KR20100138732A - Large precision member storage container - Google Patents

Abstract

PURPOSE: A large precision member storage container is provided to cleanly store and carry a large precision member. CONSTITUTION: A tray(3) and a cover(2) receive and cover a large precision member. The tray is made of aluminum, aluminum alloy or magnesium. The thickness of the tray or the cover is in the range of 4~10mm in a planar part. The surface of the tray or the cover is painted. The surface roughness of the film of the surface is Ra 10micrometer.

Description

Large precision member storage container {LARGE PRECISION MEMBER STORAGE CONTAINER}

The present invention relates to a large pellicle, a large photomask or a glass substrate for a large photomask having a size of more than 500 mm on one side used in a photolithography process in liquid crystal manufacturing, particularly a large precision member. It relates to a container for storing.

In semiconductor manufacturing such as high density integrated circuit (LSI) and very large scale integration (VLSI) or liquid crystal display, a pattern is produced by irradiating light onto a semiconductor wafer or a liquid crystal display plate. However, if foreign matter such as dust or dust adheres to the photomask or reticle (hereinafter, simply described as a photomask) used at this time, the foreign matter absorbs or refracts the light so that the transferred pattern is deformed. There was a problem that the size, quality, appearance, etc. of the manufactured product were damaged, such as not only being sharp or edged, but also grounded black. For this reason, although these operations are normally performed in a clean room, it is still difficult to keep a photomask clean all the time. Therefore, in order to prevent adhesion of foreign substances on the surface of the photomask, the pellicle is attached to the photomask and then exposed. In this case, the foreign matter is not directly attached to the surface of the photomask but is attached on the pellicle. For this reason, if the focus is set on the pattern of the photomask during lithography, the foreign matter on the pellicle becomes irrelevant to the transfer.

In general, a pellicle includes a pellicle film having a thickness of about 1 to 10 μm made of nitrocellulose, cellulose acetate, or fluorine resin, which transmits light well. Attached or glued to the top surface of a pellicle frame. In addition, the lower end of the pellicle frame is provided with a pressure-sensitive adhesive layer made of polybutene resin, polyvinyl acetate resin, acrylic resin, etc. for mounting on a photomask, and a release layer for protecting the pressure-sensitive adhesive layer until the pellicle is used. . On the other hand, in the photomask, a light shielding film made of chromium (Cr) or the like is usually provided on one surface of a glass substrate made of synthetic quartz or the like, and a desired circuit pattern is drawn on the light shielding film. After drawing, the photomask can be inspected for defects in the pattern, and then pellicles can be applied to protect the pattern while being highly cleaned and kept in a very clean state. For this reason, the pellicle should not have foreign matter adhered to in particular on its inner surface side before use, and since it is a material and structure that is virtually impossible to clean as described above, it is very important to ensure that the pellicle adheres from storage after manufacture to transportation to the user. You need to stop it. On the other hand, this necessity is the same also about a glass substrate before manufacturing a photomask and a photomask.

In recent years, the photomask and the pellicle have also been remarkably enlarged with the enlargement of a liquid crystal display. Naturally, these storage containers become large accordingly. Conventionally, the resin container by vacuum molding or adhesive bonding has been used for the reason that a storage container is low in cost, light in weight, it is possible to integrally shape, high degree of freedom of shape, etc. However, when the storage container is enlarged, since the weight of the storage object increases and the deformation amount with respect to external force increases, movement or grazing occurs in the storage object or the storage container itself in the storage container. In order to prevent oscillation and deformation of the pellicle in the container, it is necessary to increase the rigidity of the storage container. By this request, the method of attaching a metal reinforcement board to the at least one outer surface side of the tray and cover of a pellicle container made of resin is proposed conventionally (refer patent document 1). Moreover, the same reinforcement method is proposed also in a photomask or a glass substrate (refer patent document 2, 3).

Patent Document 1: Japanese Patent Laid-Open No. 2009-037269 Patent Document 2: Japanese Patent Publication No. 2005-170507 Patent Document 3: Japanese Patent Laid-Open No. 2006-184414

However, the following problem exists in the method of attaching a reinforcement plate to the outer side of the said resin container. The main ones in question are cost and weight. Regarding rigidity, it is possible to make the reinforcing plate high rigidity or to increase it sufficiently by increasing its usage. However, accordingly, the number of fastening points with the resin tray and the cover increases, which increases the number of auxiliary parts and assembly labor required for assembly, leading to a large cost increase. For example, in the case of a conventional storage container which has been conventionally used for a pellicle having an outer dimension of 1526 mm × 1748 mm × 8 mm, an aluminum alloy drawn mold is mounted as a reinforcing plate on the outside of an ABS resin vacuum molded body. It took about 10 hours with four workers to assemble. In addition, since the weight increases as the reinforcing plate increases, the advantage of using resin as the material of the tray and the cover increases as the rigidity increases. In addition, although the tray and cover made of resin can be molded even in a complicated shape, the reinforcing plate to be mounted is inevitably a combination of relatively simple shapes in consideration of cost. Therefore, from this point, it is easy to lead to weight increase. For these reasons, there has been an excellent storage container that has a high rigidity that can be transported in a clean state such as a pellicle, a photomask or a glass substrate, and is light in weight and low in labor and cost associated with manufacturing. I wasn't doing it.

