KR100903543B1 - Case for housing large-sized pellicle - Google Patents

Abstract

A storage container for a large pellicle having an area of 1000 cm 2 or more, comprising a tray containing a pellicle and a lid covering the tray, wherein the lid and / or the tray contains a material having a honeycomb structure.

Description

Large pellicle storage container {CASE FOR HOUSING LARGE-SIZED PELLICLE}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pellicle container used for preventing foreign matter from adhering to a photomask or reticle used in a lithography process when manufacturing an LSI or a liquid crystal panel, and more particularly, to a large pellicle container.

Background Art Conventionally, in the production of semiconductor circuit patterns and the like, dustproof means called pellicles are generally used to prevent foreign matter from adhering to a photomask or reticle (see Patent Document 1, for example). The pellicle is a transparent polymer film such as nitrocellulose, cellulose derivative, amorphous fluorine resin, etc. having a thickness of about 10 μm or less on the upper edge surface of the frame having a shape that matches the shape of the photomask or reticle (hereinafter referred to as a pellicle film). And the adhesive film is coated on the lower edge surface of the frame, and the protective film is adhered on the adhesive material by a predetermined adhesive force.

The adhesive material is for fixing the pellicle to the photomask or reticle. And a protective film protects the adhesive face of this adhesive material in order to maintain the adhesive force of this adhesive material until this adhesive material is provided for the use. When transporting the pellicle from the manufacturer to the user, in order to prevent foreign matter from adhering to the pellicle film or to prevent the pellicle from being damaged, the pellicle is stored in a storage container consisting of a tray and a lid, and further dustproofed. It is common to store and transport in an envelope or the like.

Conventionally, the storage with respect to the storage container which has the structure mentioned above was performed as shown to FIG. 7 and FIG. That is, in FIG. 7 and FIG. 8, the pellicle film 52 is bonded to one upper edge surface of the frame 51 in a full length state, and the other surface (lower edge) of the frame 51 is attached. The adhesive material 53 of moderate thickness is formed in the surface), and also the protective film (not shown in figure) is attached to the lower surface of the adhesive material 53, and comprises the pellicle. This pellicle is placed in contact with a protective film (not indicated in the drawing) on the installation surface 55a, which is the flat surface of the tray 55, so as not to deform the adhesive.

The pellicle mounted on the mounting surface 55a of the tray 55 is conventionally constrained from side to side by the projection-shaped post 55b provided on the tray 55, and covers the lid 56 from above. It was accommodated by fixing the four corners of the lid | cover 56 and the tray 55 with the clip 57 (patent document 1). As a result, the said pellicle was restrained and enclosed by the inclined surface 56a, the post 55b, and the mounting surface 55a of the lid | cover 56. As shown in FIG. In addition, it is also disclosed that the peripheral edge of the tray has a rib structure (Patent Document 2). In addition, instead of the clip 57, sealing of the perimeter using the adhesive tape is also performed.

However, when storing the large sized pellicle which is 1000 cm <2> or more like this invention, it is concerned that sufficient protective effect is not acquired.

Moreover, it is common to manufacture a storage container by injection molding or vacuum molding using a resin material. However, while the 5 or 6 inch semiconductor pellicle container is often molded by injection molding, a large pellicle container having an area of 1000 cm 2 or more is often manufactured by vacuum molding. Although the injection molding side can shape | mold the dimensional precision favorably, it is difficult to manufacture such a large molded article in injection molding, and the vacuum molding side is thin and a large integral molded article easily arises. However, as the pellicle increases, the storage container also becomes large, and the following problems are concerned about.

That is, the molding deformation of a storage container becomes large and the curvature amount of a storage container becomes large. When the amount of warpage is large, the shape is easily transferred to the mask adhesive and deformed during horizontal storage (the pellicle is put in the storage container and stored in a horizontal state).

If the adhesive material is deformed, there is a possibility that a poor adhesion such as a part of the mask adhesive material does not adhere to the mask at the time of attaching the mask.

