KR20130116178A - 보관고 - Google Patents

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Publication number
KR20130116178A
KR20130116178A KR1020130038081A KR20130038081A KR20130116178A KR 20130116178 A KR20130116178 A KR 20130116178A KR 1020130038081 A KR1020130038081 A KR 1020130038081A KR 20130038081 A KR20130038081 A KR 20130038081A KR 20130116178 A KR20130116178 A KR 20130116178A
Authority
KR
South Korea
Prior art keywords
storage
storage area
ffu
area
crane
Prior art date
Application number
KR1020130038081A
Other languages
English (en)
Korean (ko)
Inventor
야스히토 미츠도메
Original Assignee
무라다기카이가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 무라다기카이가부시끼가이샤 filed Critical 무라다기카이가부시끼가이샤
Publication of KR20130116178A publication Critical patent/KR20130116178A/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0407—Storage devices mechanical using stacker cranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66F—HOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD
    • B66F9/00—Devices for lifting or lowering bulky or heavy goods for loading or unloading purposes
    • B66F9/06—Devices for lifting or lowering bulky or heavy goods for loading or unloading purposes movable, with their loads, on wheels or the like, e.g. fork-lift trucks
    • B66F9/075—Constructional features or details
    • B66F9/12—Platforms; Forks; Other load supporting or gripping members
    • B66F9/14—Platforms; Forks; Other load supporting or gripping members laterally movable, e.g. swingable, for slewing or transverse movements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transportation (AREA)
  • Structural Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Geology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Civil Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020130038081A 2012-04-12 2013-04-08 보관고 KR20130116178A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2012-091019 2012-04-12
JP2012091019A JP5772693B2 (ja) 2012-04-12 2012-04-12 保管庫

Publications (1)

Publication Number Publication Date
KR20130116178A true KR20130116178A (ko) 2013-10-23

Family

ID=49459515

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020130038081A KR20130116178A (ko) 2012-04-12 2013-04-08 보관고

Country Status (4)

Country Link
JP (1) JP5772693B2 (ja)
KR (1) KR20130116178A (ja)
CN (1) CN103373576A (ja)
TW (1) TW201344122A (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106121291B (zh) * 2016-06-27 2018-11-02 江苏帕珐尼洁净科技有限公司 一种具有内部循环风扇的超净间
CN106121292B (zh) * 2016-06-28 2018-11-27 江苏中瀚通讯技术有限公司 一种风扇排布整齐的超净间
CN106088673B (zh) * 2016-06-28 2018-11-20 江苏中瀚通讯技术有限公司 一种安装有回流风扇的超净间
JP6631446B2 (ja) * 2016-09-09 2020-01-15 株式会社ダイフク 物品収納設備
CN114084565B (zh) * 2021-11-30 2022-08-19 重庆机电智能制造有限公司 一种具备惰性气体保护的自动存取立体库

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6044404A (ja) * 1983-08-17 1985-03-09 Daifuku Co Ltd クリ−ンル−ム内の荷保管設備
JP4844399B2 (ja) * 2007-01-09 2011-12-28 株式会社豊田自動織機 自動倉庫
JP2009126631A (ja) * 2007-11-22 2009-06-11 Hitachi Plant Technologies Ltd 保管倉庫設備
JP5585236B2 (ja) * 2010-06-23 2014-09-10 村田機械株式会社 有軌道台車システム

Also Published As

Publication number Publication date
JP2013216482A (ja) 2013-10-24
CN103373576A (zh) 2013-10-30
JP5772693B2 (ja) 2015-09-02
TW201344122A (zh) 2013-11-01

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