The present invention has been made in view of the above problems, and can store and transport large precision members such as large pellicles, photomasks or glass substrates in a very clean state, and have high rigidity, light weight, and low cost large size. It is an object to provide a precision member storage container.

SUMMARY OF THE INVENTION In order to solve the above object, one aspect of the present invention provides a large precision member storage container including a tray and a cover that accommodates a large precision member and covers and fits the whole, wherein at least one of the trays and the cover is made of aluminum or aluminum. A large precision member storage container made of an alloy or a magnesium alloy is used.

Another aspect of the present invention is a large precision member storage container in which at least a tray is manufactured by casting among trays and covers.

Another aspect of the present invention is a large precision member storage container in which the thickness of the tray or cover is in the range of 4 to 10 mm in the flat portion.

In another embodiment of the present invention, the surface of the tray or cover is coated, and the surface roughness of the coating film is set to a large precision member storage container having a Ra of 10 µm or less.

Another embodiment of the present invention is a large precision member storage container in which the coating film contains a conductive material.

According to another aspect of the present invention, in the tray, the outer edge of the tray is convex, protruding toward the cover side relative to the inner bottom surface inward, and the rear side of the convex outer edge is concave. A large precision member storage container is used.

In another aspect of the present invention, at least one of the tray or the cover made of aluminum, aluminum alloy, or magnesium alloy has at least one opening, and the opening is mounted with a resin plate or a glass plate covering the entire surface thereof. I make a large precision member storing container which there is.

Another embodiment of the present invention is a large precision member storage container in which a gap between the resin plate or glass plate covering the opening portion and the tray or cover is completely sealed by adhesive resin.

According to the present invention, it is possible to provide a high precision, lightweight and low cost large precision member storage container capable of storing and transporting large precision members such as large pellicles, photomasks or glass substrates in a very clean state. .

1 is a perspective view of a large precision member storage container according to the first embodiment.
It is an exploded perspective view when a pellicle is accommodated in the large precision member storage container shown in FIG.
It is a perspective view which shows the tray shown in FIG. 2, and its enlarged cross section.
It is an exploded perspective view of the large precision member storage container which concerns on 2nd Embodiment which accommodated the pellicle.
5 is a partial cross-sectional view of the vicinity of a buckle of a large precision member storage container according to the third embodiment.
FIG. 6 is a partial cross-sectional view for explaining the secondary structure of the large precision member storage container according to each embodiment of the present invention. FIG.
It is an exploded perspective view of the large precision member storage container which concerns on 4th Embodiment at the time of storing a photomask as a large precision member.
It is an exploded perspective view of the large precision member storage container which concerns on 5th Embodiment at the time of storing a photomask as a large precision member.
9 is a partial cross-sectional view of the vicinity of the fixing means of the photomask in the large-sized precision member storage container shown in FIG. 7 or FIG. 8.
10 is an exploded perspective view of the large precision member storage container manufactured in the embodiment of the present invention, and is a view showing together with the pellicle being stored.

Below, each embodiment of the large precision member storage container of this invention is described.

  1. First embodiment

1st Embodiment is a form which uses the tray which comprises a large precision member storage container as the casting of aluminum, an aluminum alloy, or a magnesium alloy, and makes a cover resin.

1 is a perspective view of a large precision member storage container according to the first embodiment. It is an exploded perspective view when a pellicle is accommodated in the large precision member storage container shown in FIG.

As shown in FIG. 1 and FIG. 2, the large precision member storage container 1 which concerns on 1st Embodiment is a thin substantially box-shaped container, and is the upper cover 2 and the lower side in normal use state. The tray 3 is provided. The cover 2 and the tray 3 can be opened and closed, and a space exists inside the large precision member storage container 1 in a state where they are closed by fitting them. The pellicle 4 which is an example of a large precision member can be accommodated in the space. However, only by storing the pellicle 4 in the space, the pellicle 4 moves in the large precision member storage container 1 during transportation, and the pellicle 4 is caused by oscillation caused by grazing or the like. There is a risk that a large number of foreign substances may stick to 4). For this reason, it is necessary to provide the fixing means suitable for the internal objects on the tray 3, and to fix the objects to the fixing means so that the objects do not move during transportation.

The cover 2 is a resin molded body having a recessed portion on the tray 3 side. As the resin material constituting the cover 2, polyester resins such as acrylic resins, polycarbonate resins, PET resins, polyolefin resins such as PE and PP, polystyrene resins, and the like can be used in addition to ABS resins. A resin material may be used and is not limited to these. However, considering the visibility of the pellicle 4 in the large precision member storage container 1, it is preferable that the cover 2 is transparent (a colorless transparent or colored transparent) or translucent. Therefore, in addition to transparency, it is particularly preferable to use an ABS resin or an acrylic resin as the material of the cover 2 in addition to workability and cost such as rigidity, molding and adhesion, and more preferably, to impart antistatic properties. .

