KR20130109057A - Microscope - Google Patents

Abstract

PURPOSE: A microscope is provided to obtain images of a target object at different magnification without exchanging a lens into an object lens. CONSTITUTION: A microscope (2) includes am objective lens (4), a lighting unit (10), a first optical member, a first imaging lens (46), a second optical member (48), a second imaging lens (50), and a third imaging lens (56). The object lens observes a target object at predetermined magnification. The lighting unit includes a light source emitting lights lighting the target object via the object lens. The first optical member spits an optical path of lights emitted by the target object and incident into the objected lens into two optical passages. The first imaging lens form images of the target object based on the reflected lights of the target object by the first optical member on the first photographing member. The second optical member splits an optical passage of the lights transmitted through the first optical member into two optical passages. The second imaging lens form images of the target object based on the reflected lights of the target object by the second optical member on the second photographing member.

Description

Microscope {MICROSCOPE}

The present invention relates to a microscope for forming an image of a subject on an imaging device at different magnifications.

Conventionally, there exists a measuring microscope apparatus provided with one objective lens and two different magnification imaging lenses (for example, refer patent document 1). According to this measuring microscope apparatus, the subject image of two different magnifications can be imaged, without performing replacement of an objective lens.

Japanese Unexamined Patent Publication No. 8-61914

However, in the above-described measuring microscope device, when the illumination unit is provided at a position away from the objective lens, the illumination light emitted from the illumination unit passes through the plurality of optical members and then enters the objective lens to illuminate the subject.

In this case, since the light quantity loss of illumination light becomes large, there exists a problem that a subject cannot be illuminated with sufficient brightness, and an image of a subject cannot be imaged satisfactorily.

An object of the present invention is to provide a microscope capable of satisfactorily photographing a subject image at different magnifications.

The microscope of the present invention includes an illumination unit having an objective lens for observing a subject at a predetermined magnification, a light source for emitting illumination light for illuminating the subject through the objective lens, and a subject incident on the objective lens from the subject. A first optical member for dividing the optical path of the specimen light into two optical paths, a first imaging lens for forming an image of a subject based on the subject light reflected by the first optical member on the first imaging device, and the first optical member A second optical member for dividing the optical path of the subject light transmitted through the first optical member into two optical paths, and an image for imaging the subject image based on the subject light reflected by the second optical member on the second imaging device; A second imaging lens and a third imaging lens for imaging an image of a subject based on the subject light transmitted through the second optical member on a third image pickup device, the light exiting from the illumination unit; Group the illumination light, through a third optical element arranged in the optical path between the objective lens and the first optical member is characterized in that enters the objective lens.

Moreover, the microscope of this invention is characterized by including the condensing lens which condenses the illumination light emitted from the said light source to a predetermined position.

Moreover, the microscope of this invention is characterized in that the magnification of the subject image formed in the said 1st imaging element, the said 2nd imaging element, and the said 3rd imaging element is low magnification, high magnification, and medium magnification, respectively.

Moreover, the microscope of this invention is a 4th optical member which divides the optical path of the subject light which permeate | transmitted the said 2nd optical member into two optical paths, and at least one which condenses the subject light which permeate | transmitted the said 4th optical member. And an imaging lens and at least one imaging device for imaging an object image based on the subject light focused by the at least one imaging lens, wherein the third imaging device is reflected by the fourth optical member. And image of a subject based on the subject light collected by the third imaging lens.

According to the microscope of the present invention, an image of a subject having a different magnification can be photographed satisfactorily.

BRIEF DESCRIPTION OF THE DRAWINGS The figure which shows the structure of the inside of a microscope which concerns on embodiment.

