KR20130109057A - 현미경 - Google Patents

현미경 Download PDF

Info

Publication number
KR20130109057A
KR20130109057A KR1020130031513A KR20130031513A KR20130109057A KR 20130109057 A KR20130109057 A KR 20130109057A KR 1020130031513 A KR1020130031513 A KR 1020130031513A KR 20130031513 A KR20130031513 A KR 20130031513A KR 20130109057 A KR20130109057 A KR 20130109057A
Authority
KR
South Korea
Prior art keywords
subject
lens
optical member
imaging
optical
Prior art date
Application number
KR1020130031513A
Other languages
English (en)
Korean (ko)
Inventor
노부키 이데
Original Assignee
신토 에스 프레시젼 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 신토 에스 프레시젼 가부시키가이샤 filed Critical 신토 에스 프레시젼 가부시키가이샤
Publication of KR20130109057A publication Critical patent/KR20130109057A/ko

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/04Measuring microscopes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02049Interferometers characterised by particular mechanical design details

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microscoopes, Condenser (AREA)
KR1020130031513A 2012-03-26 2013-03-25 현미경 KR20130109057A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012068627A JP2013200438A (ja) 2012-03-26 2012-03-26 顕微鏡
JPJP-P-2012-068627 2012-03-26

Publications (1)

Publication Number Publication Date
KR20130109057A true KR20130109057A (ko) 2013-10-07

Family

ID=49366667

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020130031513A KR20130109057A (ko) 2012-03-26 2013-03-25 현미경

Country Status (3)

Country Link
JP (1) JP2013200438A (zh)
KR (1) KR20130109057A (zh)
CN (1) CN103364935A (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105118088A (zh) * 2015-08-06 2015-12-02 曲阜裕隆生物科技有限公司 一种基于病理切片扫描装置的3d成像及融合的方法
CN116931236B (zh) * 2023-09-14 2023-11-28 长春长光智欧科技有限公司 一种基于探针对准晶圆的双倍率光学系统

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4777525A (en) * 1985-12-23 1988-10-11 Preston Jr Kendall Apparatus and method for a multi-resolution electro-optical imaging, display and storage/retrieval system
JP2004512845A (ja) * 2000-10-24 2004-04-30 オンコシス リミテッド ライアビリティ カンパニー 三次元の検体内の細胞を選択的に標的化する方法およびデバイス
JP2006276663A (ja) * 2005-03-30 2006-10-12 Olympus Corp 顕微鏡
KR20090107815A (ko) * 2008-04-10 2009-10-14 주식회사 에이치앤씨 광학측정장치 및 이를 포함하는 검사장치

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL111229A (en) * 1994-10-10 1998-06-15 Nova Measuring Instr Ltd Autofocusing microscope
US5760901A (en) * 1997-01-28 1998-06-02 Zetetic Institute Method and apparatus for confocal interference microscopy with background amplitude reduction and compensation
JP4185711B2 (ja) * 2002-06-10 2008-11-26 株式会社キーエンス 複数の光源を備えた顕微鏡
JP4242617B2 (ja) * 2002-08-28 2009-03-25 オリンパス株式会社 走査型レーザ顕微鏡システム
JP4652775B2 (ja) * 2004-11-10 2011-03-16 オリンパス株式会社 生体観察装置
US7283241B2 (en) * 2005-01-31 2007-10-16 Chemimage Corp. Method and apparatus for a microscope image selector
WO2008047893A1 (fr) * 2006-10-19 2008-04-24 Olympus Corporation Microscope
US20100118297A1 (en) * 2007-11-21 2010-05-13 Star Technologies Inc. Microscope having multiple image-outputting devices and probing apparatus for integrated circuit devices using the same
JP2010204594A (ja) * 2009-03-06 2010-09-16 Nikon Corp 結像装置及び顕微鏡
US20100277794A1 (en) * 2009-04-30 2010-11-04 Olympus Corporation Microscope
CN102096192B (zh) * 2010-12-30 2013-01-16 长春光华微电子设备工程中心有限公司 多倍率成像光学系统

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4777525A (en) * 1985-12-23 1988-10-11 Preston Jr Kendall Apparatus and method for a multi-resolution electro-optical imaging, display and storage/retrieval system
JP2004512845A (ja) * 2000-10-24 2004-04-30 オンコシス リミテッド ライアビリティ カンパニー 三次元の検体内の細胞を選択的に標的化する方法およびデバイス
JP2006276663A (ja) * 2005-03-30 2006-10-12 Olympus Corp 顕微鏡
KR20090107815A (ko) * 2008-04-10 2009-10-14 주식회사 에이치앤씨 광학측정장치 및 이를 포함하는 검사장치

Also Published As

Publication number Publication date
CN103364935A (zh) 2013-10-23
JP2013200438A (ja) 2013-10-03

Similar Documents

Publication Publication Date Title
CN111272773B (zh) 一种半导体晶圆表面缺陷的快速超高分辨检测系统
US8809809B1 (en) Apparatus and method for focusing in fluorescence microscope
JP2015135463A (ja) 顕微鏡装置、及び、顕微鏡システム
JPWO2008069220A1 (ja) 結像装置及び顕微鏡
CN109791275B (zh) 观察装置
US20110102888A1 (en) Microscope
US20100014158A1 (en) Microscope apparatus and fluorescence cube installed therein
US8785885B1 (en) Fluorescence imaging module
CN106461927A (zh) 用于显微镜的成像设备
JP5012810B2 (ja) 画像測定器
JP6895768B2 (ja) 欠陥検査装置、および欠陥検査方法
JP2009168964A (ja) 共焦点顕微鏡
KR101568980B1 (ko) 자동초점 조절장치 및 자동초점 조절방법
KR101450120B1 (ko) 복수의 광원에 따른 이미지들을 동시에 획득하는 형광이미지 획득장치
JP7094225B2 (ja) 試料を検査する方法および顕微鏡
JP2011520144A (ja) 試料をエバネッセント照明する装置および方法
KR20130109057A (ko) 현미경
JP2010091694A (ja) 走査型顕微鏡
JP2021107926A (ja) サンプルを画像化するための光学構成
JP2012079677A (ja) 自動光学検出に用いられる照明システムおよびそれと画像形成システムとの組合せ
JP2011118069A (ja) 顕微鏡用照明装置および顕微鏡
JP2012181341A (ja) 顕微鏡装置
JP2011242702A (ja) 結像光学系及び形状測定装置
JP2013190760A (ja) 顕微鏡用照明装置
KR101373511B1 (ko) 연속 범위 각도에 대해 선택가능한 조명을 이용하는 검사 시스템 및 방법

Legal Events

Date Code Title Description
E902 Notification of reason for refusal
E601 Decision to refuse application