The cover 2 is suitably manufactured by vacuum molding, but in addition to vacuum molding, the cover 2 can be formed by applying a gas pressure from the resin side to the mold side and forming the vacuum by combining both of the pressure molding and the vacuum molding. It can manufacture by this, and it can select suitably in consideration of the moldability of a material, the complexity of a metal mold | die shape, etc .. Moreover, you may select shaping | molding methods other than the said shaping | molding method.

Two holding portions 20 are provided at opposite short sides of the cover 2, respectively. The holding part 20 is a structural member for opening and closing the cover 2 from the tray 3. If the holding part 20 is configured so as to have an appropriate strength, it is possible to use the transport of the large precision member storage container 1 as a whole, but since the cover 2 requires excessive rigidity, the cover 2 is usually It is preferable to design the gripping portion 20 only for the opening and closing use. Moreover, in this embodiment, although the gripping part 20 bolts (not shown) what was produced as the member different from the cover 2 to the cover 2 after shaping | molding, the structural member of the cover 2 is integrally molded. It is good also as a grip part shape. In addition, as the mounting position, only the long sides opposite to the cover 2 or both the short sides may be provided on both long sides.

The tray 3 is a molded body of aluminum, an aluminum alloy or a magnesium alloy having a recessed portion on the cover 2 side. It is preferable to use casting, press working, etc. as a manufacturing method of the tray 3, but casting is especially preferable. In the case of press working, there is an advantage that a smooth and clean surface is obtained. In this case, various alloys such as general aluminum alloy, Al-Cu, Al-Mn, Al-Mg, Al-Mg-Si, and Al-Zn-Mg can be used as materials. In particular, it is preferable to select Al-Mg type (JIS # 5000 type) or Al-Mg-Si type (JIS # 6000 type) from the viewpoint of workability such as molding and welding. In the case of a magnesium alloy, it is inferior to press formability compared with an aluminum alloy, but when using a warm press, Mg-Al-Zn type AZ31 etc. can be used suitably.

However, in the press working, when carrying out the large-size molding as the object of the present invention, the processing cost of the mold becomes high, and the press used also has a pressing force of several hundred tons or more, which is almost equivalent to the automobile manufacturing equipment. Because of the necessity, there is a disadvantage that the manufacturing cost becomes very expensive. In addition, since a thin plate of the same thickness is used in processing, only the member cannot secure sufficient rigidity. Therefore, it is necessary to provide a lot of ribs to compensate for the lack of rigidity.

On the other hand, when casting is employed, the sand casting method, the lost wax method, the die casting method, or the like can be selected as the casting method. Although what is necessary is just to select the optimal thing in consideration of the magnitude | size and production quantity of the large precision member storage container 1 manufactured from these, Especially the sand casting which is superior in cost is preferable. In casting, even in a complicated shape, a shape close to a finished product can be obtained by one molding, and only parts of the pellicle 4, such as fixing means and mounting holes, are required for machining. For this reason, casting has the advantage that it is very productive. As a material in the case of casting, a general casting alloy can be used suitably. Among them, aluminum alloys include Al-Si-Mg-based, Al-Si-Cu-based, and Al-Si-Cu-Mg-based alloys. Particularly preferred. However, even if it is Al-Si-Cu type alloy, what has a very large Si content (for example, JIS AC8, AC9 etc.) is unpreferable because it has a problem in segregation and machinability of Si. In the case of magnesium alloys, the Mg-Al-Zn type (for example, ASTM AZ91), the Mg-Ag type (for example, ASTM QE22), and the Mg-rare earth element type are based on the balance between strength and workability. Particularly preferred.

Moreover, it is preferable to make the thickness of the tray 3 into the range of 4-10 mm, and also the range of 5-8 mm in a flat part. By setting the thickness of the flat portion to 4 mm (more preferably 5 mm) or more, there is no problem in the flow of hot water during casting, and in particular, the flat portion having a large area can sufficiently fill the molten metal, thereby causing a defect. Can be reduced. In addition, by making the thickness of the flat portion 10 mm or less (more preferably 8 mm) or less, the shrinkage amount during solidification can be suppressed, thereby making it difficult to cause defects due to pulling. In addition, the increase in the cooling time can be prevented and the strength and productivity can be increased. In addition, the weight can be reduced. Moreover, in the part which requires rigidity especially, such as a bending part and an outer peripheral part other than a flat part, it is not limited to the range of the said thickness, It can be set as desired thickness examined from the rigid surface.

In addition, when the whole tray 3 cannot be cast by one casting, it is produced in divided structure, each is joined by the fastening means, such as welding or gluing, a screw, a rivet, etc., and the tray 3 is joined. It is also possible to configure. It is disadvantageous as much as the time required for the processing of the joint, but in addition to the cost savings due to the small size of the form, it is advantageous in casting quality because one casting is small, which is a problem for the integral manufacturing. If there is a possibility that a may occur, split production may be employed.

