KR20110095016A - Scriber and scribing appratus and method using the same - Google Patents

Abstract

PURPOSE: A scriber, and scribing apparatus and method using the same are provided to correct the tilting phenomenon of a scribing wheel by forming a gap for backlash at a shaft combining part combining the motor driving shaft of a rotary driving part and the rotary shaft of a head. CONSTITUTION: A scriber includes a head including a scribing wheel and a rotary driving part rotating the head. The rotary driving part includes a first block, a second block(247), and a combining part(250). The first block is combined with the driving shaft of a driving motor. The second block faces the first block and is combined with the head. Combining grooves(247-2, 247-3) in gear shapes are formed in the second block. The combining part is formed into a gear shape. One end part of the combining part is combined with the first block, and another end part of the combining part is inserted into the combining grooves.

Description

SCRIBER AND SCRIBING APPRATUS AND METHOD USING THE SAME}

The present invention relates to a scriber and a scribing apparatus and method using the same, and more particularly, to a scriber for forming a scribe line on a mother substrate having a plurality of unit substrates, and a scribing apparatus and method using the same. It is about.

Recently, information processing devices have been rapidly developed to have various types of functions and faster information processing speeds. Such information processing apparatus has a display for displaying the activated information. Conventionally, a cathode ray tube monitor is mainly used as a display, but recently, a light and space-saving thin film transistor-liquid crystal display panel or organic light emitting diodes display The use of such flat panel displays is greatly increasing.

In general, a panel used for a flat panel display or the like is usually manufactured using a brittle substrate, and the panel is roughly classified into a single plate substrate composed of one sheet or a bonded substrate bonded to two substrates.

Since the bonded substrate is processed into small and various sizes, such as a panel for a liquid crystal display of a mobile phone, to a large size such as a panel such as a TV or a display, the bonded substrate is cut into a unit substrate having a predetermined size from a large parent substrate, Used as a panel.

As a method of cutting a mother substrate, there are a method of cutting using a scribe wheel (Scribe Wheel) in which fine diamonds are embedded, and a method of cutting using a laser beam.

A method of cutting a mother substrate using a scribe wheel includes a scribing process of contacting a scribe wheel with a cutting target line of the mother substrate and forming a scribe line having a predetermined depth along the cutting target line, and a mother substrate. A cracking process propagates along a scribe line by applying a physical impact to the breaker to break the parent substrate into a unit substrate.

A method of cutting a mother substrate using a laser beam includes a scribing process of irradiating a scribe laser beam along a cutting line of the mother substrate to form a scribe line and quenching the heated scribe line, and a brake along the scribe line. It is made of a braking step of cutting the parent substrate into a unit substrate by irradiating a laser beam for.

An object of the present invention is to provide a scriber capable of improving the quality of a scribe line and a scribing apparatus and method using the same.

The objects of the present invention are not limited thereto, and other objects not mentioned can be clearly understood by those skilled in the art from the following description.

In order to achieve the above object, a scriber according to an embodiment of the present invention, the head including a scribing wheel to form a scribe line on the substrate; And a rotation driver configured to rotate the head about a rotation center axis perpendicular to the substrate, wherein the rotation driver comprises: a first block coupled to a drive shaft of a drive motor; A second block disposed to face the first block and coupled to the head and having a coupling groove having a gear shape; And a coupling portion having a gear shape, one end of which is coupled to the first block and the other end of which is inserted into the coupling groove of the second block, between the tooth surface of the coupling groove and the tooth surface of the coupling portion. A gap is provided for).

In order to achieve the above object, a scribing apparatus according to an embodiment of the present invention, the support member is placed and linearly movable; A scriber provided on a movement path of the support member, the scriber forming a scribe line on the substrate, the scriber comprising: a head including a scribing wheel forming a scribe line; And a rotation driver configured to rotate the head about a rotation center axis perpendicular to the parent substrate, wherein the rotation driver comprises: a first block coupled to a drive shaft of a drive motor; A second block disposed to face the first block and coupled to the head and having a coupling groove having a gear shape; And a coupling portion having a gear shape, one end of which is coupled to the first block and the other end of which is inserted into the coupling groove of the second block, between the tooth surface of the coupling groove and the tooth surface of the coupling portion. A gap is provided for).

According to an embodiment of the present disclosure, the apparatus may further include a linear moving unit for linearly moving the scriber in a direction perpendicular to the moving direction of the support member.

