CN112083588B

CN112083588B - Inspection system

Info

Publication number: CN112083588B
Application number: CN202010505670.4A
Authority: CN
Inventors: 赤羽贤俊; 吉田升悟; 佐藤史朗
Original assignee: Nidec Sankyo Corp
Current assignee: Nidec Sankyo Corp
Priority date: 2019-06-14
Filing date: 2020-06-05
Publication date: 2023-07-14
Anticipated expiration: 2040-06-05
Also published as: CN112083588A; JP7219172B2; JP2020204478A

Abstract

The invention provides an inspection system for inspecting a display panel such as a liquid crystal panel, which can simplify the structure for conveying the display panel compared with the prior art. In this inspection system, when a cassette (8) containing a liquid crystal panel (2) is carried into an inspection device, in a state in which the cassette (8) placed on a cassette placement unit (37) of a panel carrying-in mechanism is disposed above a cassette placement unit (9) on the inspection device side, the cassette (8) placed on the cassette placement unit (37) is moved above the cassette placement unit (9), and then the cassette placement unit (37) is lowered, the cassette (8) is placed on the cassette placement unit (9), and when the cassette (8) is carried out from the inspection device, the cassette placement unit (37) of the panel carrying-out mechanism disposed on the lower side of the cassette (8) placed on the cassette placement unit (9) is lifted to the upper side of the cassette placement unit (9), and the cassette (8) is placed on the cassette placement unit (37), and then the cassette placement unit (37) is moved.

Description

Inspection system

Technical Field

The present invention relates to an inspection system for inspecting a display panel such as a liquid crystal panel.

Background

Conventionally, an inspection apparatus for inspecting a liquid crystal panel is known (for example, refer to patent document 1). The inspection apparatus described in patent document 1 is incorporated in the middle of a process for manufacturing a liquid crystal panel. The inspection apparatus includes a detector for performing lighting inspection of a liquid crystal panel, a carry-in side conveyor for conveying the liquid crystal panel before inspection to the detector, a carry-in mechanism for carrying the liquid crystal panel conveyed by the carry-in side conveyor into the detector, a carry-out mechanism for carrying out the liquid crystal panel after inspection from the detector, and a carry-out side conveyor for conveying the liquid crystal panel carried out by the carry-out mechanism.

In the inspection apparatus described in patent document 1, a panel gripper that positions and supports the liquid crystal panel conveyed by the carry-in side conveyor and a panel lifter that lifts up the liquid crystal panel supported by the panel gripper are provided in the carry-in side conveyor. The liquid crystal panel lifted by the panel lifter is carried into the detector by the carrying-in mechanism. The carry-out side conveyor is also provided with a panel clip and a panel lifter. When the liquid crystal panel carried out from the detector by the carrying-out mechanism is transferred to the panel gripper, the panel lifter lowers the liquid crystal panel and places it on the carrying-out side conveyor.

Prior art literature

Patent literature

Patent document 1: japanese patent laid-open No. 2007-107973

Disclosure of Invention

Technical problem to be solved by the invention

The inspection apparatus described in patent document 1 is provided with a carry-in mechanism and a carry-out mechanism in addition to a carry-in side conveyor, a carry-out side conveyor, a panel clip, and a panel lifter as a structure for conveying a liquid crystal panel. That is, in the inspection apparatus described in patent document 1, many mechanisms are provided for conveying the liquid crystal panel, and the structure for conveying the liquid crystal panel becomes complicated.

Accordingly, an object of the present invention is to provide an inspection system including an inspection device for inspecting a display panel such as a liquid crystal panel, which is capable of simplifying a structure for conveying the display panel as compared with the conventional inspection system.

Technical scheme for solving technical problems

In order to solve the above-described problems, an inspection system according to the present invention includes: an inspection device that inspects a display panel in a state of being accommodated in a case; a panel loading mechanism for loading a box containing a display panel before inspection into an inspection device; and a panel carrying-out mechanism that carries out the box in which the inspected display panel is stored from the inspection device, the inspection device includes a device-side box mounting portion on which the box is mounted, the panel carrying-in mechanism and the panel carrying-out mechanism include a movable-side box mounting portion on which the box is mounted and a moving mechanism that moves the movable-side box mounting portion linearly, the inspection device includes a lifting mechanism that lifts and lowers the device-side box mounting portion, or the panel carrying-in mechanism and the panel carrying-out mechanism include a lifting mechanism that lifts and lowers the movable-side box mounting portion, and when the panel carrying-in mechanism and the panel carrying-out mechanism include the lifting mechanism, the moving mechanism moves the movable-side box mounting portion linearly together with the lifting mechanism, the elevating mechanism moves up and down the device side cassette loading part and the movable side cassette loading part between a position where the movable side cassette loading part is disposed above the device side cassette loading part and a position where the movable side cassette loading part is disposed below the device side cassette loading part, the moving mechanism reciprocates the movable side cassette loading part in a left-right direction orthogonal to the up-down direction, the movable side cassette loading part of the panel loading mechanism and the movable side cassette loading part of the panel loading mechanism are disposed at the same position in a front-back direction orthogonal to the up-down direction and the left-right direction, the moving mechanism of the panel loading mechanism is disposed on one side of the movable side cassette loading part in the front-back direction, and when the cassette is loaded into the inspection device, the movable side cassette loading part of the panel loading mechanism is disposed on the other side of the movable side cassette loading part in the front-back direction, after the moving mechanism of the panel loading mechanism moves the cassette placed on the movable side cassette loading part of the panel loading mechanism to the upper side of the device side cassette loading part, the lifting mechanism relatively lowers the movable side cassette loading part of the panel loading mechanism relative to the device side cassette loading part, the movable side cassette loading part of the panel loading mechanism is relatively raised to the upper side of the device side cassette loading part when the cassette is loaded from the inspection device, and then the moving mechanism of the panel loading mechanism moves the movable side cassette loading part of the panel loading mechanism after the movable side cassette loading part of the panel loading mechanism is relatively raised to the upper side of the device side cassette loading part.

In the inspection system according to the present invention, when the cassette is carried into the inspection device, the moving mechanism of the panel carrying mechanism moves the cassette mounted on the movable side cassette mounting portion of the panel carrying mechanism to the upper side of the device side cassette mounting portion in a state in which the cassette mounted on the movable side cassette mounting portion of the panel carrying mechanism is disposed above the device side cassette mounting portion, and then the lifting mechanism relatively lowers the movable side cassette mounting portion of the panel carrying mechanism with respect to the device side cassette mounting portion to mount the cassette on the device side cassette mounting portion. In the present invention, when the cassette is carried out from the inspection apparatus, the elevating mechanism relatively elevates the movable-side cassette loading section of the panel carrying mechanism disposed under the cassette loaded by the apparatus-side cassette loading section to the upper side of the apparatus-side cassette loading section and loads the cassette onto the movable-side cassette loading section of the panel carrying mechanism, and then the moving mechanism of the panel carrying mechanism moves the movable-side cassette loading section of the panel carrying mechanism.

Therefore, in the present invention, even if the carry-in mechanism and the carry-out mechanism described in patent document 1 are not provided, the display panel before inspection can be carried in the inspection apparatus, and the display panel after inspection can be carried out from the inspection apparatus. Accordingly, in the present invention, the structure for conveying the display panel can be simplified as compared with the inspection apparatus described in patent document 1. That is, in the present invention, the structure for conveying the display panel can be simplified as compared with the related art.

In the present invention, the movable-side cassette loading portion of the panel loading mechanism and the movable-side cassette loading portion of the panel unloading mechanism are disposed at the same position in the front-rear direction, but the moving mechanism of the panel loading mechanism is disposed on one side of the movable-side cassette loading portion in the front-rear direction, and the moving mechanism of the panel unloading mechanism is disposed on the other side of the movable-side cassette loading portion in the front-rear direction. Therefore, in the present invention, even if the movable-side cassette loading section can be moved by the moving mechanism of the panel loading mechanism to a position where the apparatus-side cassette loading section is arranged in the left-right direction, and the movable-side cassette loading section can be moved by the moving mechanism of the panel unloading mechanism to a position where the apparatus-side cassette loading section is arranged in the left-right direction, interference between the moving mechanism of the panel loading mechanism and the moving mechanism of the panel unloading mechanism can be prevented.

In the present invention, the "movable-side cassette placement portion of the panel loading mechanism and the movable-side cassette placement portion of the panel unloading mechanism are disposed at the same position in the front-rear direction" includes a case where the movable-side cassette placement portion of the panel loading mechanism and the movable-side cassette placement portion of the panel unloading mechanism are disposed at substantially the same position in the front-rear direction, in addition to a case where the movable-side cassette placement portion of the panel loading mechanism and the movable-side cassette placement portion of the panel unloading mechanism are disposed at substantially the same position in the front-rear direction.

In the present invention, for example, the panel carry-in mechanism and the panel carry-out mechanism are provided with a lifting mechanism.

In the present invention, for example, the moving direction of the cassette carried in by the panel carrying-in mechanism and the moving direction of the cassette carried out by the panel carrying-out mechanism are the same direction in the left-right direction, and the height when the movable side cassette mounting portion of the panel carrying-in mechanism moves and the height when the movable side cassette mounting portion of the panel carrying-out mechanism moves are the same height. In this case, the structure of the panel carry-in mechanism and the structure of the panel carry-out mechanism can be the same.

In the present invention, it is preferable that the inspection system includes a plurality of inspection devices arranged in a left-right direction, and if one of two inspection devices adjacent in the left-right direction is a first inspection device and the other inspection device is a second inspection device, the moving direction of the cassette carried in by the panel carrying-in mechanism and the moving direction of the cassette carried out by the panel carrying-out mechanism are the same direction in the left-right direction, and the panel carrying-out mechanism for carrying out the cassette from the first inspection device is a panel carrying-in mechanism for carrying the cassette into the second inspection device. With this configuration, the cassette can be carried out from the first inspection device and carried in to the second inspection device by using the same mechanism, and therefore, the structure of the inspection system can be simplified.

