KR20110005084A - Board storage container, and board inspectionapparatus with the same - Google Patents

Abstract

PURPOSE: A substrate storage container and a substrate inspection apparatus with the same are provided to improve the efficiency of inspecting a substrate by loading the substrate in the substrate inspection apparatus through a cassette suitable the size of the substrate. CONSTITUTION: A substrate storage container comprises a cassette(10) and a housing(20). The cassette accepts a plurality of substrates. A plurality of slots are formed in the housing. The housing comprises a support plate(21) and pair of first side plates(24). A pair of first side plates is arranged on the top surface of the support plate is opposite to each other. A clamp unit is formed in the top surface of the support plate and grips a substrate storage container when the substrate storage container is moved.

Description

Substrate storage container and a substrate inspection device having the same {BOARD STORAGE CONTAINER, AND BOARD INSPECTIONAPPARATUS WITH THE SAME}

The present invention relates to a container for storing a substrate, and a substrate inspection apparatus for loading or unloading a substrate using the substrate.

Memory is a general term used to temporarily or permanently store data or instructions used in computers, communication systems, image processing systems, and the like, and typically includes semiconductors, tapes, disks, and optical methods. Currently, semiconductor memory is the majority.

When memory is actually used in a system, it is produced as a module. A module is a set of devices having a single function, and various semiconductor devices are mounted on a printed circuit board (PCB), connected to a panel, etc. by tabs, which are a plurality of connecting pins, and according to the structure of the tabs, a single core (SIMM) It can be classified into a -line memory module and a dual in-line memory module (DIMM). In order to produce such a module, it is necessary to confirm the abnormality of the pattern formed in the printed circuit board before mounting the component element on the printed circuit board.

The present invention is to provide a substrate storage container capable of improving the productivity of the substrate inspection process, and a substrate inspection apparatus having the same.

The objects of the present invention are not limited thereto, and other objects not mentioned can be clearly understood by those skilled in the art from the following description.

In order to achieve the above object, the substrate storage container according to the present invention accommodates a plurality of substrates stacked in the vertical direction, the upper cassette is open; And a housing having a plurality of slots in which the cassette is vertically stacked.

In the substrate storage container according to the present invention having the configuration as described above, the housing is a support plate; And a pair of first side plates installed vertically to face each other on the upper surface of the support plate and protruding the slots in a direction perpendicular to the opposite surface.

The slots may be provided in an area between two vertical edges on opposite surfaces of the first side plates.

The housing may further include a second side plate provided perpendicular to the arrangement direction of the slots and coupled to the vertical edges of either side of the first side plates.

The housing may further include a protrusion protruding in the protruding direction of the slots from the vertical edges on the other side of the first side plates.

The housing may further include a gripping portion installed on the support plate so as to be symmetrical about the first side plates.

The support plate may be formed through the first holes through which the pin member for fixing the support plate is inserted.

The cassette includes a first plate of a rectangular shape supported by the slot of the housing; Second plates extending in a direction perpendicular to the first plate from edges of the first plate, facing the longitudinal direction of the slot; And first supporting plates extending in a direction facing each other from lower ends of the second plates and supporting the substrates.

The cassette may further include a second support plate extending in a direction perpendicular to the first plate from a lower center portion of the first plate and supporting the substrates.

Second holes may be formed at a position on the support plate corresponding to an area between the first base plates and the second base plate, into which a lifting mechanism for lifting the substrates is inserted.

The cassette may further include side support members installed on inner surfaces of the second plates to face each other, and support side surfaces of the substrates supported by the first and second support plates.

The cassette may further include a partition wall that has a shape corresponding to the second plates and is detachably provided between the first plate and the second support plate.

In order to achieve the above object, a substrate accommodating container according to the present invention includes cassettes for accommodating the substrates such that the substrates are stacked in a vertical direction; And a housing having a space in which the cassettes are accommodated, wherein each of the cassettes is provided to be detachably inserted into the housing by a slide method.

In the substrate storage container according to the present invention having the configuration as described above, the housing is spaced apart so as to face each other, the pair includes a pair of first side plates having a slot in the longitudinal direction of the vertical direction, each of the cassettes A first plate supported by the slot and slidable along the slot; And second plates connected to both ends of the first plate, wherein the first plate and the second plates may be provided to accommodate the substrates in a space provided therebetween.

The first plate and the second plate may be provided in a 'c' shape when combined with each other when viewed from the top.

The cassette may further include a partition wall positioned between the second plates to separate the space between the second plates and detachably provided on the first plate.

The cassettes may be provided to be positioned side by side in a second direction perpendicular to the arrangement direction of the first side plates.

In order to achieve the above object, a substrate inspection apparatus according to the present invention includes a loading unit on which a first container containing a substrate is placed; An inspection unit for inspecting the substrate by irradiating light to the substrate transferred from the loading unit; And an unloading unit in which a second container in which the substrate inspected by the inspection unit is accommodated is placed, wherein the first and second containers accommodate a plurality of the substrates stacked in an up and down direction, the cassette having an open top; And a housing having slots in which the cassette is vertically stacked.

In the substrate inspection apparatus according to the present invention having the configuration as described above, the housing is a support plate; And a pair of first side plates installed vertically to face each other on the upper surface of the support plate and protruding the slots in a direction perpendicular to the opposite surface.

The slots are provided in an area between two vertical edges on opposite sides of the first side plates, the housing being provided perpendicular to the arrangement direction of the slots, and coupled to the vertical edges on either side of the first side plates. A second side plate; And a protrusion protruding in the protruding direction of the slots from the vertical edges on the other side of the first side plates.

The cassette includes a first plate of a rectangular shape supported by the slot of the housing; Second plates extending in a direction perpendicular to the first plate from edges of the first plate, facing the longitudinal direction of the slot; First supporting plates extending in a direction facing each other from lower ends of the second plates and supporting the substrates; And a second support plate extending in a direction perpendicular to the first plate from a lower center portion of the first plate and supporting the substrates.

The cassette may further include side support members installed on inner surfaces of the second plates to face each other, and support side surfaces of the substrates supported by the first and second support plates.

The cassette may further include a partition wall that has a shape corresponding to the second plates and is detachably provided between the first plate and the second support plate.

The support plate may be formed through the first holes through which the pin member for fixing the support plate is inserted.

Second holes may be formed at a position on the support plate corresponding to an area between the first base plates and the second base plate, into which a lifting mechanism for lifting the substrates is inserted.

The loading unit includes a plurality of first loading ports in which the first container containing the substrates to be inspected is placed and arranged in a row; A plurality of first export ports, in which the first empty container is placed, arranged in line with the first import ports; A process port disposed between the first carrying ports and the first carrying ports, in which the first container containing the substrates transferred to the inspection unit is placed; A loading robot for transferring the first container between the first loading ports, between the process port and the first loading port adjacent to the processing port and the first loading port, and between the first loading ports; It may include.