According to an embodiment of the present invention, the scriber may include a plate coupled to the mobile unit; It may further include a horizontal drive unit mounted to the plate, for linearly moving the scriber in the movement direction of the support member.

In order to achieve the above object, the scribing method according to an embodiment of the present invention, by providing a degree of freedom to the scribing wheel to enable a fine rotation based on the rotation center perpendicular to the substrate To form a scribe line on the substrate.

According to an embodiment of the present invention, while moving the scribing wheel in a first direction and at the same time in a second direction perpendicular to the first direction, a scribe line is formed in an oblique direction on the misaligned substrate. can do.

According to the present invention, the tilting of the scribing wheel can be corrected.

According to the present invention, the quality of the scribe line in the diagonal direction can be improved when misaligning the substrate.

The drawings described below are for illustrative purposes only and are not intended to limit the scope of the invention.
1 is a diagram illustrating an example of a mother substrate.
2 is a view schematically showing the configuration of a substrate cutting device according to the present invention.
3 is a perspective view illustrating an example of a scribing apparatus according to the present invention provided in the scribing unit of FIG. 2.
4 is an enlarged view of a portion “A” of FIG. 3.
FIG. 5 is an enlarged view of the scriber of FIG. 4.
6 is a cross-sectional view of the head and the rotational drive of FIG. 5.
FIG. 7 is a cross-sectional view taken along line BB ′ of FIG. 6.
8 is a view illustrating a process in which tilting of a wheel is corrected.
9 is a view illustrating a process of forming a scribe line in an oblique direction.

Hereinafter, a scriber according to a preferred embodiment of the present invention, and a scribing apparatus and method using the same will be described in detail with reference to the accompanying drawings. First, in adding reference numerals to the components of each drawing, it should be noted that the same reference numerals are assigned to the same components as much as possible, even if shown on different drawings. In addition, in describing the present invention, when it is determined that the detailed description of the related well-known configuration or function may obscure the gist of the present invention, the detailed description thereof will be omitted.

(Example)

1 is a diagram illustrating an example of a mother substrate.

Referring to FIG. 1, the mother substrate 1 may be a panel for a thin film transistor-liquid crystal display (TFT-LCD). The mother substrate 1 is composed of a first mother substrate 2 and a second mother substrate 3 having a generally rectangular plate shape. The first mother substrate 2 and the second mother substrate 3 are stacked up and down. A plurality of unit substrates 2a and 3a are formed on the first and second mother substrates 2 and 3, and the unit substrates 2a and 3a are planes of the first and second mother substrates 2 and 3. It may be arranged in a grid shape on the phase. The first mother substrate 2 is a substrate on which a thin film transistor substrate is formed, and the second mother substrate 3 is a substrate on which a color filter substrate is formed. The mother substrate 1 may be a panel for organic light emitting diodes (OLED) display, which is a kind of panel for a flat panel display.

2 is a view schematically showing the configuration of a substrate cutting device according to the present invention. Referring to FIG. 2, the substrate cutting apparatus 10 is for cutting a parent substrate (reference numeral 1 of FIG. 1) into a plurality of unit substrates, and includes a loading unit 11, a scribing unit 12, and a braking unit. The unit 13 and the unloading unit 14 is included. The loading unit 11, the scribing unit 12, the breaking unit 13, and the unloading unit 14 may be sequentially arranged in a line. The mother substrate 1 flows into the substrate cutting device 10 through the loading unit 11, and is separated into a plurality of unit substrates sequentially through the scribing unit 12 and the breaking unit 13. It flows out of the substrate cutting device 10 through the loading unit 14. The scribing unit 12 forms a scribe line along the arrangement direction of the unit substrates on the first mother substrate 2 or the second mother substrate 3 using the scribing apparatus 12a to be described later. do. The breaking part 13 cuts the unit substrates from the mother substrate 1 by applying a force to a scribe line portion formed in the mother substrate 1 using a break bar (not shown). Meanwhile, the inverting portion 15 may be disposed on one side of the scribing portion 12. The inverting unit 15 serves to change the position of one surface on which the scribe line is formed and the position of the other surface on which the scribe line is not formed. That is, when a scribe line is first formed on the first mother substrate 2 of the mother substrate 1, the first mother substrate 2 and the second mother substrate are formed to form a scribe line on the second mother substrate 3. Change the position of (3).

3 is a perspective view illustrating an example of a scribing apparatus according to the present invention provided in the scribing unit of FIG. 2, and FIG. 4 is an enlarged view of portion “A” of FIG. 3.