As mentioned above, when casting, especially sand casting, is employed, the surface of the casting is a cast skeleton having a large surface roughness. Since it is easy to accumulate foreign substances on the surface of the cast skeleton, it is not suitable for storing products with high cleanliness. Moreover, since there are many pinholes etc. which are traces of a gas leak at the time of solidification, it is difficult to wash highly. For this reason, it is preferable to grind | polish the surface of the tray 3 after casting, or the smoothing process by sandblasting, and it is especially preferable to apply | coat after smoothing and to make the surface roughness Ra 10 micrometers or less. Do. In this case, since the coating film is inevitably thickened, the background treatment of the cast skeleton becomes unnecessary, and the productivity can be further improved. Moreover, it is preferable to include electroconductive substance (carbon black, a metal, etc.) in the coating film. By providing conductivity to the coating film, it is possible to effectively prevent the charged foreign matter from adhering to the pellicle 4, and to effectively prevent the charging and electrostatic destruction when the pellicle 4 to be stored is taken out.

Two holding portions 30 are provided on each of the opposite short sides and the long sides of the tray 3, one on each side. The holding part 30 is for holding when carrying the tray 3 or the large precision member storage container 1. In this embodiment, although the holding part 30 is fastening to the tray 3 with the bolt (not shown) made by the single body as a different part from the tray 3, the shape of the tray 3 is shown. It may be a structure in which the invention is formed by molding. These positions and shapes can be appropriately set in consideration of the total weight.

FIG. 3: is a perspective view which shows the tray 3 shown in FIG. 2, and its enlarged cross section. Some enlarged cross section shown in FIG. 3 shows the area | region A shown by the dashed-dotted line enlarged after cutting the tray 3 with the dotted line X. As shown in FIG. In this way, the outer edge 31 of the tray 3 is formed to protrude toward the cover 2 side as compared with the inner bottom surface 32 in the inner side thereof, and the rear side 33 thereof is concave in the opposite shape. . By not making the outer edge 31 into the simple thick thickness but making the back side 33 into the concave shape, the defect which arises by pulling at the time of casting can be reduced, and the tray 3 can be reduced in weight. Moreover, since the outer edge 31 is an area | region where the highest rigidity is obtained on the tray 3 by the rib effect, it is most suitable for mounting the pellicle 4 which is an accommodating object, and it uses a phrase or the like at the time of use. It is preferable to finish-cutting the protruding surface 31a by plane cutting.

  2. Second Embodiment

In the second embodiment, both the tray and the cover constituting the large-sized precision member storage container are formed as a casting of aluminum, an aluminum alloy, or a magnesium alloy.

It is an exploded perspective view of the large precision member storage container which concerns on 2nd Embodiment which accommodated the pellicle.

In this embodiment, the tray 3 has a structure similar to that described in the first embodiment. Like the tray 3, the cover 2 is comprised from aluminum, an aluminum alloy, or a magnesium alloy, but similarly to the tray 3 described in 1st Embodiment, the material can be selected suitably. Here, the materials of the cover 2 and the tray 3 may not necessarily be the same. For example, the material of the tray 3 may be made of aluminum alloy in order to give particularly high rigidity, while the material of the cover 2 may be made of magnesium alloy so as to be particularly excellent in lightness at the time of opening.

Moreover, in this embodiment, the opening part 21 is provided in the cover 2, and the resin plate 22 is attached so that the opening part 21 may be completely covered. The gap between the resin plate 22 and the cover 2 is filled with an adhesive resin or the like so as not to oscillate from the gap, and vented with the outside so as to prevent foreign matter from entering the large precision member storage container 1. It is preferable that it is sealed. However, as a method of fixing the resin plate 22 to the cover 2, the resin plate 22 is covered with a seal member (such as a ring) between the resin plate 22 and the cover 2. You may make it fit inside 2). Moreover, also in embodiment which has such an opening part 21, the thick thickness of the cover 2 is the range of 4-10 mm for the same reason as the tray 3 described in the said 1st Embodiment, and also 5 It is preferable that it is the range of -8 mm.

The dotted line area | region 22a shown by the cover 2 in FIG. 4 shows the state which fixed the resin plate 22 inside the cover 2 toward the arrow B direction. Here, the resin plate 22 is not limited to one sheet, but may be a plurality of sheets so as to be common to each of the openings 21 or to the plurality of openings 21. The shape of the opening portion 21 is not limited to the rectangle illustrated in FIG. 4, but may be another shape such as a circle. The resin plate 22 may have any shape as long as it can completely cover the opening 21. In addition, in the example of FIG. 4, although the resin plate 22 is attached from the inner side of the opening part 21, you may attach from the outer side. As the material of the resin plate 22, polyester resins such as acrylic resins, polycarbonate resins, PET resins, polyolefin resins such as PE and PP, polystyrene resins, and the like can be used in addition to ABS resins. As the selection from these materials, for example, when the resin plate 22 is provided in the cover 2 illustrated in FIG. 4, the ABS resin, so that the pellicle 4 housed therein is visually recognized It is preferable to select resin which is more excellent in transparency, such as an acrylic resin and a polycarbonate resin. Moreover, it is more preferable to use the resin plate 22 which has antistatic property. In addition, a glass plate etc. can also be used instead of the resin plate 22 or in combination with the resin plate 22.

