KR20100085128A - Substrate transfer apparatus, substrate transfer method and vacuum processing apparatus - Google Patents
Substrate transfer apparatus, substrate transfer method and vacuum processing apparatus Download PDFInfo
- Publication number
- KR20100085128A KR20100085128A KR1020107011326A KR20107011326A KR20100085128A KR 20100085128 A KR20100085128 A KR 20100085128A KR 1020107011326 A KR1020107011326 A KR 1020107011326A KR 20107011326 A KR20107011326 A KR 20107011326A KR 20100085128 A KR20100085128 A KR 20100085128A
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- Prior art keywords
- substrate
- frame
- carrier
- adsorption
- vertical state
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67718—Changing orientation of the substrate, e.g. from a horizontal position to a vertical position
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68771—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by supporting more than one semiconductor substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
- B65G2249/045—Details of suction cups suction cups
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
The present invention relates to a substrate transfer apparatus, a substrate transfer method, and a vacuum processing apparatus including the substrate transfer apparatus.
Conventionally, there existed a vacuum processing apparatus which vacuum-processes, such as forming a thin film by sputtering, with respect to large glass substrates employ | adopted for flat panel displays, such as a liquid crystal display. In recent years, as such a vacuum processing apparatus, in order to improve production efficiency, many so-called inline vacuum processing apparatuses which sequentially convey a board | substrate to several vacuum processing chambers and process them continuously are employ | adopted. For example,
By the way, in the said
[Patent Document 1] Japanese Patent Laid-Open No. 2006-114675
The present invention provides a substrate transport apparatus, a substrate transport method, and a vacuum processing apparatus capable of reducing the weight of a carrier for transporting a substrate in a vertical state.
A first aspect of the present invention is a substrate transfer device. A substrate transport apparatus for flipping a substrate to a carrier for transporting a flat substrate in a vertical state includes a frame having a rectangular frame and capable of rotating about a rotation axis extending in a horizontal direction, and provided in the frame. And a transfer mechanism including a plurality of suction pads for adsorbing the substrate, and a drive unit for rotating the frame between a horizontal state and a vertical state, wherein the transfer mechanism includes a substrate in a horizontal state. Is adsorbed by a plurality of adsorption pads and rotates the frame from a horizontal state to a vertical state while supporting the substrate in the frame, thereby passing the substrate in a vertical state to the carrier.
A second aspect of the present invention is a substrate transport method. In a substrate transport method of receiving a substrate from a substrate transport apparatus by a carrier for transporting a flat substrate in a vertical state, the method may include: maintaining a horizontal state in the substrate transport apparatus with a frame having a plurality of suction pads; Adsorbing the substrate with a plurality of adsorption pads in the horizontal state of the frame, rotating the frame from the horizontal state to the vertical state while supporting the substrate in the frame, and passing the substrate in the vertical state to the carrier It includes.
A third aspect of the present invention is a vacuum processing apparatus. The vacuum processing apparatus includes a vacuum processing chamber for evacuating a flat substrate, a carrier for conveying the substrate in a vertical state to the vacuum processing chamber, and a substrate conveying apparatus for receiving the substrate through the carrier, wherein the substrate conveying apparatus The frame has a rectangular frame and can be rotated around a horizontal axis extending in a horizontal direction, a plurality of suction pads mounted on the frame to adsorb the substrate, and the frame is in a horizontal state and a vertical state. A transfer mechanism having a drive unit rotating between the drive unit and a control unit for controlling the drive unit and the plurality of suction pads, wherein the transfer mechanism includes a plurality of suction pads in a horizontal state of the frame with a substrate in a horizontal state; The frame is rotated from the horizontal state to the vertical state while supporting the substrate in the frame The substrate in the vertical state is delivered to the carrier.
1 is a schematic configuration diagram of a vacuum processing apparatus.
2 is a schematic configuration diagram of a substrate transfer device.
3 is a right side view showing the schematic configuration of the transfer mechanism.
4 is a plan view showing a schematic configuration of a transfer mechanism.