The loading unit is disposed below the process port, and further includes an elevating mechanism for elevating the substrate housed in the first container placed in the process port, wherein the elevating mechanism has a longitudinal direction of the elevating mechanism. 1 lifting rods aligned with the holes formed through the support plate of the container; And it may include a lifting drive member for linearly driving the lifting rods in the vertical direction.

An alignment unit disposed between the loading unit and the inspection unit to align the substrates; And a substrate transfer robot for transferring the substrates from the loading unit to the alignment unit, wherein the alignment unit includes an alignment table on which the substrates transferred by the substrate transfer robot are placed; A first alignment mechanism for aligning the substrates by pressing first side surfaces facing the first direction of the substrates on the alignment table; And a second alignment mechanism for aligning the substrates by pressing second side surfaces facing the second direction perpendicular to the first direction of the substrates placed on the alignment table.

The first alignment mechanism may include a pair of first alignment rods having a longitudinal direction toward the second direction, spaced apart in the first direction, and movable in a direction approaching each other.

The first alignment mechanism further comprises a pair of second alignment rods longitudinally oriented in the second direction, positioned between the first alignment rods, and movable in a direction away from each other toward the first alignment rod. It may include.

Projections may be formed on opposite surfaces of the second alignment rods, and the second alignment rods may be disposed adjacent to each other such that the protrusions cross each other.

Pressing protrusions for pressing the first side of the substrate may be formed on the lower surface of the protrusions.

The plurality of first alignment rods and the second alignment rods may be arranged side by side in the first direction.

The inspection unit may include a first inspection unit inspecting the lower surfaces of the substrates and a second inspection unit inspecting the upper surfaces of the substrates, and the first inspection unit and the second inspection unit may be arranged in a line.

The first inspection unit may include: a first adsorption table for vacuum adsorption of upper surfaces of the substrates placed on the alignment table; A first transfer robot for linearly moving the first suction table; A first luminaire disposed below the first suction table and irradiating light onto a lower surface of the substrates moved by the first transfer robot; And a first photographing apparatus photographing a lower surface of the substrates to which the light of the first lighting apparatus is irradiated.

The first inspection unit is disposed between the alignment unit and the first lighting fixture, the first substrate cleaning roller for cleaning the foreign matter on the lower surface of the substrate in contact with the lower surface of the substrate moved by the first transfer robot It may further include.

The second inspection unit is located below the first adsorption table, the second adsorption table for receiving the substrates adsorbed on the first adsorption table for vacuum adsorption of the lower surface of the substrates; A second transfer robot for linearly moving the second suction table; A second lighting device disposed above the second suction table and irradiating light onto upper surfaces of the substrates moved by the second transfer robot; The display apparatus may include a second photographing apparatus photographing the upper surfaces of the substrates to which the light of the second lighting apparatus is irradiated.

The second inspection unit is disposed between the first inspection unit and the second lighting device, the second substrate cleaning roller for cleaning the foreign matter on the upper surface of the substrate in contact with the upper surface of the substrate moved by the second transfer robot It may further include.

The apparatus may further include a sorting-loading robot configured to classify the substrates as good or defective according to the inspection results of the first and second inspection units, and selectively load the substrates into the second container placed on the unloading unit.

The unloading unit includes a plurality of second loading ports on which the second empty container is disposed and arranged in a line; A plurality of discharge rollers arranged in line with the second loading ports; A loading port disposed between the second loading ports and the discharge rollers, in which the second container in which the substrates transported by the sorting-loading robot is stored is placed; A first unloading robot for transferring said second container between said second loading ports and between said loading port and said second loading port adjacent to said loading port; And a second unloading robot for transferring the second container placed on the loading port onto the unloading rollers.

The plurality of discharge rollers may be disposed to be inclined downward while moving along the arrangement direction.

The unloading unit is disposed below the loading port, and further includes a lowering mechanism for lowering the substrate accommodated in the second container placed at the loading port, wherein the lowering mechanism has a longitudinal direction thereof in a vertical direction. Falling rods aligned with the holes formed through the support plate of the second container; And a descending driving member configured to linearly drive the descending rods in a vertical direction.

According to the present invention, by providing a cassette suitable for the size of the substrate to be inspected individually and loading the substrate into the substrate inspection apparatus using the cassette, the productivity of the substrate inspection process can be improved.

Hereinafter, a substrate accommodating container and a substrate inspecting apparatus having the same will be described in detail with reference to the accompanying drawings. First, in adding reference numerals to the components of each drawing, it should be noted that the same reference numerals are assigned to the same components as much as possible, even if shown on different drawings. In the following description of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear.

(Example)

1 is a plan view of an optical inspection apparatus 1 according to the present invention, and FIG. 2 is a side view of the optical inspection apparatus 1 of FIG. 1.

Hereinafter, the arrangement direction of the equipment on the plane of FIG. 1 is the first direction (I), the direction perpendicular to the first direction (I) on the same plane is the second direction (II), and the first direction (I) and the first direction. The direction perpendicular to the second direction (II) is referred to as the third direction (III).

The optical inspection device 1 inspects a printed circuit board (hereinafter referred to as a substrate) of a memory module such as a dual in-line memory module (DIMM) or a small outline dual in-line memory module (SO-DIMM). .

1 and 2, the optical inspection apparatus 1 may include a loading unit 100, a substrate transfer robot 200, an alignment unit 300, first and second inspection units 400 and 500, and a classification-loading robot ( 600 and an unloading part 700. The loading part 100 and the unloading part 700 are disposed in the length direction toward the second direction (II) and spaced apart in parallel to each other. The alignment unit 300 and the first and second inspection units 400 and 500 are sequentially disposed along the first direction I between the loading unit 100 and the unloading unit 600. The alignment unit 300 is disposed adjacent to the loading unit 100, the second inspection unit 500 is disposed adjacent to the unloading unit 700, and the first inspection unit 400 includes the alignment unit 300 and the first inspection unit. It is arrange | positioned between the 2 test | inspection parts 500. The substrate transfer robot 200 is disposed in the upper space of the loading unit 100 and the alignment unit 300, and the classification-loading robot 600 is disposed in the upper space of the second inspection unit 500 and the unloading unit 700. do.

In the loading unit 100, containers M in which the substrates S are inspected are placed. The substrate transfer robot 200 transfers the substrates S accommodated in the containers M to the alignment unit 300. The alignment unit 300 aligns the substrates S. The first inspection unit 400 receives the substrates S from the alignment unit 300, and inspects whether there is an abnormality in the pattern formed on the lower surfaces of the substrates S. The second inspection unit 500 receives the substrates S from the first inspection unit 400 and inspects whether there is an abnormality in the pattern formed on the upper surface of the substrate S. The sorting-loading robot 600 classifies the substrates S into the good S1 and the bad S2 according to the inspection results of the first and second inspection units 400 and 500, and places the container on the unloading unit 700. The substrates are selectively loaded into the fields M1 and M2. The unloading unit 700 carries out the containers M1 and M2 to the outside.