In addition, due to the lack of rigidity of the storage container, the storage container is distorted depending on the way of holding the storage container during transportation, or when the storage container is distorted or stored upright (put the pellicle into the storage container and store the storage container upright). There is a possibility of problems such as distortion. If the storage container is distorted, the distorted shape of the tray may be transferred to the adhesive material. If the adhesive material is deformed, there is a possibility that the above described poor adhesion occurs.

In addition, when the storage container is distorted, oscillation may occur because the pellicle and the lid of the storage container rub against the design of the storage container, which may cause a problem that foreign matter adheres to the pellicle.

Therefore, in order to provide rigidity, it is also conceivable to increase the thickness of the container, but it is speculated that the weight becomes heavy and the handling properties become excessively bad.

Moreover, even if a rib is formed in order to give rigidity, it is unpreferable in the large sized pellicle container with an area of 1000 cm <2> or more, since an unevenness | corrugation may increase in a storage container and it may worsen washability and workability with foreign material confirmation. .

Patent Document 1: Japanese Unexamined Patent Publication No. 2000-173887

Patent Document 2: Japanese Patent Application Laid-Open No. 8-62828

Disclosure of Invention

Problems to be Solved by the Invention

In view of the above problems, the present invention aims to provide a storage container capable of maintaining the original pellicle original function even after transport and storage.

Means to solve the problem

Accordingly, the present inventors have completed the present invention by finding that the storage container having the following structure can be maintained even after transport and storage as long as the storage container has the following structure.

That is, the present invention,

1. A storage container for a large pellicle having an area of 1000 cm 2 or more, comprising a tray containing a pellicle and a lid covering the tray, wherein the lid and / or the tray contains a material having a honeycomb structure.

2. A structure in which a plate-like material having the honeycomb structure is disposed on at least a portion of the cover and / or a tray, and a plate-like material having the honeycomb structure in at least a portion of the cover and / or tray. The storage container according to 1., which has at least one structure selected from one structure.

3. Storage container as described in said 1. or 2. which has a structure which arrange | positioned the plate-shaped material which has honeycomb structure on the outer surface side of the said lid | cover and / or tray.

4. The tray has a shape in which the portion on which the large pellicle is mounted is coplanar with another portion of the tray, or has a raised shape with respect to the other portion of the tray, and also has the honeycomb structure. The storage container according to any one of items 1 to 3, wherein the material is disposed in the mounting portion or has a buried structure.

5. The storage container according to any one of 1. to 4. above, wherein the honeycomb structured material is disposed on and / or inside the entire surface of the lid and / or tray.

6. The storage container according to any one of items 1 to 5, wherein the tray itself is made of a material having a honeycomb structure.

7. A large pellicle storage structure comprising the storage container according to any one of 1. to 6. above, and a pellicle stored in the storage container.

Effects of the Invention

According to the present invention, it is possible to provide a storage container for a large pellicle having high rigidity, excellent flatness and excellent cleaning property. For this reason, the adhesive material of a pellicle does not deform | transform, and the adhesion failure with respect to a mask and a reticle of a pellicle can be prevented. In addition, it is possible to prevent the pellicle from adhering to the pellicle in the gripping method during transportation of the storage container, or the small dust generated by the pellicle and the large pellicle storage container when rubbed and stored. From these facts, the user can always use stable pellicles without impairing the function of the pellicle during the return from the manufacturer to the user, and the present invention greatly contributes to the stabilization of the quality.

Implement the invention  Best form for

EMBODIMENT OF THE INVENTION Hereinafter, this invention is demonstrated in detail.

One aspect of the present invention provides a container for a large pellicle having an area of 1000 cm 2 or more, by forming a reinforcing plate on at least a portion of the lid and / or the surface of the tray so that deformation of the storage container is along the reinforcing plate, thereby providing flatness. I had it. Thereby, since this storage container can be made rigid, when carrying and carrying, it can prevent the case from distorting when standing up and storing. In addition, by arranging the reinforcing plate on the outer side of the lid and / or the tray (the side not facing the pellicle mounting side), the reinforcing plate lid or the inner side of the tray (the mounting side of the pellicle) is reinforced. Since unevenness | corrugation does not produce, it does not impair the ease of the operation | work which confirms washing | cleaning property and presence or absence of a foreign material, and shows a more preferable effect.

