JP4992137B1 - Equipment for handling plate-like materials - Google Patents

Equipment for handling plate-like materials Download PDF

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JP4992137B1
JP4992137B1 JP2011240630A JP2011240630A JP4992137B1 JP 4992137 B1 JP4992137 B1 JP 4992137B1 JP 2011240630 A JP2011240630 A JP 2011240630A JP 2011240630 A JP2011240630 A JP 2011240630A JP 4992137 B1 JP4992137 B1 JP 4992137B1
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long box
piston shaft
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shaft
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豊 池田
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株式会社Akシステム
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Abstract

【課題】他の装置との非干渉領域を拡大して作業性と安全性を大幅に改善する板状被処理材の取扱装置を提供する。
【解決手段】水平走行本体HSに旋回ポストCPを装着し、旋回ポストCPに水平旋回アームCAを装着し、その先端に旋回首振可能に横断面がコ字型の竪フレームTFを連結装着し、竪フレームTFの下端部に長尺ボックスTBを傾動可能に装着する回動駆動連結機構XKを設け、長尺ボックスTBに板状被処理材Wの下端縁と上端縁を上下の挟持爪HTで挟持支持・開放する挟持爪機構KKを装着し、挟持爪機構KKは、長尺ボックスTB内に上下駆動機構を内装し、長尺ボックスTBの外側の縦長手方向に移動可能に左右一対の爪保持リングTRを設け、爪保持リングTRの前面に上下一対の挟持爪HTを装着し、爪保持リングTRの後部を長尺ボックスTBの後側からボックスTB内に挿入し挿入部をスクリューに連結してなる。
【選択図】図1
An object of the present invention is to provide an apparatus for handling a plate-shaped workpiece that greatly improves workability and safety by expanding a non-interference area with another apparatus.
A horizontal post HS is mounted on a horizontal traveling body HS, a horizontal rotary arm CA is mounted on the rotary post CP, and a saddle frame TF having a U-shaped cross section is connected and mounted on the tip of the horizontal swing arm CP. In addition, a rotation drive connecting mechanism XK for tiltably mounting the long box TB is provided at the lower end portion of the heel frame TF, and the lower end edge and the upper end edge of the plate-like workpiece W are vertically clamped claw HT on the long box TB. The holding claw mechanism KK for holding and releasing is mounted on the holding claw mechanism KK. The holding claw mechanism KK includes a vertical drive mechanism in the long box TB, and is movable in the longitudinal and longitudinal directions outside the long box TB. A claw holding ring TR is provided, and a pair of upper and lower clamping claws HT are mounted on the front surface of the claw holding ring TR, the rear part of the claw holding ring TR is inserted into the box TB from the rear side of the long box TB, and the insertion part is used as a screw. Concatenated.
[Selection] Figure 1

Description

本発明は板状被処理材を常に縦状態にして平面的占有領域を必要最小にして安全迅速正確に可能とする板状被処理材の取扱装置に関するものである。  The present invention relates to an apparatus for handling a plate-like material to be processed, which can be safely and quickly performed by always keeping the plate-like material to be in a vertical state and minimizing a planar occupation area.

板状の被処理材を多数の連続処理工程で所定の処理を自動的に順次施すには、各工程における該被処理材の所定の姿勢、高さ等に正確に調整し且つ維持しながら移載し、受け渡し、搬送する所謂移載装置が不可欠である。
例えば、板状の被処理材を、前工程から受け取り、それを所定の各処理ポジションに受け渡し、各種の処理を施した後に後工程に渡す等の移載装置は、前工程と後工程間において、(1),前工程のアンローダー部と後工程のローダー部に対して所定サイズの被処理材を直接載置部に移載するための載置部平面拡縮動作と昇降動作、(2),前工程と後工程間の被処理材搬送走行動作、(3),被処理材を処理ポジションに受け渡しするための旋回動作、昇降動作、前後動作などの精密動作機能が要求される。
板状の被処理材例えばマザーガラス(液晶用のフォトマスクガラス以下マザーガラスと言う)等の取扱装置は、マザーガラスが重量体のため堅牢でしかも迅速正確に精度良いマザーガラスの位置管理が要求される。
In order to automatically perform a predetermined treatment on a plate-like material in a series of continuous processing steps, the plate-like material is transferred while accurately adjusting and maintaining the predetermined posture and height of the material to be treated in each step. A so-called transfer device for loading, transferring and transporting is essential.
For example, a transfer device that receives a plate-like material to be processed from the previous process, transfers it to each predetermined processing position, performs various processing, and passes it to the subsequent process. (1) A placement unit plane expansion / contraction operation and a lifting / lowering operation for directly transferring a workpiece of a predetermined size to the placement unit with respect to the unloader unit in the previous process and the loader unit in the subsequent process, (2) (3) A precision operation function such as a turning operation, an elevating operation, and a back-and-forth operation for transferring the processing material to the processing position is required.
Handling equipment such as plate-shaped materials such as mother glass (hereinafter referred to as “mother glass” for liquid crystal photomask glass) requires robust, quick and accurate positioning of the mother glass because the mother glass is heavy. Is done.

而して、従来の代表的装置は、レール式搬送走行装置の基部中央に、旋回用回転縦軸装置を介して、平行シフトリンク機構式昇降装置を設け、これの上部リンク軸支持部材にパンタグラフリンク式平面前後動装置の後部軸着部材を装着し、拡縮リンク(パンタグラフ)式の平面前後動装置の全部軸着部材に板状被処理材の水平載置用水平アーム2本の後部を片支持装着したものである。  Thus, the conventional representative device is provided with a parallel shift link mechanism type lifting device in the center of the base portion of the rail-type transport traveling device via the rotating vertical axis device for turning, and the pantograph on the upper link shaft support member. Attach the rear shaft attachment member of the link type planar longitudinal movement device, and separate the rear portions of the two horizontal arms for horizontally placing the plate-like workpieces on all the shaft attachment members of the expansion / contraction link (pantograph) type planar longitudinal movement device. It is a support-mounted one.

しかし、従来のマザーガラス等の板状被処理材の取扱装置は、上記のニーズから大型なものとなりがちで、しかもマザーガラスを常に水平状態にして取り扱うため、平面的占有領域が広く、迅速正確なマザーガラスの取り扱いが困難で効率が悪く、且つ前後工程や近傍の機器との干渉トラブルが惹起する。
つまり前記した従来例の移載装置は、走行レールに挟持ガイドを摺動装着した走行台車に設けた平行シフトリンク機構式昇降装置とそれの上に旋回用回転縦軸装置とが複雑構造でそれ自体の高さ占有領域が大きいため、載置用の一対の水平アームの昇降下限位置がこれで制約を受け走行フロアレベルから大きく離れた高い位置となり昇降デッドゾーンが大きく昇降自由度が狭い。
However, conventional plate-type material handling equipment such as mother glass tends to be large due to the above-mentioned needs, and since the mother glass is always handled in a horizontal state, the plane occupation area is wide, and it is quick and accurate. The mother glass is difficult to handle and inefficient, and causes troubles with the front and back processes and nearby equipment.
In other words, the above-described conventional transfer device has a complicated structure in which a parallel shift link mechanism type lifting device provided on a traveling carriage in which a holding guide is slidably mounted on a traveling rail and a rotating vertical axis device for turning on it. Since the height occupying area is large, the lower and lower limit positions of the pair of horizontal arms for mounting are restricted by this and become a high position far away from the traveling floor level, the elevating dead zone is large, and the elevating freedom is narrow.