FIG. 3 is a perspective view of the containers M, M1 and M2 of FIGS. 1 and 2, FIG. 4 is a top view of the container of FIG. 3, and FIG. 5 shows the container with the cassette removed. The containers M used in the loading part 100 of FIGS. 1 and 2 and the containers M1 and M2 used in the unloading part 700 have the same structure.

3 to 5, the container M includes a cassette 10 and a housing 20. The cassette 10 accommodates a plurality of substrates stacked in the vertical direction, and is vertically loaded in the slots 23a and 23b formed in the housing 20. The cassette 10 has a structure in which the top is open, and the substrates can be carried in and out through the open top of the cassette 10.

The housing 20 has a supporting plate 21. The support plate 21 may be a plate having a generally rectangular shape, and a pair of first side plates 22a and 22b are installed on an upper surface of the support plate 21. The first side plates 22a and 22b may be rectangular plates, and the first side plates 22a and 22b may be vertically installed to face each other on the upper surface of the support plate 21. A plurality of slots 23a and 23b protrude in a direction perpendicular to the inner surface of the first side plates 22a and 22b facing each other, that is, the inner surface thereof. The slots 23a and 23b may be detachably coupled to the first side plates 22a and 22b and may be integrally formed with the first side plates 22a and 22b.

Slots 23a and 23b may be provided in the area between the two vertical edges on opposite surfaces of the first side plates 22a and 22b. The second side plates 24 provided perpendicular to the arrangement direction of the slots 23a and 23b are coupled to the vertical edges of either side of the first side plates 22a and 22b, and the first side plates 22a. Protruding portions 25a and 25b may protrude in the protruding directions of the slots 23a and 23b on the vertical edges of the other side of 22b.

The support plate 21 may be provided with gripping portions 26a and 26b capable of gripping the container M when the container M is moved by hand. The grip portions 26a and 26b may be installed on the support plate 21 to be symmetrical about the first side plates 22a and 22b. In addition, first holes 27 may be formed in the support plate 21 so that pin members (not shown) fixing the support plate 21 may be inserted therethrough. For example, the first holes 27a and 27b may be formed in an area adjacent to an edge of the support plate 21 along the diagonal direction of the support plate 21.

The cassette 10 includes a first plate 11, second plates 12a and 12b, first support plates 13a and 13b, and a second support plate 14. The first plate 11 may be a square plate and may be supported by the slots 23a and 23b of the housing 20. The second plates 12a and 12b extend from the edges of the first plate 11 in the longitudinal direction of the slots 23a and 23b in a direction perpendicular to the first plate 11 and the first support plates. 13a and 13b extend in a direction facing each other from the lower ends of the second plates 12a and 12b. The second support plate 14 extends perpendicular to the first plate 11 from the lower center of the first plate 11.

On the other hand, the second holes 28 may be formed at a position corresponding to the area between the first support plates 13a and 13b and the second support plate 14 on the support plate 21 of the housing 20. A lifting mechanism (not shown) and a lowering mechanism (not shown), which will be described later, may enter the container M through the second holes 28 to lift or lower the substrates.

The substrates accommodated in the cassette 10 may be printed circuit boards of a memory module such as a dual in-line memory module (DIMM) or a small outline dual in-line memory module (SO-DIMM). The length of the SO-DIMM substrate is smaller than the length of the DIMM substrate, and the cassette 10 should have a structure that can correspond to the length of the substrate. For this purpose, the partition wall 15 is provided in the cassette 10 for SO-DIMM shown in FIG. The partition wall 15 has a shape corresponding to the second plates 12a and 12b and may be detachably installed between the first plate 11 and the second support plate 14. In addition, the partition wall 15 may be integrally fixed between the first plate 11 and the second support plate 14.

With this structure, the short-length SO-DIMM substrate can be supported by the first support plate 13a and the second support plate 14, and the second support plate 14 and the first support plate 13b. Can be supported by. That is, the cassette 10 of FIG. 5 can accommodate the SO-DIMM substrate in two rows.

The length of the DIMM substrate is longer than that of the SO-DIMM substrate, and the cassette 10 'of FIG. 6 is a cassette in which the substrate for the DIMM can be stored. Lower surfaces of both ends of the DIMM substrate may be supported by the first support plates 13a and 13b, and a lower surface of the center portion of the DIMM substrate may be supported by the second support plates 14. In addition, the cassette 10 ′ of FIG. 6 may be provided with side support members 16 for supporting both ends of the DIMM substrate. The side support members 16 may be installed to face each other on the inner surfaces of the second plates 12a and 12b. The side support member 16 has a rectangular plate 16-1 having a length corresponding to the length of the second plates 12a and 12b, and a protrusion 16- protruding from one surface of the plate 16-1. Has 2). The protrusion 16-2 may be formed to be the same as the length of the plate 16-1, and a plurality of protrusions 16-2 may be provided on the plate 16-1.

Hereinafter, the board | substrate test | inspection apparatus which advances the test | inspection process of a board | substrate using the container which has the above structure is demonstrated in detail. The inspection target substrate accommodated in the container may be a substrate for SO-DIMM or a substrate for DIMM, and different kinds of cassettes 10 and 10 'may be selected and used according to the type of substrate.

7 is an enlarged view of the loading unit of FIG. 1. 8 is a side view of the loading unit of FIG. 7. 7 and 8, the loading unit 100 includes first import ports 110a, 110b, 110c and 110d, first export ports 120a and 120b, and a process port 130. . The first loading ports 110a, 110b, 110c, and 110d are arranged in two rows along the second direction (II), and the first loading ports 110a, 110b, 110c, and 110d contain substrates to be inspected. 1 container (M) is placed. The first export ports 120a and 120b are arranged in two rows along the second direction II in parallel with the first import ports 110a, 110b, 110c and 110d, and the first import ports 110a and 110b. , And spaced apart from the predetermined intervals 110c and 110d. An empty first container M is placed in the first discharge ports 120a and 120b. The process port 130 is disposed between the first import ports 110a, 110b, 110c and 110d and the first export ports 120a and 120b, and is transferred to the alignment unit 300 to the process port 130. The first container M in which the substrates to be stored is placed.

The first container M is sequentially moved on the first loading ports 110a, 110b, 110c, and 110d and then placed in the process port 130, and when all the received substrates are transferred to the alignment unit 300, the process is performed. The port 130 is sequentially moved to the first export ports 120a and 120b.