In the present invention, it is preferable that the plurality of inspection apparatuses include a lighting inspection apparatus for performing lighting inspection on the display panel, and if an inspection apparatus adjacent to the lighting inspection apparatus in the left-right direction is a lighting inspection adjacent apparatus, a tunnel member is disposed between the lighting inspection apparatus and the lighting inspection adjacent apparatus, and the tunnel member covers the moving mechanism between the lighting inspection apparatus and the lighting inspection adjacent apparatus from at least the upper side and the front-rear direction both sides. With this configuration, even if the panel carrying-out mechanism for carrying out the cassette from the lighting inspection adjacent apparatus is used as the panel carrying-in mechanism for carrying in the cassette into the lighting inspection apparatus, the light from the outside of the lighting inspection apparatus can be suppressed from entering the lighting inspection apparatus, which becomes a darkroom, through the tunnel member at the time of lighting inspection of the display panel.

In the present invention, an inspection system includes, for example: a panel storage unit which is disposed on one side in the lateral direction of an inspection device group including a plurality of inspection devices and stores a display panel before inspection in an empty box; and a panel discharge unit which is arranged on the other side of the inspection device group in the left-right direction and which takes out the inspected display panel from the cassette, wherein if the inspection device arranged on the side of the most panel storage unit in the inspection device group is the most upstream inspection device and the inspection device arranged on the side of the most panel discharge unit in the inspection device group is the most downstream inspection device, the panel loading mechanism which loads the cassette into the most upstream inspection device loads the cassette from the panel storage unit, and the panel unloading mechanism which loads the cassette from the most downstream inspection device loads the cassette into the panel discharge unit.

In the present invention, it is preferable that the plurality of inspection apparatuses include a lighting inspection apparatus for performing lighting inspection on the display panel, and if an inspection apparatus, a panel housing portion, or a panel discharge portion adjacent to the lighting inspection apparatus in the left-right direction is a lighting inspection adjacent apparatus, a tunnel member is disposed between the lighting inspection apparatus and the lighting inspection adjacent apparatus, and the tunnel member covers the moving mechanism between the lighting inspection apparatus and the lighting inspection adjacent apparatus from at least the upper side and the front-rear direction both sides. With this configuration, even if the panel carrying-out mechanism for carrying out the cassette from the lighting inspection adjacent apparatus is used as the panel carrying-in mechanism for carrying in the cassette into the lighting inspection apparatus, the light from the outside of the lighting inspection apparatus can be suppressed from entering the lighting inspection apparatus, which becomes a darkroom, through the tunnel member at the time of lighting inspection of the display panel.

In the present invention, it is preferable that the inspection system includes a shutter member for closing a part of one end side of the tunnel member in the lateral direction. With this configuration, light from the lighting inspection adjacent device can be suppressed from entering the lighting inspection device, which is a darkroom, during the lighting inspection of the display panel.

In the present invention, it is preferable that a plurality of first positioning holes for positioning the cartridge in the horizontal direction with respect to the apparatus-side cartridge mounting portion are formed in any one of the cartridge and the apparatus-side cartridge mounting portion, the other one of the cartridge and the apparatus-side cartridge mounting portion is provided with a plurality of first positioning pins which are inserted into the first positioning holes and position the cartridge in the horizontal direction with respect to the apparatus-side cartridge mounting portion, a plurality of second positioning holes for positioning the cartridge in the horizontal direction with respect to the movable-side cartridge mounting portion are formed in any one of the cartridge and the apparatus-side cartridge mounting portion, and the other one of the cartridge and the movable-side cartridge mounting portion is provided with a plurality of second positioning pins which are inserted into the second positioning holes and position the cartridge in the horizontal direction with respect to the movable-side cartridge mounting portion. With this configuration, the cartridge can be transferred between the apparatus-side cartridge mounting portion and the movable-side cartridge mounting portion with high accuracy.

In the present invention, it is preferable that the inspection system includes a linear rail on which the movable-side cassette mounting portion is mounted, and the longitudinal direction of the rail coincides with the lateral direction, and the panel carry-in mechanism and the panel carry-out mechanism include wheels that roll on the rail and a pair of guide rollers that sandwich the rail in the front-rear direction. In the present invention, since the moving mechanism is disposed on one side or the other side of the front-rear direction of the movable-side cassette mounting portion, if the weight of the cassette and the display panel mounted on the movable-side cassette mounting portion increases, the moving state of the movable-side cassette mounting portion that moves in the left-right direction by the moving mechanism may become unstable, but if so configured, even if the weight of the cassette and the display panel mounted on the movable-side cassette mounting portion increases, the moving state of the movable-side cassette mounting portion that moves in the left-right direction by the moving mechanism can be stabilized.

In the present invention, it is preferable that the panel housing portion includes an alignment mechanism for aligning the display panel before housing the display panel in the empty box, the alignment mechanism includes a panel holding member having a planar panel adsorbing surface for adsorbing and holding the display panel when aligning the display panel, the panel holding member is formed of polyetheretherketone, and a plurality of suction holes for sucking the display panel are formed in the panel adsorbing surface. With this configuration, compared with the case where the display panel is held by the rubber suction pad when the display panel is aligned, the misalignment of the display panel when the display panel is held by the panel holding member and when the display panel held by the panel holding member is separated from the panel holding member can be suppressed. Therefore, the display panel can be aligned with high accuracy by the alignment mechanism.

Effects of the invention

As described above, in the present invention, the inspection system including the inspection device for inspecting the display panel such as the liquid crystal panel can simplify the structure for conveying the display panel, compared with the conventional technique.

Drawings

Fig. 1 is a plan view for explaining a schematic configuration of an inspection system according to an embodiment of the present invention.

Fig. 2 is a plan view for explaining the structure of the E portion in fig. 1.

Fig. 3 is a side view for explaining the structure of the apparatus side cassette loading section and the panel conveying mechanism shown in fig. 2.

Fig. 4 is a side view for explaining the structure of the apparatus side cassette loading section and the panel conveying mechanism shown in fig. 2.

Fig. 5 (a) is an enlarged view for explaining the structure of the F portion in fig. 4, and fig. 5 (B) is an enlarged view for explaining the structure of the G portion in fig. 3.

Fig. 6 is a plan view for explaining the structure of the H portion in fig. 2.

Fig. 7 is a view for explaining the structure of the panel gripping member of the alignment mechanism shown in fig. 1.

Description of the reference numerals

1 … inspection system; 2 … liquid crystal panel (display panel); 3 … inspection device (first inspection device, most upstream inspection device); 4 … inspection means (first inspection means, second inspection means, lighting inspection adjacent means); 5 … inspection means (first inspection means, second inspection means, lighting inspection adjacent means); 6 … inspection means (first inspection means, second inspection means, lighting inspection adjacent means); 7 … inspection means (second inspection means, lighting inspection adjacent means, most downstream inspection means); 8 … box; 8a … positioning holes (first positioning holes); 8b … positioning holes (second positioning holes); 9 … cartridge mounting portions (apparatus-side cartridge mounting portions); 13 … panel housing; 14 … panel discharge section (lighting check adjacent device); 15 … inspection device set; 21 … panel conveying mechanism (panel loading mechanism); 22 … panel conveying mechanism (panel carry-in mechanism, panel carry-out mechanism); 23 … panel conveying means (panel loading means, panel unloading means); 24 … panel conveying mechanism (panel carry-in mechanism, panel carry-out mechanism); 25 … panel conveying mechanism (panel carry-in mechanism, panel carry-out mechanism); 26 … panel conveying mechanism (panel carrying-out mechanism); 30 … locating pins (first locating pins); 37 … cartridge mounting portions (movable-side cartridge mounting portions); 38 … lifting mechanism; 39 … movement mechanism; 42 … dowel (second dowel); 56 … track; 57 … wheels; 58 … guide rollers; 67-71 … tunnel component; 63 … alignment mechanism; 64 … panel holding member; 64a … panel adsorption surfaces; 64b, 64c … suction holes; 73 … gate member; x … front-rear direction; y … left-right direction.

Detailed Description

Embodiments of the present invention will be described below with reference to the drawings.

(outline structure of inspection System)

Fig. 1 is a plan view for explaining a schematic configuration of an inspection system 1 according to an embodiment of the present invention. Fig. 2 is a plan view for explaining the structure of the E portion in fig. 1.

The inspection system 1 of the present embodiment is a system for inspecting a liquid crystal panel 2 as a display panel. The inspection system 1 includes a plurality of inspection devices 3 to 7 for inspecting the liquid crystal panel 2. Specifically, the inspection system 1 includes five inspection devices 3 to 7. As shown in fig. 1, five inspection devices 3 to 7 are arranged in a row. The liquid crystal panels 2 inspected by the inspection devices 3 to 7 are accommodated in a cassette 8. That is, in the inspection devices 3 to 7, the liquid crystal panel 2 in the state stored in the cassette 8 is inspected.

In the following description, the arrangement direction of the inspection devices 3 to 7 (Y direction in fig. 1 and the like) is referred to as "left-right direction", and the X direction in fig. 1 and the like orthogonal to the up-down direction (vertical direction) and the left-right direction is referred to as "front-back direction". The Y1 direction side in fig. 1 and the like, which is one side in the left-right direction, the Y2 direction side in fig. 1 and the like, which is the opposite side to the left side, is the "right" side, the X1 direction side in fig. 1 and the like, which is one side in the front-rear direction, is the "front" side, and the X2 direction side in fig. 1 and the like, which is the opposite side to the front side, is the "rear" side.

The liquid crystal panel 2 is a medium-sized panel. The liquid crystal panel 2 is formed in a rectangular flat plate shape. The case 8 is formed in a substantially rectangular flat plate shape as a whole. The thickness direction of the cassette 8 processed by the inspection system 1 coincides with the up-down direction. In the inspection system 1, the longitudinal direction of the box 8 formed in a substantially rectangular flat plate shape is substantially aligned with the left-right direction. The liquid crystal panel 2 is accommodated on the upper surface side of the case 8. The liquid crystal panel 2 is housed in the case 8 so that the thickness direction and the up-down direction of the liquid crystal panel 2 coincide.