5 is a front view illustrating a schematic configuration of a transfer mechanism.
6 is a front view illustrating a schematic configuration of a carrier.
It is a schematic diagram which shows the adsorption area formed on the frame.
8 is a cross-sectional view showing a schematic configuration of the suction pad.
9A to 9E are operation explanatory diagrams showing an operation of turning over a substrate to a carrier.
10A to 10D are operation explanatory diagrams showing an operation of receiving a substrate from a carrier.
EMBODIMENT OF THE INVENTION Hereinafter, the
The
The
2 shows a schematic configuration diagram of the
3 shows a schematic configuration of the
As shown in FIG. 4, the
As the
As shown in FIG. 5, in this embodiment, the base 49 which supports each
In addition, as shown in FIG. 4, the plurality of needle-like lift pins 52 for lifting the substrate W conveyed on the
As shown in FIG. 3, the
The
As shown in FIG. 3, the
For example, as shown in FIG. 7, the
Specifically, in the
In addition, in this embodiment, either the direction of the 1st upper main suction area | region 75 and the 2nd upper main suction area | region 76 and the 1st lower main suction area | region 77 and the 2nd lower main suction area | region 78 When the board | substrate W is adsorb | sucked in either of the directions, it is possible to support the board | substrate W without falling from the
As shown in FIG. 8, the
Next, the operation | movement which takes the board | substrate W conveyed from the
Prior to the delivery of the substrate W to the
As shown in FIG. 9A, only the alignment pin 56 (left side in the drawing) provided on the outside of the
Next, as shown in FIG. 9B, the
When the relative alignment between the
The
Next, as shown in FIG. 9D, the
Then, the
In addition, when the test substrate is conveyed from the
Next, an operation of receiving the vacuum processed substrate W from the
In the
In this state, as shown in FIG. 10A, the
When the substrate W is adsorbed on the
In addition, as mentioned above, when the
Next, as shown in FIG. 10B, the suction by the
And as shown in FIG. 10D, the
Therefore, in order not to rotate the
The
(1) The
(2) The
(3) The
(4) If the pressure in the
(5) Since the
(6) When the
(7) With the
In addition, the said embodiment can be implemented with the following aspects.
Instead of arranging the first conveying
If the
The first and second conveying
By supplying negative pressure to the
Instead of connecting the
Instead of arranging the plurality of
Instead of the plurality of
It is not limited to moving the
Instead of the
In the
The
The
Claims (15)
A frame having a rectangular frame and capable of rotating about a rotation axis extending in a horizontal direction;
A plurality of adsorption pads installed on the frame to adsorb the substrate; And
A transfer mechanism including a drive unit for rotating the frame between a horizontal state and a vertical state,
The transfer mechanism sucks the substrate in a horizontal state with the plurality of suction pads in a horizontal state of the frame, and rotates the frame from a horizontal state to a vertical state while supporting the substrate on the frame, thereby vertically And said substrate in a state is delivered to said carrier.
The driving unit supports the frame to be movable up and down along a vertical direction,
The conveying mechanism moves the frame below the conveying unit to convey the substrate by the conveying unit, and moves the frame above the conveying unit while the substrate is positioned above the frame. And a substrate transporting device for absorbing the substrate.
A plurality of conduits provided corresponding to the plurality of adsorption regions, each of which supplies a negative pressure to the corresponding adsorption pad;
A common negative pressure source connected to the plurality of conduits;
A plurality of valves connected to the plurality of conduits, respectively, for opening and closing the corresponding conduits; And
A plurality of vacuum sensors, each disposed in the plurality of conduits, each measuring a pressure in the corresponding conduit;
And after the adsorption of the substrate by the plurality of adsorption pads, if there is a conduit whose pressure is not less than a predetermined value within a predetermined time, the conduit is closed.
The frame of the frame is composed of an upper side, a lower side, a right side, a left side,
The plurality of adsorption zones include an upper main suction area set in the upper side, a lower main suction area set in the lower side, a right side suction area set in the right side, and a left side suction area set in the left side,
Each of the upper main suction region and the lower main suction region includes at least two divided regions.