A first loading robot 150 is disposed below the first loading ports 110a, 110b, 110c, and 110d, and a second loading robot 160 is disposed below the first loading ports 120a and 120b. do. The first loading robot 150 includes a first loading port 110a, 110b, 110c, 110d and a first loading port 110d adjacent to the processing port 130 and a processing port 130. Deliver the vessel (M). The second loading robot 160 includes a first container M between the process port 130 and the first export port 120a adjacent to the process port 130, and between the first export ports 120a and 120b. To pass.

The first loading robot 150 has a lifting plate 156 having a size corresponding to the opening of the first loading ports 110a, 110b, 110c and 110d. Pin members 157 inserted into the first holes 27a and 27b of the first container M may be installed on the upper surface of the lifting plate 156. When the pin members 157 are inserted into the first holes 27a and 27b, the first container M is fixed to the lifting plate 156. Cylinders 154 for moving the lifting plate 156 in the vertical direction are connected to the lower part of the lifting plate 156, and the cylinders 154 are fixed to the slider 152 sliding on the guide rail 140. The slider 152 may include a linear motor (not shown), and the slider 152 may be slid by other kinds of driving means such as a cylinder mechanism.

The process of moving the first container M placed in the first loading port 110d by the first loading robot 150 to the process port 130 is as follows. As shown in FIGS. 9A-9D, the cylinder 154 first moves the lifting plate 156 upward to elevate the first container M placed at the first loading port 110d. Then, as the slider 152 slides, the lifting plate 156 moves in the second direction (II), and the slider 152 is positioned when the first container M is positioned above the process port 130. In the second direction (II). In this state, when the cylinder 154 lowers the lifting plate 156, the first container M is placed in the process port 130.

Since the second loading robot 160 has the same structure as the first loading robot 150, a detailed description thereof will be omitted. Unexplained reference numeral 162 denotes a slider, 164 a cylinder, and 166 a lifting plate.

The lifting mechanism 170 is disposed below the process port 130. The lifting mechanism 170 lifts and lowers the substrate accommodated in the first container M placed in the process port 130. The lifting mechanism 170 has the lifting rods 172 aligned in the second holes 28 formed in the support plate 21 of the first container M, the lengthwise direction of which is in the vertical direction. The lifting rods 172 move linearly in the vertical direction by the lifting drive member 174.

10 is a front view of the substrate transfer robot, and FIG. 11 is a side view of the adsorption member of FIG. 10.

10 and 11, the substrate transfer robot 200 transfers the substrate from the first container M placed on the process port 130 to the alignment unit 300. The substrate transfer robot 200 has a horizontal support 210 that is horizontally disposed along the first direction I in the upper space of the process port 130 and the alignment unit 300. A guide rail 212 is provided on the horizontal support 210, and a slider 220 is installed on the guide rail 212. A linear motor (not shown) may be mounted on the slider 220, and the slider 220 slides on the guide rail 212 by driving the linear motor.

The slider 220 may be provided with a driving member 230 that provides a linear driving force in the third direction III, that is, the vertical direction. One end of the first connecting rod 232 having a longitudinal direction in the third direction (III) is connected to the driving member 230, and the other end of the first connecting rod 232 has the first direction (I) in the longitudinal direction. The second connecting rod 234 is connected. A plurality of adsorption members 240 for adsorbing a substrate are installed on the second connection rod 234. Each of the adsorption members 240 includes a support 242 having a longitudinal direction in the second direction II, and adsorption mechanisms 244 installed in a line along the longitudinal direction on the support 242. One end of the supports 242 is connected to the second connecting rod 234. Adsorption mechanisms 244 apply negative pressure to adsorb the substrate.

The adsorption members 240 may move the upper space of the process port 130 and the alignment unit 300 of the loading unit 100 by sliding the slider 220. The adsorption members 240 moved above the process port 130 of the loading part 100 are moved downward by the driving member 230 and received in the first container M placed in the process port 130. Adsorb the substrate. Thereafter, the adsorption members 240 move upward by the driving member 230, and move to the upper space of the alignment table 310 of the alignment unit 300 by sliding the slider 200. The suction members 240 moved to the upper space of the alignment table 310 are moved downward by the driving member 230, and then release the sound pressure applied to the substrate to load the substrate on the alignment table 310.

12 is a plan view of the alignment unit, FIG. 13 is a side view of the alignment unit of FIG. 12, and FIG. 14 is a front view of the alignment unit of FIG. 12. FIG. 15 is a view illustrating an operation state of the alignment unit, and FIGS. 16A and 16B are enlarged views of the alignment rod of FIG. 15.

12 to 16B, the alignment unit 300 includes an alignment table 310, a first alignment mechanism 330, and a second alignment mechanism 370. The substrates delivered by the substrate transfer robot 200 are placed on the alignment table 310. The first alignment mechanism 330 aligns the substrates in the first direction I by pressing the longitudinal sides of the substrates placed on the alignment table 310, that is, both sides of the first direction I. The second alignment mechanism 370 aligns the substrates in the second direction (II) by pressing both sides in the horizontal direction of the substrates placed on the alignment table 310, that is, both sides of the second direction (II).

The alignment table 310 may be provided as a plate member having a rectangular shape, and the alignment table 310 may be supported by vertical supports 313 connected to the lower surface. The vertical supports 313 may be provided as plate members, and may be connected to the lower edge area of the alignment table 310 to face the second direction II. Lower ends of the vertical supports 310 are connected to the plate-shaped horizontal support 314. The horizontal support 314 is mounted on the slider 322, and the slider 322 is mounted on the guide member 324 provided so that the longitudinal direction thereof faces the second direction II. The slider 322 is guided by the guide member 324 and slides in the second direction II.

The first alignment mechanism 330 may have a pair of first alignment rods 331, 333 and a pair of second alignment rods 335, 336. The first alignment rods 331 and 333 are disposed such that the longitudinal direction thereof faces the second direction II and is spaced apart from each other in the first direction I. FIG. The second alignment rods 335 and 336 may be disposed in the length direction toward the second direction (II) and between the first alignment rods 331 and 333. The first alignment rods 331, 333 may move in a direction approaching each other by a drive member 340 composed of a motor and a belt-pull assembly. The second alignment rods 335 and 336 may move in a direction toward the first alignment rods 331 and 333 by a cylinder (not shown). That is, the second alignment rod 335 may move in the direction toward the first alignment rod 331, and the second alignment rod 336 may move in the direction toward the first alignment rod 333. Meanwhile, the second alignment rods 335 and 336 may be moved up and down by a separate cylinder (not shown).