In addition, although not illustrated in this embodiment, you may provide the tray 3 with the opening part exactly the same as the cover 2, and may cover the opening part with the resin plate. When attaching the resin plate to the tray 3, in order to confirm the foreign matter adhering on the tray 3, it is preferable that a resin plate is colored especially black. As the material thereof, an acrylic resin, an ABS resin or the like colored with smoke brown, smoke gray or black can be used. And it is more preferable to provide antistatic property also to these. In addition, depending on the shape of the object, the tray 3 and the cover 2 may be formed in the same form so that the tray 3 and the cover 2 are not distinguished.

  3. Third Embodiment

In the third embodiment, similarly to the first embodiment, the tray is formed of a casting of aluminum, aluminum alloy, or magnesium alloy, the cover is made of resin, and the tray and the cover are fixed by a buckle. .

It is a partial sectional drawing of the buckle vicinity of the large precision member storage container which concerns on 3rd Embodiment.

As shown in Figs. 5 (A) and 5 (B), as the buckle for fixing the cover 2 and the tray 3, the fixing part 41 which can be fixed to the substantially vertical end face 24 or the like on the cover 2 side, etc. And a buckle 40 composed of a drive unit 42 which can be fixed to a substantially vertical end face 34 or the like on the tray 3 side. Moreover, when the cover 2 side is a shape which cannot hold | maintain the structural member of a buckle, as shown, for example in FIG. 5 (5B), the substantially vertical cross section 34 of the tray 3 side is shown. The cover 2 and the tray 3 may be fastened by hooking a part of the buckle 50 to the end 25 of the cover 2 using the buckle 50 which can be fixed only. Thus, the fastening means of the cover 2 and the tray 3 can be suitably selected by the shape of the fixing location of the cover 2 and the tray 3. In this embodiment, although the buckle 40, 50 fixed to the cover 2, the tray 3, or the tray 3 was illustrated, the clip which can be removed from the tray 3 or the cover 2 completely is possible. It is also possible to fasten the cover 2 and the tray 3 by a clip or the like.

In addition, as shown in FIG. 5 (5A) and FIG. 5 (5B), the holding | maintenance tool 5 for holding the pellicle 4 to the tray 3 is in the protruding surface 31a of the tray 3; Is fixed. Although only one holding tool 5 is shown in the figure, a plurality of holding tools 5 are normally fixed along the outer edge 31 of the tray 3. The holding tool 5 should just be able to be fixed reliably so that the pellicle 4 may not move in the tray 3 during transportation, and various types of things can be used. In this example, the pellicle 4 is fixed by inserting a pin supported by the holding tool 5 into a non-penetrating annular hole provided on the side of the frame of the pellicle 4.

  4. Attached Structure Example

FIG. 6 is a partial cross-sectional view for explaining the secondary structure of the large precision member storage container according to each embodiment of the present invention. FIG.

As a means of preventing foreign matter from entering into the large precision member storage container 1 from the outside, a seal material represented by a gasket 60 is fitted to the fitting surface between the cover 2 and the tray 3, As indicated by the arrow F, it is preferable that the joining surfaces of each other are brought into close contact by fitting the cover 2 and the tray 3 together. As a similar means, the method of sticking an adhesive tape to the whole periphery periphery can also be selected.

Moreover, when a pressure difference arises in and out of the large precision member storage container 1, the through-hole for adjusting internal and external air pressure is provided, in order to make it easy to release | release the cover 2 and the tray 3, and The filter 26 may be provided in order to prevent the invasion of foreign substances at the time of inflow of air.

In addition, the caster 70 may be fixed to the inner bottom surface of the tray 3 to facilitate the movement of the large precision member storage container 1.

  5. Fourth embodiment

In the fourth embodiment, as in the first embodiment, the tray is formed of a casting of aluminum, aluminum alloy or magnesium alloy, the cover is made of resin, and the photomask is stored in place of the pellicle.

In each of the first, second, and third embodiments, an example in which a large pellicle 4 is accommodated has been illustrated. However, not only the pellicle 4 but also a member that requires high cleanliness as the object to be stored. For example, application is possible also for a photomask, the glass substrate for photomasks, etc. However, in the photomask and the pellicle 4, there is a large weight difference in both. For example, the weight of a quartz glass substrate of 1620 mm x 1780 mm x 17 mm is about 110 kg, but the weight of the pellicle 4 of 1526 mm x 1748 mm x 8 mm corresponding to the quartz glass substrate is about 3 kg. For this reason, in the case of the container which accommodates glass members, such as a photomask, while making it the structure according to each of 1st, 2nd and 3rd embodiment, as an individual member, the design corresponding to glass members, such as a photomask, is performed. It is necessary.