When the transfer mechanism sucks over the substrate supported in the vertical state to the carrier with the plurality of suction pads in the vertical state of the frame, the rotational axis is a position away from the frame with respect to the carrier, The substrate transport apparatus is located below the mounting surface of the carrier.
The substrate transport apparatus further includes a position sensor for detecting a height of the mounting surface of the carrier,
The driving unit supports the frame to be movable up and down along a vertical direction,
The transfer mechanism moves the frame up and down based on a detection result of the position sensor so that the lower end of the substrate does not come into contact with the mounting surface when the substrate in the vertical state is received by the carrier. Substrate conveying device.
Maintaining a frame having a plurality of adsorption pads in a horizontal state in the substrate transport apparatus, and adsorbing the substrate in a horizontal state to the plurality of adsorption pads in a horizontal state of the frame;
Rotating the frame from a horizontal state to a vertical state while supporting the substrate in the frame; And
And passing the substrate in a vertical state to the carrier.
And rotating the frame from a vertical state to a horizontal state while supporting the substrate in the frame.
The substrate transport method,
Determining the adsorption force of the plurality of adsorption pads for each of the adsorption regions after a predetermined time after starting adsorption of the substrate by the plurality of adsorption pads; And
And determining for each of the adsorption regions whether to continue driving the plurality of adsorption pads, based on the result of the determination of the adsorption force.
Receiving the substrate in the vertical state to the carrier,
Detecting a height of the mounting surface of the carrier by a position sensor; And
And moving the frame up and down along the vertical direction based on a detection result of the position sensor so that the lower end of the substrate in the vertical state does not contact the mounting surface.
A vacuum processing chamber for vacuum-treating a flat plate substrate;
A carrier for conveying the substrate in a vertical state to the vacuum processing chamber; And
A substrate conveying apparatus for receiving the substrate into the carrier, wherein the substrate conveying apparatus comprises:
A frame having a rectangular frame and capable of rotating about a rotation axis extending in a horizontal direction, a plurality of suction pads installed on the frame to adsorb the substrate, and the frame in a horizontal state and a vertical state A transfer mechanism having a drive unit that rotates therebetween; And
A control device for controlling the drive unit and the plurality of suction pads,
The transfer mechanism sucks the substrate in a horizontal state with the plurality of suction pads in a horizontal state of the frame, and rotates the frame from a horizontal state to a vertical state while supporting the substrate on the frame, thereby vertically And vacuuming the substrate in a state into the carrier.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007319573A JP2009146932A (en) | 2007-12-11 | 2007-12-11 | Substrate transfer apparatus, substrate transfer method, and vacuum processing apparatus |
JPJP-P-2007-319573 | 2007-12-11 |
Publications (1)
Publication Number | Publication Date |
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KR20100085128A true KR20100085128A (en) | 2010-07-28 |
Family
ID=40755503
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020107011326A KR20100085128A (en) | 2007-12-11 | 2008-12-09 | Substrate transfer apparatus, substrate transfer method and vacuum processing apparatus |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP2009146932A (en) |
KR (1) | KR20100085128A (en) |
CN (1) | CN101889339B (en) |
TW (1) | TW200935547A (en) |