EMBODIMENT OF THE INVENTION Hereinafter, the microscope which concerns on embodiment of this invention is demonstrated with reference to drawings. BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows the structure of the inside of the microscope which concerns on embodiment. The microscope 2 is provided in the inspection apparatus used in the production process of flat panels, such as a liquid crystal panel and an organic electroluminescent panel, and observes a subject (not shown) by a predetermined magnification (for example, 50 times the objective). The housing 6 in which the objective lens 4 is mounted below, and an optical path box 8 serving as an optical path of the subject light incident on the objective lens 4 are provided.

In addition, the upper part of the optical path box 8, the illumination part 10 which emits the illumination light which illuminates a subject through the objective lens 4 in order from the side closer to the objective lens 4, the blood illuminated by the illumination light A third barrel having a first barrel 16 having a first camera 14, a second barrel 20 having a second camera 18, and a third camera 22 taking an image of a subject under test. 24 is provided. In the housing 6, a laser autofocus device 25 which performs focus adjustment of the objective lens 4 using a laser beam is assembled.

Next, the process of the microscope 2 which concerns on embodiment with reference to drawings is demonstrated. First, when a laser beam is emitted by the laser autofocus apparatus 25, the laser beam passes through a dichroic mirror 26 and irradiates the subject through the objective lens 4. The reflected light reflected by the subject passes through the dichroic mirror 26 via the objective lens 4 and enters the laser autofocus apparatus 25. Then, the focus of the objective lens 4 is adjusted based on the information incident on the laser autofocus device 25.

Next, when the illumination light is emitted from the end 32a of the optical fiber 32, the illumination light is condensed at the condensing point 36 by the first condensing lens 34. The illumination light proceeds downward as a pseudo point light source of the condensing point 36, enters the second condensing lens 38, and enters the half mirror 40 and dichro. After reflecting from the blade mirror 26, it is condensed by the incidence part 42 of the objective lens 4. Next, the illumination light enters the objective lens 4 using the incident part 42 as a pseudo point light source, and illuminates the subject through the objective lens 4.

The subject light reflected by the subject is incident on the objective lens 4, reflected by the dichroic mirror 26, and then transmitted through the half mirror 40. The optical path of the subject light transmitted through the half mirror 40 is split into two optical paths in the first beam splitter (first BS) 44.

The subject light reflected by the first BS 44 is collected by the first imaging lens 46, and is imaged on a first imaging device (not shown) of the first camera 14. Here, when the magnification of the first imaging lens 46 is 0.5 times, the subject image of 25 times (object 50 times x 0.5 times) is photographed by the first camera 14.

On the other hand, the optical path of the subject light transmitted through the first BS 44 is divided into two optical paths in the second beam splitter (second BS) 48.

The subject light reflected by the second BS 48 is condensed by the second imaging lens 50 and the teleconversion lens 52, and the second imaging (not shown) of the second camera 18 is performed. It is formed in the device. Here, when the magnification of the second imaging lens 50 is 1.0 times and the magnification of the teleconversion lens 52 is 2.0 times, it is 100 times (object 50 times x 1.0 times x 2.0 times) by the second camera 18. The subject image of is photographed.

On the other hand, the subject light that has passed through the second BS 48 is totally reflected by the total reflection mirror 54 and condensed by the third imaging lens 56, and then is not illustrated by the third camera 22. It forms in an imaging element. Here, when the magnification of the third imaging lens 56 is 1.0 times, the subject image of 50 times (object 50 times x 1.0 times) is photographed by the third camera 22.

That is, by the 1st camera 14, the 2nd camera 18, and the 3rd camera 22, the subject of three types of magnifications (ratio of 1: 4: 2) of 25 times, 100 times, and 50 times. The image is taken.

According to the microscope 2 which concerns on this embodiment, the illumination part 10 is arrange | positioned at the objective lens 4 side rather than the 1st barrel 16, and it is bright with illumination light with little light quantity loss by transmitting a some mirror etc. Since the subject can be illuminated, it is possible to form an image of a subject having an appropriate amount of light in each imaging device, and to capture a subject image having three different magnifications satisfactorily.