Moreover, in another aspect of this invention, it is also possible to obtain the same effect as the above by embedding a reinforcement plate in a cover and / or a tray. When embedding the reinforcement plate, one surface of the reinforcement plate may be exposed on the surface of the lid and / or the tray, and the entire reinforcement plate may be embedded. In this way, by embedding the reinforcing plate in the lid and / or the tray, it becomes possible to achieve the maintenance of flatness and the improvement of rigidity without generating irregularities.

In still another aspect of the present invention, by arranging the reinforcing plate on the entire surface of the storage container, it is also possible to prevent deformation of the adhesive material portion of the pellicle and to further improve the rigidity of the case.

In the present invention, the pellicle is mounted when the tray has a shape in which the part on which the pellicle is mounted is on the same plane as the other part of the tray, or when the tray has a raised shape with respect to the other part of the tray. By arranging or embedding a reinforcing plate in a portion to be formed, the flatness of the storage container can be maintained and the rigidity can be improved. Accordingly, the effects of the present invention can be achieved.

Examples of the reinforcing plate used in the present invention include metal plates such as carbon steel, stainless steel, aluminum alloys and titanium alloys, polycarbonates, polyacetals, polybutylene terephthalates, modified polyphenylene ethers, glass fiber reinforced polyethylene terephthalates, and polyphenyls. Engineering plastic plates, such as ren sulfide, polyetherimide, polyamideimide, and polyimide, can be used. As a shape, the part which cut | disconnected the inside partially in the punching metal shape, and the board | substrate of a honeycomb structure can be used. In particular, a honeycomb plate is preferable. This is because by using the honeycomb plate, it is possible to maintain the flatness of the storage container and improve the rigidity while minimizing the increase in the weight due to the use of the reinforcing plate.

What is necessary is just to select the honeycomb cell size etc. from a viewpoint of rigidity, flatness, and weight, for example. You may select from 0.1 mm-100 mm etc. Preferably it is 0.3 mm-50 mm. In addition, the cell height is not particularly limited, but may be selected, for example, from 1 mm to 200 mm. Preferably it is 3 mm-100 mm. In addition, the thickness of the top plate and the bottom plate is not particularly limited, but may be selected, for example, in the range of 0.1 mm to 300 mm. Preferably it is 0.2-20 mm.

Although the shape of the cell is not particularly specified, hexagonal, OX, flex, bisector, feather, etc. may be mentioned, and preferably hexagonal.

Moreover, in one aspect of this invention, the cover of the storage container and / or the tray itself may be comprised from the material itself which has said honeycomb structure. By doing in this way, in addition to improving rigidity and maintaining flatness, further weight reduction can be achieved simultaneously.

The plate-like material having a honeycomb structure that can be used in the present invention may be any one as long as it generally has a honeycomb structure. Depending on the type of use, the ceiling plate and the bottom plate may be opposed to each other via a portion of the honeycomb structure (FIG. 1 (1)), and only a portion of the honeycomb structure and the ceiling plate (FIG. 1 (2)), It may be a structure having only a portion of the honeycomb structure and a bottom plate (FIG. 1 (3)). Moreover, the material which consists only of a honeycomb structure may be sufficient (FIG. 1 (4)).

For example, when arranging a plate-shaped material (hereinafter referred to as honeycomb plate) having a honeycomb structure on the surface of the tray, when arranging the honeycomb plate on the side on which the pellicle is mounted, as a part of the ceiling plate and honeycomb structure. By arrange | positioning so that the arrangement surface of a tray may serve as a bottom plate, the increase of weight and the magnitude | size of an unevenness | corrugation can be suppressed so that a bottom plate is not used.

On the contrary, in the case where the honeycomb plate is used on the side where the pellicle is not mounted, the weight plate and the unevenness of the bottom plate and the honeycomb structure are arranged so that the placement surface of the tray serves as the ceiling plate, so that the ceiling plate is not used. The size can be suppressed.