When the substrate transferred to the alignment table 310 is a printed circuit board for a relatively long DIMM, the substrate may be aligned in the first direction (I) by the first alignment rods 331, 333. At this time, the second alignment rods 335 and 336 are moved upward by a cylinder (not shown) to avoid interference with the substrate.

If the substrate to be transferred to the alignment table 310 is a printed circuit board for an SO-DIMM having a relatively short length, the substrate is formed in the first direction (I) by the first alignment rods 331, 333 and the second alignment rods 335, 336. ) Can be sorted. The second alignment rods 335, 336 are moved downward by a cylinder (not shown). The first alignment rods 331 and 333 move in a direction closer to each other, and the second alignment rods 335 and 336 move in a direction away from each other. As a result, the first alignment rod 331 and the second alignment rod 335 move in a direction closer to each other to align the substrate, and the first alignment rod 333 and the second alignment rod 336 come closer to each other. Move in the direction to align the substrate.

The first alignment rods 331 and 333 and the second alignment rods 335 and 336 having the above-described configuration may be arranged in plural in parallel along the first direction I, which transfers the substrate to the substrate inspection apparatus. It can be linked to the number of containers (M). In the present embodiment, since the containers M are placed in two rows in the loading part 100, two first alignment rods 331 and 333 and two second alignment rods 335 and 336 may be disposed. Here, reference numerals 332 and 334 of FIG. 15 are first alignment rods, and reference numerals 337 and 338 are second alignment rods.

As shown in FIG. 16A, a lower surface of the first alignment rolls 333 and 334 corresponding to the center portion of the alignment table 310 among the first alignment rods 331, 332, 333, 334 pressurizing protrusions 333, 334 which press the first side of the substrate. ) May be formed to protrude.

As shown in FIG. 16B, protrusions 335-1 and 336-1 are formed on opposite surfaces of the second alignment rods 335 and 336, and the second alignment rods 335 and 336 are protrusions 335-1 and 336. -1) can be arranged adjacent to each other to stagger each other. In addition, pressing protrusions 335-2 and 336-2 pressing the first side surface of the substrate may be formed on the lower surfaces of the protrusions 335-1 and 336-1.

The first alignment mechanism 330, the driving member 340, and the cylinders (not shown) may be moved in the vertical direction by the linear driving member 350. The first alignment mechanism 330, the driving member 340, the cylinders (not shown), and the linear driving member 350 are secondly arranged by the linear driving member 360 fixedly installed at the lower end of the alignment table 310. Can be moved in direction II. The linear driving member 350 may be connected to the slider 352 sliding in the second direction II, and the slider 352 may be guided by the guide member 354 fixedly installed at the lower end of the alignment table 310. have. The longitudinal direction of the guide member 354 is the second direction (II).

As shown in FIGS. 14 and 15, the second alignment mechanism 370 has a plurality of alignment pins 372, 374. The alignment pins 372 and 374 are inserted into the holes 312 formed through the alignment table 310 and protrude from the top surface of the alignment table 310. One group of alignment pins 372 of the alignment pins 372, 374 is driven in the opposite direction to the other group of alignment pins 372. That is, the group of alignment pins 372 is driven in the direction toward the front end of the alignment table 310 with respect to the second direction (II), and the other group of alignment pins 374 of the alignment table 310 It can be driven in the direction toward the rear end.

One group of alignment pins 372 is connected to the first alignment plate 371, and the other group of alignment pins 374 is connected to the second alignment plate 373. The first alignment plate 371 may be connected to the first slide mechanism 375a to move in a direction toward the front end of the alignment table 310 along the second direction II, and the second alignment plate 373 may be formed in the first slide mechanism 375a. It is connected to the two slide mechanism 375b and can move in the direction toward the rear end of the alignment table 310 along the second direction (II). The first and second slide mechanisms 375a and 375b are installed on the horizontal support 376, and the horizontal support 376 may move in the vertical direction by the cylinders 377.

17 is a side view of the first inspection unit, and FIG. 18 is an enlarged view of the first substrate cleaning roller of FIG. 17. The first inspection unit 400 inspects the lower surface of the substrate.

2 and 17 and 18, the first inspection unit 400 may include a first suction table 410, a first transfer robot 420 and 430, a first lighting device 440, and a first imaging device ( 450). The first suction table 410 is provided in the upper space of the alignment table 310, and vacuum-adsorbs the upper surfaces of the substrates placed on the alignment table 310. The first transfer robots 420 and 430 linearly move the first suction table 410 in the vertical direction and the horizontal direction. The cylinder 420 is connected to the upper surface of the first suction table 410 and moves the first suction table 410 in the vertical direction. The cylinder 420 is connected to the horizontal driving member 430 and moved in the horizontal direction. The horizontal driving member 430 has a slider 432 connected to the upper portion of the cylinder 420, and a horizontal support 434 on which the slider 432 is slidably installed. The slider 432 may include a linear motor (not shown).

The first lighting device 440 and the first photographing device 450 are provided at a lower portion of the path along which the first suction table 410 is moved. The first luminaire 440 includes a luminaire 442 for irradiating light for image acquisition of a pattern region on the substrate and a luminaire 444 for irradiating light for image acquisition of the solder resist region on the substrate. . The first adsorption table 410 reciprocates in the horizontal direction so that the respective lighting fixtures 442 and 444 independently irradiate the substrate with light. The first photographing apparatus 450 photographs lower surfaces of the substrates to which the light of the first lighting apparatus 440 is irradiated to obtain images of the pattern region and the solder resist region.

A first substrate cleaning roller 460 is disposed between the alignment unit 300 and the first lighting device 440 to clean the substrate. The first substrate cleaning roller 460 has an upper roller 462 and a lower roller 464. The upper roller 462 and the lower roller 464 are arranged so that the rotation axis faces the second direction II, and each rotation axis is aligned in the third direction III. The upper roller 462 is disposed above the lower roller 464. The upper roller 462 contacts the lower surfaces of the substrates moved by the first transfer robots 420 and 430 to clean foreign substances on the lower surface of the substrate. The lower roller 464 contacts the upper roller 462 to clean the upper roller 462. The lower roller 464 may be in contact with the upper roller 462 when the substrate is cleaned, and may be moved downward by the cylinder 466 after the substrate cleaning, and may be spaced apart from the upper roller 462. The upper roller 462, the lower roller 464, and the cylinder 466 are supported by the support frame 468.

19 is a side view of the second inspection unit, and FIG. 20 is an enlarged view of the second substrate cleaning roller of FIG. 19. The second inspection unit 500 inspects the lower surface of the substrate.