Hereinafter, the first direction I is a linear movement direction of the supporting member 100 to be described later, and the second direction II is a direction perpendicular to the first direction I in the planar arrangement structure of the scribing apparatus 12. The third direction III is a direction perpendicular to the first direction I and the second direction II. The first direction I and the second direction II correspond to any one of the arrangement directions of the unit substrates 2a and 3a arranged in a lattice shape on the mother substrate 1, respectively.

3 and 4, the scribing apparatus 12 includes a support member 100, a scriber 200, and a moving unit 300. The support member 100 supports the parent substrate 1. The support member 100 linearly moves the mother substrate 1 along the first direction (I). The scriber 200 contacts the mother substrate 1 placed on the support member 100 to form a scribe line on the mother substrate 1. The moving unit 300 moves the scriber 200 in the second direction (II).

During the scribing process in the first direction (I), the scriber 200 is fixed, and the mother substrate 1 is linearly moved along the first direction (I). During the scribing process in the second direction (II), the mother substrate 1 is fixed, and the scriber 200 is linearly moved along the second direction (II).

The support member 100 includes a table 120 and a first drive member 140. The mother substrate 1 is placed on the table 120. The first driving member 140 linearly moves the table 120 in the first direction (I).

Table 120 has an upper plate 122 and a lower plate 124. The upper plate 122 and the lower plate 124 are flat and generally rectangular in shape, and the upper plate 122 is located above the lower plate 124. The parent substrate 1 is placed on the upper plate 122. Top plate 122 has an area that is similar to or greater than the parent substrate 1. A plurality of holes (not shown) connected to a vacuum line (not shown) are formed on the upper surface of the upper plate 124, and the mother substrate 1 is fixed to the upper plate 124 by vacuum pressure. In addition, the upper plate 122 or the lower plate 124 may additionally be provided with a clamp (not shown) for fixing the parent substrate 1 to the upper plate 122.

The first driving member 140 linearly moves the table 120 in the first direction (I). The first driving member 140 has a guide 142, a bracket 144, and a driver (not shown). The guide 142 is elongated along the first direction I and is mounted at the center on the base B. The guide 142 has the same width along the longitudinal direction. The upper surface of the guide 142 is provided flat, and each side of the guide 142 is provided with a groove 141 elongated in the longitudinal direction.

The table 120 is coupled to the guide 142 by the bracket 144. The bracket 144 has a bottom plate 145, a support plate 147, and a coupling plate 149. The bottom plate 145 has a flat rectangular plate shape and is located on the guide 142. The support plate 147 is vertically fixed to the upper surface of the bottom plate 145 and fixedly coupled to the lower plate 124 of the table 120 to support the table 120. Two support plates 147 are provided, and are arranged side by side on both sides of the top surface of the bottom plate 145. The coupling plate 149 has a side plate 149a vertically coupled to the bottom of the bottom plate 145 and an insertion plate 149b extending vertically inwardly from the bottom of the side plate 149a. The insertion plate 149b is inserted into the groove 141 formed on the side of the guide 142. Two coupling plates 149 are provided to face each other.

The driver provides a driving force so that the table 120 is guided by the guide 142 to move linearly in the second direction (II). As a driver, an assembly including a motor and a screw can be used. Optionally an assembly comprising a combination of a motor, belt and pulley or an assembly including a linear motor can be used as the driver. Detailed configurations of the various assemblies described above are well known to those skilled in the art, and thus detailed descriptions thereof will be omitted.

The moving unit 300 linearly moves the scriber 200 in the second direction (II). The moving unit 300 includes vertical supports 310, a guide member 320, a bracket 330, and a second driving member 340.

The vertical supports 310 are disposed to be spaced apart by a predetermined distance in the second direction II. The vertical supports 310 are disposed such that the parent substrate 1 may pass between the vertical supports 310 when the parent substrate 1 linearly moves along the first direction I. FIG. Guide member 320 is fixed to the top of the vertical support (310). The upper and lower surfaces of the guide member 320 are provided with grooves 322 extending along the length direction.

