KR20120014113A - 내마모성 코팅 적용 시스템 및 방법 - Google Patents

내마모성 코팅 적용 시스템 및 방법 Download PDF

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Publication number
KR20120014113A
KR20120014113A KR1020117019566A KR20117019566A KR20120014113A KR 20120014113 A KR20120014113 A KR 20120014113A KR 1020117019566 A KR1020117019566 A KR 1020117019566A KR 20117019566 A KR20117019566 A KR 20117019566A KR 20120014113 A KR20120014113 A KR 20120014113A
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KR
South Korea
Prior art keywords
plasma
precursor
atmospheric plasma
substrate
atmospheric
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Ceased
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KR1020117019566A
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English (en)
Korean (ko)
Inventor
리암 에스.씨. 핑리
바산 에스. 순다람
마이클 아르. 시르키스
숀 엠. 페어
Original Assignee
더 보잉 컴파니
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Application filed by 더 보잉 컴파니 filed Critical 더 보잉 컴파니
Publication of KR20120014113A publication Critical patent/KR20120014113A/ko
Ceased legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C23C16/325—Silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Vapour Deposition (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
KR1020117019566A 2009-05-04 2010-04-14 내마모성 코팅 적용 시스템 및 방법 Ceased KR20120014113A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/435,110 US8206794B2 (en) 2009-05-04 2009-05-04 System and method for applying abrasion-resistant coatings
US12/435,110 2009-05-04

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020177015020A Division KR20170064567A (ko) 2009-05-04 2010-04-14 내마모성 코팅 적용 시스템 및 방법

Publications (1)

Publication Number Publication Date
KR20120014113A true KR20120014113A (ko) 2012-02-16

Family

ID=42269774

Family Applications (3)

Application Number Title Priority Date Filing Date
KR1020117019566A Ceased KR20120014113A (ko) 2009-05-04 2010-04-14 내마모성 코팅 적용 시스템 및 방법
KR1020177015020A Ceased KR20170064567A (ko) 2009-05-04 2010-04-14 내마모성 코팅 적용 시스템 및 방법
KR1020197031078A Ceased KR20190122273A (ko) 2009-05-04 2010-04-14 내마모성 코팅 적용 시스템 및 방법

Family Applications After (2)

Application Number Title Priority Date Filing Date
KR1020177015020A Ceased KR20170064567A (ko) 2009-05-04 2010-04-14 내마모성 코팅 적용 시스템 및 방법
KR1020197031078A Ceased KR20190122273A (ko) 2009-05-04 2010-04-14 내마모성 코팅 적용 시스템 및 방법

Country Status (6)

Country Link
US (1) US8206794B2 (enExample)
EP (1) EP2430211A1 (enExample)
JP (2) JP5728469B2 (enExample)
KR (3) KR20120014113A (enExample)
CN (1) CN102414341A (enExample)
WO (1) WO2010129149A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160098165A (ko) * 2013-12-12 2016-08-18 더 보잉 컴파니 구배 박막 필름

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5708886B2 (ja) * 2011-08-26 2015-04-30 エグザテック・リミテッド・ライアビリティー・カンパニーＥｘａｔｅｃ，ＬＬＣ． 有機樹脂積層体、その製造及び使用方法、並びに有機樹脂積層体を含む物品
US20130115867A1 (en) * 2011-11-08 2013-05-09 General Electric Company Enclosure system and method for applying coating
US10787591B2 (en) * 2012-04-30 2020-09-29 The Boeing Company Composites including silicon-oxy-carbide layers and methods of making the same
CN104684592B (zh) * 2012-08-29 2017-07-14 心脏起搏器股份公司 用于医用导线的增强的低摩擦涂层和制造方法
EP3992330A1 (en) * 2020-10-29 2022-05-04 PartiX Powder coating method