2 and 19 and 20, the second inspection unit 500 may include a second suction table 510, a second transfer robot 520, a second lighting device 530, and a second imaging device ( 540). The second adsorption table 510 is provided in the lower space of the first adsorption table 410, and takes over the substrates adsorbed on the first adsorption table 410 to vacuum-adsorb the lower surfaces of the substrates. The second transfer robot 520 linearly moves the second suction table 510 in the horizontal direction. The second transfer robot 520 has a slider 522 connected to the lower portion of the second suction table 510 and a horizontal support 524 on which the slider 522 is slidably installed. The slider 522 may include a linear motor (not shown).

The second lighting device 530 and the second photographing device 540 are provided at an upper portion of a path along which the second suction table 510 is moved. The second luminaire 530 includes a luminaire 532 for irradiating light for image acquisition of a pattern region on the substrate and a luminaire 534 for irradiating light for image acquisition of the solder resist region on the substrate. . The second adsorption table 510 reciprocates in the horizontal direction so that the respective lighting fixtures 532, 534 independently irradiate light onto the substrate. The second photographing apparatus 540 photographs the upper surfaces of the substrates to which the light of the second lighting apparatus 530 is irradiated to obtain images of the pattern region and the solder resist region.

A second substrate cleaning roller 550 for cleaning the substrate is disposed between the first inspection unit 400 and the second lighting device 530. The second substrate cleaning roller 550 has an upper roller 554 and a lower roller 552. The upper roller 554 and the lower roller 552 are arranged so that the rotation axis faces the second direction II, and each rotation axis is aligned in the third direction III. The upper roller 554 is disposed above the lower roller 552. The lower roller 552 contacts the upper surfaces of the substrates moved by the second transfer robot 520 to clean the foreign substances on the upper surface of the substrate. The upper roller 554 contacts the lower roller 552 to clean the lower roller 552. The upper roller 554 and the lower roller 552 are supported by the support frame 556.

21 is a side view of the sorting-loading robot. The sorting-loading robot 600 classifies the inspected substrates according to the inspection results of the first and second inspection units 400 and 500 into the good goods S1 and the defective goods S2 and places the second containers placed on the unloading part 700. Selectively load at (M1, M2).

Referring to FIG. 21, the sorting-loading robot 600 places the substrates placed on the second suction table 510 of the second inspection unit 500 in the second containers placed in the loading port 730 of the unloading unit 700. Transfer to (M1, M2). The sorting-loading robot 600 has a first horizontal support 612 arranged horizontally along the first direction I in the upper space of the second inspection unit 500 and the loading port 730. A guide rail is provided on the first horizontal support 612, and a slider 614 is installed on the guide rail. The slider 614 may be equipped with a linear motor (not shown), and the slider 614 slides in the first direction I on the guide rail by driving the linear motor.

The slider 614 is provided with a second horizontal support 622 disposed horizontally along the second direction II. A guide rail is provided on the second horizontal support 622, and a slider 624 is installed on the guide rail. The slider 624 may be equipped with a linear motor (not shown), and the slider 624 slides in the second direction (II) on the guide rail by driving the linear motor.

A connecting member 642 is coupled to a lower portion of the slider 624, and a cylinder 644 is provided at the connecting member 642 to provide a linear driving force in a third direction (III), that is, a vertical direction. An adsorption member support plate 632 is connected to the cylinder 644, and a plurality of adsorption members 634 for adsorbing a substrate are provided on a lower surface of the adsorption member support plate 632.

The suction members 634 are linearly moved in the first and second directions (I, II) by the first and second horizontal supports 612 and 622 and the sliders 614 and 624 supported by them, and the cylinder 644 ) Is linearly moved in the third direction (III). By the driving mechanism, the suction members 634 may move to the upper space of the second suction table 510 of the second inspection unit 500 and the loading port 730 of the unloading unit 700.

The adsorption members 634 moved above the second adsorption table 510 of the second inspection unit 500 are moved downward by the cylinder 644 to adsorb the substrates placed on the second adsorption table 510. . Thereafter, the suction members 634 are moved upwards by the cylinder 644, and the unloading part 700 is slid by sliding the sliders 614 and 624 supported by the first and second horizontal supports 612 and 622. The loading port 730 moves to the upper space.

The adsorption members 634 moved to the upper space of the loading port 730 are moved downward by the cylinder 644, and then release the negative pressure applied to the substrate to release the second containers placed on the loading port 730 ( The substrate is stored in M1 and M2. At this time, the substrates S1 determined as good in the first and second inspection units 400 and 500 are accommodated in the second container M1, and the substrates determined as defective in the first and second inspection units 400 and 500 ( S2) is accommodated in the 2nd container M2.

FIG. 22 is an enlarged view of the unloading unit of FIG. 1. 23 is a side view of the unloading part of FIG. 22. 22 and 23, the unloading unit 700 includes second loading ports 710a, 710b, 710c, and 710d, carrying rollers 720, and a loading port 730. The second loading ports 710a, 710b, 710c, and 710d are arranged in two rows along the second direction (II), and the second loading ports 710a, 710b, 710c, and 710d are empty. The second containers M1, M2 are placed. The carrying out rollers 720 are arranged in two rows along the second direction (II) parallel to the second loading ports 710a, 710b, 710c and 710d, and the second loading ports 710a, 710b, 710c and 710d. ) Is spaced apart from the predetermined interval. The carrying out rollers 720 may be disposed to be inclined downward along the second direction II. The second roller M1 in which the good substrates S1 are accommodated and the second container M2 in which the defective substrates S2 are accommodated are disposed in the carrying rollers 720. Since the second containers M1 and M2 are placed on the unloading rollers 720 which are disposed to be inclined, the second containers M1 and M2 may be moved to the ends of the unloading rollers 720 by the weight of the second containers M1 and M2. The loading port 730 is disposed between the second loading ports 710a, 710b, 710c, 710d and the unloading rollers 720, and the goods delivered from the sorting-loading robot 600 to the loading port 730. And second containers M1 and M2 on which defective substrates are to be stored. On the other hand, in a position adjacent to the loading port 730 of the transport rollers 720, the second containers (M1, M2) placed on the transport rollers 720 can be pushed in the arrangement direction of the transport rollers 720 Means may be provided.

The second containers M1, M2 are sequentially moved on the second loading ports 710a, 710b, 710c, 710d and then placed in the loading port 730, and the substrate to the second containers M1, M2. When the storage of the is completed is moved from the loading port 730 to the unloading rollers 720.

The first unloading robot 750 is disposed below the second loading ports 710a, 710b, 710c, and 710d, and the second unloading robot 760 is disposed below the carrying rollers 720. The first unloading robot 750 is provided between the second loading ports 710a, 710b, 710c, 710d and between the second loading port 710d and the loading port 730 adjacent to the loading port 730. Deliver the two vessels (M1, M2). The second unloading robot 760 transfers the second containers M1 and M2 placed on the loading port 730 on the unloading rollers 720.