また平行シフトリンク機構式昇降装置は、上中下3本の水平主軸で上下主リンク棹を連結し、各主リンク棹に平行な上下補助リンク棹を対応する上中下部リンク軸支持部材に各1本の水平補助軸、で連結した複雑な機構であるため、上方の載置用水平アームに板状被処理材を載置した際の加重に対する緩衝変形量が大きく、載置用水平アームを前傾変位させる結果、板状被処理材の取り扱い重量が大きく制約される。このことは左右各一対の前後リンク棹を接近離間用の鉛直主軸で連結した拡縮リンク式平面前後動装置によっても同様な問題が発生するため該重量制限が更に厳しく液晶用の大型のフォトマスクガラス等の移載は困難である。  The parallel shift link mechanism type lifting device connects the upper and lower main link rods with three horizontal main shafts, and the upper and lower auxiliary link rods parallel to the main link rods are connected to the corresponding upper, middle and lower link shaft support members. Since this is a complex mechanism connected by a single horizontal auxiliary shaft, the amount of buffer deformation with respect to the load when the plate-shaped workpiece is placed on the upper placement horizontal arm is large, and the placement horizontal arm As a result of the forward tilt displacement, the handling weight of the plate-like workpiece is greatly restricted. This is because the same problem occurs even with an expansion / contraction link type plane back-and-forth movement device in which a pair of left and right front and rear link rods are connected by a vertical main shaft for approaching and separating. Etc. are difficult to transfer.

上記の構造に起因する問題は、移載装置自体の搬送走行動作、旋回動作、昇降動作、前後動作などによる該被処理材の姿勢、高さ調整精度の低下に繋がり、正確に所定値にすること及びそれを維持することが困難であり、水平状にした板状被処理材の不安定な取り扱いを余儀なくされる。Problems caused by the above structure lead to a decrease in the posture and height adjustment accuracy of the material to be processed due to the transporting operation, turning operation, elevating operation, and back-and-forth operation of the transfer device itself, and accurately setting the predetermined value. And it is difficult to maintain it, and the plate-like material to be processed in a horizontal state is inevitably handled.

そこで本発明者等は次の課題を掲げて特許文献1に紹介の板状被処理材の取扱装置を開発した。
(1)、平面的占有領域を必要最小にするため板状被処理材を常に縦状態にして前工程から受け取り、装置内で収容保持し、搬送走行し、中間工程に受け渡し、次工程に移載することを安全迅速正確に可能とする機構を採用し板状被処理材の取扱装置を提供する。
(2)、また取扱装置自体の搬送走行動作、旋回動作、昇降動作、前後動作などによる該被処理材の3次元位置管理を正確に把握して、該被処理材の姿勢、高さ調整の各位置制御精度を向上させ、正確に所定位置及び姿勢値にすること及びそれを維持し、板状被処理材の極めて安定したしかも精度の良い前記各種取り扱い動作を可能にすること。
(3)、しかも板状被処理材の挟持爪機構は、駆動・作動要部から塵埃が発生してもそれの外部飛散を確実に防止して、板状被処理材の塵埃汚染を未然に防止する機構を提供する。
(4)、さらに取り扱う板状被処理材のサイズ構成及び重量を格段に広げて挟持支持可能領域を幅広く確保すること。
Accordingly, the present inventors have developed the plate-like material handling apparatus introduced in Patent Document 1 with the following problems.
(1) In order to minimize the area occupied by the plane, the plate-shaped workpiece is always placed in the vertical state, received from the previous process, accommodated and held in the apparatus, transported, transferred to the intermediate process, and transferred to the next process. The present invention provides a plate-type material handling apparatus that employs a mechanism that enables safe and accurate loading.
(2) In addition, it is possible to accurately grasp the three-dimensional position management of the material to be processed by the transporting operation, turning operation, raising / lowering operation, and back-and-forth operation of the handling device itself, and adjusting the posture and height of the material to be processed. Improving the accuracy of each position control, accurately setting it to a predetermined position and posture value, and maintaining it, enabling the above-mentioned various handling operations of the plate-shaped material to be processed in a very stable and accurate manner.
(3) In addition, the clamping claw mechanism for the plate-shaped workpiece reliably prevents the external scattering of the dust even if it is generated from the main parts of the drive and operation, and prevents the plate-shaped workpiece from being contaminated with dust. Provide a mechanism to prevent.
(4) To further widen the size configuration and weight of the plate-like material to be handled and to secure a wide support area for holding.

この板状被処理材の取扱装置の構成は、図5に示す如く、水平走行本体HSに旋回ポストCPを装着し、旋回ポストCPに回転肘EBつき水平旋回アームCAを装着し、回転肘つき水平旋回アームCAの先端に旋回首振可能にL型の竪フレームTFを縦軸TJにより軸装着し、竪フレームTFの下部に長尺ボックスTBの下部を横軸で連結すると共に竪フレームTFの上部に長尺ボックスTBの中央部をスクリュー式前後駆動機構SKとユニバーサル式連結機構URとからなる前後回動駆動連結機構FBで連結装着し、長尺ボックスTBに板状被処理材の下端縁と上端縁を上下の挟持爪HTで挟持支持・開放する挟持爪機構を装着し、挟持爪機構は、長尺ボックスTB内にモータJK1とスクリューJK2式の上下駆動機構JKを内装し、長尺ボックスTBの外側の縦長手方向に移動可能に上下一対の爪保持リングTRを設け、各爪保持リングTRの前面に挟持爪HTを装着し、爪保持リングTRの後部を長尺ボックスTBの後側からボックスTB内に挿入し上記の上下駆動機構JKのスクリューJK2に連結してなる。また、旋回ポストCPと回転肘つき水平旋回アームCAと竪フレームTFの各水平旋回装着部にエンコーダと電磁ブレーキを付設してなるものであった。  As shown in FIG. 5, the plate-shaped material handling apparatus has a horizontal traveling body HS with a turning post CP, a turning post CP with a horizontal turning arm CA with a rotating elbow EB, and a rotating elbow. An L-shaped eaves frame TF is attached to the tip of the horizontal revolving arm CA by a vertical axis TJ so as to be capable of revolving. The lower part of the long box TB is connected to the lower part of the eaves frame TF along the horizontal axis and The central part of the long box TB is connected to the upper part by a front / rear drive mechanism FB composed of a screw type front / rear drive mechanism SK and a universal connection mechanism UR, and the lower end edge of the plate-like workpiece is attached to the long box TB. And a claw mechanism that supports and releases the upper end edge with the upper and lower clamping claws HT. The clamping claw mechanism has a motor JK1 and a screw JK2 type vertical drive mechanism JK in a long box TB. A pair of upper and lower claw holding rings TR are provided so as to be movable in the longitudinal and longitudinal direction outside the box TB. A clamping claw HT is attached to the front surface of each claw holding ring TR, and the rear part of the claw holding ring TR is placed behind the long box TB. It is inserted into the box TB from the side and connected to the screw JK2 of the vertical drive mechanism JK. Further, an encoder and an electromagnetic brake are attached to each horizontal turning mounting portion of the turning post CP, the horizontal turning arm CA with a rotating elbow, and the saddle frame TF.