The inspection devices 3 to 7 are arranged in this order from the left side to the right side. In the inspection device 3, for example, a short circuit inspection of the liquid crystal panel 2 is performed, and in the inspection device 4, for example, a reverse bias inspection of the liquid crystal panel 2 is performed. In the inspection devices 5 to 7, the lighting inspection of the liquid crystal panel 2 to be inspected is performed in a state where the liquid crystal panel 2 is lighted. That is, the inspection devices 5 to 7 are lighting inspection devices for lighting inspection of the liquid crystal panel 2, and three lighting inspection devices are included in the five inspection devices 3 to 7. When inspecting the liquid crystal panel 2, the inside of the inspection devices 5 to 7 becomes a darkroom. In addition, when the liquid crystal panel 2 is inspected, the inside of the inspection devices 3 and 4 also serves as a darkroom, but even if the inside of the inspection devices 3 and 4 is brighter than the inside of the inspection devices 5 to 7 when the liquid crystal panel 2 is inspected, no obstacle is caused to the inspection of the liquid crystal panel 2.

The inspection devices 3 to 7 include inspection equipment for performing various inspections. The inspection devices 3 to 7 include a box mounting portion 9 as a device-side box mounting portion for mounting the box 8, and a rack 10 for mounting the inspection equipment and the box mounting portion 9 (see fig. 3 and 4). The inspection devices 3 to 7 further include covers 11 that cover the front, rear, left, right side surfaces and the upper surface of the inspection equipment and the cassette mounting portion 9. In the present embodiment, each of the inspection apparatuses 5 to 7 includes a cover 11. On the other hand, the covers 11 of the inspection apparatuses 3 and 4 are common, and the inspection equipment and cassette mounting portion 9 of the inspection apparatus 3 and the inspection equipment and cassette mounting portion 9 of the inspection apparatus 4 are disposed in the same cover 11.

The inspection system 1 includes a panel housing portion 13 for housing the liquid crystal panel 2 before inspection in the empty box 8, and a panel discharge portion 14 for taking out the liquid crystal panel 2 after inspection from the box 8. The panel housing portion 13 is disposed on the left side of the inspection device group 15 composed of the five inspection devices 3 to 7, and the panel discharge portion 14 is disposed on the right side of the inspection device group 15. That is, the panel housing portion 13 is disposed on the left side of the inspection device 3, and the panel discharge portion 14 is disposed on the right side of the inspection device 7. The inspection system 1 further includes a conveyor 16 that conveys the empty cassettes 8 from the panel discharge unit 14 to the panel storage unit 13. The conveyor belt 16 is, for example, a roller conveyor belt. The conveyor 16 is disposed at the rear side of the inspection devices 3 to 7, the panel housing portion 13, and the panel discharge portion 14.

The inspection system 1 further includes a plurality of panel conveyance mechanisms 21 to 26 for conveying the liquid crystal panels 2 to the inspection devices 3 to 7. Specifically, the inspection system 1 includes six panel conveying mechanisms 21 to 26. The panel conveyance mechanism 21 carries the cassette 8 storing the liquid crystal panel 2 before inspection out of the panel storage unit 13, and carries it into the inspection device 3. The panel conveyance mechanism 22 carries out the cassette 8 accommodating the liquid crystal panel 2 inspected by the inspection device 3 from the inspection device 3, and carries it into the inspection device 4.

The panel conveyance mechanism 23 conveys the cassette 8 containing the liquid crystal panel 2 inspected by the inspection device 4 out of the inspection device 4 and conveys it into the inspection device 5, the panel conveyance mechanism 24 conveys the cassette 8 containing the liquid crystal panel 2 inspected by the inspection device 5 out of the inspection device 5 and conveys it into the inspection device 6, the panel conveyance mechanism 25 conveys the cassette 8 containing the liquid crystal panel 2 inspected by the inspection device 6 out of the inspection device 6 and conveys it into the inspection device 7, and the panel conveyance mechanism 26 conveys the cassette 8 containing the liquid crystal panel 2 inspected by the inspection device 7 out of the inspection device 7 and conveys it into the panel discharge unit 14.

The panel conveying mechanism 21 of the present embodiment is a panel loading mechanism for loading the cassette 8 containing the liquid crystal panel 2 before (before) inspection by the inspection device 3 into the inspection device 3. That is, the panel conveyance mechanism 21 is a panel loading mechanism for loading the cassette 8 into the inspection apparatus 3. The panel conveying mechanism 21, which is a panel loading mechanism for loading the cassette 8 into the inspection apparatus 3, loads the cassette 8 from the panel housing portion 13. The inspection device 3 of the present embodiment is an uppermost stream inspection device disposed on the side of the most panel housing portion 13 in the inspection device group 15.

The panel conveying mechanism 26 of the present embodiment is a panel carrying-out mechanism that carries out the cassette 8 accommodating the liquid crystal panel 2 after inspection (after inspection) by the inspection device 7 from the inspection device 7. That is, the panel conveyance mechanism 26 is a panel carry-out mechanism for carrying out the cassette 8 to the inspection apparatus 7. The panel conveying mechanism 26, which is a panel carrying-out mechanism for carrying out the cassette 8 from the inspection device 7, carries the cassette 8 into the panel discharge portion 14. The inspection device 7 of the present embodiment is the most downstream inspection device disposed on the most panel discharge portion 14 side in the inspection device group 15.

The panel conveying mechanism 22 according to the present embodiment is a panel carrying-out mechanism that carries out the cassette 8 containing the liquid crystal panel 2 after inspection by the inspection device 3 from the inspection device 3, and is a panel carrying-in mechanism that carries in the cassette 8 containing the liquid crystal panel 2 before inspection by the inspection device 4 into the inspection device 4. That is, the panel conveyance mechanism 22 is a panel carry-out mechanism for carrying out the cassette 8 to the inspection apparatus 3, but is a panel carry-in mechanism for carrying in the cassette 8 to the inspection apparatus 4, and the panel carry-out mechanism for carrying out the cassette 8 containing the liquid crystal panel 2 after the inspection from the inspection apparatus 3 is a panel carry-in mechanism for carrying in the cassette 8 containing the liquid crystal panel 2 before the inspection to the inspection apparatus 4.

The panel conveying mechanism 23 is a panel carrying-out mechanism that carries out the cassette 8 containing the liquid crystal panel 2 after the inspection by the inspection device 4 from the inspection device 4, and is a panel carrying-in mechanism that carries in the cassette 8 containing the liquid crystal panel 2 before the inspection by the inspection device 5 into the inspection device 5. That is, the panel conveyance mechanism 23 is a panel carry-out mechanism for carrying out the cassette 8 to the inspection apparatus 4, but is a panel carry-in mechanism for carrying in the cassette 8 to the inspection apparatus 5, and the panel carry-out mechanism for carrying out the cassette 8 containing the liquid crystal panel 2 after the inspection from the inspection apparatus 4 is a panel carry-in mechanism for carrying in the cassette 8 containing the liquid crystal panel 2 before the inspection to the inspection apparatus 5.

The panel conveying mechanism 24 is a panel carrying-out mechanism that carries out the cassette 8 containing the liquid crystal panel 2 after the inspection by the inspection device 5 from the inspection device 5, and is a panel carrying-in mechanism that carries in the cassette 8 containing the liquid crystal panel 2 before the inspection by the inspection device 6 into the inspection device 6. That is, the panel conveyance mechanism 24 is a panel carry-out mechanism for carrying out the cassette 8 to the inspection apparatus 5, but is a panel carry-in mechanism for carrying in the cassette 8 to the inspection apparatus 6, and the panel carry-out mechanism for carrying out the cassette 8 containing the inspected liquid crystal panel 2 from the inspection apparatus 5 is a panel carry-in mechanism for carrying in the cassette 8 containing the liquid crystal panel 2 before the inspection to the inspection apparatus 6.

The panel conveying mechanism 25 is a panel carrying-out mechanism that carries the cassette 8 containing the liquid crystal panel 2 after inspection by the inspection device 6 out of the inspection device 6, and is a panel carrying-in mechanism that carries the cassette 8 containing the liquid crystal panel 2 before inspection by the inspection device 7 into the inspection device 7. That is, the panel conveyance mechanism 25 is a panel carry-out mechanism for carrying out the cassette 8 to the inspection apparatus 6, but is a panel carry-in mechanism for carrying in the cassette 8 to the inspection apparatus 7, and the panel carry-out mechanism for carrying out the cassette 8 containing the liquid crystal panel 2 after the inspection from the inspection apparatus 6 is a panel carry-in mechanism for carrying in the cassette 8 containing the liquid crystal panel 2 before the inspection to the inspection apparatus 7.

In the present embodiment, in the relationship between the inspection device 3 and the inspection device 4 adjacent to each other in the lateral direction, the inspection device 3 is a first inspection device, and the inspection device 4 is a second inspection device. In the relationship between the inspection device 4 and the inspection device 5 adjacent to each other in the left-right direction, the inspection device 4 is a first inspection device, the inspection device 5 is a second inspection device, the inspection device 5 is a first inspection device in the relationship between the inspection device 5 and the inspection device 6 adjacent to each other in the left-right direction, the inspection device 6 is a second inspection device, the inspection device 6 is a first inspection device in the relationship between the inspection device 6 and the inspection device 7 adjacent to each other in the left-right direction, and the inspection device 7 is a second inspection device.

(Structure of the peripheral portion of the cassette mounting portion)

Fig. 3 and 4 are side views for explaining the structure of the cassette loading unit 9 and the panel conveying mechanism 24 shown in fig. 2. Fig. 5 (a) is an enlarged view for explaining the structure of the F portion in fig. 4, and fig. 5 (B) is an enlarged view for explaining the structure of the G portion in fig. 3.