WO (1) | WO2009075261A1 (en) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5401210B2 (en) * | 2009-08-20 | 2014-01-29 | 株式会社テセック | Wafer frame transfer apparatus and transfer method |
KR20130028038A (en) * | 2009-10-22 | 2013-03-18 | 가부시키가이샤 알박 | Vacuum treatment apparatus and graph presentation method |
JP2011093707A (en) * | 2009-10-30 | 2011-05-12 | Sun Yueh Way | Substrate suction unit and substrate suction assembly |
JP5562719B2 (en) * | 2010-05-18 | 2014-07-30 | タツモ株式会社 | Stress applying apparatus and mounting board manufacturing method using the same |
JP4992137B1 (en) * | 2011-10-15 | 2012-08-08 | 株式会社Akシステム | Equipment for handling plate-like materials |
TWI467687B (en) * | 2011-11-29 | 2015-01-01 | Tera Automation Corp Ltd | Glass substrate transfer device |
CN104251250B (en) * | 2013-06-25 | 2016-03-02 | 英属开曼群岛商精曜有限公司 | Clustered vacuum engagement system |
JP5945968B2 (en) * | 2013-09-03 | 2016-07-05 | 株式会社安川電機 | Robot hand, robot system, and article depalletizing method |
CN105097605B (en) * | 2014-05-09 | 2019-07-02 | 深圳莱宝高科技股份有限公司 | Base plate processing system and its processing method |
CN107429386B (en) * | 2015-04-15 | 2019-09-27 | 株式会社爱发科 | The keeping method of substrate holding mechanism, film formation device and substrate |
CN105655487B (en) | 2016-01-05 | 2018-10-16 | 京东方科技集团股份有限公司 | Coat peeling unit and dyestripping method |
CN106783705B (en) * | 2016-11-30 | 2019-05-14 | 上海华力微电子有限公司 | It is a kind of for optimizing the wafer transfer approach of defects of wafer edge |
CN108323150A (en) * | 2017-12-29 | 2018-07-24 | 重庆市中光电显示技术有限公司 | FPC feeding machines |
CN108909163B (en) * | 2018-08-30 | 2024-04-26 | 东莞市奇声电子实业有限公司 | Silk screen clamp |
CN111233313B (en) * | 2018-11-29 | 2022-11-01 | 塔工程有限公司 | Substrate cutting device |
CN110482220A (en) * | 2019-07-26 | 2019-11-22 | 蚌埠凯盛工程技术有限公司 | A kind of glass substrate storage technology, device and application |
TWI769737B (en) * | 2021-03-12 | 2022-07-01 | 旭東機械工業股份有限公司 | Apparatus for loading and unloading box cover and method for inspecting box cover |
CN117568757B (en) * | 2023-09-27 | 2024-08-02 | 江苏信核芯微电子有限公司 | Sputtering coating equipment and method for processing metal film ceramic substrate |
CN117262731B (en) * | 2023-10-09 | 2024-05-31 | 旭显未来(北京)科技有限公司 | Automatic ageing equipment of LED display module assembly |
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Publication number | Priority date | Publication date | Assignee | Title |
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JPH0356141U (en) * | 1989-05-31 | 1991-05-30 | ||
JPH1076491A (en) * | 1996-09-03 | 1998-03-24 | Nikon Corp | Plate delivery system |
JPH1086085A (en) * | 1996-09-19 | 1998-04-07 | Dainippon Screen Mfg Co Ltd | Substrate adsorption device and method |
JP3806272B2 (en) * | 1999-09-13 | 2006-08-09 | 三菱重工業株式会社 | Multi-chamber vacuum processing system and substrate transfer apparatus |
JP2003245884A (en) * | 2002-02-22 | 2003-09-02 | Dainippon Screen Mfg Co Ltd | Apparatus and method for suction fixing |
JP2006182502A (en) * | 2004-12-27 | 2006-07-13 | Murata Mach Ltd | Tray carrying system |
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2007
- 2007-12-11 JP JP2007319573A patent/JP2009146932A/en active Pending
-
2008
- 2008-12-09 CN CN2008801206771A patent/CN101889339B/en active Active
- 2008-12-09 KR KR1020107011326A patent/KR20100085128A/en not_active Application Discontinuation
- 2008-12-09 WO PCT/JP2008/072323 patent/WO2009075261A1/en active Application Filing
- 2008-12-11 TW TW97148248A patent/TW200935547A/en unknown
Also Published As
Publication number | Publication date |
---|---|
JP2009146932A (en) | 2009-07-02 |
WO2009075261A1 (en) | 2009-06-18 |
TW200935547A (en) | 2009-08-16 |
CN101889339A (en) | 2010-11-17 |
CN101889339B (en) | 2012-09-05 |
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Legal Events
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A201 | Request for examination | ||
E601 | Decision to refuse application |