上記構成による基本的な板状被処理材の移載操作は、前部の竪フレームTFに設けた操作台付の操作ハンドルを作業員が握って手動操作するが、前記水平旋回アームCAの中間と先端の各関節に設けた上記エンコーダを活用して、予め入力されている操作軌跡に基づいて移載操作し、また稼動可能な安全領域を登録しておくことにより、その範囲外にはみ出そうとした際は、電磁ブレーキにより稼動を停止させ他の装置等との衝突を未然に防止することが出来るものである。  In the basic transfer operation of the plate-shaped workpiece with the above-described configuration, the operator manually operates the operation handle with an operation table provided on the front heel frame TF. By using the encoders provided at the joints at the tip and the above, the transfer operation is performed based on the operation trajectory input in advance, and the safe area that can be operated is registered. In this case, the operation can be stopped by an electromagnetic brake to prevent a collision with other devices.

一方、他の装置との受け渡しは、支持台を用いて挟持爪機構で支持した板状被処理材を垂直状態にしたまま或いは斜めに傾斜させた状態で所定の高さにして行うようになっているが、ある程度までの大きさのマザーガラスであれば支持台の高さを変更することなくマザーガラスを下基準にて設置する装置に、又は中心基準にて設置する装置に、又はその両方の装置への受け渡しが可能である。  On the other hand, delivery to other devices is performed at a predetermined height while the plate-shaped workpiece supported by the clamping claw mechanism using the support stand is kept in a vertical state or inclined obliquely. However, if the mother glass is up to a certain size, the mother glass can be installed on the lower standard without changing the height of the support base, or the apparatus installed on the central standard, or both. Can be delivered to other devices.

特開2008−280147号公報JP 2008-280147 A

しかしながらこの板状被処理材の取扱装置は、受け取り装置への受け渡しにおいて次の課題が発生した。
受け取り装置への板状被処理材の受け渡しにおける長尺ボックスの操作は、首振の竪フレームの中央部と長尺ボックスの背面に連結装着した前後回動駆動連結機構によって行うが、板状被処理材の受け渡しパターンが垂直状態から所定の傾斜状態にするパターン以外に、垂直状態から水平状態にするパターンが加わる等多義に亘る状況にある。更に板状被処理材のサイズ構成も多種多様である趨勢の中で、長尺ボックスの傾動速度に限界があり迅速な受け渡しが困難になってきた。
また、板状被処理材を挟持爪機構で支持する長尺ボックスの前後回動駆動連結機構は、スクリュー式前後駆動機構とユニバーサル式連結機構とからなる複雑構造でしかも竪フレームの中央部と長尺ボックス背面中央部との間に常に延在するため長尺ボックスを傾動中及び傾斜した状態での旋回動作においては前後回動駆動連結機構自体の移動スペースが必要となりこれがデッドゾーンを形成し他の装置との干渉領域となるために非干渉領域が狭く作業性と安全性の改善が急務となった。更に、特に広面積で薄手の板状被処理材の取り扱いは、傾動作動中に左右、前後の振動が発生することもあり、板状被処理材への品質への影響、及び安全性への配慮も一段と厳しいものになっている。
However, this plate-like material handling apparatus has the following problems in delivery to the receiving apparatus.
The operation of the long box in the delivery of the plate-shaped workpiece to the receiving device is performed by a front-rear rotation drive coupling mechanism connected to the center of the swinging frame and the back of the long box. In addition to the pattern in which the processing material delivery pattern is changed from the vertical state to the predetermined inclination state, a pattern for changing from the vertical state to the horizontal state is added. Furthermore, in the trend that the size configuration of the plate-like material to be processed is various, there is a limit to the tilting speed of the long box, and it has become difficult to deliver quickly.
In addition, the longitudinal box drive mechanism for the long box that supports the plate-shaped workpiece with the clamping claw mechanism has a complicated structure consisting of a screw-type front-rear drive mechanism and a universal connection mechanism, and has a length that is longer than the center part of the heel frame. Since it always extends between the center of the back of the shank box and the swiveling operation while the long box is tilted and tilted, a moving space for the forward / backward rotation drive coupling mechanism itself is required, which forms a dead zone, etc. Therefore, the non-interference area is narrow and improvement in workability and safety is urgently required. Furthermore, especially when handling thin plate-shaped materials with a large area, vibrations from side to side and back and forth may occur during tilting movements, affecting the quality of the plate-shaped materials and safety issues. Consideration has become even more stringent.

本発明はこの課題を克服する優れた板状被処理材の取扱装置を提供するものでありその特徴とするところは次の(1)のとおりである。
(1)、水平走行本体(HS)に旋回ポスト(CP)を装着し、旋回ポスト(CP)に回転肘つき水平旋回アーム(CA)を装着し、回転肘つき水平旋回アーム(CA)の先端に旋回首振の竪フレーム(TF)を装着し、竪フレーム(TF)に長尺ボックス(TB)を傾動可能に装着し、長尺ボックス(TB)に板状被処理材(W)の下端と上端を上下の挟持爪(HT)で挟持支持・開放する挟持爪機構を装着してなる板状被処理材の取扱装置において、
前記竪フレーム(TF)の下部に設置して長尺ボックス(TB)の下端部を中心に回転傾斜させる回動駆動連結機構(XK)として、前記竪フレーム(TF)の前部の下部に設けた軸受部材(101)により回転可能に軸受支持される回転支承軸(100)と、前記回転支承軸(100)に回転可能に連結し前記長尺ボックス(TB)の下部を固定支承する軸受け部(TBJ)と、前記軸受け部(TBJ)の軸方向の両側部に一端部を固定連結して並列配置した一対のクランクアーム(300)と、前記クランクアーム(300)の他端部に前端部を回転可能に軸連結したピストンシャフト(200)と、前記ピストンシャフト(200)の後端部に軸連結したピストンシャフト軸受部材(400)と、前記ピストンシャフト軸受部材(400)の両側の上下に設けた被ガイド部材(500)と、前記被ガイド部材(500)の各々を前後水平摺動自在に嵌合装着し互いに平行関係に設けた二対のガイドレール(600)と、前記ガイドレール(600)と平行に設けられ前記ピストンシャフト軸受部材(400)の下部に螺合連結して回転により前記ピストンシャフト軸受部材(400)を水平に前進・後退させるスクリューシャフト(700)と、前記スクリューシャフト(700)に連結して回転作動させる正逆回転駆動装置(800)とを設けたことを特徴とする板状被処理材の取扱装置。
The present invention provides an excellent apparatus for handling a plate-like material to overcome this problem, and its features are as follows (1).
(1) Mount the swivel post (CP) on the horizontal travel body (HS), mount the swivel post (CP) with the horizontal swivel arm with rotating elbow (CA), and tip the horizontal swivel arm with rotating elbow (CA) A swivel swing frame (TF) is attached to the frame, a long box (TB) is tiltably attached to the frame (TF), and the lower end of the plate-shaped material (W) is attached to the long box (TB). And a plate-like workpiece handling device equipped with a clamping claw mechanism that clamps and supports the upper end with upper and lower clamping claws (HT).
As a rotational drive connection mechanism (XK) that is installed at the lower part of the heel frame (TF) and rotates and tilts around the lower end of the long box (TB) , it is provided at the lower part of the front part of the heel frame (TF). A rotating bearing shaft (100) rotatably supported by a bearing member (101), and a bearing portion rotatably connected to the rotating bearing shaft (100) and fixedly supporting a lower portion of the long box (TB). (TBJ), a pair of crank arms (300) in which one end portions are fixedly connected to both side portions in the axial direction of the bearing portion (TBJ), and a front end portion on the other end portion of the crank arm (300). A piston shaft (200) rotatably connected to the piston shaft (200), a piston shaft bearing member (400) axially connected to the rear end of the piston shaft (200), and the piston shaft bearing member (40 ) And two pairs of guide rails (600) provided in parallel relation with each other so that each of the guided members (500) is fitted and mounted so as to be slidable back and forth horizontally. A screw shaft (700) which is provided in parallel with the guide rail (600) and is screwed into a lower portion of the piston shaft bearing member (400) to horizontally advance and retract the piston shaft bearing member (400) by rotation. ) And a forward / reverse rotation drive device (800) that is connected to the screw shaft (700) and rotates.

