receiving piece, and the pressure receiving arm mechanisms 35 and 36 are engaged with the pressure receiving pieces. Even in the configuration as described above, the effects obtained by the above (1), (3) to (7) can be obtained, and the pressing force of the pressing motor 51M and the pressing cylinder 53 can be made corresponding to the number of the pressed sheets. The reaction force is more reliably pressed by the pressure receiving arm mechanisms 35,36.

The pressing cylinder may include a cylinder body and a plunger connected to the adsorption portion, and the cylinder body may be provided with a pressure receiving piece. Even in the above configuration, the effects obtained by the above (1), (3) to (7) can be obtained.

The pressure receiving arms 35b and 36b may be driven by other mechanisms such as a mechanism driven by a motor other than the arm cylinders 35s and 36s.

The configuration may be such that the pressure receiving arms 35b and 36b are fixed to the support bodies 35a and 36a at the engagement positions thereof, and the pressure receiving pieces 52a are provided between the pressure receiving arms 35b and 36b and the inspection socket 33. The gap that moves in the Y direction. According to the configuration described above, the electronic component T is carried in and out of the inspection socket 33 below the fixed pressure receiving arms 35b and 36b, and is retracted by the reaction force of the pressing force. The piece 52a is engaged with the pressure receiving arms 35b and 36b. Further, since the mechanism required for the movable of the pressure receiving arms 35b and 36b can be omitted, the configuration of the pressure receiving arms 35b and 36b can be simplified.

The pressure receiving arms 35b and 36b and the pressure receiving piece 52a may be configured to operate as follows. In other words, the pressure receiving piece 52a moves from the Y direction in the gap between the pressure receiving arms 35b and 36b at the engagement position and the inspection socket 33. Then, after the pressed piece 52a is engaged with the pressure receiving arms 35b and 36b, the pressure receiving arms 35b and 36b are displaced to the separated position. Further, the pressed piece 52a moves in the Z direction.

According to the above operation, when the electronic component T is pressed by the first transport unit 34, the period in which the pressure receiving arms 35b and 36b located at the separation position are moved to the engagement position, that is, from the timing T3 to the timing T4, can be omitted. period. Further, the pressure receiving arms 35b and 36b that have been displaced to the leaving position may be displaced to the engaging position at any timing.

The pressure receiving arms 35b and 36b and the pressure receiving piece 52a may be configured to operate as follows. That is, between the pressure receiving arms 35b and 36b located at the separation position, the pressure receiving piece 52a moves from the Z direction, and then the pressure receiving arms 35b and 36b move to the engagement position. Then, after the pressure receiving piece 52a is engaged with the pressure receiving arms 35b and 36b, the pressure receiving piece 52a is moved in the Y direction from the gap between the pressure receiving arms 35b and 36b and the inspection socket 33, thereby releasing the pressure receiving arm. The engagement of 35b and 36b.

According to the above operation, when the electronic component T is pressed by the first transport unit 34, the period in which the pressure receiving arms 35b and 36b that have been displaced to the engagement position are moved to the separated position can be omitted. The period from the above timing T8 to the timing T9. Further, the pressure-receiving arms 35b and 36b that have been displaced to the engagement position may be displaced to the exit position at any timing after the release of the pressure receiving piece 52a.

● It may be configured such that one of the pressing portions is configured to be engaged with the engaging portion of the fixed pressure receiving portion, or one of the pressing portions may be movable to release the engagement with the engaging portion. Composition.

The pressure receiving portion can be realized by suppressing the friction generated by the contact with the pressing portion and suppressing the movement of the pressing portion to the opposite side of the pressing direction. Further, the contact portion between the pressure receiving portion and the pressing portion may be the lower end of the pressing portion. In this case, a concave portion may be provided in the pressing portion, and a convex portion may be provided in the pressure receiving portion or a convex portion may be provided in the pressing portion, and a concave portion may be provided in the pressure receiving portion. The movement of the pressing portion can be greatly suppressed by the friction generated between the concave portion and the convex portion. In short, the pressure receiving portion may be configured to prevent the pressing portion from being retracted by the reaction force generated when the object to be conveyed is pressed.

The pressing force of the pressing cylinder 53 is larger than the pressing force of the pressing motor 51M, but the pressing force of the pressing motor 51M may be larger than the pressing force of the pressing cylinder 53, or the pressing force of the pressing motor 51M and the pressing cylinder 53 may be employed. The composition of the pressing force is equal.