In addition, in this invention, although the material of the part of a honeycomb structure is not limited, As mentioned above, metal plate, such as carbon steel, stainless steel, aluminum alloy, titanium alloy, polycarbonate, polyacetal, polybutylene terephthalate, and a modified Engineering plastics such as polyphenylene ether, glass fiber reinforced polyethylene terephthalate, polyphenylene sulfide, polyetherimide, polyamideimide, polyimide and the like can be used, preferably a metal, more preferably an aluminum alloy. . In addition, black alumite, blasting treatment, and both may be performed from the viewpoint of workability confirmation of foreign matter adhesion before use.

EMBODIMENT OF THE INVENTION Below, the storage container for large sized pellicles using the honeycomb plate which is one of the aspects of this invention is demonstrated more concretely using drawing.

First, the whole view of the large sized pellicle storage container of this invention is shown in FIG.

As shown to FIG. 2A, a large sized pellicle storage container accommodates the pellicle 1 inside, and consists of the tray 2 and the cover 3. As shown in FIG. The pellicle 1 is comprised from the pellicle film 11, the frame 12 to which the pellicle film 11 was stuck, the adhesive material 13, etc. for sticking a frame to a mask or a reticle. Here, in this embodiment, the pellicle 1 is a large sized pellicle whose area of the pellicle film 11 exceeds 1000 cm <2>.

The tray 2 is provided with the ridge 21 in which the pellicle 1 is mounted along the periphery, and the inner side (center side) of the ridge 21 is the flat part 22. The tray 2 is manufactured by vacuum forming, and the groove part 23 is formed in the outer surface side of the ridge 21. Moreover, in the upper part of the ridge 21, the some rib 24 which contact | connects the external part of the protective film of the pellicle 1, and restrains a transverse direction stands up and is formed. Since the area of the pellicle to store exceeds 1000 cm <2>, the area of the flat part 22 is also equivalent to this.

The lid 3 is manufactured by vacuum forming similarly to the tray 2, and as shown in FIG. 2B, it covers the tray 2 and accommodates the pellicle 1. After the tray 2 and the lid 3 are aligned, the adhesive tape (not shown) is sealed by putting the periphery on a short side.

Although it does not specifically designate as a material of the tray 2 and the cover 3, Acrylic resin, a polyethylene terephthalate resin, an acrylonitrile butadiene styrene resin, etc. may be used. In addition to the above resins, polyester resins other than polyethylene terephthalate, olefin resins such as polyethylene and polypropylene, polystyrene resins such as polystyrene and acrylonitrile styrene resin, and the like can also be used.

In the above configuration, the tray 2 and the lid 3 are generally bent around the outer circumference, and therefore have a certain degree of rigidity in the peripheral portion. However, when the flat portion 22 is weak in strength and the area thereof is 1000 cm 2 or more, the stiffness of the entire container is not sufficient, and warpage and bending easily occur. Thus, in one of the aspects of the present invention, the honeycomb plate 4 is attached to the outer surface side of the tray 2. Thereby, the rigidity of the whole container can be improved remarkably.

FIG. 3 is an image view of the honeycomb plate when the honeycomb plate is disposed or embedded on the cover and / or the surface of the tray (when the surface of the honeycomb plate is shown on the surface). Although the outer circumferential portion corresponds to the shape of the frame on which the pellicle is mounted, it can be seen that the honeycomb plate is disposed in addition to the portion along the frame shape, as apparent from the drawing. Moreover, although it is preferable to arrange | position a honeycomb plate in the part along a frame shape, it produces an effect also when it is not.

Moreover, when arranging a honeycomb plate on the surface of a cover and / or a tray, even if it arrange | positions on the inner surface side, rigidity can be improved, but when arrange | positioning on an outer surface side, since flatness can also be improved in addition to the rigidity improvement, it is preferable. .

4A and 4B are cross-sectional images in the case of reinforcing using a honeycomb plate on the side (outer surface side) opposite to the side on which the pellicle of the tray is mounted. It is a figure which shows mounting a honeycomb plate as a reinforcement board in the whole surface of a tray. It is a figure which shows that a honeycomb plate is mounted in the outer peripheral part of a tray as a reinforcement board.