本発明の板状被処理材の取扱装置において、板状被処理材を挟持爪機構で支持する長尺ボックスの回動駆動連結機構XKは、前記堅牢簡易な構成により、板状被処理材(W)を含む長尺ボックス(TB)の荷重を軸受け部(TBJ)を介して回転支承軸(100)により安定支承し、長尺ボックス(TB)の傾動駆動負荷は一対のクランクアーム(300)に左右均等に受け、これをピストンシャフト(200)の前部軸着部から後部軸着部及びピストンシャフト軸受部材(400)を介してピストンシャフト軸受部材(400)の両側上下部の二対の被ガイド部材(500)とガイドレール(600)とスクリューシャフト(700)に均等に分散緩衝支承して受けて、長尺ボックス(TB)がその傾動中及び停止時に左右及び前後に揺動することを確実に防止して板状被処理材を安全確実に保持して落下事故等を防止するものである。
これにより長尺ボックスの前記回動駆動連結機構は、長尺ボックスの微細な傾動操作と傾動速度の高速化を正確に可能にし、他の装置への迅速で正確安全な受け渡しを可能にしたので、多種多様な板状被処理材の多義な受け渡しパターンの実行を品質に悪影響を与えることなく実現し、しかも竪フレームと長尺ボックス背面との間にデッドゾーン形成を皆無にした完全な自由空間を確保して他の装置との非干渉領域を拡大して作業性と安全性を大幅に改善したものである。
In the apparatus for handling a plate-like material to be processed according to the present invention, the rotation drive connecting mechanism XK of the long box that supports the plate-like material by a clamping claw mechanism has a plate-like material ( The load of the long box (TB) including W) is stably supported by the rotary bearing shaft (100) through the bearing portion (TBJ), and the tilting drive load of the long box (TB) is a pair of crank arms (300). Are received evenly on the left and right sides of the piston shaft (200) from the front shaft-attached portion to the rear shaft-attached portion and the piston shaft bearing member (400). The long box (TB) swings to the left and right and back and forth during tilting and stopping, with the receiving member (500), guide rail (600) and screw shaft (700) being equally distributed and supported. Is intended to prevent falling accidents and reliably prevent Rukoto the plate workpiece holding secure the.
As a result, the rotation drive connection mechanism of the long box can accurately perform a fine tilting operation of the long box and increase the tilting speed, and enables quick, accurate and safe delivery to other devices. Completely free space that realizes the execution of various delivery patterns of various plate-shaped materials without adversely affecting the quality, and eliminates any dead zone formation between the frame and the back of the long box. Is ensured, and the non-interference area with other devices is expanded to greatly improve workability and safety.

本発明の実施例の全体を示す側面説明図である。It is side explanatory drawing which shows the whole Example of this invention. 図1の要部:長尺ボックスの回動駆動連結機構を示す側断面説明図である。FIG. 1 is a side cross-sectional explanatory view showing a main part of FIG. 1: a long box rotation drive connection mechanism. 長尺ボックスの回動駆動連結機構の部材構成を簡易に示す説明図であり、(1)は図2と同様の側断面説明図であり、(2)は(1)の矢視A−Aから見た横断面説明図であり、(3)は(1)の矢視B−Bから見た正逆回転駆動装置の伝動機構の背面説明図であり、(4)は(1)の矢視C−Cから見た一対のクランクアームと、ピストンシャフトと、ピストンシャフト軸受部材と、一対の被ガイド部材との配置関係を示す平面説明図であり、(5)は(2)の矢視D−Dから見たピストンシャフト軸受部材とスクリューシャフトとの配置関係示す平面説明図であり、(6)は(2)の矢視E−Eから見た正逆回転駆動装置の配置を示す平面説明図である。It is explanatory drawing which shows simply the member structure of the rotation drive connection mechanism of a long box, (1) is side sectional explanatory drawing similar to FIG. 2, (2) is the arrow AA view of (1). (3) is a backside explanatory view of the transmission mechanism of the forward / reverse rotation driving device viewed from the arrow BB of (1), and (4) is an arrow of (1). It is a plane explanatory view showing the arrangement relation of a pair of crank arms, a piston shaft, a piston shaft bearing member, and a pair of guided members as seen from the view CC, (5) is an arrow view of (2) It is plane explanatory drawing which shows the arrangement | positioning relationship between the piston shaft bearing member and screw shaft seen from DD, (6) is a plane which shows arrangement | positioning of the forward / reverse rotation drive device seen from arrow EE of (2). It is explanatory drawing. 図3に示すクッション座120の詳細側面図(1)と、同図矢視F1−F1とF2−F2から見た縦断面図(2)である。It is the detailed side view (1) of the cushion seat 120 shown in FIG. 3, and the longitudinal cross-sectional view (2) seen from the figure arrow F1-F1 and F2-F2. 従来例を示す概念的な全体側面説明図である。It is a conceptual whole side explanatory drawing which shows a prior art example.

本発明を実施するための形態を以下に示す実施例により詳細に説明紹介する。The mode for carrying out the present invention will be described in detail by the following examples.