In addition, since the subject image of three different magnifications can be photographed, it is possible to accurately inspect a subject which has been highly refined in recent years at an optimal magnification. In addition, the subject can be inspected efficiently without replacing the objective lens 4.

In addition, the illumination light emitted from the end 32a of the optical fiber 32 is once collected by the first condensing lens 34 at the condensing point 36, and a pseudo point light source is generated to generate koehler illumination. Since illumination of a subject is performed, illumination efficiency can be made high.

In addition, in consideration of the optical path length of the subject light and the loss of light quantity of the subject light, the illumination unit 10, the first barrel 16, the second barrel 20, and the third barrel ( By arranging in the order of 24), the accuracy on the subject 100 times as the largest magnification can be made the highest.

In addition, although the case where the magnification of the objective lens 4 is 50 times is demonstrated as an example in embodiment mentioned above, if the favorable subject image can be imaged, the magnification of the objective lens 4 is not limited to the example mentioned above. Do not. In addition, the magnification of each imaging lens is not limited to the above-mentioned example.

In addition, in the above-mentioned embodiment, the magnification of the teleconversion lens 52 is not limited to the above-mentioned example. For example, when the magnification of the teleconversion lens 52 is 4 times, the subject image of 200 times (object 50 times x 1.0 times x 4.0 times) can be photographed by the second camera 18, The subject image of three kinds of ratios of 1: 8: 2 can be obtained.

In addition, in the above-described embodiment, the case where the illumination light is emitted by using the end 32a of the optical fiber 32 as a light source is described as an example, but the light source of the illumination light is not limited to the optical fiber 32. For example, an LED light source or the like may be connected to the illumination unit 10 instead of the optical fiber 32.

In addition, in the above-described embodiment, the case where the microscope 2 is provided with three barrels and an object image of three different magnifications can be obtained is described as an example, but if a good object image can be photographed, You may add more barrels.

2: microscope 4: objective lens
6: housing 8: light path box
10: lighting unit 14: first camera
16: first barrel 18: second camera
20: second barrel 22: third camera
24: third barrel 26: dichroic mirror
32: optical fiber 34: first condensing lens
38: second condenser lens 40: half mirror
44: first BS 46: first imaging lens
48: second BS 50: second imaging lens
52: teleconversion lens 54: total reflection mirror
56: third imaging lens

Claims (4)

An objective lens for observing the subject at a predetermined magnification,
An illumination unit having a light source for emitting illumination light for illuminating the subject under the objective lens;
A first optical member for dividing the optical path of the subject light incident on the objective lens from the subject into two optical paths,
A first imaging lens for imaging an image of a subject based on the subject light reflected by the first optical member on a first imaging device;
A second optical member for dividing the optical path of the subject light transmitted through the first optical member into two optical paths;
A second imaging lens which forms an image of a subject based on the subject light reflected in the second optical member on a second imaging element;
And a third imaging lens for imaging the subject image based on the subject light transmitted through the second optical member on the third imaging device,
The illumination light emitted from the illumination unit is incident on the objective lens via a third optical member disposed in the optical path between the objective lens and the first optical member.
microscope. The method of claim 1,
The illumination unit includes a condenser lens for condensing the illumination light emitted from the light source at a predetermined position
microscope. 3. The method according to claim 1 or 2,
The magnifications of the subject image formed on the first imaging element, the second imaging element, and the third imaging element are low magnification, high magnification, and medium magnification, respectively.
microscope. The method according to any one of claims 1 to 3,
A fourth optical member for dividing the optical path of the subject light transmitted through the second optical member into two optical paths,
At least one imaging lens for condensing the subject light transmitted through the fourth optical member;
At least one imaging device configured to capture an image of a subject based on the subject light collected by the at least one imaging lens,
The third image pickup device is configured to reflect a subject image based on the subject light reflected by the fourth optical member and focused by the third imaging lens.
microscope.

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