5A and 5B are cross-sectional image views when the honeycomb plate itself is used for a tray. FIG. 5A is an image view of a cross section in the case where the honeycomb plate itself is used as the tray, and is a view in the case where the entire tray surface is a honeycomb plate. FIG. Fig. 5B is an image view of the cross section when the honeycomb plate itself is used as the tray, and is a diagram when the honeycomb plate is used for the outer peripheral portion of the tray.

Fig. 6 is an image view of the case where the honeycomb plate itself is used for the tray. When the honeycomb plate itself is used for the tray, the honeycomb plate may be composed of only a ceiling plate and a portion of a honeycomb structure, or may be composed of a ceiling plate and a portion of a honeycomb structure and a bottom plate. Moreover, when using a honeycomb plate in the outer peripheral part of a frame, a ceiling plate may be used for the whole tray surface including the center part without a honeycomb plate, and a honeycomb part and a ceiling plate may be formed only in an outer peripheral part.

In the present invention, in the storage container using the honeycomb plate in the reinforcing plate or tray, it is preferable to form a cover in order to prevent oscillation from the side surface of the honeycomb portion.

The large sized pellicle container of the present invention can accommodate a large sized pellicle having an area of 1000 cm 2 or more in a stable state, and can safely transport and store the large sized pellicle without damage.

1 is a cross-sectional view illustrating various honeycomb plates.

2A is a cross-sectional view illustrating the lid, pellicle and tray.

Fig. 2B is a sectional side view of the accommodating structure in which a pellicle is accommodated in a large pellicle accommodating container including a lid and a tray.

3 is a view from above of the attachment of the reinforcement plate to the storage container;

Fig. 4A is a sectional view of the honeycomb plate mounted on the entire surface of the tray as a reinforcing plate.

Fig. 4B is a sectional view of the honeycomb plate mounted on the outer circumference of the tray as a reinforcing plate.

Fig. 5A is a cross-sectional view of a state in which the honeycomb plate itself is used as a tray, and a view in which the entire tray surface is a honeycomb plate.

Fig. 5B is a cross-sectional view showing the state when the honeycomb plate itself is used as the tray, and a diagram showing the case where the honeycomb plate is used for the outer peripheral portion of the tray.

Fig. 6 is a view of the image when the honeycomb plate itself is used for the tray.

7 is a perspective view from above of a state in which a pellicle film is accommodated in a storage container of the present invention.

Fig. 8 is a sectional view of the pellicle film stored in the storage container of the present invention as viewed from the side.

Claims (8)

A large pellicle storage container having an area of 1000 cm 2 or more, comprising a tray for storing a pellicle and a lid for covering the tray, wherein the lid and / or tray is a plate-shaped material having a honeycomb structure and formed of a metal plate or engineering plastic. A storage container for large pellicles containing a plate-like material formed. delete The method of claim 1, A structure in which a plate-like material having the honeycomb structure is disposed on at least a portion of the lid and / or a tray, and a structure in which a plate-like material having the honeycomb structure is embedded in at least a portion of the cover and / or tray. A storage container for a large pellicle having at least one structure selected from. The method of claim 1, A storage container for a large pellicle having a structure in which a plate-like material having a honeycomb structure is arranged on an outer surface side of the lid and / or tray. The method of claim 1, The tray may take a form in which a portion on which the large pellicle is mounted is coplanar with another portion of the tray, or may have a raised shape with respect to the other portion of the tray, and may have a material having the honeycomb structure. A storage container for a large pellicle disposed in the mounting portion or having a buried structure. The method of claim 1, A storage container for a large pellicle having a structure in which a material of the honeycomb structure is disposed on and / or inside the entire surface of the cover and / or tray. The method of claim 1, A storage container for a large pellicle, wherein the tray itself is made of a material having a honeycomb structure. The storage structure for large pellicles containing the storage container of Claim 1, and the pellicle accommodated in the said storage container.

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