It is an exploded perspective view of the large precision member storage container which concerns on 4th Embodiment at the time of storing a photomask as a large precision member.

As shown in FIG. 7, the large precision member storage container 1 which concerns on 4th Embodiment is a thin nearly box-shaped container similarly to 1st Embodiment, and the cover 2 and the tray 3 are the same. It is provided. The cover 2 and the tray 3 can be opened and closed, and the photomask 6 can be accommodated in the space formed in the state which fitted and closed them. Moreover, fixing means is provided in the tray 3 so that the photomask 6 may not move at the time of transportation, and the photomask 6 is fixed to the tray 3 using the said fixing means. The contents, materials, structures, dimensions, and the like of the cover 2 and the tray 3 are common to those in the first embodiment, and thus description thereof is omitted.

  6. Embodiment of the fifth

In the fifth embodiment, as in the second embodiment, both the tray and the cover constituting the large-sized precision member storage container are formed by casting of aluminum, aluminum alloy, or magnesium alloy, and replace the pellicle with the photomask. It will house.

It is an exploded perspective view of the large precision member storage container which concerns on 5th Embodiment at the time of storing a photomask as a large precision member.

In this embodiment, the cover 2 and the tray 3 have the same material and structure as those described in the second embodiment. The cover 2 is provided with an opening 21, and a resin plate 22 is mounted to completely cover the opening 21. The gap between the resin plate 22 and the cover 2 is filled with an adhesive resin or the like so as not to oscillate from the gap and to allow foreign matter to enter the large precision member storage container 1 so as to be vented from the outside and completely sealed. It is preferable that it is done. In addition, the resin plate 22 may be made of a material having high transparency, whereby the storage situation of the internal photomask 6 can be easily visually recognized from the outside. The thickness of the cover 2 is preferably in the range of 4 to 10 mm and in the range of 5 to 8 mm for the same reason as the tray 3 described in the first embodiment.

9 is a partial cross-sectional view of the vicinity of the fixing means of the photomask in the large-sized precision member storage container shown in FIG. 7 or FIG. 8.

9 (9A) and 9 (9B), the holding tool 7 for holding the photomask 6 to the tray 3 is fixed to the protruding surface 31a of the tray 3. Although only one holding tool 7 is shown in the figure, in order to fix the photomask 6 having a larger weight than the aforementioned pellicle 4, the holding tool 7 having a number or more required for fixing the pellicle 4 is required. ) Is preferably provided in the tray 3. As shown enlarged in Fig. 9C, the holding tool 7 has a mechanism for fixing the upper and lower peripheral edges of the photomask 6 so as to be sandwiched between the inclined surfaces, respectively. The holding tool 7 is a main body portion 71 fixed to the protruding surface 31a and an upper protrusion portion 72 inserted into the space inside the main body portion 71 and protruding upward of the main body portion 71. And a lower protruding portion 73 protruding from the lower side of the main body portion 71 toward the inner side of the tray 3, and protruding toward the inner side of the tray 3 from a space inside the main body portion 71. A movable protrusion 74 configured to be movable between the upper protrusion 72 and the lower protrusion 73, and an elastic body (for example, a spring) biasing the movable protrusion 74 upward ( 75 and a screw 76 that penetrates the screw hole provided in the upper projection 72, and abuts on the upper surface of the movable projection 74. The lower protrusion 73 has an inclined surface whose upper surface is inclined downward toward the inner side of the tray 3. Moreover, the movable protrusion 74 has an inclined surface whose lower surface inclines upward toward the inner side of the tray 3. When the screw 76 is turned to tighten the screw toward the movable protrusion 74, the movable protrusion 74 moves downward against the elastic body 75. On the other hand, when the screw 76 is turned in the reverse direction to the above-mentioned, the movable protrusion 74 moves upward according to the restoring force of the elastic body 75. In this way, by adjusting the height of the movable protrusion 74, the outer peripheral edges of the upper and lower sides of the photomask 6 having various thicknesses are sandwiched between the lower protrusion 73 and the photomask 6. Can be fixed securely. In addition, unlike the above, the elastic body 75 may bias the movable protrusion 74 downward between the upper protrusion 72 and the movable protrusion 74.