The treatment device 10 includes the pressure receiving arm mechanisms 35 and 36 that are subjected to the reaction force when the first transfer unit 34 inserts the electronic component T into the inspection socket 33. The present invention is not limited thereto, and the reaction device 10 may include a reaction when the first transport unit 34 presses the electronic component T by the supply shuttle 32a, the recovery shuttle 37b, or the conveyor trays C1a, C2a, C3a, C4a, and the like. Forced arm mechanism.

The pressing force of the pressing motor 51M may be larger than the pressing force of the pressing cylinder 53 or the pressing force of the pressing motor 51M may be equal to the pressing force of the pressing cylinder 53.

● the supply side movable guide 22 is relatively moved with respect to the fixed supply side fixed guide 21, and the recovery side movable guide 42 is relatively moved with respect to the fixed recovery side fixed guide 41, but may be provided with 2 Relatively movable relative to a fixed single fixed guide The composition of the movable guide. In this case, the fixed guide member is preferably formed in the cover member 12 so as to be parallel to one side of the upper surface of the base 11 extending in the X direction and formed over substantially the entire X direction of the base 11. Further, the two movable guides are preferably provided on the opposite side of the cover member 12 via the conveyance guide 31.

The number of the transport units included in the handler 10 is not limited to two, and may be one or three.

The electronic component T accommodated in the supply tray 32a is transported to the inspection socket 33 by the first transport unit 34, and the electronic component T accommodated in the inspection socket 33 is provided by the second transport unit. 38 pressed. In short, it is sufficient to transport the object to be transported and press the object to be transported.

The processor is not limited to the component inspection device for inspecting the transfer target, and may be a device for transporting and pressing the transport target.

11‧‧‧Abutment

11a‧‧‧Jacketing surface

31‧‧‧Transport guides

33‧‧‧Check socket

33a‧‧‧Checking pockets

34‧‧‧1st transport unit

35‧‧‧pressure arm mechanism

35a‧‧‧Support

35b‧‧‧pressure arm

36‧‧‧pressure arm mechanism

36a‧‧‧Support

36b‧‧‧pressure arm

51‧‧‧ horizontal moving arm

51M‧‧‧ Pressing motor

52‧‧‧Vertical moving arm

52a‧‧‧Subjected tablets

53‧‧‧Pressing cylinder

54‧‧‧Adsorption Department

T‧‧‧Electronic parts

X‧‧‧ direction

Y‧‧‧ direction

Z‧‧‧ direction

Claims (9)

A processor comprising: a base; a conveying unit that conveys a conveying target; and a pressure receiving unit that is provided by the base; and the conveying unit that presses the conveying target toward the base The pressing portion is configured to prevent the pressing portion from moving toward the opposite side of the pressing direction by contact with the pressing portion. The treatment unit of claim 1, wherein the pressing portion includes: a first pressing portion that presses the transfer target toward the base; and a second pressing portion that presses the first pressing portion toward the base; The portion of the pressure receiving portion that is in contact with the pressing portion is movable in a direction in contact with the protruding portion provided in the second pressing portion. The processor according to claim 2, wherein the portion of the pressure receiving portion that is in contact with the pressing portion is movable away from a protruding portion provided in the second pressing portion. The processor according to claim 3, wherein the first pressing portion is a pressing cylinder, the second pressing portion includes a motor that raises and lowers the pressing cylinder, and a pressing force of the first pressing portion is larger than a pressing of the second pressing portion pressure. The processor of claim 4 includes a motor control unit that controls driving of the motor, and the motor control unit drives the motor by torque control in a state where the pressing cylinder presses the transfer target. The processor of claim 4 or 5, comprising a motor control for controlling the driving of the motor The motor control unit drives the motor by torque control before the pressing cylinder presses the transfer target. The processor according to any one of claims 2 to 5, wherein the portion in contact with the pressing portion is a pair of movable arms facing each other; the pair of movable arms are displaced to a position in contact with the protruding portion, and From the position where the above-mentioned protrusions are separated. The processor according to any one of claims 1 to 5, wherein the conveying unit has a state in which a plurality of the objects to be conveyed are adsorbed, and the pressing unit has a state in which a plurality of the objects to be conveyed are pressed. A component inspection device comprising: a base; a conveying unit that conveys an electronic component; a pressure receiving portion provided by the base; and an inspection socket provided on the base; and the conveying unit is provided in the conveying unit The pressing portion that presses the electronic component toward the inspection socket of the base; and the pressure receiving portion prevents the pressing portion from moving to the opposite side of the pressing direction by contact with the pressing portion.