The scriber 200 is coupled to the guide member 320 by the bracket 330. The bracket 330 has a support plate 332 and a coupling plate 334, as shown in FIG. 4. The support plate 332 has a flat rectangular plate shape and is located on one side of the guide member 320. The coupling plate 334 includes a side plate 334a protruding perpendicularly to the support plate 332 from the upper side and the lower side of the support plate 332, and an insertion plate 334b inserted into the groove 322 formed in the guide member 320. Have

The second driving member 340 provides a driving force so that the bracket 330 is linearly moved along the guide member 320. The second drive member 340 has a lead screw 342 disposed to be parallel to the guide member 320. The bracket 330 is mounted on the lead screw 342 so as to be linearly movable. One end of the lead screw 342 is connected to the driver 343 to provide a rotational force. As the driver 343, a driver such as a motor may be used. Although the assembly including the motor and the lead screw as the second driving member 340 has been described as an example, various drivers capable of providing a linear driving force to the brackets 330 such as a cylinder may be used.

The scriber 200 is mounted on the support plate 332 of the bracket 330 to move up and down. According to one example, the support plate 332 is formed with guide grooves 331 having a slit shape in the third direction (III), and the scriber 200 on a support shaft (not shown) inserted into the guide groove 331. Each combined.

FIG. 5 is an enlarged view of the scriber of FIG. 4.

Referring to FIG. 5, the scriber 200 includes a movable plate 210, a head 220, a rotation driver 240, and a horizontal driver 260. The movable plate 210 is mounted to the support plate 332 of the bracket 330 to move up and down, and the horizontal drive unit 260 is coupled to the movable plate 210. The head 220 is rotated about a rotation center axis perpendicular to the substrate by the rotation driver 240, and the horizontal driver 260 linearly moves the rotation driver 240 in the first direction (I).

6 is a cross-sectional view of the head and the rotational drive of FIG. 5, and FIG. 7 is a cross-sectional view taken along line BB ′ of FIG. 6. 6 and 7, the head 220 includes a body 222, a wheel holder 224, and a scribing wheel 226. The scribing wheel 226 rotates in contact with the mother substrate 1 during the scribing process to form a scribe line on the mother substrate 1. As the scribing wheel 222, a wheel made of diamond may be used. The scribing wheel 226 is supported by the wheel holder 224, which is coupled to the body 222. An inside of the body 222 is provided with a vibrator (not shown) for applying vibration to the scribing wheel 226, an ultrasonic vibrator may be used as the vibrator (not shown).

The rotary drive 240 has a housing 241, in which the drive 242, the follower 246, and the shaft coupling 250 are provided. The driving unit 242 includes a driving motor 243 provided on the inside of the housing 241 and a first block 245 connected to the driving shaft 244 of the driving motor 243. The drive shaft 244 of the drive motor 243 is aligned in the vertical direction. The follower 246 is coupled to the drive 242 by the shaft coupling 250. The follower 246 is spaced apart from the lower part of the first block 245 and coupled to the first block 245 by the shaft coupling part 250 and the second block 247. A rotation axis 248 coupled perpendicularly to the bottom surface, and a head plate 249 coupled to the bottom of the rotation axis 248. The head 220 is coupled to the lower surface of the head plate 249.

The rotational force of the drive motor 243 is driven by the drive shaft 244, the first block 245, the shaft coupling part 250, the second block 247, the rotation shaft 248, and the head plate 249. 220). The head 220 is driven by the rotation drive unit 240 so that the scribing wheel 226 may proceed in the process direction, that is, the scribing wheel 226 may travel in the first direction (I) or the second direction (II). Can be rotated.

The upper end of the shaft coupling part 250 is coupled to the first block 245 of the driving unit 242, and the lower end of the shaft coupling part 250 is coupled to the second block 247 of the follower 242. As shown in FIG. 7, the shaft coupling part 250 has a generally gear shape. In detail, the shaft coupling part 250 has a cylindrical body 252 and protrusions 254 protruding radially from the body 252. The protrusions 254 may protrude to have a wide area while going from the center to the outside.

The second block 247 into which the shaft coupling part 250 is inserted has a body 247-1 and coupling grooves 247-2 and 247-3 formed in the body 247-1. The coupling grooves 247-2 and 247-3 may be formed in a gear shape. Specifically, the first coupling groove 247-2 is formed in a cylindrical shape at the center of the body 247-1, and the body 252 of the shaft coupling portion 250 is formed in the first coupling groove 247-2. Is inserted. The second coupling grooves 247-3 are disposed radially about the first coupling groove 247-2 and are formed to communicate with the first coupling grooves 247-2. The second coupling grooves 247-3 may have the same shape as the protrusions 254 of the shaft coupling part 250, and a constant gap is formed between the second coupling grooves 247-3 and the protrusions 254 of the shaft coupling part 250. It is formed larger than the protrusions 254 of the shaft coupling portion 250.