  7. Action and effect in each embodiment

According to each said embodiment, in the large precision member storage container 1, since at least the tray 3 of the tray 3 and the cover 2 is comprised from aluminum, an aluminum alloy, or a magnesium alloy, it is lightweight. A highly rigid storage container can be obtained. In particular, by manufacturing the large precision member storage container 1 by the casting method, a highly rigid storage container can be obtained in a shape close to the final shape in one casting without using complicated reinforcing members. Therefore, a low cost storage container with very low assembly labor can be obtained. In addition, the thickness of the planar portions of the tray 3 or the tray 3 and the cover 2 manufactured by casting is set to 4 to 10 mm (more preferably, 5 to 8 mm) to suppress the occurrence of defects, The productivity can be increased and the weight can be reduced. In addition, by providing conductivity to the coating film, it is possible to effectively prevent the charged foreign matter from adhering to the large precision member, and also to effectively prevent the charging and electrostatic destruction when the large precision member to be stored is taken out. In addition, by applying the coating so that the surface roughness Ra is 10 μm or less in the antistatic paint, it is possible to greatly reduce foreign matter adhesion to the large precision member to be stored. In addition, by protruding the outer edge 31 of the tray 3 from the inner bottom surface 32 of the tray 3 and making the rear side 33 concave, defects caused by the pulling during casting can be reduced. The tray 3 can be reduced in weight. In addition, an opening 21 is provided in the casting (both of the tray 3 or the cover 2 and the tray 3), and the opening 21 is sealed with the resin plate 22, and the gap is made of adhesive resin. This makes it possible to completely seal it, thereby preventing foreign matters from adhering to the large precision member and further reducing the weight. When the resin plate 22 is made of a material having high transparency, the storage state of the objects (pellicle 4, photomask 6, etc.) can be easily confirmed from the outside.

<Examples>

Hereinafter, embodiments of the present invention will be described. However, the present invention is not limited to the embodiment.

In order to accommodate the pellicle 4, the large precision member storage container 1 of the external appearance as shown in FIG. 1 was produced. The size of this container 1 is 1900 mm wide, 1700 mm deep, and 180 mm high (from the bottom of the tray 3 to the ceiling surface of the cover 2). The details of the cover 2 and the tray 3 will be described below.

10 is an exploded perspective view of the large precision member storage container manufactured in this embodiment together with the pellicle being stored.

The cover 2 was integrally molded by a vacuum molding method using a 3 mm thick antistatic transparent acrylic resin. After molding, trimming around the cover 2 is carried out to remove the burrs and trims, and the handles 20 for handling each of the two positions on the sides of both short sides are removed. It mounted by the bolt (not shown) from the inside. The tray 3 was manufactured by sand casting using the Al-Si-Mg casting aluminum alloy (JIS # AC4CH).

In casting, the base metal melting of the Al-Si-Mg casting aluminum alloy (JIS # AC4CH) is performed in air using a SILICONIT electric furnace, and the porosity (such as gas hole after molding) In order to reduce porosity defects, casting was performed after reducing the gas in the melt by reducing the inside of the crucible with a vacuum pump. In particular, the sand mold is installed in three places in total in the center and the peripheral edges of both short sides in consideration of improving the flow of the hot water to the thin part of the center, and the shrinkage cavities. In order to prevent), sufficient pressure was secured. Hot water supply is carried out simultaneously at three places, and after cooling, the tray 3 is removed from the sand mold, and the protruding surface 31a on which the hot water is removed by a large machining center, the external dimension is finished, and the pellicle 4 is mounted. ) And the hole processing for mounting the fastener 5 was performed. Subsequently, cleaning was carried out using a surfactant and tap water, and the injection, cutting oil and foreign matter adhering at the time of casting and machining were removed, and then heated in a large oven to completely remove moisture. .

Next, after inspecting the appearance of the casting to confirm that there are no casting defects such as cracks or shrinkage cavities, the tray 3 is held vertically in a clean environment, and a black antistatic paint (trade name: EC- 06 / Nagase ChemteX Co., Ltd.) was applied by the spray method and dried. At the time of coating, the coating amount was controlled so as to be about 10 μm of the coating film, so that the thickness unevenness or poor appearance of the coating film due to sagging or the like was not generated. After drying, the coating was repeated, and the final film thickness after three coatings was about 30 to 40 µm.

Four openings 37 of the tray 3 are covered with an antistatic black ABS resin plate 36 (brand name: manufactured by TOYOLACPAREL / Toray Co., Ltd.) of 1480 mm x 1650 mm x 3 mm, separately prepared from the upper side, Adhesive fixing was carried out with an epoxy adhesive (trade name: MOS7 / Cornish, Inc.). In addition, the adhesive was spread | dispersed enough to the edge part so that a clearance gap may not arise in the resin plate 36 and the tray 3 at this time. Moreover, after hardening of the adhesive agent, the fastener 5 was adjusted to the position which can fit in the mounting hole of the frame of the pellicle 4 on the tray 3, and it mounted with the bolt. Thereafter, the handle 30 and the buckle 40 were attached as the fastening means between the tray 3 and the cover 2.

The surface roughness of the painted surface of the tray 3 was measured by a tactile surface roughness measuring instrument, and when Ra = 3 μm, the plane was smooth and clean without reflecting the original main surface. It was. In addition, the appearance of a suitable mat bath was easy and very suitable for visual foreign matter inspection. As a result of the weight measurement, the cover 2 had a weight of about 23 kg, the tray 3 had an ABS resin plate (8 kg) in total, 41 kg, and the total weight of the large precision member storage container 1 was 64 kg. . Except for the casting process and the machining process performed by a professional contractor, the air required for assembling and manufacturing is approximately one hour by two workers even when the ABS resin plate 36 is bonded. It was possible to reduce the airborne by width.

