KR20120014113A - 내마모성 코팅 적용 시스템 및 방법 - Google Patents

내마모성 코팅 적용 시스템 및 방법 Download PDF

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Publication number
KR20120014113A
KR20120014113A KR1020117019566A KR20117019566A KR20120014113A KR 20120014113 A KR20120014113 A KR 20120014113A KR 1020117019566 A KR1020117019566 A KR 1020117019566A KR 20117019566 A KR20117019566 A KR 20117019566A KR 20120014113 A KR20120014113 A KR 20120014113A
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KR
South Korea
Prior art keywords
plasma
precursor
atmospheric plasma
substrate
atmospheric
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Ceased
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KR1020117019566A
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English (en)
Korean (ko)
Inventor
리암 에스.씨. 핑리
바산 에스. 순다람
마이클 아르. 시르키스
숀 엠. 페어
Original Assignee
더 보잉 컴파니
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 더 보잉 컴파니 filed Critical 더 보잉 컴파니
Publication of KR20120014113A publication Critical patent/KR20120014113A/ko
Ceased legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C23C16/325—Silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Vapour Deposition (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
KR1020117019566A 2009-05-04 2010-04-14 내마모성 코팅 적용 시스템 및 방법 Ceased KR20120014113A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/435,110 US8206794B2 (en) 2009-05-04 2009-05-04 System and method for applying abrasion-resistant coatings
US12/435,110 2009-05-04

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020177015020A Division KR20170064567A (ko) 2009-05-04 2010-04-14 내마모성 코팅 적용 시스템 및 방법

Publications (1)

Publication Number Publication Date
KR20120014113A true KR20120014113A (ko) 2012-02-16

Family

ID=42269774

Family Applications (3)

Application Number Title Priority Date Filing Date
KR1020117019566A Ceased KR20120014113A (ko) 2009-05-04 2010-04-14 내마모성 코팅 적용 시스템 및 방법
KR1020177015020A Ceased KR20170064567A (ko) 2009-05-04 2010-04-14 내마모성 코팅 적용 시스템 및 방법
KR1020197031078A Ceased KR20190122273A (ko) 2009-05-04 2010-04-14 내마모성 코팅 적용 시스템 및 방법

Family Applications After (2)

Application Number Title Priority Date Filing Date
KR1020177015020A Ceased KR20170064567A (ko) 2009-05-04 2010-04-14 내마모성 코팅 적용 시스템 및 방법
KR1020197031078A Ceased KR20190122273A (ko) 2009-05-04 2010-04-14 내마모성 코팅 적용 시스템 및 방법

Country Status (6)

Country Link
US (1) US8206794B2 (enExample)
EP (1) EP2430211A1 (enExample)
JP (2) JP5728469B2 (enExample)
KR (3) KR20120014113A (enExample)
CN (1) CN102414341A (enExample)
WO (1) WO2010129149A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160098165A (ko) * 2013-12-12 2016-08-18 더 보잉 컴파니 구배 박막 필름

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CN103732337B (zh) * 2011-08-26 2017-03-08 埃克阿泰克有限责任公司 有机树脂层压板、制造和使用该有机树脂层压板的方法
US20130115867A1 (en) * 2011-11-08 2013-05-09 General Electric Company Enclosure system and method for applying coating
US10787591B2 (en) 2012-04-30 2020-09-29 The Boeing Company Composites including silicon-oxy-carbide layers and methods of making the same
EP3459570B1 (en) 2012-08-29 2021-03-10 Cardiac Pacemakers, Inc. Enhanced low friction coating for medical leads and methods of making
EP3992330A1 (en) * 2020-10-29 2022-05-04 PartiX Powder coating method

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US4927704A (en) * 1987-08-24 1990-05-22 General Electric Company Abrasion-resistant plastic articles and method for making them
US5344712A (en) 1990-06-29 1994-09-06 Ppg Industries, Inc. Abrasion resistant siloxane coatings containing ceria
US5433786A (en) * 1993-08-27 1995-07-18 The Dow Chemical Company Apparatus for plasma enhanced chemical vapor deposition comprising shower head electrode with magnet disposed therein
FR2711556B1 (fr) 1993-10-29 1995-12-15 Atohaas Holding Cv Procédé de dépôt d'une couche mince sur la surface d'un substrat en matière plastique.
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JPH10119336A (ja) * 1996-10-23 1998-05-12 Alps Electric Co Ltd サーマルヘッド及びその製造方法
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US6495208B1 (en) * 1999-09-09 2002-12-17 Virginia Tech Intellectual Properties, Inc. Near-room temperature CVD synthesis of organic polymer/oxide dielectric nanocomposites
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160098165A (ko) * 2013-12-12 2016-08-18 더 보잉 컴파니 구배 박막 필름

Also Published As

Publication number Publication date
KR20170064567A (ko) 2017-06-09
JP2015163738A (ja) 2015-09-10
CN102414341A (zh) 2012-04-11
JP6022629B2 (ja) 2016-11-09
JP5728469B2 (ja) 2015-06-03
JP2012526190A (ja) 2012-10-25
KR20190122273A (ko) 2019-10-29
US8206794B2 (en) 2012-06-26
EP2430211A1 (en) 2012-03-21
US20100279027A1 (en) 2010-11-04
WO2010129149A1 (en) 2010-11-11

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