Side surfaces of the protrusions 254 facing outward from the center of the body 252 of the shaft coupling part 250 and a second facing outward from the center of the first coupling groove 247-2 of the second block 247. A gap T for backlash is formed between the side surfaces of the coupling grooves 247-3. When the gap T is formed between the protrusions 254 and the second coupling grooves 247-3, the second block 247 may rotate as much as the gap T about the axial coupling part 250. Thus, the head 220 coupled to the second block 247 has a rotational degree of freedom.

Thus, as shown in FIG. 8, when the scribing wheel 226 is tilted at a predetermined angle θ1 in the initial state, the tilting of the scribing wheel 226 may be corrected. If no gap is formed between the shaft coupling part 250 and the second block 247, the second block 247 is fixed to the shaft coupling part 250, and the scribing wheel 226 is tilted. In this state, the scribe line is formed while traveling in one direction. This lowers the quality of the scribe line. However, according to the present invention, the tilt angle of the scribing wheel 226 as the scribing wheel 226 travels in one direction due to the gap T between the shaft coupling part 250 and the second block 247. Is gradually decreased from θ1 to θ2, and finally there is no tilting, so that the quality of the scribe line can be improved by correcting the tilting.

9 is a view illustrating a process of forming a scribe line in an oblique direction.

Referring to FIG. 9, the substrate may be placed on the table (No. 120 of FIG. 3) while being inclined by a predetermined angle Φ. In order to form a diagonal scribe line inclined by a predetermined angle Φ on the substrate, the head 220 is moved in the second direction (II) by the moving unit 300, and at the same time, the horizontal drive unit 260 Thereby moving in the first direction (I). At this time, since the scribing wheel 226 has a rotational degree of freedom due to the gap formed between the shaft coupling part 250 and the second block 247, the scribing wheel 226 can proceed while tilting in an oblique direction. have.

The foregoing description is merely illustrative of the technical idea of the present invention, and various changes and modifications may be made by those skilled in the art without departing from the essential characteristics of the present invention. Therefore, the embodiments disclosed in the present invention are not intended to limit the technical idea of the present invention but to describe the present invention, and the scope of the technical idea of the present invention is not limited by these embodiments. The protection scope of the present invention should be interpreted by the following claims, and all technical ideas within the equivalent scope should be interpreted as being included in the scope of the present invention.

100: support member 200: scriber
210: movable plate 220: head
240: rotary drive unit 250: shaft coupling portion
260: horizontal drive unit 300: moving unit

Claims (6)

A head comprising a scribing wheel forming a scribe line on the substrate; And
A rotation driver for rotating the head about a rotation center axis perpendicular to the substrate,
The rotation drive unit,
A first block coupled to a drive shaft of the drive motor;
A second block disposed to face the first block and coupled to the head and having a coupling groove having a gear shape; And
Has a gear shape, and one end is coupled to the first block, and the other end is coupled to the coupling groove of the second block,
And a clearance for backlash is provided between the tooth surface of the coupling groove and the tooth surface of the coupling portion. A support member on which the substrate is placed and linearly movable;
A scriber provided on a movement path of the support member, the scriber forming a scribe line on the substrate,
The scriber,
A head comprising a scribing wheel forming a scribe line; And
A rotation drive unit configured to rotate the head about a rotation center axis perpendicular to the parent substrate,
The rotation drive unit,
A first block coupled to a drive shaft of the drive motor;
A second block disposed to face the first block and coupled to the head and having a coupling groove having a gear shape; And
Has a gear shape, and one end is coupled to the first block, and the other end is coupled to the coupling groove of the second block,
And a clearance for backlash is provided between the tooth surface of the coupling groove and the tooth surface of the coupling portion. The method of claim 2,
And a linear moving unit for linearly moving the scriber in a direction perpendicular to the moving direction of the support member. The method of claim 3, wherein
The scriber,
A plate coupled to the mobile unit;
And a horizontal driving unit mounted to the plate and linearly moving the scriber in the moving direction of the support member. And a scribing line is formed on the substrate by providing a degree of freedom in the scribing wheel so that the scribing wheel can rotate finely with respect to the center of rotation perpendicular to the substrate. The method of claim 5, wherein
Scribing, while moving the scribing wheel in a first direction and simultaneously moving in a second direction perpendicular to the first direction to form a scribe line in an oblique direction on the misaligned substrate. Way.

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