The second unloading robot 750 has a lifting plate 756 of a size corresponding to the opening of the second loading ports 710a, 710b, 710c, and 710d. Fin members 757 inserted into the first holes 27a and 27b of the second containers M1 and M2 may be installed on the upper surface of the lifting plate 756. When the pin members 757 are inserted into the first holes 27a and 27b, the second containers M1 and M2 are fixed to the lifting plate 756. Cylinders 754 for moving the lifting plate 756 in the vertical direction are connected to the lower part of the lifting plate 756, and the cylinders 754 are fixed to the slider 752 sliding on the guide rail 740. The slider 752 may incorporate a linear motor (not shown), and the slider 752 may also be slid by other kinds of driving means such as a cylinder mechanism.

The process of moving the second containers M1 and M2 placed in the second loading port 710d by the first unloading robot 750 to the loading port 730 may be performed by the operation of the first loading robot 150 described above. Since the process is the same, a description thereof will be omitted. Since the second unloading robot 760 has the same structure as the first unloading robot 750, a detailed description thereof will be omitted.

The lowering mechanism 770 is disposed below the loading port 730. The lowering mechanism 770 lowers the substrates accommodated in the second containers M1 and M2 placed in the loading port 730. As shown in FIG. 2, the lowering mechanism 770 has a lowering rod in a longitudinal direction and aligned with second holes 28 formed in the supporting plate 21 of the second containers M1 and M2. Have 772. The falling rods 772 linearly move in the vertical direction by the lower driving member 774. The lower drive member 774 may include a drive source and a belt-pull assembly that transmits power thereof.

The foregoing description is merely illustrative of the technical idea of the present invention, and various changes and modifications may be made by those skilled in the art without departing from the essential characteristics of the present invention. Therefore, the embodiments disclosed in the present invention are not intended to limit the technical idea of the present invention but to describe the present invention, and the scope of the technical idea of the present invention is not limited by these embodiments. The protection scope of the present invention should be interpreted by the following claims, and all technical ideas within the equivalent scope should be interpreted as being included in the scope of the present invention.

The drawings described below are for illustrative purposes only and are not intended to limit the scope of the invention.

1 is a plan view of an optical inspection device according to the present invention.

FIG. 2 is a side view of the optical inspection device of FIG. 1. FIG.

3 is a perspective view of the container.

4 is a plan view of the container of FIG. 3.

5 is a view showing a container in a cassette separated state.

6 is a perspective view of a cassette according to another embodiment.

7 is an enlarged view of the loading unit of FIG. 1.

8 is a side view of the loading unit of FIG. 7.

9A to 9D are views illustrating an operating state of the loading robot.

10 is a front view of the substrate transfer robot.

11 is a side view of the adsorption member of FIG. 10.

12 is a plan view of the alignment unit.

FIG. 13 is a side view of the alignment unit of FIG. 12. FIG.

14 is a front view of the alignment unit of FIG. 12.

15 is a view illustrating an operating state of the alignment unit.

16A and 16B are enlarged views of the alignment rod of FIG. 15.

17 is a side view of the first inspection unit.

FIG. 18 is an enlarged view of the first substrate cleaning roller of FIG. 17.

19 is a side view of the second inspection unit.

20 is an enlarged view of the second substrate cleaning roller of FIG. 19.

21 is a side view of the sorting-loading robot.

FIG. 22 is an enlarged view of the unloading unit of FIG. 1.

FIG. 23 is a side view of the unloading part of FIG. 22.

<Description of Symbols for Main Parts of Drawings>

M, M1, M2: container S, S1, S2: substrate

100: loading unit 200: substrate transfer robot

300: alignment unit 400: first inspection unit

500: second inspection unit 600: classification-loading robot

700: unloading unit

Claims (42)