The cartridge mounting portion 9 includes a plurality of mounting members 29 for mounting the cartridges 8 and a plurality of positioning pins 30 for positioning the cartridges 8 in the horizontal direction with respect to the cartridge mounting portion 9. The cartridge mounting portion 9 of the present embodiment includes eight mounting members 29 and two positioning pins 30. The cartridge mounting portion 9 includes a support frame 31 for fixing the mounting member 29 and the positioning pin 30.

The support frame 31 is fixed to the upper surface of the stand 10. The cassette mounting portion 9 of the present embodiment includes a support frame 31 for supporting the left front end portion of the cassette 8 from the lower side, a support frame 31 for supporting the right front end portion of the cassette 8 from the lower side, a support frame 31 for supporting the left rear end portion of the cassette 8 from the lower side, and a support frame 31 for supporting the right rear end portion of the cassette 8 from the lower side. That is, the cassette loading unit 9 includes four support frames 31.

The support frame 31 for the left front end portion of the lower support case 8 and the support frame 31 for the right front end portion of the lower support case 8 are arranged in a state of being spaced apart in the left-right direction, and the support frame 31 for the left rear end portion of the lower support case 8 and the support frame 31 for the right rear end portion of the lower support case 8 are arranged in a state of being spaced apart in the left-right direction. Further, the two support frames 31 for supporting the front end portion of the case 8 from the lower side and the two support frames 31 for supporting the rear end portion of the case 8 from the lower side are arranged in a state of being spaced apart in the front-rear direction.

The upper surface of the placement member 29 is a plane orthogonal to the vertical direction. The lower surface of the cassette 8 is in contact with the upper surface of the placement member 29. The front end portion of the cartridge 8 is mounted on four mounting members 29 among the eight mounting members 29, and the rear end portion of the cartridge 8 is mounted on the remaining four mounting members 29. The four placement members 29 at the front end of the placement box 8 are disposed at intervals in the left-right direction, and the four placement members 29 at the rear end of the placement box 8 are disposed at intervals in the left-right direction. Two mounting members 29 are fixed to the upper surfaces of the four support frames 31.

The two positioning pins 30 are arranged at intervals in the front-rear direction and the left-right direction. For example, the two positioning pins 30 are fixed to a support frame 31 for supporting the left front end portion of the box 8 from the lower side and a support frame 31 for supporting the right rear end portion of the box 8 from the lower side. The positioning pin 30 protrudes upward from the upper surface of the support frame 31.

Two positioning holes 8a into which the positioning pins 30 are inserted are formed in the case 8 (see fig. 5 a). That is, two positioning holes 8a for positioning the cassette 8 in the horizontal direction with respect to the cassette mounting portion 9 are formed in the cassette 8. In the present embodiment, when the two positioning pins 30 are inserted into the two positioning holes 8a, the cartridge 8 is positioned in the horizontal direction with respect to the cartridge mounting portion 9. The positioning pin 30 of the present embodiment is a first positioning pin, and the positioning hole 8a is a first positioning hole.

The inspection devices 3 to 7 include two clamping mechanisms 32 for pressing the cassette 8 placed on the placement member 29 against the placement member 29. The two clamping mechanisms 32 press each of the two corners of the cassette 8 placed on the placement member 29 on the diagonal line from the upper side. The clamp mechanism 32 is provided, for example, on the left side of the support frame 31 for supporting the left front end portion of the cartridge 8 from the lower side and on the right side of the support frame 31 for supporting the right rear end portion of the cartridge 8 from the lower side. The clamp mechanism 32 includes a claw member 33 that presses a corner of the cartridge 8 from above, and an air cylinder 34 that moves the claw member 33 up and down.

(Structure of Panel conveying mechanism)

Fig. 6 is a plan view for explaining the structure of the H portion in fig. 2.

The panel conveyance mechanism 24 includes a cassette loading unit 37 as a movable side cassette loading unit for loading the cassettes 8, a lifting mechanism 38 for lifting and lowering the cassette loading unit 37, and a moving mechanism 39 for linearly moving the cassette loading unit 37 together with the lifting mechanism 38. The panel conveyance mechanisms 21 to 23, 25, and 26 have the same configuration as the panel conveyance mechanism 24. That is, the panel conveyance mechanisms 21 to 23, 25, and 26 include a cassette loading unit 37, a lifting mechanism 38, and a moving mechanism 39, as in the panel conveyance mechanism 24. The moving mechanism 39 reciprocates the cartridge mounting portion 37 in the left-right direction. That is, the left-right direction (Y direction) is the moving direction of the cartridge mounting portion 37 that is moved by the moving mechanism 39.

The cassette mounting portion 37 includes a flat plate-like bottom plate 40 formed in a substantially rectangular shape. The cassette loading portion 37 is disposed so that the thickness direction of the bottom plate 40 coincides with the up-down direction. The cartridge mounting portion 37 is disposed so that the longitudinal direction and the lateral direction of the flat plate-like bottom plate 40 formed in a substantially rectangular shape coincide with each other. The width of the cassette placement portion 37 in the front-rear direction (width of the bottom plate 40 in the short-side direction) is smaller than the interval in the front-rear direction between the support frame 31 for supporting the front end portion of the cassette 8 from the lower side and the support frame 31 for supporting the rear end portion of the cassette 8 from the lower side.

The cartridge placement unit 37 includes a plurality of placement members 41 for placing the cartridges 8 thereon, and a plurality of positioning pins 42 for positioning the cartridges 8 in the horizontal direction with respect to the cartridge placement unit 37. The cartridge mounting portion 37 of the present embodiment includes four mounting members 41 and two positioning pins 42. The upper surface of the placement member 41 is a plane orthogonal to the vertical direction. The lower surface of the cassette 8 is in contact with the upper surface of the mounting member 41. The placement member 41 is fixed to the upper surface of the bottom plate 40. The placement member 41 is fixed to four corners of the bottom plate 40. In fig. 2 and 6, the mounting member 41 is not illustrated.

Two positioning pins 42 are fixed to both end sides of the bottom plate 40 in the front-rear direction. Further, two positioning pins 42 are fixed to the center position of the bottom plate 40 in the left-right direction. The positioning pins 42 protrude from the upper surface of the bottom plate 40 toward the upper side. Two positioning holes 8B into which the positioning pins 42 are inserted are formed in the case 8 (see fig. 5B). That is, two positioning holes 8b for positioning the cassette 8 in the horizontal direction with respect to the cassette mounting portion 37 are formed in the cassette 8. In the present embodiment, when the two positioning pins 42 are inserted into the two positioning holes 8b, the cartridge 8 is positioned in the horizontal direction with respect to the cartridge mounting portion 37. The positioning pin 42 of the present embodiment is a second positioning pin, and the positioning hole 8b is a second positioning hole.

The cassette placement portion 37 is disposed between a support frame 31 for supporting the front end portion of the cassette 8 from below and a support frame 31 for supporting the rear end portion of the cassette 8 from below in the front-rear direction. The cassette placement portion 37 of the panel conveyance mechanism 21, the cassette placement portion 37 of the panel conveyance mechanism 22, the cassette placement portion 37 of the panel conveyance mechanism 23, the cassette placement portion 37 of the panel conveyance mechanism 24, the cassette placement portion 37 of the panel conveyance mechanism 25, and the cassette placement portion 37 of the panel conveyance mechanism 26 are disposed at the same position in the front-rear direction.

Specifically, the cassette placement portion 37 of the panel conveyance mechanism 21, the cassette placement portion 37 of the panel conveyance mechanism 22, the cassette placement portion 37 of the panel conveyance mechanism 23, the cassette placement portion 37 of the panel conveyance mechanism 24, the cassette placement portion 37 of the panel conveyance mechanism 25, and the cassette placement portion 37 of the panel conveyance mechanism 26 are disposed at exactly the same position in the front-rear direction or at substantially the same position in the front-rear direction.

The lifting mechanism 38 lifts and lowers the cartridge mounting portion 37 between a position (position shown in fig. 3) where the cartridge 8 mounted on the cartridge mounting portion 37 is disposed above the cartridge mounting portion 9 and a position (position shown in fig. 4) where the cartridge mounting portion 37 is disposed below the cartridge 8 mounted on the cartridge mounting portion 9. The lifting mechanism 38 includes an air cylinder 45, a support frame 46 for fixing the main body of the air cylinder 45, and a guide mechanism 47 for guiding the cartridge mounting portion 37 in the up-down direction.

The cylinder 45 is disposed such that a rod 45a (see fig. 3) of the cylinder 45 protrudes upward. The front end portion (upper end portion) of the lever 45a is fixed to the center portion of the bottom plate 40. The guide mechanism 47 is constituted by four guide shafts 48 fixed to the base plate 40 and four guide sleeves 49 for inserting the guide shafts 48. The guide shaft 48 is arranged such that the axial direction and the up-down direction of the guide shaft 48 coincide. The guide shaft 48 protrudes downward from the lower surface of the bottom plate 40. The guide sleeve 49 is fixed to the support frame 46.

The moving mechanism 39 includes a slider 52 and a driving guide mechanism 53, the slider 52 linearly moves in the left-right direction, and the driving guide mechanism 53 moves the slider 52 in the left-right direction and guides the slider 52 in the left-right direction. The drive guide mechanism 53 is formed in a linear shape elongated in the left-right direction. The driving guide mechanism 53 is mounted on the upper surface of the gantry 10. The slider 52 is attached to the drive guide mechanism 53 from above. The support frame 46 is fixed to the slider 52.

The drive guide mechanism 53 includes a motor for moving the slider 52 in the left-right direction, a power transmission mechanism for transmitting power of the motor to the slider 52, and a guide rail for guiding the slider 52 in the left-right direction. The slider 52 engages with the guide rail. The power transmission mechanism is, for example, a ball screw including a screw shaft that rotates by power of a motor and a nut that is fixed to the slider 52 and engages with the screw shaft.