Family Cites Families (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4770940A (en) * 1984-09-10 1988-09-13 Ovonic Synthetic Materials Company Glow discharge method of applying a carbon coating onto a substrate and coating applied thereby
US4927704A (en) * 1987-08-24 1990-05-22 General Electric Company Abrasion-resistant plastic articles and method for making them
US5344712A (en) 1990-06-29 1994-09-06 Ppg Industries, Inc. Abrasion resistant siloxane coatings containing ceria
US5433786A (en) * 1993-08-27 1995-07-18 The Dow Chemical Company Apparatus for plasma enhanced chemical vapor deposition comprising shower head electrode with magnet disposed therein
FR2711556B1 (fr) 1993-10-29 1995-12-15 Atohaas Holding Cv Procédé de dépôt d'une couche mince sur la surface d'un substrat en matière plastique.
US5508368A (en) 1994-03-03 1996-04-16 Diamonex, Incorporated Ion beam process for deposition of highly abrasion-resistant coatings
JPH10119336A (ja) * 1996-10-23 1998-05-12 Alps Electric Co Ltd サーマルヘッド及びその製造方法
US6010967A (en) * 1998-05-22 2000-01-04 Micron Technology, Inc. Plasma etching methods
EP1077479A1 (en) * 1999-08-17 2001-02-21 Applied Materials, Inc. Post-deposition treatment to enchance properties of Si-O-C low K film
US6495208B1 (en) * 1999-09-09 2002-12-17 Virginia Tech Intellectual Properties, Inc. Near-room temperature CVD synthesis of organic polymer/oxide dielectric nanocomposites
DE10131156A1 (de) 2001-06-29 2003-01-16 Fraunhofer Ges Forschung Arikel mit plasmapolymerer Beschichtung und Verfahren zu dessen Herstellung
TW200409669A (en) * 2002-04-10 2004-06-16 Dow Corning Ireland Ltd Protective coating composition
FR2843408B1 (fr) * 2002-08-06 2005-04-08 Saint Gobain Procede de formation d'un revetement sur un vitrage en matiere plastique
AU2003260000A1 (en) * 2002-08-26 2004-03-11 Sigma Technologies International, Inc. Barrier coatings produced by atmospheric glow discharge
US7468311B2 (en) * 2003-09-30 2008-12-23 Tokyo Electron Limited Deposition of silicon-containing films from hexachlorodisilane
US20070104957A1 (en) * 2003-12-16 2007-05-10 Sun Chemical Corporation Method of forming a radiation curable coating and coated article
EP1725698A1 (en) * 2004-03-09 2006-11-29 Exatec, LLC. Expanding thermal plasma deposition system
US7030041B2 (en) * 2004-03-15 2006-04-18 Applied Materials Inc. Adhesion improvement for low k dielectrics
GB0410749D0 (en) * 2004-05-14 2004-06-16 Dow Corning Ireland Ltd Coating apparatus
US20060063015A1 (en) * 2004-09-23 2006-03-23 3M Innovative Properties Company Protected polymeric film
KR20070072900A (ko) * 2004-10-29 2007-07-06 다우 글로벌 테크놀로지스 인크. 플라즈마 강화 화학 기상 증착에 의한 내마모성 코팅
RU2007119783A (ru) * 2004-10-29 2008-12-10 Дау Глобал Текнолоджиз Инк. (Us) Способ плазменно-химического осаждения из газовой фазы с улучшенной скоростью осаждения
JP2006175583A (ja) 2004-11-29 2006-07-06 Chemitoronics Co Ltd マイクロ構造体の製造方法
US8216679B2 (en) * 2005-07-27 2012-07-10 Exatec Llc Glazing system for vehicle tops and windows
US20070196633A1 (en) 2005-11-30 2007-08-23 Coak Craig E Durable transparent coatings for polymeric substrates
US8313812B2 (en) 2005-11-30 2012-11-20 The Boeing Company Durable transparent coatings for aircraft passenger windows
JP2007216435A (ja) * 2006-02-14 2007-08-30 Tomoegawa Paper Co Ltd ガスバリアフィルム基板、電極付きガスバリアフィルム基板、及びそれらを用いた表示素子
JP4968883B2 (ja) * 2006-03-30 2012-07-04 日本碍子株式会社 リモート式プラズマ処理装置
KR100914354B1 (ko) * 2006-06-05 2009-08-28 어플라이드 머티어리얼스, 인코포레이티드 Ｐｅｃｖｄ막에 대한 1차 웨이퍼 효과 제거
WO2008047549A1 (fr) * 2006-10-12 2008-04-24 Konica Minolta Holdings, Inc. Substrat de film conducteur transparent et procédé de formation d'un film conducteur transparent à base d'oxyde de titane destiné à être utilisé avec celui-ci
US7410916B2 (en) * 2006-11-21 2008-08-12 Applied Materials, Inc. Method of improving initiation layer for low-k dielectric film by digital liquid flow meter
JP5222940B2 (ja) * 2007-05-01 2013-06-26 エグザテック・リミテッド・ライアビリティー・カンパニー プラズマコーティングのエッジヒーリング及び現場修復
KR20100017761A (ko) * 2007-05-17 2010-02-16 엑사테크 엘.엘.씨. 공통 플라즈마 코팅 구역에서 복수의 코팅 재료를 침착시키기 위한 장치 및 방법
GB0717430D0 (en) * 2007-09-10 2007-10-24 Dow Corning Ireland Ltd Atmospheric pressure plasma

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160098165A (ko) * 2013-12-12 2016-08-18 더 보잉 컴파니 구배 박막 필름

Also Published As

Publication number Publication date
WO2010129149A1 (en) 2010-11-11
CN102414341A (zh) 2012-04-11
US8206794B2 (en) 2012-06-26
JP2015163738A (ja) 2015-09-10
US20100279027A1 (en) 2010-11-04
KR20190122273A (ko) 2019-10-29
JP6022629B2 (ja) 2016-11-09
KR20170064567A (ko) 2017-06-09
JP2012526190A (ja) 2012-10-25
EP2430211A1 (en) 2012-03-21
JP5728469B2 (ja) 2015-06-03

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