本実施例を図1から図3にて紹介する。
図1は本発明の実施例の全体を示す側面説明図であり、図2は、図1の要部の長尺ボックスの回動駆動連結機構を示す側断面説明図である。
図3は、長尺ボックスの回動駆動連結機構XKの部材構成を簡易に示す説明図であり、(1)は図2と同様の側断面説明図であり、(2)は(1)の矢視A−Aから見た横断面説明図であり、(3)は(1)の矢視B−Bから見た正逆回転駆動装置の伝動機構の背面説明図であり、(4)は(1)の矢視C−Cから見た一対のクランクアームと、ピストンシャフトと、ピストンシャフト軸受部材と、一対の被ガイド部材との配置関係を示す平面説明図であり、(5)は(2)の矢視D−Dから見たピストンシャフト軸受部材とスクリューシャフトとの配置関係示す平面説明図であり、(6)は(2)の矢視E−Eから見た正逆回転駆動装置の配置を示す平面説明図である。
This embodiment will be introduced with reference to FIGS.
FIG. 1 is an explanatory side view showing the entirety of the embodiment of the present invention, and FIG. 2 is an explanatory side sectional view showing a rotary drive connecting mechanism of the long box of the main part of FIG.
FIG. 3 is an explanatory diagram simply showing the member configuration of the rotation drive coupling mechanism XK of the long box, (1) is an explanatory side sectional view similar to FIG. 2, and (2) is a diagram of (1). It is transverse cross section explanatory drawing seen from arrow AA, (3) is a back surface explanatory drawing of the transmission mechanism of the forward / reverse rotation drive device seen from arrow BB of (1), (4) is It is plane explanatory drawing which shows the arrangement | positioning relationship between a pair of crank arm seen from arrow CC of (1), a piston shaft, a piston shaft bearing member, and a pair of guided member, (5) is ( It is plane explanatory drawing which shows the arrangement | positioning relationship of the piston shaft bearing member and screw shaft seen from arrow DD of 2), (6) is the forward / reverse rotation drive device seen from arrow EE of (2) It is plane explanatory drawing which shows arrangement | positioning.

図1において、被処理材の取扱装置の前提の基本条件は、水平走行本体HSに旋回ポストCPを装着し、旋回ポストCPに回転肘EBつき水平旋回アームCAを装着し、回転肘つき水平旋回アームCAの先端に旋回首振可能に横断面がコ字型の竪フレームTFを縦軸J1で連結装着し、竪フレームTFのコ字型の下部に長尺ボックスTBを収容し、竪フレームTFの下端部に長尺ボックスTBを傾動可能に装着する回動駆動連結機構XKを設け、長尺ボックスTBに板状被処理材Wの下端縁と上端縁を上下の挟持爪HTで挟持支持・開放する挟持爪機構KKを装着し、挟持爪機構KKは、長尺ボックスTB内に図5と同様のモータスクリュー式の上下駆動機構を内装し、長尺ボックスTBの外側の縦長手方向に移動可能に左右一対の爪保持リングTRを設け、爪保持リングTRの前面に上下一対の挟持爪HTを装着し、爪保持リングTRの後部を長尺ボックスTBの後側からボックスTB内に挿入し挿入部を上下駆動機構のスクリューに連結してなる。また、旋回ポストCPと回転肘つき水平旋回アームCAと竪フレームTFの各水平旋回装着部にエンコーダと電磁ブレーキを付設してなる。  In FIG. 1, the basic condition of the premise of the material handling apparatus is that the horizontal traveling body HS is equipped with the turning post CP, the turning post CP is attached with the horizontal turning arm CA with the rotating elbow EB, and the horizontal turning with the rotating elbow is performed. A saddle frame TF having a U-shaped cross-section is connected to the front end of the arm CA by a vertical axis J1 so as to be swingable and swingable, and a long box TB is accommodated in a U-shaped lower portion of the saddle frame TF. A rotation drive connection mechanism XK for tiltably mounting the long box TB is provided at the lower end of the plate, and the lower end edge and the upper end edge of the plate-like workpiece W are sandwiched and supported by the upper and lower clamping claws HT on the long box TB. The holding claw mechanism KK to be opened is mounted, and the holding claw mechanism KK has a motor screw type vertical drive mechanism similar to that shown in FIG. 5 in the long box TB, and moves in the longitudinal and longitudinal direction outside the long box TB. Possible to hold a pair of left and right nails A pair of upper and lower clamping claws HT are mounted on the front surface of the claw holding ring TR, the rear part of the claw holding ring TR is inserted into the box TB from the rear side of the long box TB, and the insertion part is inserted into the vertical driving mechanism. Connected to the screw. Further, an encoder and an electromagnetic brake are attached to each horizontal turning mounting portion of the turning post CP, the horizontal turning arm CA with a rotating elbow, and the saddle frame TF.

而して、竪フレームTFに装備する長尺ボックスTBの回動駆動連結機構XKは、竪フレームTFの下部を構成する架構GKに設けられ、長尺ボックスTBをその下部を中心にして直立状態から水平状態までの任意の傾動位置に回動させる。  Thus, the rotation drive connection mechanism XK of the long box TB provided in the kite frame TF is provided on the frame GK constituting the lower part of the kite frame TF, and the long box TB is in an upright state centering on the lower part thereof. To an arbitrary tilting position from horizontal to horizontal.

この回動駆動連結機構XKは、図3に詳細に示すように次の(1)〜(8)から構成してなる。
(1)、竪フレームTFの前部の下部に設けた軸受部材101により水平状態で回転可能に軸受支持し、長尺ボックスTBの下部に設けた軸受けTBJを回転可能に支承した基軸の回転支承軸100。
(2)、長尺ボックスTBの回転方向に前後進するピストンシャフト200。
(3)、一端部を前記長尺ボックスTBの軸受けTBJに固定連結し他端部をピストンシャフト200の前部とを軸連結してピストンシャフト200の前後動を軸受けTBJの回転動作に換える一対のクランクアーム300。
(4)、ピストンシャフト200の後部を軸401で回転可能に連結するピストンシャフト軸受部材400。
(5)、ピストンシャフト軸受部材400の両側の上下に装着した二対の被ガイド部材500。
(6)、二対の被ガイド部材500を水平に前後摺動自在に嵌合してガイドし互いに平行関係にした二対のガイドレール600。
(7)、ガイドレール600と平行に水平に設け、ピストンシャフト軸受部材400の下部に螺合して回転動作によりピストンシャフト軸受部材400を水平に進退移動させるスクリューシャフト700。
(8)、架構GKの後部定位置に設置しスクリューシャフト700を正逆回転作動させる正逆回転駆動装置800。
As shown in detail in FIG. 3, the rotational drive coupling mechanism XK includes the following (1) to (8).
(1) A base shaft rotation support that is rotatably supported in a horizontal state by a bearing member 101 provided at the lower portion of the front portion of the saddle frame TF, and a bearing TBJ provided at the lower portion of the long box TB is rotatably supported. Shaft 100.
(2) The piston shaft 200 that moves back and forth in the rotation direction of the long box TB.
(3) A pair in which one end is fixedly connected to the bearing TBJ of the long box TB and the other end is axially connected to the front portion of the piston shaft 200 so that the longitudinal movement of the piston shaft 200 is changed to the rotational operation of the bearing TBJ. Crank arm 300.
(4) A piston shaft bearing member 400 that rotatably connects the rear portion of the piston shaft 200 with a shaft 401.
(5) Two pairs of guided members 500 mounted on the upper and lower sides of the piston shaft bearing member 400.
(6) Two pairs of guide rails 600 in which two pairs of guided members 500 are fitted and guided so as to be slidable back and forth horizontally and in parallel with each other.
(7) A screw shaft 700 provided horizontally in parallel with the guide rail 600, screwed into the lower portion of the piston shaft bearing member 400, and horizontally moving the piston shaft bearing member 400 forward and backward by a rotating operation.
(8) A forward / reverse rotation drive device 800 that is installed at a rear fixed position of the frame GK and operates the screw shaft 700 in forward / reverse rotation.