The moving mechanism 39 is disposed between the support frame 31 for supporting the front end portion of the cassette 8 from the lower side and the support frame 31 for supporting the rear end portion of the cassette 8 from the lower side in the front-rear direction. The moving mechanism 39 of the panel conveying mechanism 21 is disposed at the rear side of the cassette mounting portion 37, the moving mechanism 39 of the panel conveying mechanism 22 is disposed at the front side of the cassette mounting portion 37, the moving mechanism 39 of the panel conveying mechanism 23 is disposed at the rear side of the cassette mounting portion 37, the moving mechanism 39 of the panel conveying mechanism 24 is disposed at the front side of the cassette mounting portion 37, the moving mechanism 39 of the panel conveying mechanism 25 is disposed at the rear side of the cassette mounting portion 37, and the moving mechanism 39 of the panel conveying mechanism 26 is disposed at the front side of the cassette mounting portion 37.

That is, the moving mechanisms 39 of the panel conveying mechanisms 21 to 26 are staggered in the left-right direction. The movement mechanism 39 of the panel conveyance mechanism 21, the movement mechanism 39 of the panel conveyance mechanism 22, the movement mechanism 39 of the panel conveyance mechanism 23, the movement mechanism 39 of the panel conveyance mechanism 24, the movement mechanism 39 of the panel conveyance mechanism 25, and the movement mechanism 39 of the panel conveyance mechanism 26 are arranged at the same position in the up-down direction.

The left end of the drive guide 53 of the panel conveyance mechanism 22 is disposed on the left side of the right end of the drive guide 53 of the panel conveyance mechanism 21. Similarly, the left end of the driving guide mechanism 53 of the panel conveyance mechanism 23 is disposed on the left side of the right end of the driving guide mechanism 53 of the panel conveyance mechanism 22, the left end of the driving guide mechanism 53 of the panel conveyance mechanism 24 is disposed on the left side of the right end of the driving guide mechanism 53 of the panel conveyance mechanism 23, the left end of the driving guide mechanism 53 of the panel conveyance mechanism 25 is disposed on the left side of the right end of the driving guide mechanism 53 of the panel conveyance mechanism 24, and the left end of the driving guide mechanism 53 of the panel conveyance mechanism 26 is disposed on the left side of the right end of the driving guide mechanism 53 of the panel conveyance mechanism 25.

That is, the right end portion of the drive guide mechanism 53 of the panel conveyance mechanism 21 and the left end portion of the drive guide mechanism 53 of the panel conveyance mechanism 22 overlap when viewed from the front-rear direction. In addition, when viewed from the front-rear direction, the right end portion of the driving guide mechanism 53 of the panel conveying mechanism 22 and the left end portion of the driving guide mechanism 53 of the panel conveying mechanism 23 overlap, the right end portion of the driving guide mechanism 53 of the panel conveying mechanism 23 and the left end portion of the driving guide mechanism 53 of the panel conveying mechanism 24 overlap, the right end portion of the driving guide mechanism 53 of the panel conveying mechanism 24 and the left end portion of the driving guide mechanism 53 of the panel conveying mechanism 25 overlap, and the right end portion of the driving guide mechanism 53 of the panel conveying mechanism 25 and the left end portion of the driving guide mechanism 53 of the panel conveying mechanism 26 overlap.

The moving mechanism 39 of the panel conveying mechanism 21 moves the cassette loading portion 37 and the lifting mechanism 38 of the panel conveying mechanism 21 to a position where the cassette 8 can be delivered to the cassette loading portion 9 of the inspection apparatus 3. The moving mechanism 39 of the panel conveying mechanism 22 moves the cassette loading portion 37 and the lifting mechanism 38 of the panel conveying mechanism 22 between a position where the cassette 8 can be received from the cassette loading portion 9 of the inspection apparatus 3 and a position where the cassette 8 can be delivered to the cassette loading portion 9 of the inspection apparatus 4. The moving mechanism 39 of the panel conveying mechanism 23 moves the cassette loading portion 37 and the lifting mechanism 38 of the panel conveying mechanism 23 between a position where the cassette 8 can be received from the cassette loading portion 9 of the inspection apparatus 4 and a position where the cassette 8 can be delivered to the cassette loading portion 9 of the inspection apparatus 5.

The moving mechanism 39 of the panel conveying mechanism 24 moves the cassette loading portion 37 and the lifting mechanism 38 of the panel conveying mechanism 24 between a position where the cassette 8 can be received from the cassette loading portion 9 of the inspection apparatus 5 and a position where the cassette 8 can be delivered to the cassette loading portion 9 of the inspection apparatus 6. The moving mechanism 39 of the panel conveying mechanism 25 moves the cassette loading portion 37 and the lifting mechanism 38 of the panel conveying mechanism 25 between a position where the cassette 8 can be received from the cassette loading portion 9 of the inspection device 6 and a position where the cassette 8 can be delivered to the cassette loading portion 9 of the inspection device 7. The moving mechanism 39 of the panel conveying mechanism 26 moves the cassette loading portion 37 and the lifting mechanism 38 of the panel conveying mechanism 26 to a position where the cassette 8 can be received from the cassette loading portion 9 of the inspection apparatus 7.

Two rails 56 are disposed below the support frame 46, and the elevating mechanism 38 and the cassette mounting portion 37 are mounted on the two rails 56. That is, the inspection system 1 includes two rails 56 for the mounting elevating mechanism 38 and the cassette mounting portion 37. The rail 56 is fixed to the upper surface of the gantry 10. The length direction of the rail 56 coincides with the left-right direction. The two rails 56 are arranged in a state of being spaced apart in the front-rear direction. The rail 56 is formed in the left-right direction over the entire movable range of the cassette placement portion 37 and the lifting mechanism 38 of the panel conveying mechanisms 21 to 26.

Wheels (rollers) 57 rolling on the rails 56 and a pair of guide rollers 58 sandwiching the rails 56 in the front-rear direction are mounted on the support frame 46. That is, the panel conveying mechanisms 21 to 26 include wheels 57 and a pair of guide rollers 58. The wheels 57 and guide rollers 58 are ball bearings. Wheels 57 are mounted to the support frame 46 at the underside of the four corners of the floor 40. The pair of guide rollers 58 sandwich the rail 56 disposed on the front side of the two rails 56, for example, in the front-rear direction. A pair of guide rollers 58 are attached to both left and right end sides of the support frame 46.

As described above, the inspection devices 3 to 7 are arranged in this order from the left side to the right side, the panel housing portion 13 is disposed on the left side of the inspection device 3, and the panel discharge portion 14 is disposed on the right side of the inspection device 3. As described above, the panel conveying mechanism 21 carries the cassette 8 out of the panel housing portion 13 and into the inspection device 3, the panel conveying mechanism 22 carries the cassette 8 out of the inspection device 3 and into the inspection device 4, the panel conveying mechanism 23 carries the cassette 8 out of the inspection device 4 and into the inspection device 5, the panel conveying mechanism 24 carries the cassette 8 out of the inspection device 5 and into the inspection device 6, the panel conveying mechanism 25 carries the cassette 8 out of the inspection device 6 and into the inspection device 7, and the panel conveying mechanism 26 carries the cassette 8 out of the inspection device 7 and into the panel discharge portion 14.

That is, the cassettes 8 carried in by the panel conveying mechanisms 21 to 25 are moved rightward, and the cassettes 8 carried out by the panel conveying mechanisms 22 to 26 are moved rightward. That is, in the present embodiment, the moving direction of the cassette 8 carried in by the panel conveying mechanisms 21 to 25 and the moving direction of the cassette 8 carried out by the panel conveying mechanisms 22 to 26 are the same direction in the left-right direction.

When the cassette 8 is carried into the inspection apparatuses 3 to 7, in a state where the cassette 8 mounted on the cassette mounting portion 37 is disposed above the cassette mounting portion 9 (see fig. 3), the moving mechanism 39 moves the cassette 8 mounted on the cassette mounting portion 37 to the right above the cassette mounting portion 9, and then the lifting mechanism 38 lowers the cassette mounting portion 37 to mount the cassette 8 on the cassette mounting portion 9 (see fig. 4). At this time, the cartridge mounting portion 37 is lowered to a position lower than the cartridge 8 mounted on the cartridge mounting portion 9. In addition, at this time, the positioning pin 30 is inserted into the positioning hole 8 a. When the cartridge 8 is mounted on the cartridge mounting portion 9, the clamping mechanism 32 presses the cartridge 8 against the mounting member 29. In the inspection devices 3 to 7, the inspection of the liquid crystal panel 2 is performed in this state.

When the cassette 8 is carried out from the inspection apparatuses 3 to 7, first, the cassette loading units 37 of the panel conveying mechanisms 22 to 26 for carrying out the cassette 8 are moved to the lower side of the cassette 8 loaded on the cassette loading unit 9. At this time, the cartridge mounting portion 37 is disposed below the cartridge 8 mounted on the cartridge mounting portion 9. In addition, the clamping state of the cassette 8 by the clamping mechanism 32 is released. Thereafter, the elevating mechanism 38 moves the cassette loading unit 37 disposed below the cassette 8 loaded by the cassette loading unit 9 upward to the upper side of the cassette loading unit 9, and then, after the cassette 8 is loaded on the cassette loading unit 37 (see fig. 4 and 3), the moving mechanism 39 moves the cassette loading unit 37 rightward. When the cartridge 8 is mounted on the cartridge mounting portion 37, the positioning pin 42 is inserted into the positioning hole 8 b.

In the present embodiment, the height when the cassette loading portion 37 of the panel conveying mechanism 21 moves, the height when the cassette loading portion 37 of the panel conveying mechanism 22 moves, the height when the cassette loading portion 37 of the panel conveying mechanism 23 moves, the height when the cassette loading portion 37 of the panel conveying mechanism 24 moves, the height when the cassette loading portion 37 of the panel conveying mechanism 25 moves, and the height when the cassette loading portion 37 of the panel conveying mechanism 26 moves are the same height.