A cassette accommodating a plurality of substrates stacked in a vertical direction and having an open top; And A housing having a plurality of slots in which the cassette is stacked vertically Substrate storage container comprising a. The method of claim 1, The housing, Support plate; And A pair of first side plates installed vertically to face each other on the upper surface of the support plate, and protruding the slots in a direction perpendicular to the opposite surface; Substrate storage container comprising a. The method of claim 2, And the slots are provided in an area between two vertical edges on opposite surfaces of the first side plates. The method of claim 3, wherein The housing, And a second side plate provided perpendicular to the arrangement direction of the slots and coupled to the vertical edges of either side of the first side plates. The method of claim 4, wherein The housing, And a protrusion protruding in the protruding direction of the slots from the vertical edges on the other side of the first side plates. The method of claim 2, The housing, And a gripping portion provided on the support plate so as to be symmetrical about the first side plates. The method of claim 2, And a first hole through which the pin member for fixing the support plate is inserted into the support plate. The method according to any one of claims 2 to 7, The cassette, A first plate of rectangular shape supported by the slot of the housing; Second plates extending in a direction perpendicular to the first plate from edges of the first plate, facing the longitudinal direction of the slot; And And first support plates extending in a direction facing each other from lower ends of the second plates and supporting the substrates. The method of claim 8, The cassette, And a second supporting plate extending in a direction perpendicular to the first plate from a lower center portion of the first plate and supporting the substrates. The method of claim 9, And a second hole in which a lifting mechanism for lifting and lowering the substrates is formed at a position on the support plate corresponding to an area between the first and second support plates. The method of claim 10, The cassette, And a side support member installed on inner surfaces of the second plates to face each other and supporting side surfaces of the substrates supported by the first and second support plates. The method of claim 10, The cassette, And a partition wall having a shape corresponding to the second plates, the partition wall being detachably provided between the first plate and the second support plate. Cassettes for receiving the substrates such that the substrates are stacked in the vertical direction; And A housing having a space in which the cassettes are accommodated, Each of the cassettes is moved to the housing by a sliding manner provided to be separated and inserted into the substrate container. The method of claim 13, The housing is spaced apart from each other to face each other, and includes a pair of first side plates formed with a slot in the longitudinal direction of the vertical direction, Each of the cassettes, A first plate supported by the slot and slideable along the slot; And Including second plates connected to both ends of the first plate, And the first plate and the second plates are provided to accommodate the substrates in a space provided therebetween. The method of claim 14, And the first plate and the second plate are combined with each other when viewed from the top to provide a '-' shape. The method of claim 14, The cassette, And a partition wall positioned between the second plates to separate the space between the second plates, the partition wall being detachably provided on the first plate. The method according to any one of claims 14 to 16, The cassettes And a substrate storage container provided in parallel with each other in a second direction perpendicular to the arrangement direction of the first side plates. A loading unit on which the first container containing the substrate is placed; An inspection unit for inspecting the substrate by irradiating light to the substrate transferred from the loading unit; And And an unloading unit in which a second container in which the substrate inspected by the inspecting unit is accommodated is placed, The first and second containers, A cassette accommodating a plurality of the substrates stacked in an up-down direction and having an upper portion open; And And a housing having slots in which the cassette is stacked vertically. The method of claim 18, The housing, Support plate; And And a pair of first side plates installed vertically on the upper surface of the support plate so as to face each other and protruding the slots in a direction perpendicular to the opposite surface. The method of claim 19, The slots are provided in an area between two vertical edges on opposite surfaces of the first side plates, The housing, A second side plate provided perpendicular to the arrangement direction of the slots and coupled to the vertical edges on either side of the first side plates; And And a protrusion protruding in the protruding direction of the slots from the vertical edges on the other side of the first side plates. The method of claim 19, The cassette, A first plate of rectangular shape supported by the slot of the housing; Second plates extending in a direction perpendicular to the first plate from edges of the first plate, facing the longitudinal direction of the slot; First supporting plates extending in a direction facing each other from lower ends of the second plates and supporting the substrates; And And a second support plate extending in a direction perpendicular to the first plate from a lower center portion of the first plate and supporting the substrates. The method of claim 21, The cassette, And a side support member installed on inner surfaces of the second plates so as to face each other and supporting side surfaces of the substrates supported by the first and second support plates. The method of claim 21, The cassette, And a partition wall having a shape corresponding to the second plates, the partition wall being detachably provided between the first plate and the second support plate. The method of claim 22 or 23, And a first hole through which the pin member fixing the support plate is inserted into the support plate. The method of claim 24, And a second hole into which a lifting mechanism for lifting and lowering the substrates is formed at a position on the support plate corresponding to an area between the first and second support plates. The method of claim 19, The loading unit, A plurality of first loading ports placed in a line, in which the first container containing the substrates to be inspected is placed; A plurality of first export ports, in which the first empty container is placed, arranged in line with the first import ports; A process port disposed between the first carrying ports and the first carrying ports, in which the first container containing the substrates transferred to the inspection unit is placed; A loading robot for transferring the first container between the first loading ports, between the process port and the first loading port adjacent to the processing port and the first loading port, and between the first loading ports. Substrate inspection apparatus comprising a. The method of claim 26, The loading unit is disposed below the process port, and further includes a lifting mechanism for lifting the substrate received in the first container placed in the process port, The lifting mechanism, Elevating rods having a longitudinal direction upward and downwardly aligned with holes formed through the support plate of the first container; And An elevating drive member for linearly driving the elevating rods in the vertical direction. Substrate inspection apparatus comprising a. The method of claim 19, An alignment unit disposed between the loading unit and the inspection unit to align the substrates; And And a substrate transfer robot for transferring the substrates from the loading portion to the alignment portion. The alignment unit, An alignment table on which the substrates delivered by the substrate transfer robot are placed; A first alignment mechanism for aligning the substrates by pressing first side surfaces facing the first direction of the substrates on the alignment table; And A second alignment mechanism for aligning the substrates by pressing second side surfaces facing the second direction perpendicular to the first direction of the substrates placed on the alignment table Substrate inspection apparatus comprising a. 29. The method of claim 28, The first alignment mechanism, And a pair of first alignment rods extending in a length direction toward the second direction, spaced in the first direction, and moving in a direction approaching each other. 30. The method of claim 29, The first alignment mechanism, Further comprising a pair of second alignment rods extending in a longitudinal direction, positioned between the first alignment rods, and movable in a direction away from each other toward the first alignment rod. Inspection device. 31. The method of claim 30, Projections are formed on opposite surfaces of the second alignment rods, and the second alignment rods are disposed adjacent to each other such that the protrusions are staggered from each other. The method of claim 31, wherein And a pressing protrusion for pressing the first side of the substrate is formed on the lower surfaces of the protrusions. The method according to any one of claims 30 to 32, And a plurality of the first alignment rods and the second alignment rods are arranged side by side along the first direction. The method of claim 33, wherein The inspection unit includes a first inspection unit for inspecting the lower surfaces of the substrates, and a second inspection unit for inspecting the upper surfaces of the substrates, And the first inspection unit and the second inspection unit are arranged side by side in a line. The method of claim 34, wherein The first inspection unit, A first adsorption table for vacuum adsorption of upper surfaces of the substrates placed on the alignment table; A first transfer robot for linearly moving the first suction table; A first luminaire disposed below the first suction table and irradiating light onto a lower surface of the substrates moved by the first transfer robot; And a first photographing mechanism for photographing lower surfaces of the substrates to which the light of the first lighting fixture is irradiated. 36. The method of claim 35, The first inspection unit, And a first substrate cleaning roller disposed between the alignment unit and the first lighting device, the first substrate cleaning roller being in contact with the lower surfaces of the substrates moved by the first transfer robot to clean foreign substances on the lower surface of the substrate. Board inspection equipment. The method of claim 34, wherein The second inspection unit, A second adsorption table positioned below the first adsorption table and configured to receive the substrates adsorbed on the first adsorption table and to vacuum-adsorb the lower surfaces of the substrates; A second transfer robot for linearly moving the second suction table; A second lighting device disposed above the second suction table and irradiating light onto upper surfaces of the substrates moved by the second transfer robot; And a second photographing mechanism for photographing the upper surfaces of the substrates to which the light of the second lighting fixture is irradiated. 39. The method of claim 37, The second inspection unit, And a second substrate cleaning roller disposed between the first inspection unit and the second lighting device, the second substrate cleaning roller contacting the upper surfaces of the substrates moved by the second transfer robot to clean the foreign substances on the upper surface of the substrate. Substrate inspection apparatus characterized by the above-mentioned. The method of claim 19, And a sorting-loading robot configured to classify the substrates into good and defective parts according to the test results of the first and second inspection units, and to selectively load the substrates into the second container placed on the unloading unit. . 40. The method of claim 39, The unloading unit, A plurality of second import ports, in which the empty second container is placed, arranged in a line; A plurality of discharge rollers arranged in line with the second loading ports; A loading port disposed between the second loading ports and the discharge rollers, in which the second container in which the substrates transported by the sorting-loading robot is stored is placed; A first unloading robot for transferring said second container between said second loading ports and between said loading port and said second loading port adjacent to said loading port; And A second unloading robot that transfers the second container placed on the loading port onto the unloading rollers Substrate inspection apparatus comprising a. 41. The method of claim 40, And the plurality of take-out rollers are disposed to be inclined downward while moving along the arrangement direction. 41. The method of claim 40, The unloading unit further includes a lowering mechanism disposed below the loading port and lowering the substrate accommodated in the second container placed at the loading port. The lowering mechanism, Descending rods having a longitudinal direction upward and downwardly aligned with holes formed through the support plate of the second container; And A descending driving member for linearly driving the descending rods in a vertical direction; Substrate inspection apparatus comprising a.

Images