而して、回転支承軸100は、長尺ボックスTBの全荷重を支承するが挟持爪HTで板状被処理材Wを保持した状態の長尺ボックスTBを傾動させる場合の回転基軸であり被処理材Wを保持しての傾動の際は、軸受101を保持する架構GKの先端部の下部に設けたクッション座130を、荷重受車KUCの荷重受台KDの上部湾曲周面KD1内に収容載置して安定保持される。クッション座130の構成は図4(1)と(2)により詳細に説明する。  Thus, the rotation support shaft 100 is a rotation base shaft for tilting the long box TB that supports the entire load of the long box TB but holds the plate-shaped workpiece W with the clamping claws HT. When tilting while holding the treatment material W, the cushion seat 130 provided at the lower portion of the front end portion of the frame GK that holds the bearing 101 is placed in the upper curved peripheral surface KD1 of the load receiving base KD of the load receiving vehicle KUC. It is housed and stably held. The configuration of the cushion seat 130 will be described in detail with reference to FIGS.

図4(1)と(2)において、回転支承軸100は、両側を架構GKの先端部の両側に設けた軸受101により回転可能に支持される。クッション座130は、一対の脚部120と水平座板125とスプリング機構126、127と湾曲クッション板128とリミットスイッチ129とからなる。各脚部120は、側面から見て半円盤状を示す断面L型の部材であり上部両側を各軸受101の内側に位置し下部を架構GKの先端部の直下に位置して締め具で固定されており、架構GKの先端部に図示していないが充分な強度のネジにより別途固定装着する。
図に示す121〜124は荷重受台KDに長尺ボックスTB本体を載せる際に、長尺ボックスTB本体の前後左右の挿入用のガイドである。
4 (1) and (2), the rotary bearing shaft 100 is rotatably supported by bearings 101 provided on both sides of the front end of the frame GK. The cushion seat 130 includes a pair of leg portions 120, a horizontal seat plate 125, spring mechanisms 126 and 127, a curved cushion plate 128, and a limit switch 129. Each leg 120 is an L-shaped member showing a semicircular shape when viewed from the side. The upper both sides are located inside each bearing 101 and the lower part is located directly below the distal end of the frame GK and fixed with fasteners. Although not shown, it is separately fixed and attached to the front end of the frame GK with a sufficiently strong screw.
Reference numerals 121 to 124 shown in the drawing are guides for insertion in the front, rear, left and right of the long box TB main body when the long box TB main body is placed on the load receiving base KD.

両方の脚部120の下部間には水平座板125を梁設し、水平座板125の左右両側の下面部には、スプリング機構126、127を設置し、スプリング機構126、127は湾曲クッション板128を吊持する。湾曲クッション板128が、荷重受け台KDの上部湾曲周面KD1内に収容載置され荷重で微小上移動し両脚部130の下面に当接すると両リミットスイッチ129からの着床信号で長尺ボックスTBの下降移動を停止させるのである。
前記一対のクランクアーム300は、ピストンシャフト200の前後進動作を長尺ボックスTBの回転傾動動作に変換する伝動リンクであり、例えば、L型のエルボ部材、三角片部材、上下に¬型(鍵型)の連結部を設けた連結部材等があげられる。
本例のクランクアーム300は、上下に¬型の連結部300a、300bを点対称的に有し下の¬型連結部300aを長尺ボックスTBの下部を固定した前記回転支承軸100の左右両側部に固定して共動可能に連結し、上の¬型連結部300bをクランクアーム回転用のピストンシャフト200の先部に回転可能に軸301で装着する。
A horizontal seat plate 125 is provided between the lower portions of both leg portions 120, and spring mechanisms 126 and 127 are installed on the lower surfaces of the left and right sides of the horizontal seat plate 125. The spring mechanisms 126 and 127 are curved cushion plates. 128 is suspended. When the curved cushion plate 128 is accommodated and placed in the upper curved peripheral surface KD1 of the load receiving base KD, moves slightly upward with the load, and comes into contact with the lower surfaces of both leg portions 130, the long box is received by the landing signals from both limit switches 129. The downward movement of TB is stopped.
The pair of crank arms 300 are transmission links that convert the forward / backward movement of the piston shaft 200 into the rotation / tilt movement of the long box TB. For example, an L-shaped elbow member, a triangular piece member, And a connecting member provided with a connecting portion of a mold).
The crank arm 300 of this example has left and right sides of the rotary bearing shaft 100 in which the upper and lower ¬ type connecting portions 300a and 300b are point-symmetrical and the lower ¬ type connecting portion 300a is fixed to the lower portion of the long box TB. The upper ¬ type connecting portion 300b is fixed to the front portion of the piston shaft 200 for rotating the crank arm and is rotatably mounted on the shaft 301.

ピストンシャフト200は、前部を回転支承軸100と平行にした軸301により一対のクランクアーム300の上の¬型連結部300bを回転可能に支持し、後部を回転支承軸100と平行にした軸401によりピストンシャフト軸受部材400と連結し、ピストンシャフト軸受部材400の下部に螺合接続したスクリューシャフト700の回転により前後進して一対のクランクアーム300を安定的に回転作動させる。The piston shaft 200 has a shaft 301 whose front portion is parallel to the rotary support shaft 100 and rotatably supports the first connecting portion 300b on the pair of crank arms 300 and whose rear portion is parallel to the rotary support shaft 100. The piston shaft bearing member 400 is connected by 401, and moves forward and backward by the rotation of the screw shaft 700 screwed and connected to the lower portion of the piston shaft bearing member 400, thereby stably rotating the pair of crank arms 300.

ピストンシャフト軸受部材400は、下部の軸受402をスクリューシャフト700で螺合支持され、上下左右を二対の被ガイド部材500を介して二対のガイドレール600で支持されて、スクリューシャフト700の回転によりピストンシャフト200を前後のピストン作動を安定的に行う。The piston shaft bearing member 400 is supported by screwing a lower bearing 402 with a screw shaft 700 and supported by two pairs of guide rails 600 via two pairs of guided members 500 in the upper, lower, left, and right directions. Thus, the piston operation of the piston shaft 200 is performed stably.

二対の被ガイド部材500はピストンシャフト軸受部材400をガイドレール600に沿って正確に水平状態を保持して前後作動させるものである。The two pairs of guided members 500 operate the piston shaft bearing member 400 back and forth while accurately maintaining a horizontal state along the guide rail 600.