The inspection devices 3 to 7 further include a detection mechanism for detecting that the cassette mounting portion 37 has been disposed at a position where the cassette 8 can be transferred between the cassette mounting portion 9 and the cassette mounting portion 37. The movement mechanism 39 (specifically, the motor of the movement mechanism 39) of the panel conveyance mechanisms 21 to 26 is controlled based on the detection result of the detection mechanism.

Therefore, the contact between the box-mounted portion 37 of the panel conveying mechanism 21 and the box-mounted portion 37 of the panel conveying mechanism 22 in the inspection apparatus 3, the contact between the box-mounted portion 37 of the panel conveying mechanism 22 and the box-mounted portion 37 of the panel conveying mechanism 23 in the inspection apparatus 4, the contact between the box-mounted portion 37 of the panel conveying mechanism 23 and the box-mounted portion 37 of the panel conveying mechanism 24 in the inspection apparatus 5, the contact between the box-mounted portion 37 of the panel conveying mechanism 24 and the box-mounted portion 37 of the panel conveying mechanism 25 in the inspection apparatus 6, and the contact between the box-mounted portion 37 of the panel conveying mechanism 25 and the box-mounted portion 37 of the panel conveying mechanism 26 in the inspection apparatus 7 can be prevented.

(outline structure of Panel containing section and Panel discharging section)

Fig. 7 is a view for explaining the structure of the panel holding member 64 of the alignment mechanism 63 shown in fig. 1.

The panel housing section 13 includes a cassette conveying mechanism 61 that conveys the empty cassette 8 conveyed to the left end of the conveyor 16 to the left of the inspection apparatus 3. The panel discharge unit 14 includes a cassette conveying mechanism 62 that conveys the empty cassette 8, which is conveyed to the panel discharge unit 14 by the panel conveying mechanism 26 and from which the liquid crystal panel 2 is taken out, to the right end portion of the conveyor 16. The

cassette conveying mechanisms

61 and 62 are, for example, two-axis orthogonal robots.

The panel housing portion 13 further includes an alignment mechanism 63 for aligning the liquid crystal panel 2 before being housed in the empty case 8. The alignment mechanism 63 includes a panel holding member 64 that holds the liquid crystal panel 2 when the liquid crystal panel 2 is aligned. The alignment mechanism 63 includes a holding member driving mechanism that moves the panel holding member 64 in the front-rear-left-right direction and rotates the panel holding member 64 in the axial direction that rotates in the up-down direction, an alignment table on which the liquid crystal panel 2 is mounted, an alignment camera, and the like.

The panel holding member 64 is formed of polyetheretherketone. The panel holding member 64 is formed in a flat plate shape, for example, and is disposed so that the thickness direction and the up-down direction of the panel holding member 64 coincide. The lower surface of the panel holding member 64 is a planar panel suction surface 64a for sucking and holding the liquid crystal panel 2. The panel suction surface 64a is formed with a plurality of

suction holes

64b and 64c for sucking the liquid crystal panel 2.

Specifically, the panel suction surface 64a is formed with a plurality of suction holes 64b for sucking the liquid crystal panel 2 of a predetermined size and a plurality of suction holes 64c for sucking the liquid crystal panel 2 larger than the liquid crystal panel 2 sucked by the plurality of suction holes 64 b. In the present embodiment, the suction of the liquid crystal panel 2 by the plurality of suction holes 64b and the suction of the liquid crystal panel 2 by the plurality of suction holes 64c can be performed independently.

In the alignment mechanism 63, after the alignment camera confirms the direction of the liquid crystal panel 2 mounted on the alignment stage, the liquid crystal panel 2 is gripped and lifted by the panel gripping member 64. Further, based on the result of the camera confirmation, the panel holding member 64 is moved or rotated in the front-rear-left-right direction to perform the positional alignment of the liquid crystal panel 2. The aligned liquid crystal panel 2 is automatically accommodated in the cassette 8 by the alignment mechanism 63.

(Structure of Tunnel Member and Gate Member)

As shown in fig. 2, a tunnel member 67 is disposed between the inspection device 5 and the inspection device 6, and the tunnel member 67 covers the moving mechanism 39 of the panel conveying mechanism 24 from the upper side and the front-rear direction both sides between the inspection device 5 and the inspection device 6. Specifically, a tunnel member 67 is disposed between the cover 11 of the inspection device 5 and the cover 11 of the inspection device 6.

As shown in fig. 1, a tunnel member 68 is disposed between the inspection device 4 and the inspection device 5, the tunnel member 68 covers the moving mechanism 39 of the panel conveying mechanism 23 from the upper side and the front-rear direction sides between the inspection device 4 and the inspection device 5, and a tunnel member 69 is disposed between the inspection device 6 and the inspection device 7, the tunnel member 69 covers the moving mechanism 39 of the panel conveying mechanism 25 from the upper side and the front-rear direction sides between the inspection device 6 and the inspection device 7. Specifically, a tunnel member 68 is disposed between the cover 11 of the inspection devices 3 and 4 and the cover 11 of the inspection device 5, and a tunnel member 69 is disposed between the cover 11 of the inspection device 6 and the cover 11 of the inspection device 7.

A tunnel member 70 is disposed between the inspection device 7 and the panel discharge unit 14, the tunnel member 70 covers the moving mechanism 39 of the panel conveying mechanism 26 from both sides in the upper and front-rear directions between the inspection device 7 and the panel discharge unit 14, and a tunnel member 71 is disposed between the panel housing unit 13 and the inspection device 3, the tunnel member 71 covers the moving mechanism 39 of the panel conveying mechanism 21 from both sides in the upper and front-rear directions. Specifically, a tunnel member 70 is disposed between the cover 11 of the inspection device 7 and the cover of the panel discharge unit 14, and a tunnel member 71 is disposed between the cover of the panel housing unit 13 and the covers 11 of the inspection devices 3 and 4.

The tunnel members 67 to 71 are formed in a square groove shape with both sides in the right-left direction and the lower side open. The tunnel members 67 to 71 also cover the two rails 56 from the upper side and both sides in the front-rear direction. The left end of the tunnel member 67 is disposed inside the cover 11 of the inspection device 5, and the right end of the tunnel member 67 is disposed inside the cover 11 of the inspection device 6. The left end of the tunnel member 68 is disposed inside the cover 11 of the inspection apparatus 3, 4, and the right end of the tunnel member 68 is disposed inside the cover 11 of the inspection apparatus 5.

The left end of the tunnel member 69 is disposed inside the cover 11 of the inspection device 6, and the right end of the tunnel member 69 is disposed inside the cover 11 of the inspection device 7. The left end of the tunnel member 70 is disposed inside the cover 11 of the inspection device 7, and the right end of the tunnel member 70 is disposed inside the cover of the panel discharge unit 14. The left end of the tunnel member 71 is disposed inside the cover of the panel housing portion 13, and the right end of the tunnel member 71 is disposed inside the cover 11 of the inspection apparatus 3, 4.

A shutter member 73 for closing a part of one end sides of the tunnel members 67 to 70 is disposed at one end sides of the tunnel members 67 to 70 in the left-right direction. In the present embodiment, the shutter member 73 is disposed on the right side of the tunnel members 67, 68, 70 and on the left side of the tunnel member 69. The shutter member 73 is connected to a shutter drive mechanism that moves the shutter member 73. The shutter driving mechanism moves the shutter member 73 between a closed position where the shutter member 73 closes a part of one end sides of the tunnel members 67 to 70 and an open position where the shutter member 73 opens one end sides of the tunnel members 67 to 70.

When the inspection device 5 performs the lighting inspection of the liquid crystal panel 2, the shutter member 73 disposed on the right side of the tunnel member 67 closes a portion of the right end side of the tunnel member 67, and the shutter member 73 disposed on the right side of the tunnel member 68 closes a portion of the right end side of the tunnel member 68. In addition, when the inspection apparatus 6 performs the lighting inspection of the liquid crystal panel 2, the shutter member 73 disposed on the right side of the tunnel member 67 closes a part of the right end side of the tunnel member 67, and the shutter member 73 disposed on the left side of the tunnel member 69 closes a part of the left end side of the tunnel member 69, and when the inspection apparatus 7 performs the lighting inspection of the liquid crystal panel 2, the shutter member 73 disposed on the left side of the tunnel member 69 closes a part of the left end side of the tunnel member 69, and the shutter member 73 disposed on the right side of the tunnel member 70 closes a part of the right end side of the tunnel member 69.

In the present embodiment, the inspection apparatuses 4 and 6 are lighting inspection adjacent apparatuses adjacent to the inspection apparatus 5 as a lighting inspection apparatus in the left-right direction with respect to the inspection apparatus 5. In addition, the inspection device 6 is a lighting inspection adjacent device in which the inspection device 5 and the inspection device 7 are adjacent to the inspection device 6 as a lighting inspection device in the left-right direction. In addition, the inspection device 7 is a lighting inspection adjacent device in which the inspection device 6 and the panel discharge portion 14 are adjacent to the inspection device 7 as a lighting inspection device in the left-right direction.

(main effects of the present embodiment)

As described above, in the present embodiment, when the cassette 8 is carried into the inspection apparatuses 3 to 7, the moving mechanism 39 moves the cassette 8 mounted on the cassette mounting portion 37 to above the cassette mounting portion 9 in a state where the cassette 8 mounted on the cassette mounting portion 37 is disposed above the cassette mounting portion 9, and then the lifting mechanism 38 lowers the cassette mounting portion 37 to mount the cassette 8 on the cassette mounting portion 9. In the present embodiment, when the cassette 8 is carried out from the inspection apparatuses 3 to 7, the lifting mechanism 38 lifts the cassette mounting portion 37 arranged below the cassette 8 mounted on the cassette mounting portion 9 to the upper side of the cassette mounting portion 9, and then the movement mechanism 39 moves the cassette mounting portion 37 after the cassette 8 is mounted on the cassette mounting portion 37.

Therefore, in the present embodiment, even if the carry-in mechanism and the carry-out mechanism described in patent document 1 are not mounted, the liquid crystal panel 2 can be carried in the inspection devices 3 to 7, and the liquid crystal panel 2 can be carried out from the inspection devices 3 to 7. Therefore, in the present embodiment, the structure for conveying the liquid crystal panel 2 can be simplified as compared with the related art.