The cover 2 and the tray 3 of the large precision member storage container 1 thus manufactured are brought into a clean room of a class 10, using a surfactant and a sponge made of PVA. After sufficient scrub washing, the mixture was rinsed with pure water and completely dried by natural drying. Thereafter, foreign matter inspection and appearance inspection were performed in the dark room. Since the cover 2 was a large vacuum molded article made of resin, there was no problem in particular. The tray 3 is also in a clean state in the painted surface, the surface of the ABS resin plate 36, and all of the joints between the casting and the ABS resin plate 36, and includes shrinkage cavities, hot water traces, and blows. In addition to casting defects such as blow holes, no bonding defects at the joints were observed and the appearance was good.

Then, the pellicle 4 produced separately with respect to the large precision member storage container 1 was accommodated, and the transportation test was done. The pellicle 4 used here was a pellicle frame made of an A5052 aluminum alloy subjected to a black alumite treatment having an outer dimension of 1526 mm × 1748 mm, an inner dimension of 1493 mm × 1711 mm, and a height of 6.2 mm. A silicon adhesive layer having a thickness of 6 mm and a height of 2 mm was formed, and a pellicle film made of a fluorine resin having a thickness of 6 µm, which was formed by a die coat method, on the opposite end surface was pasted with a silicone adhesive. In addition, the mask adhesion layer is protected by the 125-micrometer-thick PET film separator which apply | coated the fluorine modified silicone mold release agent as the separator cut into the shape of substantially the same dimension as the said pellicle frame. The pellicle 4 was inspected for foreign matter in the dark room, and the position of the attached foreign matter was accurately described on a map, and then stored in the manufactured large precision member storage container 1.

After storing the pellicle 4, the large precision member storage container 1 was conveyed to two workers, but deformation and squeaking of the container 1 were not felt at all in normal handling. Therefore, three persons were placed on both long sides and six persons were deliberately rubbed on the large precision member storage container 1, but the inside pellicle membrane was kept flat and wrinkled or loosened. Signs suggesting the deformation of the container 1, such as the occurrence of, could not be seen.

Next, the large-precision member storage container 1 which accommodated the pellicle 4 was double-packed by the antistatic PE packing bag, and it was taken out from the clean room and packed into the reinforcement cardboard box. . Transportation tests included loading and unloading of these packages from Gunma Takasaki City to Kitakyushu City, Fukuoka (approximately 1100 km, by highway). After performing it three times, it was accommodated in a clean room again, and it was set as the test which examines the internal pellicle 4 for the external appearance test and the presence or absence of adhering foreign substances. As a result, no damage was observed at all in the pellicle frame and the pellicle film. In addition, the position and number of foreign matters on the membrane were not changed at all before transportation. From these results, it was confirmed that the large precision member storage container 1 is light in weight and has sufficient rigidity for transporting the large precision member including the pellicle 4 in a clean state while having little assembly labor during manufacture. It became.

Industrial Applicability The present invention can be used to store or transport a precision substrate such as a pellicle or glass photomask.

1 large precision member storage container
2 cover
3 tray
4 pellicle (an example of a large precision member)
6 photomask (an example of a large precision member)
21 opening
22 resin plate
31 Expectation
32 Inner Floor
33 back
36 ABS resin plate
37 opening

Claims (8)

In the large precision member storage container provided with the tray and cover which accommodate a large precision member and cover and fit the whole,
At least the tray of the tray and the cover is a large precision member storage container, characterized in that composed of aluminum, aluminum alloy or magnesium alloy. The method of claim 1,
At least the tray of the tray and the cover is a large precision member storage container, characterized in that produced by casting. The method of claim 2,
The thickness of the tray or the cover is a large precision member storage container, characterized in that the range of 4 ~ 10mm in the flat portion. The method of claim 1,
The surface of the said tray or said cover is coated, and the surface roughness of the coating film is Ra 10 micrometers or less, The large precision member storage container characterized by the above-mentioned. The method of claim 4, wherein
And the coating film comprises a conductive material. The method according to any one of claims 1 to 5,
In the tray, the outer edge thereof is a convex shape projecting toward the cover side relative to the inner bottom surface inwardly located therein, and the rear side of the convex outer edge is a concave shape, characterized in that the large precision member storage container. The method according to any one of claims 1 to 5,
At least one of the said tray or the said cover comprised from the said aluminum, aluminum alloy, or magnesium alloy WHEREIN: The large size which has at least 1 opening part, and the opening part is equipped with the resin plate or the glass plate which covers the whole surface. Precision member storage container. The method of claim 7, wherein
The gap between the resin plate or the glass plate covering the opening and the tray or the cover is completely sealed by an adhesive resin.

Images