二対のガイドレール600は、相互に対面して平行に水平に設けて二対の被ガイド部材500を横揺れ無く縦揺れなく水平に前後作動させるものである。The two pairs of guide rails 600 are provided so as to face each other in parallel and horizontally so that the two pairs of guided members 500 can be moved back and forth horizontally without rolling and without shaking.

スクリューシャフト700は、水平状態にして前後端部を軸受702、703により回転自在に軸支持し、胴部を前記ピストンシャフト軸受部材400の軸受402に螺合して、正逆回転駆動装置800の回転駆動によりピストンシャフト軸受部材400を水平に前後動作させる。The screw shaft 700 is in a horizontal state and axially supports the front and rear end portions thereof by bearings 702 and 703, and the body portion is screwed into the bearing 402 of the piston shaft bearing member 400, so The piston shaft bearing member 400 is moved back and forth horizontally by rotational driving.

正逆回転駆動装置800は、後部の上部中央部にサーボモータ801を配置しこれの回転駆動軸802にプーリ803を装着しプーリ803にタイミングベルト804を介してスクリューシャフト700側のプーリ701に回転伝達し、タイミングベルト804のテンション調節用のスプリング押圧式のプーリ805を付設したものである。In the forward / reverse rotation driving device 800, a servo motor 801 is disposed at the upper center of the rear portion, a pulley 803 is mounted on the rotation driving shaft 802, and the pulley 803 rotates to a pulley 701 on the screw shaft 700 side via a timing belt 804. A spring-pressing pulley 805 for transmitting and adjusting the tension of the timing belt 804 is attached.

以上の構成により、図1に示す直立状態で板状被処理材Wを保持した長尺ボックスTBは、回動駆動連結機構における正逆回転駆動装置800の小さな正回転駆動トルクでスクリューシャフト700を回転させて前記ピストンシャフト軸受部材400とピストンシャフト200とを介してクランクアーム300を90度回転させることにより長尺ボックスTBとともに板状被処理材Wを正確且つ迅速安全に90度前方回動させて水平状態にすることができる。
またこの水平状態にした板状被処理材Wを他の装置等に移載した後は長尺ボックスTBのみであるので、正逆回転駆動装置800は小さな逆回転駆動トルクでスクリューシャフト700を逆回転させて前記ピストンシャフト軸受部材400とピストンシャフト200とを介してクランクアーム300を90度逆回動させることにより元の直立状態に正確に且つ迅速安全に復元させることができるものである。
長尺ボックスTBの90度回転において、長尺ボックスTBの下降回転の際のクランクアーム300は、回転スタートの際は、ピストンシャフト200が水平状態になることを避けてピストンシャフト200との連結軸301を回転支承軸100に軸芯を通る鉛直線に対して後方45度の傾斜角線上に位置させてピストンシャフト200を水平より2〜3度上向き状態にしてあり、回転スタート開始して連結軸301の回転角度位置が45度の際は、鉛直線上に位置してピストンシャフト200の上向き傾斜角度を最大にし、ここから連結軸301を前記上鉛直線に対して前方45度の傾斜角線上に置いて停止する際は、ピストンシャフト200を再び水平より2〜3度上向き状態にして長尺ボックスTBを水平状態にするのである。
これにより、ピストンシャフト200は、クランクアーム300を介して回転支承軸100を95度の正転・逆転を円滑に行い長尺ボックスTBを直立状態から水平状態に転動させ且つその逆の水平状態にから直立状態に転動させるのである。
With the above configuration, the long box TB that holds the plate-like workpiece W in the upright state shown in FIG. 1 uses the small forward rotation drive torque of the forward / reverse rotation drive device 800 in the rotation drive coupling mechanism to drive the screw shaft 700. By rotating the crank arm 300 through 90 degrees through the piston shaft bearing member 400 and the piston shaft 200, the plate-shaped workpiece W together with the long box TB is rotated forward 90 degrees accurately and quickly. Can be leveled.
In addition, since the plate-shaped workpiece W in a horizontal state is transferred only to the long box TB after being transferred to another device or the like, the forward / reverse rotation drive device 800 reverses the screw shaft 700 with a small reverse rotation drive torque. By rotating and rotating the crank arm 300 through 90 degrees through the piston shaft bearing member 400 and the piston shaft 200, the original upright state can be accurately and quickly restored safely.
In the 90-degree rotation of the long box TB, the crank arm 300 during the downward rotation of the long box TB avoids the piston shaft 200 from being in a horizontal state at the start of rotation, and is connected to the piston shaft 200. 301 is positioned on an inclination angle line of 45 degrees rearward with respect to a vertical line passing through the axis of the rotation support shaft 100, and the piston shaft 200 is set upward by 2 to 3 degrees from the horizontal. When the rotation angle position of 301 is 45 degrees, it is positioned on the vertical line to maximize the upward inclination angle of the piston shaft 200, and from here the connecting shaft 301 is on the inclination angle line of 45 degrees forward with respect to the upper vertical line. When placing and stopping, the piston shaft 200 is again turned upward by 2 to 3 degrees from the horizontal, and the long box TB is made horizontal.
As a result, the piston shaft 200 smoothly rotates the support shaft 100 through the crank arm 300 forward and backward by 95 degrees to roll the long box TB from the upright state to the horizontal state, and vice versa. It is rolled upright from the beginning.

本発明の板状被処理材の取扱装置において、板状被処理材を挟持爪機構で支持する長尺ボックスの前後回動駆動連結機構は、前記堅牢簡易な構成により、板状被処理材を含む長尺ボックスの下端部を支承して傾動中心にし、長尺ボックスからの負荷を一対のクランクアームに左右均等に受けこれをピストンシャフトの前部軸着部から後部軸着部及びピストンシャフト軸受部材を介してピストンシャフト軸受部材の両側上部の一対の被ガイド部材とスクリューシャフトに均等に分散緩衝支承して受けて、長尺ボックスが傾動中及び停止時の左右及び前後に揺動することを確実に防止するものである。
これにより前後回動駆動連結機構は、長尺ボックスの正確な傾動操作と傾動速度の高速化を可能にし、他の装置への迅速で正確安全な受け渡しを可能にして、多種多様な板状被処理材の多義な受け渡しパターンの実行を品質に悪影響を与えることなく実現し、しかも竪フレームと長尺ボックス背面との間にデッドゾーンの形成を皆無にした自由区間を確保して他の装置との干渉領域を拡大して作業性と安全性を大幅に改善したものである。
これによって、当該取扱装置が本来有する機能すなわち、○マザーガラス等の板状被処理材の昇降自由度の拡大、○加重に対する緩衝変形量の低減と取り扱い重量制限の大幅な緩和、○載置姿勢の安定維持、○各種取り扱い動作の所定姿勢・高さ・平面・位置調整精度の格段な向上、○高効率、高稼働率、安全搬送処理等の機能を高位に安定維持するものであり、この種産業上の有効利用は多大なものがある。
In the plate-like material handling apparatus according to the present invention, the longitudinal box drive connection mechanism of the long box that supports the plate-like material by the clamping claw mechanism has the above-mentioned robust and simple structure. The lower end of the long box is supported to be tilted at the center, and the load from the long box is equally received by the pair of crank arms on the left and right. This is received from the front shaft mounting portion of the piston shaft to the rear shaft mounting portion and the piston shaft bearing. A pair of guided members on both sides of the piston shaft bearing member and the screw shaft are equally distributed and supported through the member, and the long box swings left and right and back and forth during tilting and stopping. It is surely prevented.
As a result, the forward / backward rotation drive connection mechanism enables accurate tilting operation and speeding up of the long box, enables quick, accurate and safe delivery to other devices, and enables a wide variety of plate-like covers. Realizes the execution of the ambiguous delivery pattern of processing materials without adversely affecting the quality, and secures a free section between the heel frame and the back of the long box without any dead zone, and other devices. The work area and safety are greatly improved by expanding the interference area.
As a result, the functions that the handling device originally has, that is, ○ Expansion of freedom of plate-like material to be processed such as mother glass, ○ Reduction of buffer deformation amount against load and drastic reduction of handling weight limit, ○ Mounting posture Stable maintenance of ○, the marked posture, height, plane, and position adjustment accuracy of various handling operations are greatly improved, ○ High efficiency, high availability, and safe transport processing functions are stably maintained at a high level. There are many effective uses in the seed industry.