In the present embodiment, the cassette loading portion 37 of the panel conveying mechanism 21 and the cassette loading portion 37 of the panel conveying mechanism 22 are disposed at the same position in the front-rear direction, but the moving mechanism 39 of the panel conveying mechanism 21 is disposed at the rear side of the cassette loading portion 37, and the moving mechanism 39 of the panel conveying mechanism 22 is disposed at the front side of the cassette loading portion 37. Therefore, in the present embodiment, even if the cassette loading unit 37 can be moved by the moving mechanism 39 of the panel conveying mechanism 21 to the position where the cassette loading unit 9 of the inspection apparatus 3 is arranged in the left-right direction, and the cassette loading unit 37 can be moved by the moving mechanism 39 of the panel conveying mechanism 22 to the position where the cassette loading unit 9 of the inspection apparatus 3 is arranged in the left-right direction, interference between the moving mechanism 39 of the panel conveying mechanism 21 and the moving mechanism 39 of the panel conveying mechanism 22 can be prevented.

Similarly, in the present embodiment, the moving mechanism 39 of the panel conveying mechanism 23 is disposed on the rear side of the cassette mounting portion 37, the moving mechanism 39 of the panel conveying mechanism 24 is disposed on the front side of the cassette mounting portion 37, the moving mechanism 39 of the panel conveying mechanism 25 is disposed on the rear side of the cassette mounting portion 37, and the moving mechanism 39 of the panel conveying mechanism 26 is disposed on the front side of the cassette mounting portion 37, so that interference between the moving mechanism 39 of the panel conveying mechanism 22 and the moving mechanism 39 of the panel conveying mechanism 23, interference between the moving mechanism 39 of the panel conveying mechanism 23 and the moving mechanism 39 of the panel conveying mechanism 24, and interference between the moving mechanism 39 of the panel conveying mechanism 25 and the moving mechanism 39 of the panel conveying mechanism 26 can be prevented.

In the present embodiment, the panel conveyance mechanism 22 is a panel carry-out mechanism that carries out the cassette 8 from the inspection apparatus 3, and is a panel carry-in mechanism that carries in the cassette 8 to the inspection apparatus 4, and the carry-out of the cassette 8 from the inspection apparatus 3 and the carry-in of the cassette 8 to the inspection apparatus 4 are performed by the panel conveyance mechanism 22. Therefore, in the present embodiment, the structure of the inspection system 1 can be simplified.

Similarly, in the present embodiment, the panel conveyance mechanism 23 is a panel carrying-out mechanism that carries out the cassette 8 from the inspection apparatus 4 and a panel carrying-in mechanism that carries in the cassette 8 to the inspection apparatus 5, the panel conveyance mechanism 24 is a panel carrying-out mechanism that carries out the cassette 8 from the inspection apparatus 5 and a panel carrying-in mechanism that carries in the cassette 8 to the inspection apparatus 6, and the panel conveyance mechanism 25 is a panel carrying-out mechanism that carries out the cassette 8 from the inspection apparatus 6 and a panel carrying-in mechanism that carries in the cassette 8 to the inspection apparatus 7, so that the structure of the inspection system 1 can be simplified.

In the present embodiment, a tunnel member 68 is disposed between the inspection device 4 and the inspection device 5, the tunnel member 68 covers the moving mechanism 39 of the panel conveying mechanism 23 from both sides in the upper and front-rear directions, a tunnel member 67 is disposed between the inspection device 5 and the inspection device 6, the tunnel member 67 covers the moving mechanism 39 of the panel conveying mechanism 24 from both sides in the upper and front-rear directions, a tunnel member 69 is disposed between the inspection device 6 and the inspection device 7, the tunnel member 69 covers the moving mechanism 39 of the panel conveying mechanism 25 from both sides in the upper and front-rear directions, a tunnel member 70 is disposed between the inspection device 7 and the panel discharge portion 14, and the tunnel member 70 covers the moving mechanism 39 of the panel conveying mechanism 26 from both sides in the upper and front-rear directions.

Therefore, in the present embodiment, the light from the outside of the inspection devices 5 to 7 can be suppressed from entering the inside of the inspection devices 5 to 7 as the lighting inspection devices by the tunnel members 67 to 70. That is, the light from the outside of the inspection devices 5 to 7 can be suppressed from entering the inspection devices 5 to 7 that become dark rooms at the time of lighting inspection of the liquid crystal panel 2. Therefore, in the present embodiment, the inspection devices 5 to 7 can perform appropriate lighting inspection of the liquid crystal panel 2.

In the present embodiment, a shutter member 73 for closing a part of one end sides of the tunnel members 67, 68 is disposed at one end side in the left-right direction of the tunnel members 67, 68, and the shutter member 73 closes a part of one end sides of the tunnel members 67, 68 when the inspection device 5 performs the lighting inspection of the liquid crystal panel 2. Therefore, in the present embodiment, even if the inspection timing of the liquid crystal panel 2 in the inspection devices 4 and 6 and the inspection timing of the liquid crystal panel 2 in the inspection device 5 are shifted, the light from the inspection devices 4 and 6 can be suppressed from entering the inspection device 5 performing the lighting inspection.

In the present embodiment, the shutter members 73 are disposed on one end sides of the tunnel members 67 and 69 in the left-right direction, and when the inspection apparatus 6 performs the lighting inspection of the liquid crystal panel 2, since the shutter members 73 close a part of one end sides of the tunnel members 67 and 69, even if the inspection timing of the liquid crystal panel 2 in the inspection apparatuses 5 and 7 and the inspection timing of the liquid crystal panel 2 in the inspection apparatus 6 are shifted, the light from the inspection apparatuses 5 and 7 can be suppressed from entering the inspection apparatus 6 performing the lighting inspection.

In the present embodiment, the shutter member 73 is disposed on one end side in the left-right direction of the tunnel members 69, 70, and when the inspection device 7 performs the lighting inspection of the liquid crystal panel 2, since the shutter member 73 closes a part of one end side of the tunnel members 69, 70, even if the inspection timing of the liquid crystal panel 2 in the inspection device 6 and the inspection timing of the liquid crystal panel 2 in the inspection device 7 are shifted, it is possible to suppress the light from the inspection device 6 from entering the inside of the inspection device 7 performing the lighting inspection, and to suppress the light from the panel discharge portion 14 from entering the inside of the inspection device 7. Therefore, in the present embodiment, the inspection devices 5 to 7 can perform appropriate lighting inspection of the liquid crystal panel 2.

In the present embodiment, two positioning holes 8a for positioning the cassette 8 in the horizontal direction with respect to the cassette mounting portion 9 are formed in the cassette 8, and the cassette mounting portion 9 includes two positioning pins 30 inserted into the positioning holes 8a and positioning the cassette 8 in the horizontal direction with respect to the cassette mounting portion 9. In the present embodiment, two positioning holes 8b for positioning the cassette 8 in the horizontal direction with respect to the cassette mounting portion 37 are formed in the cassette 8, and the cassette mounting portion 37 includes two positioning pins 42 inserted into the positioning holes 8b and positioning the cassette 8 in the horizontal direction with respect to the cassette mounting portion 37. Therefore, in the present embodiment, the cartridge 8 can be transferred between the cartridge mounting portion 9 and the cartridge mounting portion 37 with high accuracy.

In the present embodiment, wheels 57 rolling on the rails 56 and a pair of guide rollers 58 sandwiching the rails 56 in the front-rear direction are mounted on the support frame 46. Therefore, in the present embodiment, even if the weight of the cassette 8 and the liquid crystal panel 2 mounted on the cassette mounting portion 37 increases, the moving state of the cassette mounting portion 37 that is moved in the left-right direction by the moving mechanism 39 can be stabilized.

In the present embodiment, the panel holding member 64 that adsorbs and holds the liquid crystal panel 2 when the liquid crystal panel 2 is aligned is formed of polyetheretherketone, and a plurality of

suction holes

64b, 64c are formed in the planar panel adsorption surface 64a of the panel holding member 64. Therefore, in the present embodiment, compared with the case where the liquid crystal panel 2 is held by the rubber suction pad when the liquid crystal panel 2 is aligned, the misalignment of the liquid crystal panel 2 when the liquid crystal panel 2 is held by the panel holding member 64 and when the liquid crystal panel 2 held by the panel holding member 64 is separated from the panel holding member 64 can be suppressed. Therefore, in the present embodiment, the alignment mechanism 63 can perform the positional alignment of the liquid crystal panel 2 with high accuracy.

(other embodiments)

The above-described embodiments are examples of the preferred embodiments of the present invention, but the present invention is not limited thereto, and various modifications can be made without changing the gist of the present invention.

In the above embodiment, the inspection devices 3 to 7 may be provided with a lifting mechanism for lifting and lowering the cassette mounting portion 9. In this case, the elevating mechanism 38 is not required. In this case, the elevating mechanism moves the cartridge mounting portion 9 up and down between a position where the cartridge 8 mounted on the cartridge mounting portion 37 is disposed above the cartridge mounting portion 9 and a position where the cartridge mounting portion 37 is disposed below the cartridge 8 mounted on the cartridge mounting portion 9.

In this case, when the cassette 8 is carried into the inspection apparatuses 3 to 7, in a state where the cassette mounting portion 9 is lowered so that the cassette 8 mounted on the cassette mounting portion 37 is disposed above the cassette mounting portion 9, the moving mechanism 39 moves the cassette 8 mounted on the cassette mounting portion 37 to the right direction above the cassette mounting portion 9, and thereafter, the cassette mounting portion 9 is raised (that is, the cassette mounting portion 37 is relatively lowered with respect to the cassette mounting portion 9), and the cassette 8 is mounted on the cassette mounting portion 9.

