KR20130090805A - 도전성 필름 롤의 제조 방법 - Google Patents

도전성 필름 롤의 제조 방법 Download PDF

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Publication number
KR20130090805A
KR20130090805A KR1020130008624A KR20130008624A KR20130090805A KR 20130090805 A KR20130090805 A KR 20130090805A KR 1020130008624 A KR1020130008624 A KR 1020130008624A KR 20130008624 A KR20130008624 A KR 20130008624A KR 20130090805 A KR20130090805 A KR 20130090805A
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KR
South Korea
Prior art keywords
roll
copper
layer
film
oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020130008624A
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English (en)
Korean (ko)
Inventor
노조미 후지노
히로유키 다카오
구니아키 이시바시
Original Assignee
닛토덴코 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 닛토덴코 가부시키가이샤 filed Critical 닛토덴코 가부시키가이샤
Publication of KR20130090805A publication Critical patent/KR20130090805A/ko
Ceased legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5846—Reactive treatment
    • C23C14/5853—Oxidation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)
  • Inorganic Chemistry (AREA)
  • Position Input By Displaying (AREA)
KR1020130008624A 2012-02-06 2013-01-25 도전성 필름 롤의 제조 방법 Ceased KR20130090805A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012023078A JP5826656B2 (ja) 2012-02-06 2012-02-06 導電性フィルムロールの製造方法
JPJP-P-2012-023078 2012-02-06

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020150094208A Division KR101954483B1 (ko) 2012-02-06 2015-07-01 도전성 필름 롤의 제조 방법

Publications (1)

Publication Number Publication Date
KR20130090805A true KR20130090805A (ko) 2013-08-14

Family

ID=48901935

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020130008624A Ceased KR20130090805A (ko) 2012-02-06 2013-01-25 도전성 필름 롤의 제조 방법
KR1020150094208A Active KR101954483B1 (ko) 2012-02-06 2015-07-01 도전성 필름 롤의 제조 방법

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020150094208A Active KR101954483B1 (ko) 2012-02-06 2015-07-01 도전성 필름 롤의 제조 방법

Country Status (5)

Country Link
US (1) US20130199927A1 (https=)
JP (1) JP5826656B2 (https=)
KR (2) KR20130090805A (https=)
CN (1) CN103247389B (https=)
TW (1) TWI479511B (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108027688B (zh) * 2015-09-30 2021-04-13 住友金属矿山株式会社 导电性基板
JP6668273B2 (ja) * 2017-01-31 2020-03-18 富士フイルム株式会社 巻取ロール
JP6953170B2 (ja) 2017-04-19 2021-10-27 日東電工株式会社 導電性フィルムおよびタッチパネル
JP2020075364A (ja) 2018-11-05 2020-05-21 日東電工株式会社 導電性フィルムおよびタッチパネル

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3895129A (en) * 1973-02-20 1975-07-15 Sprague Electric Co Method for metallizing plastic film
US4262034A (en) * 1979-10-30 1981-04-14 Armotek Industries, Inc. Methods and apparatus for applying wear resistant coatings to roto-gravure cylinders
US4622240A (en) * 1985-11-12 1986-11-11 Air Products And Chemicals, Inc. Process for manufacturing thick-film electrical components
US5153074A (en) * 1991-11-05 1992-10-06 Mobil Oil Corporation Metallized film combination
US5583285A (en) * 1994-11-29 1996-12-10 Lucent Technologies Inc. Method for detecting a coating material on a substrate
EP1419286A1 (en) * 2001-08-20 2004-05-19 Nova-Plasma Inc. Coatings with low permeation of gases and vapors
US8307549B2 (en) * 2001-11-20 2012-11-13 Touchsensor Technologies, Llc Method of making an electrical circuit
EP1333323A3 (en) * 2002-02-01 2004-10-06 Nikon Corporation Self-cleaning reflective optical elements for use in x-ray optical systems, and optical systems and microlithography systems comprising same
EP1450378A3 (en) * 2003-02-24 2006-07-05 TDK Corporation Soft magnetic member, method for manufacturing thereof and electromagnetic wave controlling sheet
CN1809799A (zh) * 2003-04-22 2006-07-26 触摸传感器技术有限责任公司 具有多个导电层的基板以及制造和使用该基板的方法
JP4667471B2 (ja) * 2007-01-18 2011-04-13 日東電工株式会社 透明導電性フィルム、その製造方法及びそれを備えたタッチパネル
US8349731B2 (en) * 2011-03-25 2013-01-08 GlobalFoundries, Inc. Methods for forming copper diffusion barriers for semiconductor interconnect structures

Also Published As

Publication number Publication date
KR101954483B1 (ko) 2019-03-05
CN103247389A (zh) 2013-08-14
JP2013161282A (ja) 2013-08-19
TW201337960A (zh) 2013-09-16
JP5826656B2 (ja) 2015-12-02
CN103247389B (zh) 2016-02-17
US20130199927A1 (en) 2013-08-08
KR20150083982A (ko) 2015-07-21
TWI479511B (zh) 2015-04-01

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