HS:水平走行本体 XK:回動駆動連結機構
CP:旋回ポスト 100:回転支承軸
CA:回転肘EBつき水平旋回アーム 200:ピストンシャフト
TF:コ型の竪フレーム 300:一対のクランクアーム
TB:長尺ボックス 400:ピストンシャフト軸受部材
W:板状被処理材 500:二対の被ガイド部材
HT:上下の挟持爪 600:二対のガイドレール
KK:挟持爪機構 700:スクリューシャフト
TR:左右一対の爪保持リング 800:正逆回転駆動装置
TT:上下一対の挟持爪
HS: Horizontal traveling body XK: Rotating drive coupling mechanism CP: Rotating post 100: Rotating bearing shaft CA: Horizontal slewing arm with rotating elbow EB 200: Piston shaft TF: U-shaped saddle frame 300: Pair of crank arms TB: Long Measure box 400: Piston shaft bearing member W: Plate-shaped workpiece 500: Two pairs of guided members HT: Upper and lower clamping claws 600: Two pairs of guide rails KK: Clamping claw mechanism 700: Screw shaft TR: Pair of left and right Claw holding ring 800: Forward / reverse rotation drive device TT: A pair of upper and lower clamping claws

Claims (1)

水平走行本体(HS)に旋回ポスト(CP)を装着し、旋回ポスト(CP)に回転肘つき水平旋回アーム(CA)を装着し、回転肘つき水平旋回アーム(CA)の先端に旋回首振の竪フレーム(TF)を装着し、竪フレーム(TF)に長尺ボックス(TB)を傾動可能に装着し、長尺ボックス(TB)に板状被処理材(W)の下端と上端を上下の挟持爪(HT)で挟持支持・開放する挟持爪機構を装着してなる板状被処理材の取扱装置において、
前記竪フレーム(TF)の下部に設置して長尺ボックス(TB)の下端部を中心に回転傾斜させる回動駆動連結機構(XK)として、前記竪フレーム(TF)の前部の下部に設けた軸受部材(101)により回転可能に軸受支持される回転支承軸(100)と、前記回転支承軸(100)に回転可能に連結し前記長尺ボックス(TB)の下部を固定支承する軸受け部(TBJ)と、前記軸受け部(TBJ)の軸方向の両側部に一端部を固定連結して並列配置した一対のクランクアーム(300)と、前記クランクアーム(300)の他端部に前端部を回転可能に軸連結したピストンシャフト(200)と、前記ピストンシャフト(200)の後端部に軸連結したピストンシャフト軸受部材(400)と、前記ピストンシャフト軸受部材(400)の両側の上下に設けた被ガイド部材(500)と、前記被ガイド部材(500)の各々を前後水平摺動自在に嵌合装着し互いに平行関係に設けた二対のガイドレール(600)と、前記ガイドレール(600)と平行に設けられ前記ピストンシャフト軸受部材(400)の下部に螺合連結して回転により前記ピストンシャフト軸受部材(400)を水平に前進・後退させるスクリューシャフト(700)と、前記スクリューシャフト(700)に連結して回転作動させる正逆回転駆動装置(800)とを設けたことを特徴とする板状被処理材の取扱装置。
A swivel post (CP) is mounted on the horizontal travel body (HS), a horizontal swivel arm (CA) with a rotating elbow is mounted on the swivel post (CP), and a swivel swing is attached to the tip of the horizontal swivel arm (CA) with a rotating elbow. A long frame ( TB) is attached to the long frame (TF) so that it can be tilted, and the lower end and upper end of the plate-shaped workpiece (W) are moved up and down on the long box (TB). In a plate-shaped workpiece handling device equipped with a clamping claw mechanism for clamping and supporting with a clamping claw (HT) of
As a rotational drive connection mechanism (XK) that is installed at the lower part of the heel frame (TF) and rotates and tilts around the lower end of the long box (TB) , it is provided at the lower part of the front part of the heel frame (TF). A rotating bearing shaft (100) rotatably supported by a bearing member (101), and a bearing portion rotatably connected to the rotating bearing shaft (100) and fixedly supporting a lower portion of the long box (TB). (TBJ), a pair of crank arms (300) in which one end portions are fixedly connected to both side portions in the axial direction of the bearing portion (TBJ), and a front end portion on the other end portion of the crank arm (300). A piston shaft (200) rotatably connected to the piston shaft (200), a piston shaft bearing member (400) axially connected to the rear end of the piston shaft (200), and the piston shaft bearing member (40 ) And two pairs of guide rails (600) provided in parallel relation with each other so that each of the guided members (500) is fitted and mounted so as to be slidable back and forth horizontally. A screw shaft (700) which is provided in parallel with the guide rail (600) and is screwed into a lower portion of the piston shaft bearing member (400) to horizontally advance and retract the piston shaft bearing member (400) by rotation. ) And a forward / reverse rotation drive device (800) that is connected to the screw shaft (700) and rotates.
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006105747A (en) * 2004-10-05 2006-04-20 Daifuku Co Ltd Plate-like body inspection equipment
JP2007035790A (en) * 2005-07-25 2007-02-08 Shibaura Mechatronics Corp Apparatus and method of processing substrate
JP2008280147A (en) * 2007-05-11 2008-11-20 Ak System:Kk Handling device for plate-like material to be processed
JP2009146932A (en) * 2007-12-11 2009-07-02 Ulvac Japan Ltd Substrate transfer apparatus, substrate transfer method, and vacuum processing apparatus

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006105747A (en) * 2004-10-05 2006-04-20 Daifuku Co Ltd Plate-like body inspection equipment
JP2007035790A (en) * 2005-07-25 2007-02-08 Shibaura Mechatronics Corp Apparatus and method of processing substrate
JP2008280147A (en) * 2007-05-11 2008-11-20 Ak System:Kk Handling device for plate-like material to be processed
JP2009146932A (en) * 2007-12-11 2009-07-02 Ulvac Japan Ltd Substrate transfer apparatus, substrate transfer method, and vacuum processing apparatus

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