In this case, when the cartridges 8 are carried out from the inspection apparatuses 3 to 7, the cartridge mounting portion 9 is lowered to the lower side of the cartridge mounting portion 37 (that is, the cartridge mounting portion 37 disposed on the lower side of the cartridges 8 mounted on the cartridge mounting portion 9 is relatively raised to the upper side of the cartridge mounting portion 9) in a state in which the cartridge mounting portion 37 is disposed on the lower side of the cartridges 8 mounted on the cartridge mounting portion 9, and then the movement mechanism 39 moves the cartridge mounting portion 37 in the rightward direction.

In the above embodiment, the cartridge mounting portion 9 may have a positioning hole corresponding to the positioning hole 8a, and the cartridge 8 may have a positioning pin corresponding to the positioning pin 30. In the above embodiment, the cartridge mounting portion 37 may be formed with a positioning hole corresponding to the positioning hole 8b, and the cartridge 8 may be provided with a positioning pin corresponding to the positioning pin 42.

In the above embodiment, the tunnel members 67 to 71 may cover the moving mechanism 39 from below. That is, the tunnel members 67 to 71 may cover the moving mechanism 39 from both sides in the up-down direction and both sides in the front-back direction. In this case, the tunnel members 67 to 71 are formed in a square tubular shape with both sides open in the left-right direction, for example. In the above embodiment, when the weight of the cassette 8 and the liquid crystal panel 2 mounted on the cassette mounting portion 37 is light, the inspection system 1 may not include the rail 56, the wheels 57, and the guide rollers 58.

In the above embodiment, the panel housing portion 13 may not be provided with the cassette conveying mechanism 61. In this case, the worker carries the empty cassette 8 conveyed to the left end portion of the conveyor belt 16 to the left side of the inspection device 3. In addition, if the operator stores the liquid crystal panel 2 before inspection in the empty box 8, the panel storage section 13 may not be provided with the alignment mechanism 63. In the above embodiment, the panel discharge unit 14 may not include the cassette conveying mechanism 62. In this case, the worker conveys the empty box 8 after taking out the liquid crystal panel 2 to the right end portion of the conveyor 16.

In the above embodiment, the number of inspection devices included in the inspection system 1 may be six or more or four or less. In the case where the number of inspection devices included in the inspection system 1 is one, the direction of movement of the cassette 8 carried in the inspection device by the panel carrying-in mechanism and the direction of movement of the cassette 8 carried out of the inspection device by the panel carrying-out mechanism may be opposite to each other. For example, the direction of movement of the cassette 8 carried in the inspection device by the panel carrying-in mechanism may be the right direction, and the direction of movement of the cassette 8 carried out of the inspection device by the panel carrying-out mechanism may be the left direction.

In the above embodiment, the panel holding member 64 may be formed of a material other than polyetheretherketone. The alignment mechanism 63 may be provided with a rubber suction pad for sucking and holding the liquid crystal panel 2 instead of the panel holding member 64. In the above embodiment, the display panel inspected by the inspection system 1 is the liquid crystal panel 2, but the display panel conveyed by the inspection system 1 may be a display panel other than the liquid crystal panel 2. For example, the display panel conveyed by the inspection system 1 may be an organic EL (electro luminescence) panel.

Claims

1. An inspection system comprising:

An inspection device that inspects a display panel in a state of being accommodated in a case; a panel loading mechanism that loads the cartridge storing the display panel before inspection into the inspection device; and a panel carrying-out mechanism that carries out the cassette storing the inspected display panel from the inspection device,

the inspection device is provided with a device side cartridge loading part for loading the cartridge,

the panel carrying-in mechanism and the panel carrying-out mechanism are provided with a movable side box carrying-in part for carrying the box and a moving mechanism for linearly moving the movable side box carrying-in part,

the inspection apparatus includes a lifting mechanism that moves up and down the apparatus-side cassette loading section between a position where the cassette placed on the movable-side cassette loading section is disposed above the apparatus-side cassette loading section and a position where the movable-side cassette loading section is disposed below the cassette placed on the apparatus-side cassette loading section; alternatively, the panel loading mechanism and the panel unloading mechanism may include a lifting mechanism that moves the movable-side cassette loading unit up and down between a position above the apparatus-side cassette loading unit and a position below the apparatus-side cassette loading unit, the movable-side cassette loading unit and the lifting mechanism being linearly moved by the moving mechanism,

The moving mechanism reciprocates the movable side cartridge mounting section in a left-right direction orthogonal to a vertical direction,

the movable side cassette loading part of the panel loading mechanism and the movable side cassette loading part of the panel unloading mechanism are arranged at the same position in the front-rear direction orthogonal to the up-down direction and the left-right direction,

the moving mechanism of the panel carrying-in mechanism is arranged at one side of the movable side box carrying-in part in the front-back direction,

the moving mechanism of the panel carrying-out mechanism is arranged on the other side of the front-rear direction of the movable side box carrying-out portion,

when the cassette is carried into the inspection apparatus, the moving mechanism of the panel carrying mechanism moves the cassette mounted on the movable side cassette mounting portion of the panel carrying mechanism to a position above the apparatus side cassette mounting portion in a state where the cassette mounted on the movable side cassette mounting portion of the panel carrying mechanism is disposed above the apparatus side cassette mounting portion, and then the lifting mechanism relatively lowers the movable side cassette mounting portion of the panel carrying mechanism with respect to the apparatus side cassette mounting portion to mount the cassette on the apparatus side cassette mounting portion,

When the cassette is carried out from the inspection apparatus, the elevating mechanism relatively elevates the movable-side cassette loading portion of the panel carrying-out mechanism disposed under the cassette loaded by the apparatus-side cassette loading portion to an upper side of the apparatus-side cassette loading portion and loads the cassette onto the movable-side cassette loading portion of the panel carrying-out mechanism, and then the moving mechanism of the panel carrying-out mechanism moves the movable-side cassette loading portion of the panel carrying-out mechanism.

2. The inspection system of claim 1, wherein the inspection system,

the panel carry-in mechanism and the panel carry-out mechanism are provided with the lifting mechanism.

3. An inspection system according to claim 1 or 2, wherein,

the moving direction of the cassette carried in by the panel carrying-in mechanism and the moving direction of the cassette carried out by the panel carrying-out mechanism are the same direction in the left-right direction,

the height of the panel loading mechanism when the movable side box loading part moves is the same as the height of the panel unloading mechanism when the movable side box loading part moves.

4. The inspection system of claim 1, wherein the inspection system,

Comprising a plurality of inspection devices arranged in the left-right direction,

if one of the two inspection devices adjacent in the left-right direction is set as a first inspection device, the other inspection device is set as a second inspection device,

the panel carrying-out mechanism that carries out the cassette from the first inspection device is the panel carrying-in mechanism that carries in the cassette into the second inspection device.

5. The inspection system of claim 4, wherein the inspection system,

the inspection devices include a lighting inspection device for lighting inspection of the display panel,

if the inspection device adjacent to the lighting inspection device in the left-right direction is set as a lighting inspection adjacent device, then

A tunnel member is disposed between the lighting inspection device and the lighting inspection adjacent device, and covers the moving mechanism between the lighting inspection device and the lighting inspection adjacent device at least from the upper side and the front-rear direction both sides.

6. The inspection system of claim 4, wherein the inspection system,

the device is provided with: a panel storage unit which is disposed on one side in a lateral direction of an inspection device group including a plurality of inspection devices and which stores the display panel before inspection in the empty box; and a panel discharge unit which is disposed on the other side of the inspection device group in the lateral direction and which takes out the inspected display panel from the cassette,

if the inspection device of the inspection device group disposed closest to the panel housing portion is the most upstream inspection device and the inspection device of the inspection device group disposed closest to the panel discharge portion is the most downstream inspection device, the inspection device of the inspection device group disposed closest to the panel discharge portion is the most downstream inspection device

The panel loading mechanism for loading the cassette into the most upstream inspection device loads the cassette from the panel accommodating section,

the panel carrying-out mechanism that carries out the cassette from the downstream-most inspection apparatus carries the cassette into the panel discharge section.

7. The inspection system of claim 6, wherein the inspection system,

the inspection apparatus includes a lighting inspection apparatus for lighting inspection of the display panel,

If the inspection device, the panel housing portion, or the panel discharge portion adjacent to the lighting inspection device in the left-right direction is set as a lighting inspection adjacent device, then

8. An inspection system according to claim 5 or 7, wherein,

the tunnel member is provided with a shutter member for closing a part of one end side in the lateral direction of the tunnel member.

9. The inspection system of claim 1, wherein the inspection system,

a plurality of first positioning holes are formed in either one of the cartridge and the apparatus-side cartridge mounting section, the plurality of first positioning holes being for positioning the cartridge in a horizontal direction with respect to the apparatus-side cartridge mounting section,

the other of the cartridge and the apparatus-side cartridge mounting section includes a plurality of first positioning pins which are inserted into the first positioning holes and position the cartridge in a horizontal direction with respect to the apparatus-side cartridge mounting section,

A plurality of second positioning holes are formed in either one of the cassette and the movable-side cassette mounting portion, the plurality of second positioning holes being for positioning the cassette in a horizontal direction with respect to the movable-side cassette mounting portion,

the other of the cassette and the movable-side cassette mounting portion includes a plurality of second positioning pins that are inserted into the second positioning holes and position the cassette in a horizontal direction with respect to the movable-side cassette mounting portion.

10. The inspection system of claim 1, wherein the inspection system,

comprises a linear rail for placing the movable side box placing part,

the length direction of the track is consistent with the left-right direction,

the panel carry-in mechanism and the panel carry-out mechanism include wheels that roll on the rail and a pair of guide rollers that sandwich the rail in the front-rear direction.

11. An inspection system according to claim 6 or 7, wherein,

the panel housing portion is provided with an alignment mechanism for aligning the display panel before housing the display panel in the empty box,

the alignment mechanism includes a panel holding member having a planar panel suction surface that sucks and holds the display panel when the display panel is aligned,

The panel holding member is formed of polyetheretherketone,

a plurality of suction holes for sucking the display panel are formed in the panel suction surface.